GB0303697D0 - Measurement technique - Google Patents

Measurement technique

Info

Publication number
GB0303697D0
GB0303697D0 GBGB0303697.7A GB0303697A GB0303697D0 GB 0303697 D0 GB0303697 D0 GB 0303697D0 GB 0303697 A GB0303697 A GB 0303697A GB 0303697 D0 GB0303697 D0 GB 0303697D0
Authority
GB
United Kingdom
Prior art keywords
measurement technique
measurement
technique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB0303697.7A
Other versions
GB2401934A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University College Cardiff Consultants Ltd
Cardiff University
Original Assignee
University College Cardiff Consultants Ltd
Cardiff University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University College Cardiff Consultants Ltd, Cardiff University filed Critical University College Cardiff Consultants Ltd
Priority to GB0303697A priority Critical patent/GB2401934A/en
Publication of GB0303697D0 publication Critical patent/GB0303697D0/en
Publication of GB2401934A publication Critical patent/GB2401934A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G01Q40/02—Calibration standards and methods of fabrication thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB0303697A 2003-02-18 2003-02-18 Measurement technique and system based on sub-nano-scale reference patterns Withdrawn GB2401934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0303697A GB2401934A (en) 2003-02-18 2003-02-18 Measurement technique and system based on sub-nano-scale reference patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0303697A GB2401934A (en) 2003-02-18 2003-02-18 Measurement technique and system based on sub-nano-scale reference patterns

Publications (2)

Publication Number Publication Date
GB0303697D0 true GB0303697D0 (en) 2003-03-19
GB2401934A GB2401934A (en) 2004-11-24

Family

ID=9953224

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0303697A Withdrawn GB2401934A (en) 2003-02-18 2003-02-18 Measurement technique and system based on sub-nano-scale reference patterns

Country Status (1)

Country Link
GB (1) GB2401934A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7800761B2 (en) 2006-04-12 2010-09-21 Massachusetts Institute Of Technology Infrared interferometric-spatial-phase imaging using backside wafer marks
CN102889866B (en) * 2012-09-28 2015-10-28 西安交通大学 Length metering source tracing method using Graphene bond distance as mete-wand

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2775464B2 (en) * 1989-04-27 1998-07-16 キヤノン株式会社 Position detection device
WO1992012528A1 (en) * 1991-01-11 1992-07-23 Hitachi Limited Surface atom machining method and apparatus
KR100597014B1 (en) * 2001-01-10 2006-07-06 재단법인서울대학교산학협력재단 The method of generating a pattern using a crystal structure of material
AU2003211027A1 (en) * 2002-03-27 2003-10-13 Nanoink, Inc. Method and apparatus for aligning patterns on a substrate

Also Published As

Publication number Publication date
GB2401934A (en) 2004-11-24

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)