DE69403395T2 - Kapazitiver Druckwandler und Herstellungsverfahren dazu - Google Patents
Kapazitiver Druckwandler und Herstellungsverfahren dazuInfo
- Publication number
- DE69403395T2 DE69403395T2 DE69403395T DE69403395T DE69403395T2 DE 69403395 T2 DE69403395 T2 DE 69403395T2 DE 69403395 T DE69403395 T DE 69403395T DE 69403395 T DE69403395 T DE 69403395T DE 69403395 T2 DE69403395 T2 DE 69403395T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- pressure transducer
- capacitive pressure
- process therefor
- therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI933124A FI93059C (fi) | 1993-07-07 | 1993-07-07 | Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69403395D1 DE69403395D1 (de) | 1997-07-03 |
DE69403395T2 true DE69403395T2 (de) | 1997-11-06 |
Family
ID=8538294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69403395T Expired - Fee Related DE69403395T2 (de) | 1993-07-07 | 1994-06-29 | Kapazitiver Druckwandler und Herstellungsverfahren dazu |
Country Status (5)
Country | Link |
---|---|
US (1) | US5656781A (de) |
EP (1) | EP0633459B1 (de) |
JP (1) | JP3428729B2 (de) |
DE (1) | DE69403395T2 (de) |
FI (1) | FI93059C (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000002611A (ja) * | 1998-06-12 | 2000-01-07 | Fujikura Ltd | 圧力センサ |
WO2000002028A1 (en) * | 1998-07-07 | 2000-01-13 | The Goodyear Tire & Rubber Company | Method of fabricating silicon capacitive sensor |
US6780830B1 (en) * | 2000-05-19 | 2004-08-24 | Huish Detergents, Incorporated | Post-added α-sulfofatty acid ester compositions and methods of making and using the same |
US6445053B1 (en) * | 2000-07-28 | 2002-09-03 | Abbott Laboratories | Micro-machined absolute pressure sensor |
US6662663B2 (en) * | 2002-04-10 | 2003-12-16 | Hewlett-Packard Development Company, L.P. | Pressure sensor with two membranes forming a capacitor |
US6958255B2 (en) * | 2002-08-08 | 2005-10-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducers and method of fabrication |
FR2859281B1 (fr) * | 2003-09-02 | 2005-12-23 | Auxitrol Sa | Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique |
US7214324B2 (en) * | 2005-04-15 | 2007-05-08 | Delphi Technologies, Inc. | Technique for manufacturing micro-electro mechanical structures |
JP4585426B2 (ja) * | 2005-10-31 | 2010-11-24 | アルプス電気株式会社 | 静電容量型圧力センサ |
US7345867B2 (en) * | 2005-11-18 | 2008-03-18 | Alps Electric Co., Ltd | Capacitive pressure sensor and method of manufacturing the same |
JP2010169665A (ja) * | 2008-12-24 | 2010-08-05 | Canon Anelva Corp | 静電容量型隔膜真空計、真空装置 |
JP5714648B2 (ja) | 2012-11-16 | 2015-05-07 | 株式会社豊田中央研究所 | 力学量memsセンサ及び力学量memsセンサシステム |
EP2871456B1 (de) | 2013-11-06 | 2018-10-10 | Invensense, Inc. | Drucksensor und Herstellungsmethode für einen Drucksensor |
EP2871455B1 (de) | 2013-11-06 | 2020-03-04 | Invensense, Inc. | Drucksensor |
DE102014200500A1 (de) * | 2014-01-14 | 2015-07-16 | Robert Bosch Gmbh | Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren |
TWI550261B (zh) * | 2014-03-17 | 2016-09-21 | 立錡科技股份有限公司 | 微機電壓力計以及其製作方法 |
US20170328800A1 (en) * | 2014-07-11 | 2017-11-16 | Richtek Technology Corporation | Combo micro-electro-mechanical system device and manufacturing method thereof |
EP3614115A1 (de) | 2015-04-02 | 2020-02-26 | InvenSense, Inc. | Drucksensor |
EP3106426B1 (de) * | 2015-06-19 | 2019-11-06 | Invensense, Inc. | Drucksensor |
US11225409B2 (en) | 2018-09-17 | 2022-01-18 | Invensense, Inc. | Sensor with integrated heater |
EP3969868A1 (de) | 2019-05-17 | 2022-03-23 | InvenSense, Inc. | Drucksensor mit verbesserter dichtigkeit |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3288656A (en) * | 1961-07-26 | 1966-11-29 | Nippon Electric Co | Semiconductor device |
GB1138401A (en) * | 1965-05-06 | 1969-01-01 | Mallory & Co Inc P R | Bonding |
JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
US4386453A (en) * | 1979-09-04 | 1983-06-07 | Ford Motor Company | Method for manufacturing variable capacitance pressure transducers |
US4332000A (en) * | 1980-10-03 | 1982-05-25 | International Business Machines Corporation | Capacitive pressure transducer |
US4390925A (en) * | 1981-08-26 | 1983-06-28 | Leeds & Northrup Company | Multiple-cavity variable capacitance pressure transducer |
FI69211C (fi) * | 1984-02-21 | 1985-12-10 | Vaisala Oy | Kapacitiv styckgivare |
FI71015C (fi) * | 1984-02-21 | 1986-10-27 | Vaisala Oy | Temperaturoberoende kapacitiv tryckgivare |
FI74350C (fi) * | 1984-02-21 | 1988-01-11 | Vaisala Oy | Kapacitiv absoluttryckgivare. |
US4625561A (en) * | 1984-12-06 | 1986-12-02 | Ford Motor Company | Silicon capacitive pressure sensor and method of making |
EP0339981A3 (de) * | 1988-04-29 | 1991-10-09 | Schlumberger Industries, Inc. | Geschichteter Halbleitersensor mit Überdruckschutz |
US4951174A (en) * | 1988-12-30 | 1990-08-21 | United Technologies Corporation | Capacitive pressure sensor with third encircling plate |
DE4115420A1 (de) * | 1991-05-10 | 1992-11-12 | Fraunhofer Ges Forschung | Drucksensor |
JP2896725B2 (ja) * | 1991-12-26 | 1999-05-31 | 株式会社山武 | 静電容量式圧力センサ |
DE4206677C1 (de) * | 1992-02-28 | 1993-09-02 | Siemens Ag, 80333 Muenchen, De |
-
1993
- 1993-07-07 FI FI933124A patent/FI93059C/fi active
-
1994
- 1994-06-29 EP EP94304740A patent/EP0633459B1/de not_active Expired - Lifetime
- 1994-06-29 DE DE69403395T patent/DE69403395T2/de not_active Expired - Fee Related
- 1994-07-07 JP JP15557794A patent/JP3428729B2/ja not_active Expired - Fee Related
-
1996
- 1996-04-30 US US08/641,264 patent/US5656781A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69403395D1 (de) | 1997-07-03 |
EP0633459A2 (de) | 1995-01-11 |
US5656781A (en) | 1997-08-12 |
FI93059C (fi) | 1995-02-10 |
EP0633459B1 (de) | 1997-05-28 |
FI93059B (fi) | 1994-10-31 |
FI933124A0 (fi) | 1993-07-07 |
JP3428729B2 (ja) | 2003-07-22 |
JPH0755617A (ja) | 1995-03-03 |
EP0633459A3 (en) | 1995-02-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |