DE69314059T2 - Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik - Google Patents

Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik

Info

Publication number
DE69314059T2
DE69314059T2 DE69314059T DE69314059T DE69314059T2 DE 69314059 T2 DE69314059 T2 DE 69314059T2 DE 69314059 T DE69314059 T DE 69314059T DE 69314059 T DE69314059 T DE 69314059T DE 69314059 T2 DE69314059 T2 DE 69314059T2
Authority
DE
Germany
Prior art keywords
article
line
light
mirror
scan line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69314059T
Other languages
English (en)
Other versions
DE69314059D1 (de
Inventor
Kevin Moran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADE OPTICAL SYST CORP
Original Assignee
ADE OPTICAL SYST CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADE OPTICAL SYST CORP filed Critical ADE OPTICAL SYST CORP
Application granted granted Critical
Publication of DE69314059D1 publication Critical patent/DE69314059D1/de
Publication of DE69314059T2 publication Critical patent/DE69314059T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69314059T 1993-03-22 1993-12-21 Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik Expired - Lifetime DE69314059T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/034,081 US5448364A (en) 1993-03-22 1993-03-22 Particle detection system with reflective line-to-spot collector
PCT/US1993/012492 WO1994022003A1 (en) 1993-03-22 1993-12-21 Particle detection system with reflective line-to-spot collector

Publications (2)

Publication Number Publication Date
DE69314059D1 DE69314059D1 (de) 1997-10-23
DE69314059T2 true DE69314059T2 (de) 1998-04-16

Family

ID=21874184

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69314059T Expired - Lifetime DE69314059T2 (de) 1993-03-22 1993-12-21 Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik

Country Status (9)

Country Link
US (1) US5448364A (de)
EP (1) EP0690982B1 (de)
JP (1) JP3192426B2 (de)
KR (1) KR960701358A (de)
AT (1) ATE158410T1 (de)
AU (1) AU5985594A (de)
CA (1) CA2153774C (de)
DE (1) DE69314059T2 (de)
WO (1) WO1994022003A1 (de)

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US6356346B1 (en) * 2000-01-21 2002-03-12 International Business Machines Corporation Device and method for inspecting a disk for physical defects
US6614519B1 (en) 2000-10-25 2003-09-02 International Business Machines Corporation Surface inspection tool using a parabolic mirror
US6825437B2 (en) * 2001-01-17 2004-11-30 Hitachi, Ltd. Apparatus enabling particle detection utilizing wide view lens
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US7110106B2 (en) * 2003-10-29 2006-09-19 Coretech Optical, Inc. Surface inspection system
CN100595564C (zh) * 2004-07-30 2010-03-24 百维吉伦特系统有限公司 病原体和粒子检测器系统和方法
JP2006105749A (ja) * 2004-10-05 2006-04-20 Shindenshi Corp 表面実装基板等の外観検査装置
US7557910B2 (en) * 2004-12-19 2009-07-07 Kla-Tencor Corporation System and method for controlling a beam source in a workpiece surface inspection system
US7586596B2 (en) * 2005-06-24 2009-09-08 Applied Materials, Israel, Ltd. Field folding optical method for imaging system
KR101283071B1 (ko) 2005-07-15 2013-07-05 바이오비질런트 시스템즈 인코포레이티드 병원체 및 입자 검출기 시스템 및 방법
FR2892191B1 (fr) * 2005-10-17 2008-04-04 Vai Clecim Soc Par Actions Sim Dispositif compact et procede d'inspection d'un produit en defilement, pour la detection automatique de defauts.
ITUD20070151A1 (it) * 2007-08-31 2009-03-01 Ri Te S P A Ricambi Tessili Apparecchiatura automatica di ispezione ottica per tessuti
US8628976B2 (en) 2007-12-03 2014-01-14 Azbil BioVigilant, Inc. Method for the detection of biologic particle contamination
US8735837B2 (en) * 2009-11-18 2014-05-27 John D. Idoine Gamma camera system
US8836934B1 (en) * 2012-05-15 2014-09-16 The Boeing Company Contamination identification system
CN113189013B (zh) * 2021-04-07 2023-03-24 山西大学 一种光声传感装置及方法

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Also Published As

Publication number Publication date
JPH08508099A (ja) 1996-08-27
JP3192426B2 (ja) 2001-07-30
EP0690982A1 (de) 1996-01-10
EP0690982B1 (de) 1997-09-17
KR960701358A (ko) 1996-02-24
CA2153774A1 (en) 1994-09-29
WO1994022003A1 (en) 1994-09-29
CA2153774C (en) 2000-02-08
DE69314059D1 (de) 1997-10-23
ATE158410T1 (de) 1997-10-15
US5448364A (en) 1995-09-05
AU5985594A (en) 1994-10-11

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Legal Events

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8364 No opposition during term of opposition