DE69314059D1 - Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik - Google Patents

Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik

Info

Publication number
DE69314059D1
DE69314059D1 DE69314059T DE69314059T DE69314059D1 DE 69314059 D1 DE69314059 D1 DE 69314059D1 DE 69314059 T DE69314059 T DE 69314059T DE 69314059 T DE69314059 T DE 69314059T DE 69314059 D1 DE69314059 D1 DE 69314059D1
Authority
DE
Germany
Prior art keywords
article
line
light
mirror
scan line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69314059T
Other languages
English (en)
Other versions
DE69314059T2 (de
Inventor
Kevin E Moran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADE OPTICAL SYST CORP
Original Assignee
ADE OPTICAL SYST CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADE OPTICAL SYST CORP filed Critical ADE OPTICAL SYST CORP
Publication of DE69314059D1 publication Critical patent/DE69314059D1/de
Application granted granted Critical
Publication of DE69314059T2 publication Critical patent/DE69314059T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
DE69314059T 1993-03-22 1993-12-21 Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik Expired - Lifetime DE69314059T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/034,081 US5448364A (en) 1993-03-22 1993-03-22 Particle detection system with reflective line-to-spot collector
PCT/US1993/012492 WO1994022003A1 (en) 1993-03-22 1993-12-21 Particle detection system with reflective line-to-spot collector

Publications (2)

Publication Number Publication Date
DE69314059D1 true DE69314059D1 (de) 1997-10-23
DE69314059T2 DE69314059T2 (de) 1998-04-16

Family

ID=21874184

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69314059T Expired - Lifetime DE69314059T2 (de) 1993-03-22 1993-12-21 Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik

Country Status (9)

Country Link
US (1) US5448364A (de)
EP (1) EP0690982B1 (de)
JP (1) JP3192426B2 (de)
KR (1) KR960701358A (de)
AT (1) ATE158410T1 (de)
AU (1) AU5985594A (de)
CA (1) CA2153774C (de)
DE (1) DE69314059T2 (de)
WO (1) WO1994022003A1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479252A (en) * 1993-06-17 1995-12-26 Ultrapointe Corporation Laser imaging system for inspection and analysis of sub-micron particles
US5923430A (en) * 1993-06-17 1999-07-13 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
US6148114A (en) 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing
US6624884B1 (en) 1997-04-28 2003-09-23 International Business Machines Corporation Surface inspection tool
US5867261A (en) * 1997-04-28 1999-02-02 International Business Machines Corporation Surface inspection tool
US5969370A (en) * 1997-04-28 1999-10-19 International Business Machines Corporation Surface inspection tool
US5917589A (en) * 1997-04-28 1999-06-29 International Business Machines Corporation Surface inspection tool
US6704435B1 (en) 1997-04-28 2004-03-09 International Business Machines Corporation Surface inspection tool
US5847823A (en) * 1997-04-28 1998-12-08 International Business Machines Corporation Surface inspection tool
US6100971A (en) * 1997-04-28 2000-08-08 International Business Machines Corporation Surface inspection tool
US5898492A (en) * 1997-09-25 1999-04-27 International Business Machines Corporation Surface inspection tool using reflected and scattered light
JP3833810B2 (ja) * 1998-03-04 2006-10-18 株式会社日立製作所 半導体の製造方法並びにプラズマ処理方法およびその装置
US6355570B1 (en) * 1998-03-04 2002-03-12 Hitachi, Ltd. Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses
KR100301067B1 (ko) * 1999-08-23 2001-11-01 윤종용 마이크로 스크래치 검사방법 및 이를 적용한 장치
US6356346B1 (en) * 2000-01-21 2002-03-12 International Business Machines Corporation Device and method for inspecting a disk for physical defects
US6614519B1 (en) 2000-10-25 2003-09-02 International Business Machines Corporation Surface inspection tool using a parabolic mirror
US6825437B2 (en) * 2001-01-17 2004-11-30 Hitachi, Ltd. Apparatus enabling particle detection utilizing wide view lens
US7053783B2 (en) 2002-12-18 2006-05-30 Biovigilant Systems, Inc. Pathogen detector system and method
US7110106B2 (en) * 2003-10-29 2006-09-19 Coretech Optical, Inc. Surface inspection system
US7430046B2 (en) * 2004-07-30 2008-09-30 Biovigilant Systems, Inc. Pathogen and particle detector system and method
JP2006105749A (ja) * 2004-10-05 2006-04-20 Shindenshi Corp 表面実装基板等の外観検査装置
WO2006066207A2 (en) 2004-12-19 2006-06-22 Ade Corporation System and method for inspecting a workpiece surface using combinations of light collectors
US7586596B2 (en) * 2005-06-24 2009-09-08 Applied Materials, Israel, Ltd. Field folding optical method for imaging system
WO2007011854A2 (en) 2005-07-15 2007-01-25 Biovigilant Systems, Inc. Pathogen and particle detector system and method
FR2892191B1 (fr) * 2005-10-17 2008-04-04 Vai Clecim Soc Par Actions Sim Dispositif compact et procede d'inspection d'un produit en defilement, pour la detection automatique de defauts.
ITUD20070151A1 (it) * 2007-08-31 2009-03-01 Ri Te S P A Ricambi Tessili Apparecchiatura automatica di ispezione ottica per tessuti
US8628976B2 (en) 2007-12-03 2014-01-14 Azbil BioVigilant, Inc. Method for the detection of biologic particle contamination
US8735837B2 (en) * 2009-11-18 2014-05-27 John D. Idoine Gamma camera system
US8836934B1 (en) * 2012-05-15 2014-09-16 The Boeing Company Contamination identification system
CN113189013B (zh) * 2021-04-07 2023-03-24 山西大学 一种光声传感装置及方法

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB180929A (en) * 1921-07-15 1922-06-08 George Frederick Barnett Improvements in and connected with gas burners
GB180930A (en) * 1921-07-18 1922-06-08 Helena Martin An improved device for partitioning trunks and drawers, applicable also for use as a press
US3575668A (en) * 1968-03-18 1971-04-20 Bell Telephone Labor Inc Laser frequency standard employing an optical limiter
US3556664A (en) * 1969-04-01 1971-01-19 Eastman Kodak Co Methods and apparatus for inspecting photographic materials
US3782803A (en) * 1971-10-12 1974-01-01 W Buck Simplified flat mirror scanner
US3748014A (en) * 1971-12-22 1973-07-24 Columbia Broadcasting Sys Inc Near-confocal device for optical scan enhancement
US3790287A (en) * 1972-03-31 1974-02-05 Western Electric Co Surface inspection with scanned focused light beams
US3825325A (en) * 1973-02-14 1974-07-23 Atomic Energy Commission Light trap
US3843890A (en) * 1973-07-27 1974-10-22 Du Pont Optical-electrical web inspection system
US3900265A (en) * 1974-03-08 1975-08-19 Intec Corp Laser scanner flaw detection system
US3973833A (en) * 1974-07-31 1976-08-10 Zygo Corporation Lens where the light rays obey the relation H=KFθ
US3961838A (en) * 1975-01-10 1976-06-08 Zygo Corporation Apparatus for producing a scanning laser beam of constant linear velocity
JPS588B2 (ja) * 1975-10-15 1983-01-05 富士写真フイルム株式会社 ヒカリビ−ムソウサソウチ
DE2550815C3 (de) * 1975-11-12 1979-05-31 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optisches Abtastsystem
CH608628A5 (de) * 1975-11-21 1979-01-15 Sick Optik Elektronik Erwin
US4158507A (en) * 1977-07-27 1979-06-19 Recognition Equipment Incorporated Laser measuring system for inspection
DE2800351B2 (de) * 1978-01-04 1979-11-15 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optische Vorrichtung zur Bestimmung des Lichtaustrittswinkels bei einer mit einem Lichtfleck abgetasteten Materialbahn
US4264208A (en) * 1978-10-25 1981-04-28 Semperit Aktiengesellschaft Method and apparatus for measuring the surface of an object
US4314763A (en) * 1979-01-04 1982-02-09 Rca Corporation Defect detection system
US4213157A (en) * 1979-02-05 1980-07-15 Xerox Corporation Self tracking laser scanning apparatus
JPS56126747A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
US4321628A (en) * 1980-04-02 1982-03-23 Xerox Corporation Scanning apparatus
US4360275A (en) * 1980-08-11 1982-11-23 Litton Systems Inc. Device for measurement of optical scattering
US4355860A (en) * 1980-09-29 1982-10-26 Xerox Corporation Double pass scanning system
US4378159A (en) * 1981-03-30 1983-03-29 Tencor Instruments Scanning contaminant and defect detector
US4376583A (en) * 1981-05-12 1983-03-15 Aeronca Electronics, Inc. Surface inspection scanning system
JPS5879240A (ja) * 1981-11-06 1983-05-13 Nippon Kogaku Kk <Nikon> 異物検出装置
US4601576A (en) * 1983-12-09 1986-07-22 Tencor Instruments Light collector for optical contaminant and flaw detector
US4655592A (en) * 1983-12-30 1987-04-07 Hamamatsu Systems, Inc. Particle detection method and apparatus
DE3422143A1 (de) * 1984-06-14 1985-12-19 Josef Prof. Dr. Bille Geraet zur wafer-inspektion
US4630276A (en) * 1984-10-09 1986-12-16 Aeronca Electronics, Inc. Compact laser scanning system
DE3518832A1 (de) * 1985-05-24 1986-11-27 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Oberflaechenbeschaffenheitsfeststellungs-lichtabtastvorrichtung mit einem lichtkonzentrator
DE3534018A1 (de) * 1985-09-24 1987-04-02 Sick Optik Elektronik Erwin Optische bahnueberwachungsvorrichtung
DE3534019A1 (de) * 1985-09-24 1987-04-02 Sick Optik Elektronik Erwin Optische bahnueberwachungsvorrichtung
US4795911A (en) * 1986-02-14 1989-01-03 Canon Kabushiki Kaisha Surface examining apparatus for detecting the presence of foreign particles on the surface
US4893932A (en) * 1986-05-02 1990-01-16 Particle Measuring Systems, Inc. Surface analysis system and method
US4806774A (en) * 1987-06-08 1989-02-21 Insystems, Inc. Inspection system for array of microcircuit dies having redundant circuit patterns
US4898471A (en) * 1987-06-18 1990-02-06 Tencor Instruments Particle detection on patterned wafers and the like
US5046847A (en) * 1987-10-30 1991-09-10 Hitachi Ltd. Method for detecting foreign matter and device for realizing same
US4875780A (en) * 1988-02-25 1989-10-24 Eastman Kodak Company Method and apparatus for inspecting reticles
US5278012A (en) * 1989-03-29 1994-01-11 Hitachi, Ltd. Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate
US5127726A (en) * 1989-05-19 1992-07-07 Eastman Kodak Company Method and apparatus for low angle, high resolution surface inspection
JPH0781958B2 (ja) * 1989-06-23 1995-09-06 三菱電機株式会社 微細粒子測定装置
US5076692A (en) * 1990-05-31 1991-12-31 Tencor Instruments Particle detection on a patterned or bare wafer surface
CA2029767C (en) * 1990-11-13 1996-07-16 Najeeb Ashraf Khalid Laser scanning system for use in laser imaging
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
US5088105A (en) * 1991-03-26 1992-02-11 Spectra Diode Laboratories, Inc. Optical amplifier with folded light path and laser-amplifier combination

Also Published As

Publication number Publication date
CA2153774A1 (en) 1994-09-29
DE69314059T2 (de) 1998-04-16
JPH08508099A (ja) 1996-08-27
ATE158410T1 (de) 1997-10-15
AU5985594A (en) 1994-10-11
JP3192426B2 (ja) 2001-07-30
KR960701358A (ko) 1996-02-24
WO1994022003A1 (en) 1994-09-29
CA2153774C (en) 2000-02-08
US5448364A (en) 1995-09-05
EP0690982B1 (de) 1997-09-17
EP0690982A1 (de) 1996-01-10

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