DE69309306T2 - Elektrische Verbindungsstrukturen - Google Patents

Elektrische Verbindungsstrukturen

Info

Publication number
DE69309306T2
DE69309306T2 DE69309306T DE69309306T DE69309306T2 DE 69309306 T2 DE69309306 T2 DE 69309306T2 DE 69309306 T DE69309306 T DE 69309306T DE 69309306 T DE69309306 T DE 69309306T DE 69309306 T2 DE69309306 T2 DE 69309306T2
Authority
DE
Germany
Prior art keywords
substructure
layer
signal layer
depositing
dielectric material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309306T
Other languages
German (de)
English (en)
Other versions
DE69309306D1 (de
Inventor
Robert Dorothy
Dean Face
Daniel Laubacher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of DE69309306D1 publication Critical patent/DE69309306D1/de
Application granted granted Critical
Publication of DE69309306T2 publication Critical patent/DE69309306T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/66—Conductive materials thereof
    • H10W70/668—Superconducting materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/401—Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
DE69309306T 1992-12-15 1993-12-07 Elektrische Verbindungsstrukturen Expired - Fee Related DE69309306T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US99227592A 1992-12-15 1992-12-15
US8046393A 1993-06-21 1993-06-21
PCT/US1993/011632 WO1994014201A1 (en) 1992-12-15 1993-12-07 Electrical interconnect structures

Publications (2)

Publication Number Publication Date
DE69309306D1 DE69309306D1 (de) 1997-04-30
DE69309306T2 true DE69309306T2 (de) 1997-09-04

Family

ID=26763551

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309306T Expired - Fee Related DE69309306T2 (de) 1992-12-15 1993-12-07 Elektrische Verbindungsstrukturen

Country Status (8)

Country Link
US (1) US5567330A (enExample)
EP (1) EP0674808B1 (enExample)
JP (1) JPH08504541A (enExample)
KR (1) KR950704819A (enExample)
CA (1) CA2150913A1 (enExample)
DE (1) DE69309306T2 (enExample)
TW (1) TW245839B (enExample)
WO (1) WO1994014201A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5759625A (en) * 1994-06-03 1998-06-02 E. I. Du Pont De Nemours And Company Fluoropolymer protectant layer for high temperature superconductor film and photo-definition thereof
JP2871516B2 (ja) * 1995-03-22 1999-03-17 株式会社移動体通信先端技術研究所 酸化物超伝導薄膜装置
US5662816A (en) * 1995-12-04 1997-09-02 Lucent Technologies Inc. Signal isolating microwave splitters/combiners
US5932799A (en) * 1997-07-21 1999-08-03 Ysi Incorporated Microfluidic analyzer module
US6293012B1 (en) 1997-07-21 2001-09-25 Ysi Incorporated Method of making a fluid flow module
US6073482A (en) * 1997-07-21 2000-06-13 Ysi Incorporated Fluid flow module
SE9904263L (sv) 1999-11-23 2001-05-24 Ericsson Telefon Ab L M Supraledande substratstruktur och ett förfarande för att producera en sådan struktur
US20050062131A1 (en) * 2003-09-24 2005-03-24 Murduck James Matthew A1/A1Ox/A1 resistor process for integrated circuits
CN105940465B (zh) * 2014-03-07 2017-08-25 住友电气工业株式会社 氧化物超导薄膜线材及其制造方法
JP6789385B2 (ja) 2016-09-13 2020-11-25 グーグル エルエルシー 積層量子デバイス内の損失の低減
JP7003719B2 (ja) * 2018-02-16 2022-02-04 日本電信電話株式会社 磁性材料および磁性素子

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144190A (ja) * 1983-02-08 1984-08-18 Agency Of Ind Science & Technol 超伝導回路用実装基板
US4474828A (en) * 1983-03-30 1984-10-02 Sperry Corporation Method of controlling the supercurrent of a Josephson junction device
KR900001273B1 (ko) * 1983-12-23 1990-03-05 후지쑤 가부시끼가이샤 반도체 집적회로 장치
JPS61239649A (ja) * 1985-04-13 1986-10-24 Fujitsu Ltd 高速集積回路パツケ−ジ
CA1329952C (en) * 1987-04-27 1994-05-31 Yoshihiko Imanaka Multi-layer superconducting circuit substrate and process for manufacturing same
US4942142A (en) * 1987-07-27 1990-07-17 Sumitomo Electric Industries Ltd. Superconducting thin film and a method for preparing the same
US4980339A (en) * 1987-07-29 1990-12-25 Matsushita Electric Industrial Co., Ltd. Superconductor structure
US4837609A (en) * 1987-09-09 1989-06-06 American Telephone And Telegraph Company, At&T Bell Laboratories Semiconductor devices having superconducting interconnects
JPH01157007A (ja) * 1987-12-11 1989-06-20 Sony Corp 超電導線材
JPH01158757A (ja) * 1987-12-16 1989-06-21 Hitachi Ltd 回路実装構造
JP2598973B2 (ja) * 1988-07-27 1997-04-09 三洋電機株式会社 積層型超電導素子
EP0358879A3 (en) * 1988-09-13 1991-02-27 Hewlett-Packard Company Method of making high density interconnects
US5087605A (en) * 1989-06-01 1992-02-11 Bell Communications Research, Inc. Layered lattice-matched superconducting device and method of making
JPH0710005B2 (ja) * 1989-08-31 1995-02-01 アメリカン テレフォン アンド テレグラフ カムパニー 超伝導体相互接続装置
US5159347A (en) * 1989-11-14 1992-10-27 E-Systems, Inc. Micromagnetic circuit
EP0586558A4 (en) * 1991-05-08 1994-07-13 Superconductor Tech Multichip interconnect module including superconductive materials
EP0538077B1 (en) * 1991-10-18 1996-05-22 Shinko Electric Industries Co. Ltd. Super conducting quantum interference device

Also Published As

Publication number Publication date
EP0674808A1 (en) 1995-10-04
JPH08504541A (ja) 1996-05-14
CA2150913A1 (en) 1994-06-23
KR950704819A (ko) 1995-11-20
TW245839B (enExample) 1995-04-21
EP0674808B1 (en) 1997-03-26
DE69309306D1 (de) 1997-04-30
WO1994014201A1 (en) 1994-06-23
US5567330A (en) 1996-10-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee