DE68918746T2 - Halbleitersubstrat mit dünner Supraleiterschicht. - Google Patents

Halbleitersubstrat mit dünner Supraleiterschicht.

Info

Publication number
DE68918746T2
DE68918746T2 DE68918746T DE68918746T DE68918746T2 DE 68918746 T2 DE68918746 T2 DE 68918746T2 DE 68918746 T DE68918746 T DE 68918746T DE 68918746 T DE68918746 T DE 68918746T DE 68918746 T2 DE68918746 T2 DE 68918746T2
Authority
DE
Germany
Prior art keywords
semiconductor substrate
superconductor layer
thin superconductor
thin
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68918746T
Other languages
English (en)
Other versions
DE68918746D1 (de
Inventor
Keizo Harada
Hideo Itozaki
Naoji Fujimoro
Shuji Yazu
Tetsuji Jodai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63110016A external-priority patent/JPH01280373A/ja
Priority claimed from JP63110014A external-priority patent/JPH01280371A/ja
Priority claimed from JP63110018A external-priority patent/JP2797186B2/ja
Priority claimed from JP63110013A external-priority patent/JPH01280370A/ja
Priority claimed from JP63110020A external-priority patent/JPH01280377A/ja
Priority claimed from JP63110017A external-priority patent/JPH01280374A/ja
Priority claimed from JP63110019A external-priority patent/JPH01280376A/ja
Priority claimed from JP63110023A external-priority patent/JPH01280380A/ja
Priority claimed from JP63110025A external-priority patent/JPH01280382A/ja
Priority claimed from JP63110024A external-priority patent/JPH01280381A/ja
Priority claimed from JP63110015A external-priority patent/JPH01280372A/ja
Priority claimed from JP63110012A external-priority patent/JPH01280369A/ja
Priority claimed from JP63110021A external-priority patent/JPH01280378A/ja
Priority claimed from JP63110022A external-priority patent/JPH01280379A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE68918746D1 publication Critical patent/DE68918746D1/de
Publication of DE68918746T2 publication Critical patent/DE68918746T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming superconductor layers
    • H10N60/0576—Processes for depositing or forming superconductor layers characterised by the substrate
    • H10N60/0632—Intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
DE68918746T 1988-04-30 1989-05-02 Halbleitersubstrat mit dünner Supraleiterschicht. Expired - Fee Related DE68918746T2 (de)

Applications Claiming Priority (19)

Application Number Priority Date Filing Date Title
JP10849888 1988-04-30
JP10932388 1988-05-02
JP10932488 1988-05-02
JP63110020A JPH01280377A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110017A JPH01280374A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110019A JPH01280376A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110015A JPH01280372A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110018A JP2797186B2 (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110013A JPH01280370A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110016A JPH01280373A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP11001188 1988-05-06
JP63110012A JPH01280369A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110021A JPH01280378A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110022A JPH01280379A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110024A JPH01280381A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110025A JPH01280382A (ja) 1988-04-30 1988-05-06 超電導体層を有する半導体基板
JP63110023A JPH01280380A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP63110014A JPH01280371A (ja) 1988-05-06 1988-05-06 超電導体層を有する半導体基板
JP24942588 1988-10-03

Publications (2)

Publication Number Publication Date
DE68918746D1 DE68918746D1 (de) 1994-11-17
DE68918746T2 true DE68918746T2 (de) 1995-06-01

Family

ID=27586278

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68918746T Expired - Fee Related DE68918746T2 (de) 1988-04-30 1989-05-02 Halbleitersubstrat mit dünner Supraleiterschicht.

Country Status (5)

Country Link
EP (1) EP0341148B1 (de)
KR (1) KR900017216A (de)
AU (1) AU614606B2 (de)
CA (1) CA1330196C (de)
DE (1) DE68918746T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU610260B2 (en) * 1987-10-16 1991-05-16 Furukawa Electric Co. Ltd., The Oxide superconductor shaped body and method of manufacturing the same
JPH0286014A (ja) * 1988-06-17 1990-03-27 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜と、その成膜方法
AU635040B2 (en) * 1989-06-30 1993-03-11 Sumitomo Electric Industries, Ltd. Substrate having a superconductor layer
KR100235799B1 (ko) * 1990-05-30 1999-12-15 구라우치 노리타카 산화물 초전도체를 이용한 초전도 접합형성방법
CA2045890C (en) * 1990-06-28 1998-10-06 Takashi Matsuura Process for preparing thin film of oxide superconductor
EP0494830B1 (de) * 1991-01-10 1997-06-18 Sumitomo Electric Industries, Ltd. Verfahren zur Herstellung eines Tunnelüberganges von der Art einer Josephson-Einrichtung aufgebaut aus supraleitendem oxydischem Verbundmaterial
JPH104222A (ja) * 1996-06-14 1998-01-06 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center 酸化物超電導体素子及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU615014B2 (en) * 1987-02-17 1991-09-19 Sumitomo Electric Industries, Ltd. Superconducting thin film and wire and a process for producing the same
AU607219B2 (en) * 1987-05-29 1991-02-28 Toray Industries, Inc. Method of forming superconductive thin films and solutions for forming the same
AU610260B2 (en) * 1987-10-16 1991-05-16 Furukawa Electric Co. Ltd., The Oxide superconductor shaped body and method of manufacturing the same

Also Published As

Publication number Publication date
EP0341148B1 (de) 1994-10-12
AU3389689A (en) 1989-11-02
EP0341148A3 (en) 1990-11-14
DE68918746D1 (de) 1994-11-17
CA1330196C (en) 1994-06-14
AU614606B2 (en) 1991-09-05
EP0341148A2 (de) 1989-11-08
KR900017216A (ko) 1990-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee