DE69125425T2 - Verfahren zum Herstellen einer supraleitenden Einrichtung aus supraleitendem Material und dadurch hergestellte supraleitende Einrichtung - Google Patents
Verfahren zum Herstellen einer supraleitenden Einrichtung aus supraleitendem Material und dadurch hergestellte supraleitende EinrichtungInfo
- Publication number
- DE69125425T2 DE69125425T2 DE69125425T DE69125425T DE69125425T2 DE 69125425 T2 DE69125425 T2 DE 69125425T2 DE 69125425 T DE69125425 T DE 69125425T DE 69125425 T DE69125425 T DE 69125425T DE 69125425 T2 DE69125425 T2 DE 69125425T2
- Authority
- DE
- Germany
- Prior art keywords
- superconducting
- superconducting device
- manufacturing
- device manufactured
- manufactured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
- H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
- Y10S505/702—Josephson junction present
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/728—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
- Y10S505/731—Sputter coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
- Y10S505/732—Evaporative coating with superconducting material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/742—Annealing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2187726A JPH0473976A (ja) | 1990-07-16 | 1990-07-16 | 超電導装置の作製方法 |
JP18807391 | 1991-07-02 | ||
JP3188074A JP2730336B2 (ja) | 1991-07-02 | 1991-07-02 | 超電導装置の作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69125425D1 DE69125425D1 (de) | 1997-05-07 |
DE69125425T2 true DE69125425T2 (de) | 1997-10-23 |
Family
ID=27325938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69125425T Expired - Fee Related DE69125425T2 (de) | 1990-07-16 | 1991-07-16 | Verfahren zum Herstellen einer supraleitenden Einrichtung aus supraleitendem Material und dadurch hergestellte supraleitende Einrichtung |
Country Status (4)
Country | Link |
---|---|
US (2) | US5215960A (de) |
EP (1) | EP0467777B1 (de) |
CA (1) | CA2047139C (de) |
DE (1) | DE69125425T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2730336B2 (ja) * | 1991-07-02 | 1998-03-25 | 住友電気工業株式会社 | 超電導装置の作製方法 |
JPH0563247A (ja) * | 1990-09-18 | 1993-03-12 | Sumitomo Electric Ind Ltd | 超電導接合構造体およびその作製方法 |
EP0506573B1 (de) * | 1991-03-28 | 1997-10-08 | Sumitomo Electric Industries, Ltd. | Verfahren zur Reinigung einer dünnen Schicht eines Supraleiteroxyd |
EP0506582B1 (de) * | 1991-03-28 | 1997-05-28 | Sumitomo Electric Industries, Ltd. | Verfahren zur Herstellung von mehrlagigen Dünnschichten |
DE69219192T2 (de) * | 1991-03-28 | 1997-09-11 | Sumitomo Electric Industries | Verfahren zur Herstellung einer Schichtstruktur mit mindestens einer dünnen Schicht aus Supraleiteroxyd |
WO1993000708A1 (de) * | 1991-06-24 | 1993-01-07 | Forschungszentrum Jülich GmbH | Strukturierte leiterbahnen und verfahren zur herstellung derselben |
US5286336A (en) * | 1991-07-23 | 1994-02-15 | Trw Inc. | Submicron Josephson junction and method for its fabrication |
EP0534811B1 (de) * | 1991-08-28 | 1996-05-08 | Sumitomo Electric Industries, Ltd. | Verfahren zur Herstellung von supraleitenden Schichten aus supraleitendem Oxyd in denen nicht-supraleitende Gebiete vorkommen und Verfahren zur Herstellung eines Bauelements welches solche Schichten enthält |
DE4136126C2 (de) * | 1991-11-02 | 1994-06-30 | Forschungszentrum Juelich Gmbh | Verfahren zur Herstellung eines SrTiO¶3¶-YBa¶2¶Cu¶3¶O¶7¶-Schichtsystems und Schichtsystem aus SrTiO¶3¶ und YBa¶2¶Cu¶3¶O¶7¶ |
WO1994002862A1 (en) * | 1992-07-20 | 1994-02-03 | Superconductor Technologies, Inc. | Superconductor thin film crossovers and method |
DE4324700C2 (de) * | 1993-07-23 | 1995-11-02 | Forschungszentrum Juelich Gmbh | Verfahren zur Herstellung eines einen Josephson-Kontakt enthaltenden SQUIDs aus Hochtemperatur-Supraleitermaterial |
JPH07133192A (ja) * | 1993-11-04 | 1995-05-23 | Sumitomo Electric Ind Ltd | 成膜装置および成膜方法 |
JP3540047B2 (ja) * | 1995-03-31 | 2004-07-07 | 株式会社島津製作所 | 微細パターン作成方法 |
US5856204A (en) * | 1995-09-28 | 1999-01-05 | Matsushita Electric Industrial Co., Ltd. | Tunnel-type Josephson element and method for manufacturing the same |
JP3881732B2 (ja) * | 1996-10-16 | 2007-02-14 | 財団法人国際超電導産業技術研究センター | 酸化物超電導体複合体の製造方法 |
US6253096B1 (en) * | 1999-07-08 | 2001-06-26 | The University Of Chicago | Shielded high-TC BSCCO tapes or wires for high field applications |
US6613463B1 (en) * | 1999-09-06 | 2003-09-02 | International Superconductivity Technology Center | Superconducting laminated oxide substrate and superconducting integrated circuit |
US9929334B2 (en) * | 2015-01-15 | 2018-03-27 | International Business Machines Corporation | Josephson junction with spacer |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR910002311B1 (ko) * | 1987-02-27 | 1991-04-11 | 가부시기가이샤 히다찌세이사꾸쇼 | 초전도 디바이스 |
US4970197A (en) * | 1987-04-22 | 1990-11-13 | Fujikura Ltd. | Oxide superconductor |
JPH0638525B2 (ja) * | 1987-05-06 | 1994-05-18 | 株式会社半導体エネルギ−研究所 | 超電導装置の作製方法 |
JPS63283086A (ja) * | 1987-05-14 | 1988-11-18 | Furukawa Electric Co Ltd:The | 超電導薄膜の製造方法 |
CN1017110B (zh) * | 1987-08-13 | 1992-06-17 | 株式会社半导体能源研究所 | 一种超导器件 |
US4811380A (en) * | 1988-01-29 | 1989-03-07 | Motorola, Inc. | Cellular radiotelephone system with dropped call protection |
US5047385A (en) * | 1988-07-20 | 1991-09-10 | The Board Of Trustees Of The Leland Stanford Junior University | Method of forming superconducting YBa2 Cu3 O7-x thin films with controlled crystal orientation |
JPH0244786A (ja) * | 1988-08-05 | 1990-02-14 | Canon Inc | ジョセフソン素子の製造方法 |
US5047390A (en) * | 1988-10-03 | 1991-09-10 | Matsushita Electric Industrial Co., Ltd. | Josephson devices and process for manufacturing the same |
JP2667231B2 (ja) * | 1988-11-17 | 1997-10-27 | 松下電器産業株式会社 | ジョセフソン素子の製造方法 |
US5171732A (en) * | 1988-12-23 | 1992-12-15 | Troy Investments, Inc. | Method of making a josephson junction |
US5087605A (en) * | 1989-06-01 | 1992-02-11 | Bell Communications Research, Inc. | Layered lattice-matched superconducting device and method of making |
CA2037795C (en) * | 1990-03-09 | 1998-10-06 | Saburo Tanaka | Process for preparing high-temperature superconducting thin films |
-
1991
- 1991-07-16 DE DE69125425T patent/DE69125425T2/de not_active Expired - Fee Related
- 1991-07-16 CA CA002047139A patent/CA2047139C/en not_active Expired - Fee Related
- 1991-07-16 EP EP91401989A patent/EP0467777B1/de not_active Expired - Lifetime
- 1991-07-16 US US07/730,770 patent/US5215960A/en not_active Expired - Fee Related
-
1994
- 1994-04-20 US US08/230,449 patent/US5504058A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5504058A (en) | 1996-04-02 |
CA2047139C (en) | 1997-12-09 |
EP0467777A2 (de) | 1992-01-22 |
EP0467777B1 (de) | 1997-04-02 |
US5215960A (en) | 1993-06-01 |
EP0467777A3 (en) | 1992-05-27 |
DE69125425D1 (de) | 1997-05-07 |
CA2047139A1 (en) | 1992-01-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69125425T2 (de) | Verfahren zum Herstellen einer supraleitenden Einrichtung aus supraleitendem Material und dadurch hergestellte supraleitende Einrichtung | |
DE69133316D1 (de) | Verfahren zum Herstellen einer Halbleitervorrichtung | |
DE69030229T2 (de) | Verfahren zum Herstellen einer Halbleitervorrichtung | |
DE69033736D1 (de) | Verfahren zum Herstellen einer Halbleitervorrichtung | |
DE69228787D1 (de) | Verfahren und Anlage zur Herstellung von Halbleitervorrichtungen | |
DE69403593D1 (de) | Gerät und Verfahren zur Herstellung einer Halbleitervorrichtung | |
DE69218560T3 (de) | Wegwerfkleidungsstück und Verfahren zum Herstellen | |
DE69031543T2 (de) | Verfahren zum Herstellen einer Halbleitervorrichtung | |
DE69119535T2 (de) | Vorformling zum Herstellen einer Kunststoffdose und Verfahren zum Herstellen einer Dose aus diesem Vorformling | |
DE68926072D1 (de) | Verfahren zum Ausbilden eines Musters und Verfahren zur Herstellung einer Halbleitervorrichtung | |
DE69312807T2 (de) | Verfahren und Vorrichtung zum Herstellen einer rohrförmigen Zahnstange | |
DE69028964D1 (de) | Verfahren zum Herstellen einer Halbleitervorrichtung | |
DE69226887T2 (de) | Halbleiteranordnung und Verfahren zum Herstellen einer derartigen Halbleiteranordnung | |
DE69209856T2 (de) | Supraleitendes Oxidmaterial und Verfahren zu seiner Herstellung | |
DE69120975D1 (de) | Verfahren zum Herstellen einer Halbleitervorrichtung | |
DE68922085T2 (de) | Halbleiteranordung und Verfahren zum Herstellen einer Halbleiteranordung. | |
DE3884019D1 (de) | Verfahren zum Herstellen einer Modul-Halbleiter-Leistungsanordnung und hergestellte Anordnung. | |
DE69214032D1 (de) | Supraleitendes Material und Verfahren zu dessen Herstellung | |
DE69119916D1 (de) | Verfahren und Anlage zum Herstellen einer Dünnfilm-Elektroluminescentenvorrichtung | |
DE69116592T2 (de) | Verfahren zum Herstellen einer Halbleiteranordnung | |
DE59107942D1 (de) | Verfahren und Vorrichtung zum Tonen einer Druckform aus ferroelektrischem Material | |
DE69116938D1 (de) | Verfahren zum Herstellen einer Halbleiteranordnung | |
DE69127165T2 (de) | Supraleitende Streifen und Verfahren zur Herstellung | |
DE69128326D1 (de) | Ein Verfahren zum Herstellen einer Halbleiteranordnung | |
DE69112923D1 (de) | Verfahren zum Herstellen einer Halbleiteranordnung und Vorrichtung zum Durchführen dieses Verfahrens. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |