DE69304016T2 - Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat - Google Patents
Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem GlassubstratInfo
- Publication number
- DE69304016T2 DE69304016T2 DE69304016T DE69304016T DE69304016T2 DE 69304016 T2 DE69304016 T2 DE 69304016T2 DE 69304016 T DE69304016 T DE 69304016T DE 69304016 T DE69304016 T DE 69304016T DE 69304016 T2 DE69304016 T2 DE 69304016T2
- Authority
- DE
- Germany
- Prior art keywords
- reflection
- production
- glass substrate
- reducing layer
- reducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
- C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
- C03C1/008—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route for the production of films or coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/008—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character comprising a mixture of materials covered by two or more of the groups C03C17/02, C03C17/06, C03C17/22 and C03C17/28
- C03C17/009—Mixtures of organic and inorganic materials, e.g. ormosils and ormocers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/77—Coatings having a rough surface
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
- C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4303711A JP2716330B2 (ja) | 1992-11-13 | 1992-11-13 | 低反射ガラスおよびその製法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69304016D1 DE69304016D1 (de) | 1996-09-19 |
DE69304016T2 true DE69304016T2 (de) | 1996-12-19 |
Family
ID=17924334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69304016T Expired - Fee Related DE69304016T2 (de) | 1992-11-13 | 1993-11-12 | Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat |
Country Status (4)
Country | Link |
---|---|
US (1) | US5394269A (de) |
EP (1) | EP0597490B1 (de) |
JP (1) | JP2716330B2 (de) |
DE (1) | DE69304016T2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000064830A1 (de) * | 1999-04-26 | 2000-11-02 | Flabeg Gmbh & Co. Kg | VORGESPANNTES, MIT EINER WISCHFESTEN, PORÖSEN SiO2-ANTIREFLEX-SCHICHT VERSEHENES SICHERHEITSGLAS UND VERFAHREN ZU DESSEN HERSTELLUNG |
DE10051724A1 (de) * | 2000-10-18 | 2002-05-02 | Flabeg Gmbh & Co Kg | Thermisch vorgespanntes Glas mit einer abriebfesten, porösen SiO¶2¶-Antireflexschicht |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5909314A (en) * | 1994-02-15 | 1999-06-01 | Dai Nippon Printing Co., Ltd. | Optical functional materials and process for producing the same |
CA2162451A1 (en) * | 1994-12-22 | 1996-06-23 | John P. Murphy | Anti-reflective clarifier film for eyeglasses |
EP0748775A3 (de) * | 1995-05-30 | 1998-11-25 | Central Glass Company, Limited | Wasserabweisende Glasscheibe mit fein aufgerauhter Metalloxidbasisschicht |
WO1997006896A1 (en) * | 1995-08-14 | 1997-02-27 | Central Glass Company Limited | Porous metal-oxide thin film and method of forming same on glass substrate |
TW376408B (en) | 1995-12-01 | 1999-12-11 | Nissan Chemical Ind Ltd | Coating film having water repellency and low refractive index |
DE69730259T2 (de) * | 1996-03-27 | 2005-09-08 | Asahi Glass Co., Ltd. | Laminat und Verfahren zu seiner Herstellung |
JP3488965B2 (ja) * | 1996-05-21 | 2004-01-19 | 日本山村硝子株式会社 | ゾル−ゲル法による独立膜の製造方法 |
DE19642419A1 (de) * | 1996-10-14 | 1998-04-16 | Fraunhofer Ges Forschung | Verfahren und Beschichtungszusammensetzung zur Herstellung einer Antireflexionsbeschichtung |
JPH10259038A (ja) | 1997-01-24 | 1998-09-29 | Samsung Corning Co Ltd | 耐久性撥水ガラス及びその製造方法 |
KR100281993B1 (ko) * | 1997-06-26 | 2001-04-02 | 박영구 | 내구성 발수유리와 그 제조방법 |
FR2762097B1 (fr) * | 1997-04-10 | 1999-07-02 | Corning Sa | Dispositif optique a revetement antireflechissant, materiau de revetement et procede de revetement correspondants |
JP2001526798A (ja) * | 1997-04-10 | 2001-12-18 | コーニング ソシエテ アノニム | 無反射コーティングを施した光学物品並びにそのコーティング材料及びコーティング方法 |
US5980983A (en) * | 1997-04-17 | 1999-11-09 | The President And Fellows Of Harvard University | Liquid precursors for formation of metal oxides |
EP0897898B1 (de) * | 1997-08-16 | 2004-04-28 | MERCK PATENT GmbH | Verfahren zur Abscheidung optischer Schichten |
DE19828231C2 (de) * | 1997-08-16 | 2000-09-07 | Merck Patent Gmbh | Verfahren zur Abscheidung poröser optischer Schichten |
DE19829172A1 (de) * | 1998-06-30 | 2000-01-05 | Univ Konstanz | Verfahren zur Herstellung von Antireflexschichten |
US6964731B1 (en) * | 1998-12-21 | 2005-11-15 | Cardinal Cg Company | Soil-resistant coating for glass surfaces |
TR200102186T2 (tr) | 1998-12-21 | 2001-11-21 | Cardinal Ig Company | Cam yüzeyleri için kire-dayanıklı kaplamalar |
US6660365B1 (en) * | 1998-12-21 | 2003-12-09 | Cardinal Cg Company | Soil-resistant coating for glass surfaces |
US6974629B1 (en) | 1999-08-06 | 2005-12-13 | Cardinal Cg Company | Low-emissivity, soil-resistant coating for glass surfaces |
JP4430194B2 (ja) | 1999-05-31 | 2010-03-10 | 日本板硝子株式会社 | 透明積層体およびこれを用いたガラス物品 |
JP2001060708A (ja) | 1999-06-18 | 2001-03-06 | Nippon Sheet Glass Co Ltd | 透明積層体およびこれを用いたガラス物品 |
JP2001060702A (ja) | 1999-06-18 | 2001-03-06 | Nippon Sheet Glass Co Ltd | 光電変換装置用基板およびこれを用いた光電変換装置 |
TW468053B (en) | 1999-12-14 | 2001-12-11 | Nissan Chemical Ind Ltd | Antireflection film, process for forming the antireflection film, and antireflection glass |
US6921579B2 (en) * | 2000-09-11 | 2005-07-26 | Cardinal Cg Company | Temporary protective covers |
DE10051725A1 (de) | 2000-10-18 | 2002-05-02 | Merck Patent Gmbh | Wäßrige Beschichtungslösung für abriebfeste SiO2-Antireflexschichten |
MXPA02009426A (es) | 2001-02-08 | 2003-10-06 | Cardinal Cg Co | Tratamientos marginales para sustratos recubiertos. |
WO2002064524A1 (fr) * | 2001-02-16 | 2002-08-22 | Nippon Sheet Glass Co., Ltd. | Film irregulier et son procede de fabrication |
US6902813B2 (en) * | 2001-09-11 | 2005-06-07 | Cardinal Cg Company | Hydrophilic surfaces carrying temporary protective covers |
TW593188B (en) | 2001-09-21 | 2004-06-21 | Merck Patent Gmbh | Hybrid sol for the production of abrasion-resistant SiO2 antireflection layers |
DE10146687C1 (de) | 2001-09-21 | 2003-06-26 | Flabeg Solarglas Gmbh & Co Kg | Glas mit einer porösen Antireflex-Oberflächenbeschichtung sowie Verfahren zur Herstellung des Glases und Verwendung eines derartigen Glases |
JP2003186004A (ja) * | 2001-12-14 | 2003-07-03 | Nippon Sheet Glass Co Ltd | 凸状膜の形成方法 |
US6919133B2 (en) * | 2002-03-01 | 2005-07-19 | Cardinal Cg Company | Thin film coating having transparent base layer |
CA2477845C (en) * | 2002-03-01 | 2010-10-12 | Cardinal Cg Company | Thin film coating having transparent base layer |
JP4118086B2 (ja) * | 2002-05-31 | 2008-07-16 | トヨタ自動車株式会社 | 親水性を有する防曇防汚性薄膜の製造方法 |
PL211548B1 (pl) * | 2002-06-10 | 2012-05-31 | Cnt Społka Z Ograniczoną Odpowiedzialnością | Ustrój izolacji termicznej gazowej, zwłaszcza szyb zespolonych |
TW200530350A (en) * | 2003-12-18 | 2005-09-16 | Nissan Chemical Ind Ltd | Water repellent coating film having low refractive index |
TWI404776B (zh) * | 2003-12-19 | 2013-08-11 | Nissan Chemical Ind Ltd | A film having a low refractive index and a large contact angle with respect to water |
EP1713736B1 (de) * | 2003-12-22 | 2016-04-27 | Cardinal CG Company | Gradierte photokatalytische beschichtungen und verfahren zur herstellung |
JP4182236B2 (ja) * | 2004-02-23 | 2008-11-19 | キヤノン株式会社 | 光学部材および光学部材の製造方法 |
DE102004019575A1 (de) * | 2004-04-20 | 2005-11-24 | Innovent E.V. Technologieentwicklung | Verfahren zur Herstellung von transmissionsverbessernden und/oder reflexionsmindernden optischen Schichten |
DE602005003228T2 (de) | 2004-07-12 | 2008-08-28 | Cardinal Cg Co., Eden Prairie | Wartungsarme beschichtungen |
US20060096614A1 (en) * | 2004-11-08 | 2006-05-11 | Krisko Annette J | Surface treating methods, compositions and articles |
US8092660B2 (en) * | 2004-12-03 | 2012-01-10 | Cardinal Cg Company | Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films |
US7923114B2 (en) * | 2004-12-03 | 2011-04-12 | Cardinal Cg Company | Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films |
US20090214796A1 (en) | 2005-06-09 | 2009-08-27 | Kaoru Okaniwa | Method for Forming Antireflection Film |
JP4893103B2 (ja) * | 2005-06-17 | 2012-03-07 | 日産化学工業株式会社 | 被膜形成用塗布液及びその被膜並びに被膜形成方法 |
US7550040B2 (en) | 2005-06-17 | 2009-06-23 | Nissan Chemical Industries, Ltd. | Coating fluid for forming film, and film thereof and film-forming process |
EP1873126A1 (de) * | 2006-02-22 | 2008-01-02 | Central Glass Co., Ltd. | Blendfreies Glassubstrat |
US7989094B2 (en) | 2006-04-19 | 2011-08-02 | Cardinal Cg Company | Opposed functional coatings having comparable single surface reflectances |
US20080011599A1 (en) | 2006-07-12 | 2008-01-17 | Brabender Dennis M | Sputtering apparatus including novel target mounting and/or control |
US20080055729A1 (en) * | 2006-08-28 | 2008-03-06 | Micron Technology, Inc. | Reducing reflections in image sensors |
KR100919281B1 (ko) * | 2007-08-31 | 2009-09-30 | 주식회사 엠디코드 | 유리기판의 표면처리제와, 이 표면처리제가 도포된표면처리필름 및, 이 표면처리필름을 갖는유기발광다이오드 |
US7820309B2 (en) * | 2007-09-14 | 2010-10-26 | Cardinal Cg Company | Low-maintenance coatings, and methods for producing low-maintenance coatings |
DE102007053839B4 (de) * | 2007-11-12 | 2009-09-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verwendung eines beschichteten, transparenten Substrats zur Beeinflussung der menschlichen Psyche |
US8557877B2 (en) * | 2009-06-10 | 2013-10-15 | Honeywell International Inc. | Anti-reflective coatings for optically transparent substrates |
DE102009042159B4 (de) * | 2009-09-11 | 2017-09-28 | Schott Ag | Verfahren zur Verbesserung der tribologischen Eigenschaften einer Glasoberfläche |
KR20130096145A (ko) | 2010-04-30 | 2013-08-29 | 닛산 가가쿠 고교 가부시키 가이샤 | 스프레이 도포용의 피막 형성용 도포액 및 피막 |
PL2582764T3 (pl) | 2010-06-18 | 2015-08-31 | Dsm Ip Assets Bv | Nieorganiczna powłoka tlenkowa |
PL2852641T3 (pl) | 2012-05-22 | 2019-01-31 | Dsm Ip Assets B.V. | Kompozycja i sposób wytwarzania porowatej powłoki z nieorganicznego tlenku |
KR20150036114A (ko) | 2012-07-20 | 2015-04-07 | 레르 리키드 쏘시에떼 아노님 뿌르 레뜌드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | Ald/cvd 규소-함유 필름 애플리케이션을 위한 유기실란 전구체 |
CA2878704A1 (en) | 2012-08-09 | 2014-02-13 | Dsm Ip Assets B.V. | Roll coating process and apparatus |
US9971065B2 (en) * | 2013-03-14 | 2018-05-15 | Gaurdian Glass, LLC | Anti-reflection glass made from sol made by blending tri-alkoxysilane and tetra-alkoxysilane inclusive sols |
CN104101918B (zh) * | 2013-04-03 | 2017-03-01 | 法国圣戈班玻璃公司 | 一种光学增透膜及其制备方法和光学组件 |
TW201509799A (zh) | 2013-07-19 | 2015-03-16 | Air Liquide | 用於ald/cvd含矽薄膜應用之六配位含矽前驅物 |
US9382268B1 (en) | 2013-07-19 | 2016-07-05 | American Air Liquide, Inc. | Sulfur containing organosilane precursors for ALD/CVD silicon-containing film applications |
CN107210010A (zh) * | 2015-01-26 | 2017-09-26 | 旭硝子株式会社 | 具有显示装置的建材玻璃板和建材玻璃结构 |
US10273573B2 (en) | 2015-12-11 | 2019-04-30 | Cardinal Cg Company | Method of coating both sides of a substrate using a sacrificial coating |
WO2017098053A1 (en) | 2015-12-11 | 2017-06-15 | Dsm Ip Assets B.V. | System and method for optical measurements on a transparent sheet |
EP3211122A1 (de) | 2016-02-23 | 2017-08-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum sintern, kristallisieren und/oder vernetzen eines beschichtungsmaterials auf einem substrat |
EP3541762B1 (de) | 2016-11-17 | 2022-03-02 | Cardinal CG Company | Statisch-dissipative beschichtungstechnologie |
JP7276775B2 (ja) | 2017-04-18 | 2023-05-18 | コベストロ (ネザーランズ) ビー.ブイ. | コーティング及びコーティング配合物 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60127250A (ja) * | 1983-12-15 | 1985-07-06 | Hoya Corp | 反射防止膜の形成方法 |
JPS62226840A (ja) * | 1986-03-29 | 1987-10-05 | Shimadzu Corp | 反射防止膜およびその製造方法 |
US4828721A (en) * | 1988-04-28 | 1989-05-09 | Colgate-Palmolive Co. | Particulate detergent compositions and manufacturing processes |
US5268196A (en) * | 1988-05-30 | 1993-12-07 | Ford Motor Company | Process for forming anti-reflective coatings comprising light metal fluorides |
JPH02248357A (ja) * | 1989-03-18 | 1990-10-04 | Mitsubishi Mining & Cement Co Ltd | ゾルの調製方法 |
JPH0323493A (ja) * | 1989-06-20 | 1991-01-31 | Pioneer Electron Corp | 液晶表示装置 |
JPH04275950A (ja) * | 1991-03-04 | 1992-10-01 | Central Glass Co Ltd | 基板面への微細凹凸形成法 |
JP2874391B2 (ja) * | 1991-06-05 | 1999-03-24 | 日産自動車株式会社 | 撥水処理ガラスの製造方法 |
JP2716302B2 (ja) * | 1991-11-29 | 1998-02-18 | セントラル硝子株式会社 | マイクロピット状表層を有する酸化物薄膜および該薄膜を用いた多層膜、ならびにその形成法 |
JPH05170486A (ja) * | 1991-12-25 | 1993-07-09 | Central Glass Co Ltd | ガラス表面用撥水処理剤およびその撥水処理ガラス |
-
1992
- 1992-11-13 JP JP4303711A patent/JP2716330B2/ja not_active Expired - Fee Related
-
1993
- 1993-11-12 DE DE69304016T patent/DE69304016T2/de not_active Expired - Fee Related
- 1993-11-12 US US08/150,895 patent/US5394269A/en not_active Expired - Fee Related
- 1993-11-12 EP EP93118366A patent/EP0597490B1/de not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000064830A1 (de) * | 1999-04-26 | 2000-11-02 | Flabeg Gmbh & Co. Kg | VORGESPANNTES, MIT EINER WISCHFESTEN, PORÖSEN SiO2-ANTIREFLEX-SCHICHT VERSEHENES SICHERHEITSGLAS UND VERFAHREN ZU DESSEN HERSTELLUNG |
DE19918811A1 (de) * | 1999-04-26 | 2000-11-02 | Fraunhofer Ges Forschung | Vorgespanntes, mit einer wischfesten, porösen SiO¶2¶-Antireflex-Schicht versehenes Sicherheitsglas u. Verfahren z. d. Herstellung |
DE10051724A1 (de) * | 2000-10-18 | 2002-05-02 | Flabeg Gmbh & Co Kg | Thermisch vorgespanntes Glas mit einer abriebfesten, porösen SiO¶2¶-Antireflexschicht |
US7128944B2 (en) | 2000-10-18 | 2006-10-31 | Flabeg Solarglas Gmbh & Co., Kg | Method for making thermally tempered glass comprising a non-abrasive, porous, SiO2 antireflection layer |
Also Published As
Publication number | Publication date |
---|---|
EP0597490B1 (de) | 1996-08-14 |
JP2716330B2 (ja) | 1998-02-18 |
JPH06157076A (ja) | 1994-06-03 |
EP0597490A1 (de) | 1994-05-18 |
DE69304016D1 (de) | 1996-09-19 |
US5394269A (en) | 1995-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69304016T2 (de) | Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat | |
DE69422964T2 (de) | Mehrlagiger, wasserabweisender Film und Verfahren zu dessen Herstellung auf einem Glassubstrat | |
DE69333152D1 (de) | Verfahren zur Herstellung eines Halbleitersubstrates | |
DE69331815T2 (de) | Verfahren zur Herstellung eines Halbleitersubstrates | |
DE69331816D1 (de) | Verfahren zur Herstellung eines Halbleitersubstrats | |
DE69711335D1 (de) | Hochtemperatur-Schutzschicht für ein Substrat aus einer Superlegierung und Verfahren zu deren Herstellung | |
DE69332511D1 (de) | Verfahren zur Herstellung eines Halbleitersubstrats | |
DE69333282D1 (de) | Verfahren zur Herstellung eines Halbleitersubstrats | |
DE69214683D1 (de) | Halbleiterbauelement mit einem auf TEOS-Basis aufgeschleuderten Glas und Verfahren zu dessen Herstellung | |
DE69423309T2 (de) | Herstellungsverfahren für eine Reliefstruktur auf einem Substrat aus Halbleitermaterial | |
DE68928402T2 (de) | Verfahren zur Entfernung einer Oxidschicht auf einem Substrat | |
DE69220901T2 (de) | Verfahren zur Herstellung eines wärmebehandelten beschichteten Glases | |
DE69333173D1 (de) | Verfahren zur Herstellung eines Substrates mit einer Halbleiterschicht auf einem Isolator | |
DE69722832D1 (de) | Verfahren zum Transportieren einer dünnen Schicht von einem Anfangssubstrat auf ein Endsubstrat | |
DE69210784D1 (de) | Wasserabstossende Metalloxidschicht auf einem Glassubstrat und Herstellungsverfahren | |
DE3872339D1 (de) | Anlage und verfahren zur herstellung einer schicht auf einem band. | |
DE69211022T2 (de) | Auf Kunststoffsubstrat aufgebrachte gleitsichere Schicht und Verfahren zur deren Herstellung | |
DE69326706T2 (de) | Verfahren zur Herstellung einer Schicht auf einem Halbleiterkörper | |
DE69201856D1 (de) | Mikrorauhe Metalloxidschichten auf Glassubstrat und Verfahren zu ihrer Herstellung. | |
DE69505048T2 (de) | Herstellungsmethode für Halbleiterelemente in einer aktiven Schicht auf einem Trägersubstrat | |
DE69231655T2 (de) | Verfahren zur Herstellung einer Graberstruktur in einem Halbleitersubstrat | |
DE59503245D1 (de) | Kratzfeste Beschichtung aus Aluminiumoxid auf einem Glas-Substrat und Verfahren zu ihrer Herstellung | |
DE69306600D1 (de) | Verfahren zur Herstellung eines mehrschichtigen Leitersubstrats | |
DE69209488D1 (de) | Verfahren zur Herstellung eines Halbleiterplätchens und Substrat für die Herstellung eines Halbleiters | |
DE69309358T2 (de) | Verfahren zur Herstellung eines Schaltungssubstrats |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |