DE69304016D1 - Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat - Google Patents

Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat

Info

Publication number
DE69304016D1
DE69304016D1 DE69304016T DE69304016T DE69304016D1 DE 69304016 D1 DE69304016 D1 DE 69304016D1 DE 69304016 T DE69304016 T DE 69304016T DE 69304016 T DE69304016 T DE 69304016T DE 69304016 D1 DE69304016 D1 DE 69304016D1
Authority
DE
Germany
Prior art keywords
reflection
production
glass substrate
reducing layer
reducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69304016T
Other languages
English (en)
Other versions
DE69304016T2 (de
Inventor
Atsushi Takamatsu
Osamu Takahashi
Hiroaki Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Application granted granted Critical
Publication of DE69304016D1 publication Critical patent/DE69304016D1/de
Publication of DE69304016T2 publication Critical patent/DE69304016T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
    • C03C1/008—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route for the production of films or coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/008—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character comprising a mixture of materials covered by two or more of the groups C03C17/02, C03C17/06, C03C17/22 and C03C17/28
    • C03C17/009—Mixtures of organic and inorganic materials, e.g. ormosils and ormocers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/213—SiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Glass (AREA)
DE69304016T 1992-11-13 1993-11-12 Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat Expired - Fee Related DE69304016T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4303711A JP2716330B2 (ja) 1992-11-13 1992-11-13 低反射ガラスおよびその製法

Publications (2)

Publication Number Publication Date
DE69304016D1 true DE69304016D1 (de) 1996-09-19
DE69304016T2 DE69304016T2 (de) 1996-12-19

Family

ID=17924334

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304016T Expired - Fee Related DE69304016T2 (de) 1992-11-13 1993-11-12 Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat

Country Status (4)

Country Link
US (1) US5394269A (de)
EP (1) EP0597490B1 (de)
JP (1) JP2716330B2 (de)
DE (1) DE69304016T2 (de)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5909314A (en) * 1994-02-15 1999-06-01 Dai Nippon Printing Co., Ltd. Optical functional materials and process for producing the same
CA2162451A1 (en) * 1994-12-22 1996-06-23 John P. Murphy Anti-reflective clarifier film for eyeglasses
EP0748775A3 (de) * 1995-05-30 1998-11-25 Central Glass Company, Limited Wasserabweisende Glasscheibe mit fein aufgerauhter Metalloxidbasisschicht
WO1997006896A1 (en) * 1995-08-14 1997-02-27 Central Glass Company Limited Porous metal-oxide thin film and method of forming same on glass substrate
TW376408B (en) * 1995-12-01 1999-12-11 Nissan Chemical Ind Ltd Coating film having water repellency and low refractive index
EP0798272B1 (de) * 1996-03-27 2004-08-18 Asahi Glass Company Ltd. Schichtstoff und Verfahren zu dessen Herstellung
JP3488965B2 (ja) * 1996-05-21 2004-01-19 日本山村硝子株式会社 ゾル−ゲル法による独立膜の製造方法
DE19642419A1 (de) * 1996-10-14 1998-04-16 Fraunhofer Ges Forschung Verfahren und Beschichtungszusammensetzung zur Herstellung einer Antireflexionsbeschichtung
KR100281993B1 (ko) * 1997-06-26 2001-04-02 박영구 내구성 발수유리와 그 제조방법
JPH10259038A (ja) 1997-01-24 1998-09-29 Samsung Corning Co Ltd 耐久性撥水ガラス及びその製造方法
JP2001526798A (ja) * 1997-04-10 2001-12-18 コーニング ソシエテ アノニム 無反射コーティングを施した光学物品並びにそのコーティング材料及びコーティング方法
FR2762097B1 (fr) * 1997-04-10 1999-07-02 Corning Sa Dispositif optique a revetement antireflechissant, materiau de revetement et procede de revetement correspondants
WO1998046617A1 (en) * 1997-04-17 1998-10-22 The President And Fellows Of Harvard College Liquid precursor for formation of metal oxides
DE19828231C2 (de) * 1997-08-16 2000-09-07 Merck Patent Gmbh Verfahren zur Abscheidung poröser optischer Schichten
EP0897898B1 (de) * 1997-08-16 2004-04-28 MERCK PATENT GmbH Verfahren zur Abscheidung optischer Schichten
DE19829172A1 (de) * 1998-06-30 2000-01-05 Univ Konstanz Verfahren zur Herstellung von Antireflexschichten
DK1147065T3 (da) 1998-12-21 2003-04-28 Cardinal Cg Co Smudsresistent coating til glasoverflader
US6974629B1 (en) 1999-08-06 2005-12-13 Cardinal Cg Company Low-emissivity, soil-resistant coating for glass surfaces
US6660365B1 (en) 1998-12-21 2003-12-09 Cardinal Cg Company Soil-resistant coating for glass surfaces
US6964731B1 (en) * 1998-12-21 2005-11-15 Cardinal Cg Company Soil-resistant coating for glass surfaces
DE19918811A1 (de) * 1999-04-26 2000-11-02 Fraunhofer Ges Forschung Vorgespanntes, mit einer wischfesten, porösen SiO¶2¶-Antireflex-Schicht versehenes Sicherheitsglas u. Verfahren z. d. Herstellung
JP4430194B2 (ja) 1999-05-31 2010-03-10 日本板硝子株式会社 透明積層体およびこれを用いたガラス物品
JP2001060702A (ja) 1999-06-18 2001-03-06 Nippon Sheet Glass Co Ltd 光電変換装置用基板およびこれを用いた光電変換装置
JP2001060708A (ja) 1999-06-18 2001-03-06 Nippon Sheet Glass Co Ltd 透明積層体およびこれを用いたガラス物品
TW468053B (en) 1999-12-14 2001-12-11 Nissan Chemical Ind Ltd Antireflection film, process for forming the antireflection film, and antireflection glass
US6921579B2 (en) * 2000-09-11 2005-07-26 Cardinal Cg Company Temporary protective covers
DE10051725A1 (de) 2000-10-18 2002-05-02 Merck Patent Gmbh Wäßrige Beschichtungslösung für abriebfeste SiO2-Antireflexschichten
DE10051724A1 (de) 2000-10-18 2002-05-02 Flabeg Gmbh & Co Kg Thermisch vorgespanntes Glas mit einer abriebfesten, porösen SiO¶2¶-Antireflexschicht
JP2004525054A (ja) 2001-02-08 2004-08-19 カーディナル・シージー・カンパニー 基板の表面に当てられた被覆を除去するための方法及び装置
US6964815B2 (en) 2001-02-16 2005-11-15 Nippon Sheet Glass Co., Ltd. Projecting film and manufacturing method thereof
US6902813B2 (en) * 2001-09-11 2005-06-07 Cardinal Cg Company Hydrophilic surfaces carrying temporary protective covers
JP4440639B2 (ja) * 2001-09-21 2010-03-24 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング 耐摩耗性ＳｉＯ２反射防止層を製造するための新規な混成ゾル
DE10146687C1 (de) * 2001-09-21 2003-06-26 Flabeg Solarglas Gmbh & Co Kg Glas mit einer porösen Antireflex-Oberflächenbeschichtung sowie Verfahren zur Herstellung des Glases und Verwendung eines derartigen Glases
JP2003186004A (ja) * 2001-12-14 2003-07-03 Nippon Sheet Glass Co Ltd 凸状膜の形成方法
US6919133B2 (en) 2002-03-01 2005-07-19 Cardinal Cg Company Thin film coating having transparent base layer
EP1630142B1 (de) * 2002-03-01 2008-01-09 Cardinal CG Company Dünnfilmbeschichtung mit einer transparenten grundierungsschicht
JP4118086B2 (ja) * 2002-05-31 2008-07-16 トヨタ自動車株式会社 親水性を有する防曇防汚性薄膜の製造方法
PL211548B1 (pl) * 2002-06-10 2012-05-31 Cnt Społka Z Ograniczoną Odpowiedzialnością Ustrój izolacji termicznej gazowej, zwłaszcza szyb zespolonych
TW200530350A (en) 2003-12-18 2005-09-16 Nissan Chemical Ind Ltd Water repellent coating film having low refractive index
US20070155897A1 (en) * 2003-12-19 2007-07-05 Nissan Chemical Industries Limited Coating film having low refractive index and large water contact angle
WO2005063646A1 (en) * 2003-12-22 2005-07-14 Cardinal Cg Company Graded photocatalytic coatings
JP4182236B2 (ja) * 2004-02-23 2008-11-19 キヤノン株式会社 光学部材および光学部材の製造方法
DE102004019575A1 (de) * 2004-04-20 2005-11-24 Innovent E.V. Technologieentwicklung Verfahren zur Herstellung von transmissionsverbessernden und/oder reflexionsmindernden optischen Schichten
CA2573428C (en) * 2004-07-12 2008-04-01 Cardinal Cg Company Low-maintenance coatings
US20060096614A1 (en) * 2004-11-08 2006-05-11 Krisko Annette J Surface treating methods, compositions and articles
US8092660B2 (en) * 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US7923114B2 (en) * 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
CN101194187A (zh) 2005-06-09 2008-06-04 日立化成工业株式会社 防反射膜的形成方法
JP4893103B2 (ja) * 2005-06-17 2012-03-07 日産化学工業株式会社 被膜形成用塗布液及びその被膜並びに被膜形成方法
US7550040B2 (en) 2005-06-17 2009-06-23 Nissan Chemical Industries, Ltd. Coating fluid for forming film, and film thereof and film-forming process
EP1873126A1 (de) * 2006-02-22 2008-01-02 Central Glass Co., Ltd. Blendfreies Glassubstrat
WO2007124291A2 (en) 2006-04-19 2007-11-01 Cardinal Cg Company Opposed functional coatings having comparable single surface reflectances
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
US20080055729A1 (en) * 2006-08-28 2008-03-06 Micron Technology, Inc. Reducing reflections in image sensors
KR100919281B1 (ko) * 2007-08-31 2009-09-30 주식회사 엠디코드 유리기판의 표면처리제와, 이 표면처리제가 도포된표면처리필름 및, 이 표면처리필름을 갖는유기발광다이오드
CA2664369A1 (en) 2007-09-14 2009-03-19 Cardinal Cg Company Low-maintenance coatings, and methods for producing low-maintenance coatings
DE102007053839B4 (de) 2007-11-12 2009-09-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verwendung eines beschichteten, transparenten Substrats zur Beeinflussung der menschlichen Psyche
US8557877B2 (en) * 2009-06-10 2013-10-15 Honeywell International Inc. Anti-reflective coatings for optically transparent substrates
DE102009042159B4 (de) * 2009-09-11 2017-09-28 Schott Ag Verfahren zur Verbesserung der tribologischen Eigenschaften einer Glasoberfläche
WO2011136370A1 (ja) 2010-04-30 2011-11-03 日産化学工業株式会社 スプレー塗布用の被膜形成用塗布液及び被膜
EP2582764B1 (de) 2010-06-18 2015-03-18 DSM IP Assets B.V. Anorganische oxidbeschichtung
EP2852641B1 (de) 2012-05-22 2018-08-08 DSM IP Assets B.V. Zusammensetzung und verfahren zur herstellung einer porösen anorganischen oxidbeschichtung
US9938303B2 (en) 2012-07-20 2018-04-10 American Air Liquide, Inc. Organosilane precursors for ALD/CVD silicon-containing film applications
IN2015DN00721A (de) 2012-08-09 2015-07-10 Dsm Ip Assets Bv
US9971065B2 (en) * 2013-03-14 2018-05-15 Gaurdian Glass, LLC Anti-reflection glass made from sol made by blending tri-alkoxysilane and tetra-alkoxysilane inclusive sols
CN104101918B (zh) * 2013-04-03 2017-03-01 法国圣戈班玻璃公司 一种光学增透膜及其制备方法和光学组件
TW201509799A (zh) 2013-07-19 2015-03-16 Air Liquide 用於ａｌｄ／ｃｖｄ含矽薄膜應用之六配位含矽前驅物
US9382268B1 (en) 2013-07-19 2016-07-05 American Air Liquide, Inc. Sulfur containing organosilane precursors for ALD/CVD silicon-containing film applications
JPWO2016121591A1 (ja) * 2015-01-26 2017-12-21 旭硝子株式会社 表示装置付き建材ガラス板及び建材ガラス構造
EP3387413A1 (de) 2015-12-11 2018-10-17 DSM IP Assets B.V. System und verfahren für optische messungen einer transparenten folie
EP3387163B1 (de) 2015-12-11 2020-04-29 Cardinal CG Company Verfahren zur beidseitigen beschichtung eines substrats
EP3211122A1 (de) 2016-02-23 2017-08-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum sintern, kristallisieren und/oder vernetzen eines beschichtungsmaterials auf einem substrat
WO2018093985A1 (en) 2016-11-17 2018-05-24 Cardinal Cg Company Static-dissipative coating technology
EP3612601A2 (de) 2017-04-18 2020-02-26 DSM IP Assets B.V. Beschichtung und beschichtungsformulierung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60127250A (ja) * 1983-12-15 1985-07-06 Hoya Corp 反射防止膜の形成方法
JPS62226840A (ja) * 1986-03-29 1987-10-05 Shimadzu Corp 反射防止膜およびその製造方法
US4828721A (en) * 1988-04-28 1989-05-09 Colgate-Palmolive Co. Particulate detergent compositions and manufacturing processes
US5268196A (en) * 1988-05-30 1993-12-07 Ford Motor Company Process for forming anti-reflective coatings comprising light metal fluorides
JPH02248357A (ja) * 1989-03-18 1990-10-04 Mitsubishi Mining & Cement Co Ltd ゾルの調製方法
JPH0323493A (ja) * 1989-06-20 1991-01-31 Pioneer Electron Corp 液晶表示装置
JPH04275950A (ja) * 1991-03-04 1992-10-01 Central Glass Co Ltd 基板面への微細凹凸形成法
JP2874391B2 (ja) * 1991-06-05 1999-03-24 日産自動車株式会社 撥水処理ガラスの製造方法
JP2716302B2 (ja) * 1991-11-29 1998-02-18 セントラル硝子株式会社 マイクロピット状表層を有する酸化物薄膜および該薄膜を用いた多層膜、ならびにその形成法
JPH05170486A (ja) * 1991-12-25 1993-07-09 Central Glass Co Ltd ガラス表面用撥水処理剤およびその撥水処理ガラス

Also Published As

Publication number Publication date
US5394269A (en) 1995-02-28
JP2716330B2 (ja) 1998-02-18
DE69304016T2 (de) 1996-12-19
EP0597490B1 (de) 1996-08-14
EP0597490A1 (de) 1994-05-18
JPH06157076A (ja) 1994-06-03

Similar Documents

Publication Publication Date Title
DE69304016D1 (de) Reflektion verringernde Schicht und Verfahren für deren Herstellung auf einem Glassubstrat
DE69422964D1 (de) Mehrlagiger, wasserabweisender Film und Verfahren zu dessen Herstellung auf einem Glassubstrat
DE69333152D1 (de) Verfahren zur Herstellung eines Halbleitersubstrates
DE69331815T2 (de) Verfahren zur Herstellung eines Halbleitersubstrates
DE69331816T2 (de) Verfahren zur Herstellung eines Halbleitersubstrats
DE69711335D1 (de) Hochtemperatur-Schutzschicht für ein Substrat aus einer Superlegierung und Verfahren zu deren Herstellung
DE69332511T2 (de) Verfahren zur Herstellung eines Halbleitersubstrats
DE69328390T2 (de) Verfahren zur Herstellung eines mehrlagigen Substrats
DE69214683T2 (de) Halbleiterbauelement mit einem auf TEOS-Basis aufgeschleuderten Glas und Verfahren zu dessen Herstellung
DE69423309T2 (de) Herstellungsverfahren für eine Reliefstruktur auf einem Substrat aus Halbleitermaterial
DE68928402T2 (de) Verfahren zur Entfernung einer Oxidschicht auf einem Substrat
DE69220901D1 (de) Verfahren zur Herstellung eines wärmebehandelten beschichteten Glases
DE69528611D1 (de) Verfahren zur Herstellung eines Halbleitersubstrates
DE69722832D1 (de) Verfahren zum Transportieren einer dünnen Schicht von einem Anfangssubstrat auf ein Endsubstrat
DE69210784T2 (de) Wasserabstossende Metalloxidschicht auf einem Glassubstrat und Herstellungsverfahren
DE3872339D1 (de) Anlage und verfahren zur herstellung einer schicht auf einem band.
DE69211022T2 (de) Auf Kunststoffsubstrat aufgebrachte gleitsichere Schicht und Verfahren zur deren Herstellung
DE69326706T2 (de) Verfahren zur Herstellung einer Schicht auf einem Halbleiterkörper
DE69201856D1 (de) Mikrorauhe Metalloxidschichten auf Glassubstrat und Verfahren zu ihrer Herstellung.
DE69505048D1 (de) Herstellungsmethode für Halbleiterelemente in einer aktiven Schicht auf einem Trägersubstrat
DE69231655D1 (de) Verfahren zur Herstellung einer Graberstruktur in einem Halbleitersubstrat
DE59503245D1 (de) Kratzfeste Beschichtung aus Aluminiumoxid auf einem Glas-Substrat und Verfahren zu ihrer Herstellung
DE69306600D1 (de) Verfahren zur Herstellung eines mehrschichtigen Leitersubstrats
DE69209488D1 (de) Verfahren zur Herstellung eines Halbleiterplätchens und Substrat für die Herstellung eines Halbleiters
DE69309358D1 (de) Verfahren zur Herstellung eines Schaltungssubstrats

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee