DE69228847T2 - Flüssigkeitsabgabe und Verdampfungssystem - Google Patents

Flüssigkeitsabgabe und Verdampfungssystem

Info

Publication number
DE69228847T2
DE69228847T2 DE69228847T DE69228847T DE69228847T2 DE 69228847 T2 DE69228847 T2 DE 69228847T2 DE 69228847 T DE69228847 T DE 69228847T DE 69228847 T DE69228847 T DE 69228847T DE 69228847 T2 DE69228847 T2 DE 69228847T2
Authority
DE
Germany
Prior art keywords
pump
liquid
valve
chamber
plunger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69228847T
Other languages
German (de)
English (en)
Other versions
DE69228847D1 (de
Inventor
James H. Lexington Ma 02173 Ewing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE69228847D1 publication Critical patent/DE69228847D1/de
Application granted granted Critical
Publication of DE69228847T2 publication Critical patent/DE69228847T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/06—Flash distillation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/088—Machines, pumps, or pumping installations having flexible working members having tubular flexible members with two or more tubular flexible members in series
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7782—With manual or external control for line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7835—Valve seating in direction of flow
    • Y10T137/7836—Flexible diaphragm or bellows reactor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Reciprocating Pumps (AREA)
  • Chemical Vapour Deposition (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Details Of Valves (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
DE69228847T 1991-08-28 1992-07-29 Flüssigkeitsabgabe und Verdampfungssystem Expired - Lifetime DE69228847T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/751,173 US5371828A (en) 1991-08-28 1991-08-28 System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure

Publications (2)

Publication Number Publication Date
DE69228847D1 DE69228847D1 (de) 1999-05-12
DE69228847T2 true DE69228847T2 (de) 1999-08-05

Family

ID=25020809

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69228847T Expired - Lifetime DE69228847T2 (de) 1991-08-28 1992-07-29 Flüssigkeitsabgabe und Verdampfungssystem

Country Status (5)

Country Link
US (3) US5371828A (enExample)
EP (1) EP0529334B1 (enExample)
JP (4) JP2693092B2 (enExample)
KR (1) KR0167568B1 (enExample)
DE (1) DE69228847T2 (enExample)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2872891B2 (ja) * 1993-08-06 1999-03-24 株式会社東芝 気化装置
US5660207A (en) * 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US5553188A (en) * 1995-02-24 1996-09-03 Mks Instruments, Inc. Vaporizer and liquid delivery system using same
US5520215A (en) * 1995-08-04 1996-05-28 Handy & Harman Automotive Group, Inc. Pressure regulator and dampener assembly
US5851293A (en) * 1996-03-29 1998-12-22 Atmi Ecosys Corporation Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations
US5873388A (en) * 1996-06-07 1999-02-23 Atmi Ecosys Corporation System for stabilization of pressure perturbations from oxidation systems for treatment of process gases from semiconductor manufacturing operations
SE509732C2 (sv) * 1996-06-18 1999-03-01 Tsp Medical Ab Ånggenerator med reglerad till- och bortförsel av vatten
US5785297A (en) * 1996-07-16 1998-07-28 Millipore Corporation Valve mechanism
US6244575B1 (en) 1996-10-02 2001-06-12 Micron Technology, Inc. Method and apparatus for vaporizing liquid precursors and system for using same
US5835677A (en) * 1996-10-03 1998-11-10 Emcore Corporation Liquid vaporizer system and method
US5835678A (en) * 1996-10-03 1998-11-10 Emcore Corporation Liquid vaporizer system and method
US6280793B1 (en) 1996-11-20 2001-08-28 Micron Technology, Inc. Electrostatic method and apparatus for vaporizing precursors and system for using same
US5820942A (en) * 1996-12-20 1998-10-13 Ag Associates Process for depositing a material on a substrate using light energy
US6419462B1 (en) 1997-02-24 2002-07-16 Ebara Corporation Positive displacement type liquid-delivery apparatus
JPH10238470A (ja) * 1997-02-24 1998-09-08 Ebara Corp 送液装置
US6409839B1 (en) 1997-06-02 2002-06-25 Msp Corporation Method and apparatus for vapor generation and film deposition
US5966499A (en) * 1997-07-28 1999-10-12 Mks Instruments, Inc. System for delivering a substantially constant vapor flow to a chemical process reactor
DE19755643C2 (de) * 1997-12-15 2001-05-03 Martin Schmaeh Vorrichtung zum Verdampfen von Flüssigkeit und zum Herstellen von Gas/Dampf-Gemischen
US6007330A (en) * 1998-03-12 1999-12-28 Cosmos Factory, Inc. Liquid precursor delivery system
US6216708B1 (en) 1998-07-23 2001-04-17 Micron Technology, Inc. On-line cleaning method for CVD vaporizers
IT246360Y1 (it) * 1998-11-25 2002-04-08 Andrea Gerosa Dispositivo per produrre istantaneamente vapore
JP3844418B2 (ja) * 1999-02-12 2006-11-15 株式会社荏原製作所 容積式送液装置
JP2002538604A (ja) 1999-02-26 2002-11-12 トリコン ホールディングス リミティド ポリマー層の処理方法
JP2000271471A (ja) 1999-03-24 2000-10-03 Nippon M K S Kk 液体ソース供給システム及びその洗浄方法、気化器
JP2001004095A (ja) * 1999-06-18 2001-01-09 Nippon M K S Kk 気化器
WO2001001472A1 (en) 1999-06-26 2001-01-04 Trikon Holdings Limited Method and apparatus for forming a film on a substrate
GB2354528B (en) 1999-09-25 2004-03-10 Trikon Holdings Ltd Delivery of liquid precursors to semiconductor processing reactors
KR100649852B1 (ko) * 1999-09-09 2006-11-24 동경 엘렉트론 주식회사 기화기 및 이것을 이용한 반도체 제조 시스템
US6299076B1 (en) 2000-03-10 2001-10-09 Jeffrey E. Sloan Steam cleaning system
US7163197B2 (en) 2000-09-26 2007-01-16 Shimadzu Corporation Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method
CA2327012C (en) 2000-11-28 2006-09-26 Duncan Wade Diaphragm for a diaphragm pump
US6827479B1 (en) * 2001-10-11 2004-12-07 Amphastar Pharmaceuticals Inc. Uniform small particle homogenizer and homogenizing process
JP2004183678A (ja) * 2002-11-29 2004-07-02 Nippon M K S Kk 電磁バルブ
US6957512B2 (en) * 2003-11-24 2005-10-25 Smithers-Oasis Company Method for the propogation of and aeroponic growing of plants and vessels therefor
US7569193B2 (en) 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US8197231B2 (en) 2005-07-13 2012-06-12 Purity Solutions Llc Diaphragm pump and related methods
CN101300411B (zh) 2005-10-31 2012-10-03 应用材料公司 制程减降反应器
US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
US20070194470A1 (en) * 2006-02-17 2007-08-23 Aviza Technology, Inc. Direct liquid injector device
DE102007047682B4 (de) 2007-10-05 2013-07-11 Webasto Ag Verfahren zum Pumpen einer Flüssigkeit und Verdrängerpumpe mit zwei Pumpkammern
CN102042480A (zh) * 2010-11-24 2011-05-04 安徽省电力科学研究院 用于发电机组氢气置换的二氧化碳气化器
CN102494546B (zh) * 2011-12-16 2013-03-13 亿恒节能科技江苏有限公司 空气加热盘管组冷凝水余热一效闪蒸利用系统
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
US9877509B2 (en) * 2014-03-31 2018-01-30 Westfield Limited (Ltd.) Micro-vaporizer heating element and method of vaporization
US20160123313A1 (en) * 2014-11-05 2016-05-05 Simmons Development, Llc Pneumatically-operated fluid pump with amplified fluid pressure, and related methods
KR102154866B1 (ko) 2020-02-07 2020-09-10 최규술 준불연 폴리우레탄 폼본드 및 그 제조방법
KR102154867B1 (ko) 2020-02-07 2020-09-10 최규술 폴리우레탄 발포폼 및 그 제조방법
KR102154865B1 (ko) 2020-03-17 2020-09-10 최규술 폴리우레탄 발포폼 제조용 키트 및 이를 이용한 폴리우레탄 발포폼 제조방법
KR102154864B1 (ko) 2020-03-17 2020-09-10 최규술 준불연 폴리우레탄 폼블록 조성물 및 그 제조방법
KR102154863B1 (ko) 2020-03-17 2020-09-10 최규술 준불연 폴리우레탄 폼본드 조성물 및 그 제조방법
CN111927559B (zh) * 2020-07-27 2021-05-11 北京航天发射技术研究所 一种气体喷射膨胀作动系统及控制方法

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE98324C (enExample) *
US1939783A (en) * 1931-02-20 1933-12-19 Elmer F Knowles Self contained vapor engine
US2528440A (en) * 1948-06-16 1950-10-31 Mcdonnell & Miller Inc Safety relief valve construction
US2673525A (en) * 1949-05-27 1954-03-30 William Edward Hann Pump
US2631538A (en) * 1949-11-17 1953-03-17 Wilford C Thompson Diaphragm pump
DE944669C (de) * 1951-10-23 1956-06-21 Knapsack Ag Verfahren zur Rueckgewinnung der beim Verpumpen von tiefsiedenden verfluessigten Gasen entstehenden Abgase
FR1089500A (fr) * 1953-12-17 1955-03-17 Générateur de vapeur
FR1113576A (fr) * 1954-11-19 1956-03-30 Générateur électrique de vapeur sous pression
US2949768A (en) * 1957-05-07 1960-08-23 Standard Oil Co Vacuum equilibrium flash vaporization equipment
US3119004A (en) * 1960-12-12 1964-01-21 Serafim M Koukios Flash chamber
US3151562A (en) * 1962-04-25 1964-10-06 Charles A Swartz Pump device
GB1122785A (en) * 1965-08-26 1968-08-07 George Frank Hare Improvements in fluid pressure valves
US3529622A (en) * 1968-04-22 1970-09-22 Anderson Greenwood & Co Balanced pressure responsive valve
US3583440A (en) * 1968-11-26 1971-06-08 Sven E Andersson Automatic metering valve
FR2188696A5 (enExample) 1972-06-02 1974-01-18 Commissariat Energie Atomique
JPS5540761B2 (enExample) * 1975-03-08 1980-10-20
US4093406A (en) * 1976-08-25 1978-06-06 Applied Power Inc. Fluid operated hydraulic pump including noise reduction means
US4269569A (en) * 1979-06-18 1981-05-26 Hoover Francis W Automatic pump sequencing and flow rate modulating control system
FR2581442B2 (fr) * 1979-08-03 1988-05-13 Brenot Claude Generateur de vapeur a evaporation directe
FR2462654A1 (fr) * 1979-08-03 1981-02-13 Brenot Claude Generateur de vapeur a evaporation directe et application aux presses a repasser
US4352636A (en) * 1980-04-14 1982-10-05 Spectra-Physics, Inc. Dual piston pump
CA1145728A (en) * 1981-04-21 1983-05-03 Antonio Gozzi Three or four stage gas compressor
US4620562A (en) * 1982-09-28 1986-11-04 Butterworth, Inc. High pressure regulator valve
US4493614A (en) * 1982-10-08 1985-01-15 Lifecare Services, Inc. Pump for a portable ventilator
US4583920A (en) * 1983-12-28 1986-04-22 M&T Chemicals Inc. Positive displacement diaphragm pumps employing displacer valves
US4634099A (en) * 1985-05-17 1987-01-06 Nupro Company High pressure inverted bellows valve
JPH0673651B2 (ja) * 1986-10-31 1994-09-21 トリニテイ工業株式会社 塗布剤供給装置
JPS6460795A (en) * 1987-08-31 1989-03-07 Toshiba Corp Rotary compressor
DE3785207T2 (de) * 1987-09-26 1993-07-15 Hewlett Packard Gmbh Pumpvorrichtung zur abgabe von fluessigkeit bei hohem druck.
US4936342A (en) * 1988-01-27 1990-06-26 Mitsuba Electric Manufacturing Co., Ltd. Fuel pressure control valve device
JPH0211984A (ja) * 1988-05-04 1990-01-17 Nupro Co 流体作動形弁アクチュエータ及び弁
IT1226303B (it) * 1988-07-26 1990-12-27 Montedipe Spa Processo ed apparato per la devolatilizzazione di soluzioni di polimeri.
US4950134A (en) * 1988-12-27 1990-08-21 Cybor Corporation Precision liquid dispenser
US5098741A (en) * 1990-06-08 1992-03-24 Lam Research Corporation Method and system for delivering liquid reagents to processing vessels
US5204314A (en) * 1990-07-06 1993-04-20 Advanced Technology Materials, Inc. Method for delivering an involatile reagent in vapor form to a CVD reactor
DE4029071C2 (de) * 1990-09-13 1994-03-31 Massah Sobhy Ahmed Dipl Ing El Vorrichtung zum Verdampfen von flüssigen Produkten, Verfahren zum Betreiben der Vorrichtung sowie Verwendung der Vorrichtung als Dampferzeuger oder Kondensator
US5205722A (en) * 1991-06-04 1993-04-27 Hammond John M Metering pump
US5193575A (en) * 1992-03-13 1993-03-16 Dresser-Rand Adjustable differential pressure valve

Also Published As

Publication number Publication date
KR0167568B1 (ko) 1999-01-15
EP0529334A3 (enExample) 1994-02-23
EP0529334B1 (en) 1999-04-07
DE69228847D1 (de) 1999-05-12
JPH1030558A (ja) 1998-02-03
US5371828A (en) 1994-12-06
JPH05253402A (ja) 1993-10-05
JPH1030557A (ja) 1998-02-03
US5361800A (en) 1994-11-08
JP2693092B2 (ja) 1997-12-17
JP3296749B2 (ja) 2002-07-02
EP0529334A2 (en) 1993-03-03
KR930004735A (ko) 1993-03-23
US5437542A (en) 1995-08-01
JPH1030556A (ja) 1998-02-03

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