DE69207473D1 - Durchflussregler - Google Patents
DurchflussreglerInfo
- Publication number
- DE69207473D1 DE69207473D1 DE69207473T DE69207473T DE69207473D1 DE 69207473 D1 DE69207473 D1 DE 69207473D1 DE 69207473 T DE69207473 T DE 69207473T DE 69207473 T DE69207473 T DE 69207473T DE 69207473 D1 DE69207473 D1 DE 69207473D1
- Authority
- DE
- Germany
- Prior art keywords
- flow controller
- controller
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Diaphragms And Bellows (AREA)
- Valve Housings (AREA)
- Control Of Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3133450A JP3006913B2 (ja) | 1991-05-09 | 1991-05-09 | 流体制御器 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69207473D1 true DE69207473D1 (de) | 1996-02-22 |
DE69207473T2 DE69207473T2 (de) | 1996-08-01 |
Family
ID=15105063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69207473T Expired - Fee Related DE69207473T2 (de) | 1991-05-09 | 1992-03-24 | Durchflussregler |
Country Status (6)
Country | Link |
---|---|
US (1) | US5186434A (de) |
EP (1) | EP0512674B1 (de) |
JP (1) | JP3006913B2 (de) |
KR (1) | KR960002537B1 (de) |
CA (1) | CA2065589C (de) |
DE (1) | DE69207473T2 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5335691A (en) * | 1992-05-26 | 1994-08-09 | Nupro Company | High pressure diaphragm valve |
JP3017398B2 (ja) * | 1994-06-29 | 2000-03-06 | 株式会社本山製作所 | ダイヤフラム弁構造及びガス配管系 |
JP3343313B2 (ja) * | 1995-06-30 | 2002-11-11 | 株式会社フジキン | ダイヤフラム弁 |
TW342429B (en) * | 1995-07-14 | 1998-10-11 | Tadahiro Omi | Fluid control system and valve used in it |
US5730423A (en) * | 1996-10-16 | 1998-03-24 | Parker-Hannifin Corporation | All metal diaphragm valve |
US5851004A (en) * | 1996-10-16 | 1998-12-22 | Parker-Hannifin Corporation | High pressure actuated metal seated diaphragm valve |
SE9604725D0 (sv) * | 1996-12-20 | 1996-12-20 | Siemens Elema Ab | Ventil |
IL130567A (en) | 1997-02-03 | 2002-04-21 | Swagelok Co | Diaphragm valve |
US6123320A (en) * | 1998-10-09 | 2000-09-26 | Swagelok Co. | Sanitary diaphragm valve |
US6394417B1 (en) * | 1998-10-09 | 2002-05-28 | Swagelok Co. | Sanitary diaphragm valve |
JP3437811B2 (ja) * | 1999-05-12 | 2003-08-18 | 藤倉ゴム工業株式会社 | 二段階切換開閉弁及び倍力型二段階切換開閉弁 |
JP2001317655A (ja) * | 2000-05-08 | 2001-11-16 | Smc Corp | シリンダー操作形複合弁 |
JP2001317654A (ja) * | 2000-05-08 | 2001-11-16 | Smc Corp | シリンダー操作形切換弁 |
TW441734U (en) * | 2000-07-27 | 2001-06-16 | Ind Tech Res Inst | Switch mechanism of gas control module |
CN1277251C (zh) * | 2002-01-30 | 2006-09-27 | 富士胶片株式会社 | 磁记录介质 |
TW572164U (en) * | 2002-12-06 | 2004-01-11 | Ind Tech Res Inst | Diaphragm valve |
WO2004092622A2 (en) * | 2003-04-14 | 2004-10-28 | Swagelok Company | Diaphragm valve seat |
JP4247386B2 (ja) * | 2003-11-28 | 2009-04-02 | 旭有機材工業株式会社 | 流量調節弁 |
US20050139061A1 (en) * | 2003-12-29 | 2005-06-30 | Swagelok Company | Stackable actuator housing |
CN1704615A (zh) | 2004-06-01 | 2005-12-07 | 斯瓦戈洛克公司 | 流体致动器 |
JP2006153230A (ja) * | 2004-12-01 | 2006-06-15 | Neriki:Kk | 流体制御器用ダイヤフラム及びこれを用いたバルブ装置 |
US7370664B2 (en) * | 2005-01-31 | 2008-05-13 | Swagelok Company | Flow control device |
US7243903B2 (en) * | 2005-06-22 | 2007-07-17 | Wincek Christopher P | Valve diaphragm with a compression restraining ring, and valve including same |
CN101283212A (zh) * | 2005-08-09 | 2008-10-08 | 斯瓦戈洛克公司 | 流体流动装置 |
JP5054904B2 (ja) * | 2005-08-30 | 2012-10-24 | 株式会社フジキン | ダイレクトタッチ型メタルダイヤフラム弁 |
KR20090107544A (ko) * | 2007-02-06 | 2009-10-13 | 가부시키가이샤 후지킨 | 유체 제어기 |
JP4971030B2 (ja) * | 2007-05-21 | 2012-07-11 | シーケーディ株式会社 | 流体制御弁 |
WO2009012479A1 (en) * | 2007-07-19 | 2009-01-22 | Swagelok Company | Coated seals |
US20100320278A1 (en) * | 2007-11-13 | 2010-12-23 | Danfoss A/S | Expansion valve |
ES2498192T3 (es) * | 2009-10-09 | 2014-09-24 | Norgren Ag | Válvula de moldeo por soplado para un bloque de válvula de moldeo por soplado |
JP5613420B2 (ja) * | 2010-02-05 | 2014-10-22 | 株式会社フジキン | 流体制御器 |
US20140305522A1 (en) * | 2013-04-12 | 2014-10-16 | Parker-Hannifin Corporation | Stream switching system |
DE102013215294A1 (de) * | 2013-08-02 | 2015-02-05 | GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG | Membrananordnung für eine Ventileinrichtung |
JP6491878B2 (ja) * | 2014-12-25 | 2019-03-27 | 株式会社フジキン | 流体制御器 |
CN105387242B (zh) * | 2015-12-23 | 2018-04-17 | 山东大学 | 一种压电型薄膜式节流阀 |
JP7015111B2 (ja) * | 2017-01-31 | 2022-02-08 | 株式会社キッツエスシーティー | バルブ用アクチュエータとこれを備えたダイヤフラムバルブ |
CN110730869B (zh) * | 2017-07-04 | 2021-08-06 | 株式会社富士金 | 致动器、阀、流体供给系统、以及半导体制造装置 |
JP6941355B2 (ja) * | 2017-07-31 | 2021-09-29 | 株式会社フジキン | ダイヤフラム弁 |
JP7161157B2 (ja) * | 2018-08-28 | 2022-10-26 | 株式会社フジキン | アクチュエータ、流体制御弁及び弁監視装置 |
JP7061587B2 (ja) * | 2019-04-05 | 2022-04-28 | Ckd株式会社 | 流体制御弁 |
US20230366484A1 (en) * | 2020-09-15 | 2023-11-16 | Lam Research Corporation | Heat-transferring valve flexure and methods |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1839727U (de) * | 1959-05-30 | 1961-10-19 | Klein Schanzlin & Becker Ag | Als abschlusskoerper dienende membran fuer ventile. |
FR2180213A5 (de) * | 1972-04-13 | 1973-11-23 | Duriron Co | |
NL7714475A (nl) * | 1977-04-04 | 1978-10-06 | Dresser Ind | Membraanafsluiter voor hoge druk. |
JPS61119675A (ja) * | 1984-11-14 | 1986-06-06 | Toshiba Tungaloy Co Ltd | 被覆焼結合金及びその製造方法 |
JPS61218873A (ja) * | 1985-03-23 | 1986-09-29 | Konan Denki Kk | ダイヤフラム弁 |
JPS6372984A (ja) * | 1986-09-11 | 1988-04-02 | Yamada Mitsue | 流体制御器 |
US4915353A (en) * | 1988-09-26 | 1990-04-10 | Nupro Company | Diaphragm valve |
US4867201A (en) * | 1989-03-06 | 1989-09-19 | Harsco Corporation | Parallel-motion dual-diaphragm valve |
-
1991
- 1991-05-09 JP JP3133450A patent/JP3006913B2/ja not_active Expired - Lifetime
-
1992
- 1992-03-24 EP EP92302500A patent/EP0512674B1/de not_active Expired - Lifetime
- 1992-03-24 DE DE69207473T patent/DE69207473T2/de not_active Expired - Fee Related
- 1992-04-08 CA CA002065589A patent/CA2065589C/en not_active Expired - Fee Related
- 1992-04-08 US US07/865,241 patent/US5186434A/en not_active Expired - Lifetime
- 1992-05-07 KR KR1019920007732A patent/KR960002537B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0512674B1 (de) | 1996-01-10 |
US5186434A (en) | 1993-02-16 |
KR920021905A (ko) | 1992-12-19 |
JPH0526357A (ja) | 1993-02-02 |
EP0512674A3 (en) | 1993-01-13 |
DE69207473T2 (de) | 1996-08-01 |
KR960002537B1 (ko) | 1996-02-22 |
JP3006913B2 (ja) | 2000-02-07 |
CA2065589C (en) | 1995-01-17 |
EP0512674A2 (de) | 1992-11-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |