KR920021905A - 유체 제어기 - Google Patents

유체 제어기 Download PDF

Info

Publication number
KR920021905A
KR920021905A KR1019920007732A KR920007732A KR920021905A KR 920021905 A KR920021905 A KR 920021905A KR 1019920007732 A KR1019920007732 A KR 1019920007732A KR 920007732 A KR920007732 A KR 920007732A KR 920021905 A KR920021905 A KR 920021905A
Authority
KR
South Korea
Prior art keywords
fluid controller
fastening member
controller according
sliding
metal diaphragm
Prior art date
Application number
KR1019920007732A
Other languages
English (en)
Other versions
KR960002537B1 (ko
Inventor
료오타로오 니시무라
미치오 야마지
히로카쯔 마에다
노부카즈 이케다
켄지 야마모토
Original Assignee
키요하라 마사코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 키요하라 마사코 filed Critical 키요하라 마사코
Publication of KR920021905A publication Critical patent/KR920021905A/ko
Application granted granted Critical
Publication of KR960002537B1 publication Critical patent/KR960002537B1/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Diaphragms And Bellows (AREA)
  • Valve Housings (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

내용 없음.

Description

유체 제어기
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1실시예에 관한 유체제어기를 표시하는 종단 측면도,
제2도는 제1도의 주요부분의 확대 종단측면도,
제3도는 본 발명의 제2실시예에 관한 유체제어기를 표시하는 주요부분의 확대 종단측면도.

Claims (5)

  1. 고정부재(2)와, 고정부재(2)에 대하여 체결가능하게 설치된 체결부재(3)와, 고정부재(2)와 체결부재(3)와의 사이에 둘레가장자리가 끼워 고정되어 복수매의 것이 중합된 금속제 다이어프램(4)과, 각 금속제 다이어프램(4)사이에 설치되어 이들의 접동을 원활하게 하는 접동원활재(5)로 이루어진 것을 특징으로 하는 유체제어기.
  2. 제1항에 있어서, 접동원활재(5)를, 각 금속제 다이어프램(4)사이에 개설된 윤활유(23)로 한 것을 특징으로 하는 유체제어기.
  3. 제1항에 있어서, 접동원활재(5)를, 각 금속제 다이어프램(4)에 부설된 도금층(24)으로 한 것을 특징으로 하는 유체제어기.
  4. 제1항에 있어서, 고정부재를 밸브의 보디(2)로 하고, 체결부재를 밸브의 보닛(3)으로 한 것을 특징으로 하는 유체제어기.
  5. 제1항에 있어서, 고정부재를 액츄에이터의 보디(18)로 하고, 체결부재를 액츄에이터의 캡(19)으로 한 것을 특징으로 하는 유체제어기.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920007732A 1991-05-09 1992-05-07 유체제어기 KR960002537B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3133450A JP3006913B2 (ja) 1991-05-09 1991-05-09 流体制御器
JP91-133450 1991-05-09

Publications (2)

Publication Number Publication Date
KR920021905A true KR920021905A (ko) 1992-12-19
KR960002537B1 KR960002537B1 (ko) 1996-02-22

Family

ID=15105063

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920007732A KR960002537B1 (ko) 1991-05-09 1992-05-07 유체제어기

Country Status (6)

Country Link
US (1) US5186434A (ko)
EP (1) EP0512674B1 (ko)
JP (1) JP3006913B2 (ko)
KR (1) KR960002537B1 (ko)
CA (1) CA2065589C (ko)
DE (1) DE69207473T2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010102936A (ko) * 2000-05-08 2001-11-17 다까다 요시유끼 실린더 조작형 복합밸브
KR20010102937A (ko) * 2000-05-08 2001-11-17 다까다 요시유끼 실린더 조작형 전환밸브

Families Citing this family (39)

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US5335691A (en) * 1992-05-26 1994-08-09 Nupro Company High pressure diaphragm valve
JP3017398B2 (ja) * 1994-06-29 2000-03-06 株式会社本山製作所 ダイヤフラム弁構造及びガス配管系
JP3343313B2 (ja) * 1995-06-30 2002-11-11 株式会社フジキン ダイヤフラム弁
TW342429B (en) * 1995-07-14 1998-10-11 Tadahiro Omi Fluid control system and valve used in it
US5730423A (en) * 1996-10-16 1998-03-24 Parker-Hannifin Corporation All metal diaphragm valve
US5851004A (en) * 1996-10-16 1998-12-22 Parker-Hannifin Corporation High pressure actuated metal seated diaphragm valve
SE9604725D0 (sv) * 1996-12-20 1996-12-20 Siemens Elema Ab Ventil
IL130567A (en) 1997-02-03 2002-04-21 Swagelok Co Diaphragm valve
US6123320A (en) * 1998-10-09 2000-09-26 Swagelok Co. Sanitary diaphragm valve
US6394417B1 (en) * 1998-10-09 2002-05-28 Swagelok Co. Sanitary diaphragm valve
JP3437811B2 (ja) * 1999-05-12 2003-08-18 藤倉ゴム工業株式会社 二段階切換開閉弁及び倍力型二段階切換開閉弁
TW441734U (en) * 2000-07-27 2001-06-16 Ind Tech Res Inst Switch mechanism of gas control module
CN1277251C (zh) * 2002-01-30 2006-09-27 富士胶片株式会社 磁记录介质
TW572164U (en) * 2002-12-06 2004-01-11 Ind Tech Res Inst Diaphragm valve
WO2004092622A2 (en) * 2003-04-14 2004-10-28 Swagelok Company Diaphragm valve seat
JP4247386B2 (ja) * 2003-11-28 2009-04-02 旭有機材工業株式会社 流量調節弁
US20050139061A1 (en) * 2003-12-29 2005-06-30 Swagelok Company Stackable actuator housing
CN1704615A (zh) 2004-06-01 2005-12-07 斯瓦戈洛克公司 流体致动器
JP2006153230A (ja) * 2004-12-01 2006-06-15 Neriki:Kk 流体制御器用ダイヤフラム及びこれを用いたバルブ装置
US7370664B2 (en) * 2005-01-31 2008-05-13 Swagelok Company Flow control device
US7243903B2 (en) * 2005-06-22 2007-07-17 Wincek Christopher P Valve diaphragm with a compression restraining ring, and valve including same
CN101283212A (zh) * 2005-08-09 2008-10-08 斯瓦戈洛克公司 流体流动装置
JP5054904B2 (ja) * 2005-08-30 2012-10-24 株式会社フジキン ダイレクトタッチ型メタルダイヤフラム弁
KR20090107544A (ko) * 2007-02-06 2009-10-13 가부시키가이샤 후지킨 유체 제어기
JP4971030B2 (ja) * 2007-05-21 2012-07-11 シーケーディ株式会社 流体制御弁
WO2009012479A1 (en) * 2007-07-19 2009-01-22 Swagelok Company Coated seals
US20100320278A1 (en) * 2007-11-13 2010-12-23 Danfoss A/S Expansion valve
ES2498192T3 (es) * 2009-10-09 2014-09-24 Norgren Ag Válvula de moldeo por soplado para un bloque de válvula de moldeo por soplado
JP5613420B2 (ja) * 2010-02-05 2014-10-22 株式会社フジキン 流体制御器
US20140305522A1 (en) * 2013-04-12 2014-10-16 Parker-Hannifin Corporation Stream switching system
DE102013215294A1 (de) * 2013-08-02 2015-02-05 GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG Membrananordnung für eine Ventileinrichtung
JP6491878B2 (ja) * 2014-12-25 2019-03-27 株式会社フジキン 流体制御器
CN105387242B (zh) * 2015-12-23 2018-04-17 山东大学 一种压电型薄膜式节流阀
JP7015111B2 (ja) * 2017-01-31 2022-02-08 株式会社キッツエスシーティー バルブ用アクチュエータとこれを備えたダイヤフラムバルブ
CN110730869B (zh) * 2017-07-04 2021-08-06 株式会社富士金 致动器、阀、流体供给系统、以及半导体制造装置
JP6941355B2 (ja) * 2017-07-31 2021-09-29 株式会社フジキン ダイヤフラム弁
JP7161157B2 (ja) * 2018-08-28 2022-10-26 株式会社フジキン アクチュエータ、流体制御弁及び弁監視装置
JP7061587B2 (ja) * 2019-04-05 2022-04-28 Ckd株式会社 流体制御弁
US20230366484A1 (en) * 2020-09-15 2023-11-16 Lam Research Corporation Heat-transferring valve flexure and methods

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Publication number Priority date Publication date Assignee Title
DE1839727U (de) * 1959-05-30 1961-10-19 Klein Schanzlin & Becker Ag Als abschlusskoerper dienende membran fuer ventile.
FR2180213A5 (ko) * 1972-04-13 1973-11-23 Duriron Co
NL7714475A (nl) * 1977-04-04 1978-10-06 Dresser Ind Membraanafsluiter voor hoge druk.
JPS61119675A (ja) * 1984-11-14 1986-06-06 Toshiba Tungaloy Co Ltd 被覆焼結合金及びその製造方法
JPS61218873A (ja) * 1985-03-23 1986-09-29 Konan Denki Kk ダイヤフラム弁
JPS6372984A (ja) * 1986-09-11 1988-04-02 Yamada Mitsue 流体制御器
US4915353A (en) * 1988-09-26 1990-04-10 Nupro Company Diaphragm valve
US4867201A (en) * 1989-03-06 1989-09-19 Harsco Corporation Parallel-motion dual-diaphragm valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010102936A (ko) * 2000-05-08 2001-11-17 다까다 요시유끼 실린더 조작형 복합밸브
KR20010102937A (ko) * 2000-05-08 2001-11-17 다까다 요시유끼 실린더 조작형 전환밸브

Also Published As

Publication number Publication date
EP0512674B1 (en) 1996-01-10
US5186434A (en) 1993-02-16
JPH0526357A (ja) 1993-02-02
EP0512674A3 (en) 1993-01-13
DE69207473T2 (de) 1996-08-01
KR960002537B1 (ko) 1996-02-22
JP3006913B2 (ja) 2000-02-07
CA2065589C (en) 1995-01-17
DE69207473D1 (de) 1996-02-22
EP0512674A2 (en) 1992-11-11

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