DE69115292D1 - Verfahren und vorrichtung zum überführen von gegenständen aus einer kontrollierten atmosphäre in eine andere. - Google Patents

Verfahren und vorrichtung zum überführen von gegenständen aus einer kontrollierten atmosphäre in eine andere.

Info

Publication number
DE69115292D1
DE69115292D1 DE69115292T DE69115292T DE69115292D1 DE 69115292 D1 DE69115292 D1 DE 69115292D1 DE 69115292 T DE69115292 T DE 69115292T DE 69115292 T DE69115292 T DE 69115292T DE 69115292 D1 DE69115292 D1 DE 69115292D1
Authority
DE
Germany
Prior art keywords
another
controlled atmosphere
transferring objects
transferring
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69115292T
Other languages
English (en)
Other versions
DE69115292T2 (de
Inventor
Anthony Bonora
Gilles Guerre
Mihir Parikh
Frederick Rosenquist
Sudhir Jain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASYST TECHNOLOGIES
Asyst Technologies Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Publication of DE69115292D1 publication Critical patent/DE69115292D1/de
Application granted granted Critical
Publication of DE69115292T2 publication Critical patent/DE69115292T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE69115292T 1990-11-01 1991-09-12 Verfahren und vorrichtung zum überführen von gegenständen aus einer kontrollierten atmosphäre in eine andere. Expired - Fee Related DE69115292T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/607,898 US5169272A (en) 1990-11-01 1990-11-01 Method and apparatus for transferring articles between two controlled environments
PCT/US1991/006620 WO1992007759A1 (en) 1990-11-01 1991-09-12 Method and apparatus for transferring articles between two controlled environments

Publications (2)

Publication Number Publication Date
DE69115292D1 true DE69115292D1 (de) 1996-01-18
DE69115292T2 DE69115292T2 (de) 1996-06-27

Family

ID=24434168

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69115292T Expired - Fee Related DE69115292T2 (de) 1990-11-01 1991-09-12 Verfahren und vorrichtung zum überführen von gegenständen aus einer kontrollierten atmosphäre in eine andere.

Country Status (5)

Country Link
US (3) US5169272A (de)
EP (1) EP0556193B1 (de)
JP (1) JP3576162B2 (de)
DE (1) DE69115292T2 (de)
WO (1) WO1992007759A1 (de)

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Also Published As

Publication number Publication date
US5169272A (en) 1992-12-08
JP3576162B2 (ja) 2004-10-13
US5547328A (en) 1996-08-20
EP0556193A4 (en) 1993-11-03
EP0556193A1 (de) 1993-08-25
EP0556193B1 (de) 1995-12-06
JPH06501815A (ja) 1994-02-24
US5370491A (en) 1994-12-06
DE69115292T2 (de) 1996-06-27
WO1992007759A1 (en) 1992-05-14

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