DE68926732D1 - Verfahren zur Reinigung von gasförmigem Stickstofftrifluorid - Google Patents

Verfahren zur Reinigung von gasförmigem Stickstofftrifluorid

Info

Publication number
DE68926732D1
DE68926732D1 DE68926732T DE68926732T DE68926732D1 DE 68926732 D1 DE68926732 D1 DE 68926732D1 DE 68926732 T DE68926732 T DE 68926732T DE 68926732 T DE68926732 T DE 68926732T DE 68926732 D1 DE68926732 D1 DE 68926732D1
Authority
DE
Germany
Prior art keywords
purification
gaseous nitrogen
nitrogen trifluoride
trifluoride
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68926732T
Other languages
English (en)
Other versions
DE68926732T2 (de
Inventor
Makoto Aritsuka
Naruyuki Iwanaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Application granted granted Critical
Publication of DE68926732D1 publication Critical patent/DE68926732D1/de
Publication of DE68926732T2 publication Critical patent/DE68926732T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride
    • C01B21/0837—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)
  • Catalysts (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
DE68926732T 1988-10-25 1989-10-24 Verfahren zur Reinigung von gasförmigem Stickstofftrifluorid Expired - Lifetime DE68926732T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26705888 1988-10-25

Publications (2)

Publication Number Publication Date
DE68926732D1 true DE68926732D1 (de) 1996-08-01
DE68926732T2 DE68926732T2 (de) 1996-12-05

Family

ID=17439448

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68926732T Expired - Lifetime DE68926732T2 (de) 1988-10-25 1989-10-24 Verfahren zur Reinigung von gasförmigem Stickstofftrifluorid

Country Status (5)

Country Link
US (1) US4933158A (de)
EP (1) EP0366078B1 (de)
KR (1) KR920000797B1 (de)
CA (1) CA2001304C (de)
DE (1) DE68926732T2 (de)

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JPH01261208A (ja) * 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
EP0424727B1 (de) * 1989-10-26 1995-04-19 MITSUI TOATSU CHEMICALS, Inc. Methode zur Herstellung von Stickstofftrifluorid
JPH0798648B2 (ja) * 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5202096A (en) * 1990-01-19 1993-04-13 The Boc Group, Inc. Apparatus for low temperature purification of gases
US5401473A (en) * 1990-07-09 1995-03-28 Daidousanso Co., Ltd. Method and apparatus for treatment of NF3 gas
US5176889A (en) * 1990-07-09 1993-01-05 Daidousanso Co., Ltd. Method and apparatus for treatment of NF3 gas
US5069690A (en) * 1991-02-21 1991-12-03 Air Products And Chemicals, Inc. Process for kinetic gas-solid chromatographic separations
US5171553A (en) * 1991-11-08 1992-12-15 Air Products And Chemicals, Inc. Catalytic decomposition of N2 O
US5200162A (en) * 1992-04-01 1993-04-06 Uop Process for N2 O decomposition
US6030591A (en) * 1994-04-06 2000-02-29 Atmi Ecosys Corporation Process for removing and recovering halocarbons from effluent process streams
JP2787196B2 (ja) * 1995-03-24 1998-08-13 工業技術院長 セラミックスを分離材とした窒素と二酸化炭素の分離方法
US6458249B2 (en) * 1997-11-10 2002-10-01 E. I. Du Pont De Nemours And Company Process for purifying perfluorinated products
JP3727797B2 (ja) 1998-05-22 2005-12-14 セントラル硝子株式会社 三フッ化窒素の製造方法
US6106593A (en) * 1998-10-08 2000-08-22 Air Products And Chemicals, Inc. Purification of air
US6146606A (en) * 1999-02-09 2000-11-14 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing nitrogen fluoride
US6797178B2 (en) * 2000-03-24 2004-09-28 Ada Technologies, Inc. Method for removing mercury and mercuric compounds from dental effluents
US8124036B1 (en) 2005-10-27 2012-02-28 ADA-ES, Inc. Additives for mercury oxidation in coal-fired power plants
US6719828B1 (en) * 2001-04-30 2004-04-13 John S. Lovell High capacity regenerable sorbent for removal of mercury from flue gas
US6942840B1 (en) 2001-09-24 2005-09-13 Ada Technologies, Inc. Method for removal and stabilization of mercury in mercury-containing gas streams
AU2002365046A1 (en) * 2001-12-20 2003-07-09 Praxair Technology, Inc. Method and apparatus for gas purification
US6908601B2 (en) * 2002-02-08 2005-06-21 The Boc Group, Inc. Method for the production of nitrogen trifluoride
RU2206499C1 (ru) * 2002-02-26 2003-06-20 Игумнов Сергей Михайлович Способ очистки газообразного трифторида азота
US6719827B2 (en) 2002-03-01 2004-04-13 Air Products And Chemicals, Inc. Process for nitrous oxide removal
US6955707B2 (en) 2002-06-10 2005-10-18 The Boc Group, Inc. Method of recycling fluorine using an adsorption purification process
KR100481795B1 (ko) * 2002-07-31 2005-04-11 주식회사 소디프신소재 고 순도의 삼불화 질소 가스 제조 방법
US20040191155A1 (en) * 2003-03-25 2004-09-30 Mahler Barry Asher Thermal process for reducing the concentration of dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride
US7361209B1 (en) 2003-04-03 2008-04-22 Ada Environmental Solutions, Llc Apparatus and process for preparing sorbents for mercury control at the point of use
US6843830B2 (en) * 2003-04-15 2005-01-18 Advanced Technology Materials, Inc. Abatement system targeting a by-pass effluent stream of a semiconductor process tool
US6962617B2 (en) * 2003-07-03 2005-11-08 Lehigh University Method of removing mercury from exhaust gases
KR100841183B1 (ko) * 2003-09-23 2008-06-24 주식회사 효성 니켈 및 구리함침 제올라이트 흡착제를 이용한 삼불화질소(ｎｆ₃)의 정제방법
US7074378B2 (en) * 2004-01-23 2006-07-11 Air Products And Chemicals, Inc. Process for the purification of NF3
EP1765962B8 (de) * 2004-06-28 2014-02-12 Nox II International, Ltd. Verringerung der beim verbrennen von kohlenstoffhaltigen brennstoffen anfallenden schwefelgasemissionen
CN100503005C (zh) * 2004-07-08 2009-06-24 株式会社晓星 利用经碱土金属交换的沸石精制三氟化氮气体的方法
JP2008505831A (ja) * 2004-07-08 2008-02-28 ヒョスン・コーポレーション アルカリ土類金属でイオン交換および含浸されたゼオライトを用いた三フッ化窒素ガスの精製方法
CN103759249A (zh) 2005-03-17 2014-04-30 Noxii国际有限公司 降低煤燃烧中的汞排放量
RU2494793C2 (ru) 2005-03-17 2013-10-10 НОКС II ИНТЕНЭШНЛ, эЛТиДи. Способ сжигания ртутьсодержащего топлива (варианты), способ снижения количества выброса ртути, способ сжигания угля с уменьшенным уровнем выброса вредных элементов в окружающую среду, способ уменьшения содержания ртути в дымовых газах
US20070092418A1 (en) * 2005-10-17 2007-04-26 Chemical Products Corporation Sorbents for Removal of Mercury from Flue Gas
US8150776B2 (en) * 2006-01-18 2012-04-03 Nox Ii, Ltd. Methods of operating a coal burning facility
US20070184394A1 (en) * 2006-02-07 2007-08-09 Comrie Douglas C Production of cementitious ash products with reduced carbon emissions
EP2531276A4 (de) 2010-02-04 2014-07-02 Ada Es Inc Verfahren und system zur steuerung von quecksilber-emissionen in durch kohle angetriebenen wärmeverfahren
US8524179B2 (en) 2010-10-25 2013-09-03 ADA-ES, Inc. Hot-side method and system
US8951487B2 (en) 2010-10-25 2015-02-10 ADA-ES, Inc. Hot-side method and system
US8496894B2 (en) 2010-02-04 2013-07-30 ADA-ES, Inc. Method and system for controlling mercury emissions from coal-fired thermal processes
CA2792732C (en) 2010-03-10 2018-07-31 Martin A. Dillon Process for dilute phase injection of dry alkaline materials
US8784757B2 (en) 2010-03-10 2014-07-22 ADA-ES, Inc. Air treatment process for dilute phase injection of dry alkaline materials
US8404024B2 (en) * 2010-04-15 2013-03-26 Air Products And Chemicals, Inc. Recovery of NF3 from adsorption operation
US8845986B2 (en) 2011-05-13 2014-09-30 ADA-ES, Inc. Process to reduce emissions of nitrogen oxides and mercury from coal-fired boilers
US9017452B2 (en) 2011-11-14 2015-04-28 ADA-ES, Inc. System and method for dense phase sorbent injection
US8883099B2 (en) 2012-04-11 2014-11-11 ADA-ES, Inc. Control of wet scrubber oxidation inhibitor and byproduct recovery
US8974756B2 (en) 2012-07-25 2015-03-10 ADA-ES, Inc. Process to enhance mixing of dry sorbents and flue gas for air pollution control
US9957454B2 (en) 2012-08-10 2018-05-01 ADA-ES, Inc. Method and additive for controlling nitrogen oxide emissions
US10350545B2 (en) 2014-11-25 2019-07-16 ADA-ES, Inc. Low pressure drop static mixing system
JP7353012B2 (ja) 2019-08-22 2023-09-29 フジアン ヨンジン テクノロジー カンパニー リミテッド 直接フッ素化によるフルオロベンゼンの製造プロセス
CN111039266A (zh) * 2019-12-29 2020-04-21 中船重工（邯郸）派瑞特种气体有限公司 一种除去三氟化氮中氧化亚氮的装置及方法
CN113713567B (zh) * 2021-08-12 2022-09-30 中船(邯郸)派瑞特种气体股份有限公司 一种制备高纯三氟化氮用裂解塔

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356454A (en) * 1961-10-02 1967-12-05 Air Prod & Chem Methods and apparatus for handling nitrogen trifluoride and its conversion to tetrafluorohydrazine
US3235474A (en) * 1961-10-02 1966-02-15 Air Prod & Chem Electrolytic method of producing nitrogen trifluoride
FR1596425A (de) * 1968-12-27 1970-06-15
GB1395211A (en) * 1972-04-28 1975-05-21 Teller Environmental Systems Process for recovery of acid gases
US4193976A (en) * 1978-04-06 1980-03-18 Air Products & Chemicals, Inc. Removal of dinitrogen difluoride from nitrogen trifluoride
US4156598A (en) * 1978-06-08 1979-05-29 Air Products And Chemicals, Inc. Purification of nitrogen trifluoride atmospheres
JPS6048217B2 (ja) * 1981-02-06 1985-10-25 潤一 西澤 気体の純化装置
JPS61247609A (ja) * 1985-04-26 1986-11-04 Showa Denko Kk 三弗化窒素の精製方法
JPS61287424A (ja) * 1985-06-11 1986-12-17 Showa Denko Kk 窒素弗化物の処理方法
JPS63151608A (ja) * 1986-12-16 1988-06-24 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法

Also Published As

Publication number Publication date
CA2001304C (en) 1990-04-25
EP0366078A3 (de) 1991-04-10
EP0366078B1 (de) 1996-06-26
CA2001304A1 (en) 1990-04-25
DE68926732T2 (de) 1996-12-05
US4933158A (en) 1990-06-12
EP0366078A2 (de) 1990-05-02
KR900006231A (ko) 1990-05-07
KR920000797B1 (ko) 1992-01-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MITSUI CHEMICALS, INC., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee
8370 Indication of lapse of patent is to be deleted