DE68915590T2 - Verfahren zur Herstellung von magnetischem Aufzeichnungsmaterial. - Google Patents
Verfahren zur Herstellung von magnetischem Aufzeichnungsmaterial.Info
- Publication number
- DE68915590T2 DE68915590T2 DE68915590T DE68915590T DE68915590T2 DE 68915590 T2 DE68915590 T2 DE 68915590T2 DE 68915590 T DE68915590 T DE 68915590T DE 68915590 T DE68915590 T DE 68915590T DE 68915590 T2 DE68915590 T2 DE 68915590T2
- Authority
- DE
- Germany
- Prior art keywords
- film
- alloy
- magnetic recording
- coercive force
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 title description 9
- 229910000531 Co alloy Inorganic materials 0.000 claims description 60
- 239000000758 substrate Substances 0.000 claims description 29
- 230000015572 biosynthetic process Effects 0.000 claims description 19
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 229910052804 chromium Inorganic materials 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910000701 elgiloys (Co-Cr-Ni Alloy) Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/656—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/736—Non-magnetic layer under a soft magnetic layer, e.g. between a substrate and a soft magnetic underlayer [SUL] or a keeper layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7373—Non-magnetic single underlayer comprising chromium
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/90—Magnetic feature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63059537A JPH02161617A (ja) | 1988-03-15 | 1988-03-15 | 面内記録型磁気記録体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE68915590D1 DE68915590D1 (de) | 1994-07-07 |
| DE68915590T2 true DE68915590T2 (de) | 1994-12-15 |
Family
ID=13116114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE68915590T Expired - Lifetime DE68915590T2 (de) | 1988-03-15 | 1989-03-13 | Verfahren zur Herstellung von magnetischem Aufzeichnungsmaterial. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5147734A (enrdf_load_stackoverflow) |
| EP (1) | EP0333101B1 (enrdf_load_stackoverflow) |
| JP (1) | JPH02161617A (enrdf_load_stackoverflow) |
| KR (1) | KR910007776B1 (enrdf_load_stackoverflow) |
| DE (1) | DE68915590T2 (enrdf_load_stackoverflow) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02154323A (ja) * | 1988-12-06 | 1990-06-13 | Mitsubishi Kasei Corp | 磁気記録媒体の製造方法 |
| JP2763165B2 (ja) * | 1989-07-10 | 1998-06-11 | 株式会社東芝 | 磁気記録媒体の製造方法 |
| US5162158A (en) * | 1989-07-24 | 1992-11-10 | Magnetic Peripherals Inc. | Low noise magnetic thin film longitudinal media |
| JP2581232B2 (ja) * | 1989-10-13 | 1997-02-12 | 富士電機株式会社 | 磁気記録媒体の製造方法 |
| JP2760906B2 (ja) * | 1991-03-08 | 1998-06-04 | 日立金属株式会社 | 磁気記録媒体およびその製造方法 |
| JPH0528485A (ja) * | 1991-07-24 | 1993-02-05 | Kubota Corp | 磁気記録媒体の製造法 |
| US5264981A (en) * | 1991-08-14 | 1993-11-23 | International Business Machines Corporation | Multilayered ferromagnetic film and magnetic head employing the same |
| DE69233233T2 (de) * | 1991-12-27 | 2004-08-26 | Honeywell International Inc. | Anordnung mehrschichtiger Filmmaterialien |
| US5789088A (en) * | 1994-04-28 | 1998-08-04 | Kabushiki Kaisha Kobe Seiko Sho | Magnetic recording medium having a metal underlayer and a CoCr alloy magnetic thin film |
| US5693197A (en) * | 1994-10-06 | 1997-12-02 | Hmt Technology Corporation | DC magnetron sputtering method and apparatus |
| JPH10228621A (ja) * | 1997-02-17 | 1998-08-25 | Fujitsu Ltd | 磁気記録媒体及び磁気ディスク装置 |
| US5989674A (en) * | 1998-05-15 | 1999-11-23 | International Business Machines Corporation | Thin film disk with acicular magnetic grains |
| US6268036B1 (en) | 1998-06-26 | 2001-07-31 | International Business Machines Corporation | Thin film disk with highly faulted crystalline underlayer |
| US6210819B1 (en) | 1998-07-24 | 2001-04-03 | Hmt Technology Corporation | Magnetic recording media having a CrTi underlayer deposited under a substrate bias |
| CN101408596B (zh) * | 2008-11-28 | 2010-05-12 | 清华大学 | 弱磁材料相对磁导率和电工纯铁矫顽力的测量方法及装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS578919A (en) * | 1980-06-18 | 1982-01-18 | Toshiba Corp | Manufacture of magnetic recording body |
| JPS5724031A (en) * | 1980-07-18 | 1982-02-08 | Matsushita Electric Ind Co Ltd | Production of vertical magnetic recording medium |
| JPS57100628A (en) * | 1980-12-12 | 1982-06-22 | Matsushita Electric Ind Co Ltd | Manufacture of vertical magnetic recording medium |
| EP0109481B1 (en) * | 1982-11-22 | 1988-01-13 | International Business Machines Corporation | Magnetic recording disk |
| JPH0618135B2 (ja) * | 1983-06-10 | 1994-03-09 | 株式会社日立製作所 | 垂直磁気記録媒体 |
| US4610911A (en) * | 1983-11-03 | 1986-09-09 | Hewlett-Packard Company | Thin film magnetic recording media |
| JPS61120330A (ja) * | 1984-11-14 | 1986-06-07 | Ulvac Corp | 面内記録型磁気記録体 |
| US4632883A (en) * | 1985-04-22 | 1986-12-30 | International Business Machines Corporation | Vertical recording medium with improved perpendicular magnetic anisotropy due to influence of beta-tantalum underlayer |
| US4652499A (en) * | 1986-04-29 | 1987-03-24 | International Business Machines | Magnetic recording medium with a chromium alloy underlayer and a cobalt-based magnetic layer |
| JPS6326827A (ja) * | 1986-07-21 | 1988-02-04 | Hitachi Ltd | 磁気記録媒体の製造方法 |
| US4800457A (en) * | 1987-09-29 | 1989-01-24 | Carnegie-Mellon University | Magnetoresistive sensor element |
-
1988
- 1988-03-15 JP JP63059537A patent/JPH02161617A/ja active Granted
-
1989
- 1989-03-13 DE DE68915590T patent/DE68915590T2/de not_active Expired - Lifetime
- 1989-03-13 EP EP89104421A patent/EP0333101B1/en not_active Expired - Lifetime
- 1989-03-14 KR KR1019890003145A patent/KR910007776B1/ko not_active Expired
- 1989-03-14 US US07/323,452 patent/US5147734A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US5147734A (en) | 1992-09-15 |
| EP0333101B1 (en) | 1994-06-01 |
| KR890015207A (ko) | 1989-10-28 |
| DE68915590D1 (de) | 1994-07-07 |
| EP0333101A3 (en) | 1990-11-14 |
| JPH0450653B2 (enrdf_load_stackoverflow) | 1992-08-14 |
| KR910007776B1 (ko) | 1991-10-02 |
| JPH02161617A (ja) | 1990-06-21 |
| EP0333101A2 (en) | 1989-09-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |