DE68915564D1 - Belichtungskontrollsystem für Vollfeld-Photolithographie mit gepulsten Quellen. - Google Patents
Belichtungskontrollsystem für Vollfeld-Photolithographie mit gepulsten Quellen.Info
- Publication number
- DE68915564D1 DE68915564D1 DE68915564T DE68915564T DE68915564D1 DE 68915564 D1 DE68915564 D1 DE 68915564D1 DE 68915564 T DE68915564 T DE 68915564T DE 68915564 T DE68915564 T DE 68915564T DE 68915564 D1 DE68915564 D1 DE 68915564D1
- Authority
- DE
- Germany
- Prior art keywords
- full
- control system
- exposure control
- pulsed sources
- field photolithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
- 238000000206 photolithography Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70041—Production of exposure light, i.e. light sources by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/157,755 US4804978A (en) | 1988-02-19 | 1988-02-19 | Exposure control system for full field photolithography using pulsed sources |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68915564D1 true DE68915564D1 (de) | 1994-07-07 |
DE68915564T2 DE68915564T2 (de) | 1994-09-15 |
Family
ID=22565127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68915564T Expired - Lifetime DE68915564T2 (de) | 1988-02-19 | 1989-02-16 | Belichtungskontrollsystem für Vollfeld-Photolithographie mit gepulsten Quellen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4804978A (de) |
EP (1) | EP0329140B1 (de) |
JP (1) | JPH025063A (de) |
CA (1) | CA1300717C (de) |
DE (1) | DE68915564T2 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5157700A (en) * | 1988-09-02 | 1992-10-20 | Canon Kabushiki Kaisha | Exposure apparatus for controlling intensity of exposure radiation |
JP2958913B2 (ja) * | 1990-05-21 | 1999-10-06 | キヤノン株式会社 | X線露光装置 |
JPH0620924A (ja) * | 1992-07-03 | 1994-01-28 | Nikon Corp | レーザ光源を用いた処理装置 |
JP2862477B2 (ja) * | 1993-06-29 | 1999-03-03 | キヤノン株式会社 | 露光装置及び該露光装置を用いてデバイスを製造する方法 |
JPH08179514A (ja) * | 1994-12-22 | 1996-07-12 | Canon Inc | 露光装置および露光方法 |
JP3630807B2 (ja) * | 1994-12-28 | 2005-03-23 | キヤノン株式会社 | 走査露光装置及び当該走査露光装置を用いたデバイスの製造方法 |
EP0748009B1 (de) * | 1995-06-05 | 2002-12-04 | Canon Kabushiki Kaisha | Verfahren zur Kontrolle von Excimerlaserausgangsstrahlung |
JP3127782B2 (ja) * | 1995-06-22 | 2001-01-29 | 双葉電子工業株式会社 | 光学式プリンタ |
JP3391940B2 (ja) * | 1995-06-26 | 2003-03-31 | キヤノン株式会社 | 照明装置及び露光装置 |
JP3591922B2 (ja) * | 1995-07-17 | 2004-11-24 | キヤノン株式会社 | 光量測定装置 |
JPH09129550A (ja) | 1995-08-30 | 1997-05-16 | Canon Inc | 露光装置及びそれを用いたデバイスの製造方法 |
KR100210569B1 (ko) * | 1995-09-29 | 1999-07-15 | 미따라이 하지메 | 노광방법 및 노광장치, 그리고 이를 이용한 디바이스제조방법 |
JP3459742B2 (ja) * | 1996-01-17 | 2003-10-27 | キヤノン株式会社 | 露光装置及びそれを用いたデバイスの製造方法 |
US6555449B1 (en) * | 1996-05-28 | 2003-04-29 | Trustees Of Columbia University In The City Of New York | Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidfication |
JP4392879B2 (ja) | 1998-09-28 | 2010-01-06 | キヤノン株式会社 | 投影露光装置及びデバイスの製造方法 |
JP4065518B2 (ja) * | 2002-11-29 | 2008-03-26 | キヤノン株式会社 | 露光装置 |
WO2005029551A2 (en) * | 2003-09-16 | 2005-03-31 | The Trustees Of Columbia University In The City Of New York | Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions |
CA2560084C (en) * | 2004-03-16 | 2012-07-03 | Sign-Tronic Ag | Method for establishing a light beam with substantially constant luminous intensity |
DE102006038455A1 (de) * | 2006-08-16 | 2008-02-21 | Carl Zeiss Smt Ag | Optisches System für die Halbleiterlithographie |
DE102006060368B3 (de) * | 2006-12-16 | 2008-07-31 | Xtreme Technologies Gmbh | Verfahren und Anordnung zur Stabilisierung der mittleren abgegebenen Strahlungsleistung einer gepulst betriebenen Strahlungsquelle |
WO2011102486A1 (ja) | 2010-02-22 | 2011-08-25 | ギガフォトン株式会社 | 露光装置用レーザ装置 |
CN102914945B (zh) * | 2011-08-04 | 2015-05-13 | 上海微电子装备有限公司 | 一种分布式曝光剂量控制系统及方法 |
US8563956B1 (en) * | 2012-07-28 | 2013-10-22 | Cymer, Llc | Intracavity loss element for power amplifier |
EP3011645B1 (de) * | 2013-06-18 | 2019-03-13 | ASML Netherlands B.V. | Lithografisches verfahren und system |
TWI714226B (zh) * | 2013-06-18 | 2020-12-21 | 荷蘭商Asml荷蘭公司 | 控制自由電子雷射之方法、用於自由電子雷射之注入器及相關之自由電子雷射、微影系統及非暫態電腦可讀取媒體 |
NL2015735A (en) * | 2014-12-19 | 2016-09-20 | Asml Netherlands Bv | An Undulator. |
CN108614396B (zh) * | 2018-05-09 | 2021-03-02 | Tcl华星光电技术有限公司 | 曝光机狭缝切换装置及切换方法 |
CN110895386B (zh) * | 2018-09-13 | 2021-02-26 | 上海微电子装备(集团)股份有限公司 | 一种光透过率调节装置及照明系统 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4264986A (en) * | 1979-03-12 | 1981-04-28 | Willis Craig I | Information-recording process & apparatus |
US4516842A (en) * | 1983-05-02 | 1985-05-14 | Trombert John F | Aperture wheel |
GB2155647B (en) * | 1984-02-01 | 1988-12-21 | Canon Kk | Exposure method and apparatus |
GB2155650B (en) * | 1984-02-14 | 1988-11-16 | Canon Kk | Method and apparatus for exposure |
GB8425425D0 (en) * | 1984-10-09 | 1984-11-14 | Crosfield Electronics Ltd | Radiation generation apparatus |
US4613877A (en) * | 1984-11-26 | 1986-09-23 | Data Recording Systems, Inc. | High resolution laser printer |
JPH0614508B2 (ja) * | 1985-03-06 | 1994-02-23 | キヤノン株式会社 | ステップアンドリピート露光方法 |
US4719474A (en) * | 1985-07-19 | 1988-01-12 | Rudolf Hell Gmbh | Apparatus for imaging text and graphics on photosensitive material |
JP2524108B2 (ja) * | 1986-02-24 | 1996-08-14 | 富士写真フイルム株式会社 | 光走査記録装置 |
-
1988
- 1988-02-19 US US07/157,755 patent/US4804978A/en not_active Expired - Fee Related
-
1989
- 1989-02-07 CA CA000590310A patent/CA1300717C/en not_active Expired - Lifetime
- 1989-02-16 DE DE68915564T patent/DE68915564T2/de not_active Expired - Lifetime
- 1989-02-16 EP EP89102687A patent/EP0329140B1/de not_active Revoked
- 1989-02-20 JP JP1038513A patent/JPH025063A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0329140A2 (de) | 1989-08-23 |
JPH025063A (ja) | 1990-01-09 |
CA1300717C (en) | 1992-05-12 |
US4804978A (en) | 1989-02-14 |
DE68915564T2 (de) | 1994-09-15 |
EP0329140A3 (en) | 1989-10-11 |
EP0329140B1 (de) | 1994-06-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8331 | Complete revocation |