DE60311368D1 - Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium - Google Patents

Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium

Info

Publication number
DE60311368D1
DE60311368D1 DE60311368T DE60311368T DE60311368D1 DE 60311368 D1 DE60311368 D1 DE 60311368D1 DE 60311368 T DE60311368 T DE 60311368T DE 60311368 T DE60311368 T DE 60311368T DE 60311368 D1 DE60311368 D1 DE 60311368D1
Authority
DE
Germany
Prior art keywords
silicon
improving
treatment
efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60311368T
Other languages
English (en)
Other versions
DE60311368T2 (de
Inventor
Arvid Neil Arvidson
Todd Stanley Graham
Kathryn Elizabeth Messner
Chris Tim Schmidt
Terence Lee Horstman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hemlock Semiconductor Operations LLC
Original Assignee
Hemlock Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hemlock Semiconductor Corp filed Critical Hemlock Semiconductor Corp
Application granted granted Critical
Publication of DE60311368D1 publication Critical patent/DE60311368D1/de
Publication of DE60311368T2 publication Critical patent/DE60311368T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0272—Investigating particle size or size distribution with screening; with classification by filtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/02—Apparatus for grading using pockets for taking out particles from aggregates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/04—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices according to size
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N2015/0288—Sorting the particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Silicon Compounds (AREA)
  • Combined Means For Separation Of Solids (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
DE60311368T 2002-08-22 2003-08-19 Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium Expired - Lifetime DE60311368T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US227362 2002-08-22
US10/227,362 US6874713B2 (en) 2002-08-22 2002-08-22 Method and apparatus for improving silicon processing efficiency

Publications (2)

Publication Number Publication Date
DE60311368D1 true DE60311368D1 (de) 2007-03-15
DE60311368T2 DE60311368T2 (de) 2007-10-18

Family

ID=31188035

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60311368T Expired - Lifetime DE60311368T2 (de) 2002-08-22 2003-08-19 Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium
DE60329789T Expired - Lifetime DE60329789D1 (de) 2002-08-22 2003-08-19 Vorrichtung zur Verbesserung der Effizienz der Behandlung von Silicium

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60329789T Expired - Lifetime DE60329789D1 (de) 2002-08-22 2003-08-19 Vorrichtung zur Verbesserung der Effizienz der Behandlung von Silicium

Country Status (5)

Country Link
US (2) US6874713B2 (de)
EP (2) EP1683584B1 (de)
JP (2) JP4585751B2 (de)
KR (1) KR100991110B1 (de)
DE (2) DE60311368T2 (de)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7270706B2 (en) * 2004-10-04 2007-09-18 Dow Corning Corporation Roll crusher to produce high purity polycrystalline silicon chips
DE102005019873B4 (de) * 2005-04-28 2017-05-18 Wacker Chemie Ag Vorrichtung und Verfahren zum maschinellen Zerkleinern von Halbleitermaterialien
US8381916B2 (en) * 2005-05-26 2013-02-26 Paul W. Bossen Rotary aggregate washing and classification system
US20070040055A1 (en) * 2005-08-17 2007-02-22 Riendeau Robert D Method and apparatus for pulverizing solid materials
DE102006016324A1 (de) * 2006-04-06 2007-10-25 Wacker Chemie Ag Vorrichtung und Verfahren zum flexiblen Klassieren von polykristallinen Silicium-Bruchstücken
DE102006035081A1 (de) * 2006-07-28 2008-01-31 Wacker Chemie Ag Verfahren und Vorrichtung zur Herstellung von klassiertem polykristallinen Siliciumbruch in hoher Reinheit
GB2451810B (en) * 2007-08-07 2012-08-01 John Charles Shakespeare Rotary multi drum soil screener
US20100124463A1 (en) * 2008-11-17 2010-05-20 Rogers Robert V Method for forming a solid soil base with a material comprising soil and spent lime
CN102471868B (zh) * 2009-07-02 2014-08-27 松下电器产业株式会社 薄膜制造方法及能够用于其方法的硅材料
MY155554A (en) * 2009-07-28 2015-10-30 Mitsubishi Materials Corp Method of generating cracks in polycrystalline silicon rod and crack generating apparatus
CN101658814B (zh) * 2009-09-10 2011-04-20 倪文龙 回粉中进式闭路粉磨系统
DE102009044991A1 (de) * 2009-09-24 2011-03-31 Wacker Chemie Ag Stabförmiges Polysilicium mit verbesserter Brucheigenschaft
CA2781897C (en) 2009-11-27 2018-02-20 Arrowcorp Inc. Cylinder exchange device and method for solid material processor
DE102010039752A1 (de) * 2010-08-25 2012-03-01 Wacker Chemie Ag Polykristallines Silicium und Verfahren zu dessen Herstellung
CN102059170B (zh) * 2010-11-26 2011-10-19 镇江荣德新能源科技有限公司 一种破碎多晶硅棒的装置及方法
DE102011003875A1 (de) * 2011-02-09 2012-08-09 Wacker Chemie Ag Verfahren und Vorrichtung zum Dosieren und Verpacken von Polysiliciumbruchstücken sowie Dosier- und Verpackungseinheit
US8906453B2 (en) 2011-03-18 2014-12-09 MEMC Electronics Materials, S.p.A. Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor
GB2490543B (en) 2011-05-06 2013-06-12 Moss Hydro As Filter arrangement
CN102489372B (zh) * 2011-12-12 2013-09-04 湖南顶立科技有限公司 多晶硅棒破碎方法及设备
DE102012200994A1 (de) * 2012-01-24 2013-07-25 Wacker Chemie Ag Verfahren zur Bestimmung einer Oberflächen-Verunreinigung von polykristallinem Silicium
MY171572A (en) 2012-01-30 2019-10-21 Hemlock Semiconductor Operations Llc Method of repairing and/or protecting a surface in a reactor
JP5644794B2 (ja) * 2012-03-08 2014-12-24 信越半導体株式会社 リチャージ管及びリチャージ方法
DE102012208473A1 (de) * 2012-05-21 2013-11-21 Wacker Chemie Ag Polykristallines Silicium
JP5895713B2 (ja) * 2012-06-01 2016-03-30 株式会社サタケ 異物選別機
DE102013203336A1 (de) * 2013-02-28 2014-08-28 Wacker Chemie Ag Verpacken von Polysiliciumbruchstücken
DE102013218003A1 (de) * 2013-09-09 2015-03-12 Wacker Chemie Ag Klassieren von Polysilicium
SG11201606733TA (en) 2014-02-14 2016-09-29 Tokuyama Corp Device for producing cleaned crushed product of polycrystalline silicon blocks, and method for producing cleaned crushed product of polycrystalline silicon blocks using same
MY182043A (en) 2014-10-14 2021-01-18 Tokuyama Corp Polycrystalline silicon fragment, method for manufacturing polycrystalline silicon fragment, and polycrystalline silicon block fracture device
CA2921597C (en) * 2015-02-24 2023-03-21 Vermeer Manufacturing Company Trommel screen with different sized apertures
EP3337918B1 (de) 2015-08-20 2024-12-25 GlobalWafers Co., Ltd. Systeme zum wahlweisen zuführen von polysilicium-brocken oder polysilicium-granulat in einer kristallzüchtungskammer
US10005614B2 (en) 2016-02-25 2018-06-26 Hemlock Semiconductor Operations Llc Surface conditioning of conveyor materials or contact surfaces
CN106473166B (zh) * 2016-09-29 2018-10-19 清华大学 一种切割碾搓组合的油茶果鲜果脱壳清选机及方法
CN106475301B (zh) * 2016-09-29 2019-01-29 清华大学 一种油茶果鲜果分级脱壳清选机及方法
CN106622934A (zh) * 2016-11-24 2017-05-10 张云轩 一种干燥滚动筛分机筛网布置方法及其干燥滚动筛分方法
CA172569S (en) 2017-01-16 2018-02-08 Arrowcorp Inc Grading cylinder
JP7107922B2 (ja) * 2017-04-24 2022-07-27 株式会社トクヤマ 多結晶シリコン破砕物の製造方法、及び、多結晶シリコン破砕物の表面金属濃度を管理する方法
CN108405035B (zh) * 2018-02-26 2020-07-28 亚洲硅业(青海)股份有限公司 一种多晶硅棒破碎装置及方法
NZ765167A (en) * 2018-03-09 2022-01-28 Green Eco Int Pty Ltd System and method for food waste decomposition
CN108906570A (zh) * 2018-07-06 2018-11-30 安徽香妃茶业有限公司 一种茶叶风选机
CN109046988B (zh) * 2018-08-01 2021-06-15 广西金智慧科技服务有限公司 一种蚕茧分拣装置
CN109772677B (zh) * 2019-01-23 2021-05-25 广东萨米特陶瓷有限公司 一种多孔径滚笼筛及其制备含颗粒元素陶瓷制品的方法
CN110238027B (zh) * 2019-07-29 2021-07-20 内江师范学院 一种建筑废弃物制路面砖用筛分装置及使用方法
EP4021849B1 (de) * 2019-08-29 2024-01-03 Wacker Chemie AG Verfahren zur herstellung von siliciumbruchstücken
CN112325589B (zh) * 2020-11-17 2022-09-13 江苏绿都环境工程有限公司 一种自动筛选均衡烘干的滚筒烘干机
CN112967962B (zh) * 2021-01-29 2022-07-26 上海中欣晶圆半导体科技有限公司 一种避免硅片在酸腐蚀后转移时造成擦伤的治具及其安装方法
CN118162277B (zh) * 2024-05-14 2024-07-12 山西中铝华润有限公司 一种电解铝废料回收用粉碎筛选设备
CN120227814B (zh) * 2025-04-22 2026-02-10 江苏智微新材料科技有限公司 一种半导体专用氧化铜粉生产装置及生产方法

Family Cites Families (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US345725A (en) * 1886-07-20 Cockle-machine
US882955A (en) * 1907-07-22 1908-03-24 John A Neufeld Grain-separator.
US1250554A (en) * 1916-03-21 1917-12-18 Daniel R Bryan Apparatus for separating and recovering domestic refuse.
US3289833A (en) * 1964-05-21 1966-12-06 Daffin Corp Rotary material separator having adjustable baffle means
US3612273A (en) * 1969-04-21 1971-10-12 Wallace R Pritchett Separator
BE789090A (fr) 1971-09-22 1973-01-15 Western Electric Co Procede et solution d'attaque de semi-conducteurs
JPS5232828B2 (de) * 1972-06-29 1977-08-24
US4092446A (en) 1974-07-31 1978-05-30 Texas Instruments Incorporated Process of refining impure silicon to produce purified electronic grade silicon
US4213937A (en) 1976-09-22 1980-07-22 Texas Instruments Incorporated Silicon refinery
US4341311A (en) * 1980-08-25 1982-07-27 Deere & Company Method and apparatus for sorting rivets
DE3320682A1 (de) * 1983-06-08 1984-12-13 Linnhoff & Thesenfitz Maschinenbau GmbH, 2090 Winsen Vorrichtung zum aufbereiten von strassendeckenbelaegen
JPS6033210A (ja) * 1983-08-02 1985-02-20 Komatsu Denshi Kinzoku Kk 半導体用シリコンの破砕方法
BR8707875A (pt) * 1986-11-14 1989-10-03 Ankal Pty Ltd Aparelho para classificar material fibroso
JPS63287565A (ja) 1987-05-19 1988-11-24 小松電子金属株式会社 半導体用シリコンの破砕方法
JPS6414109A (en) 1987-07-06 1989-01-18 Mitsui Toatsu Chemicals Method for crushing high purity silicon
DE3728693A1 (de) 1987-08-27 1989-03-09 Wacker Chemitronic Verfahren und vorrichtung zum aetzen von halbleiteroberflaechen
JPH0791048B2 (ja) * 1988-02-18 1995-10-04 アドバンスド、シリコン、マテリアルズ、インコーポレイテッド シリコン棒材から予め大きさを定めた粒子を形成する方法
DE3811091A1 (de) 1988-03-31 1989-10-12 Heliotronic Gmbh Verfahren zum kontaminationsarmen zerkleinern von massivem stueckigem silicium
DD283032A7 (de) 1988-05-19 1990-10-03 Bauakademie Ddr Anordnung zur nichtmechanischen zerstoerung von beton/stahlbeton und gesteinen
JP2565759B2 (ja) 1988-12-02 1996-12-18 高純度シリコン株式会社 多結晶シリコンの破砕装置
US5021150A (en) * 1989-01-18 1991-06-04 Buerklin Werner Sieve drum for sieving out waste or the like
US4978443A (en) * 1989-05-18 1990-12-18 Carter-Day Company Separator disc
US5165548A (en) 1990-04-23 1992-11-24 Hemlock Semiconductor Corporation Rotary silicon screen
US5123636A (en) 1991-01-25 1992-06-23 Dow Corning Corporation Low-contaminate work surface for processing semiconductor grade silicon
JPH04341382A (ja) * 1991-05-17 1992-11-27 Kubota Corp 穀物処理設備における精選処理部
US5163565A (en) * 1991-09-24 1992-11-17 The United States Of America As Represented By The Secretary Of Agriculture System for separating particles in a rotary separator
EP0539097B1 (de) 1991-10-23 1994-11-30 Hemlock Semiconductor Corporation Schlagwerkzeug mit geringer Verunreinigung zum Brechen von Silizium
DE4218283A1 (de) * 1992-05-27 1993-12-02 Wacker Chemitronic Verfahren zum kontaminationsfreien Zerkleinern von Halbleitermaterial, insbesondere Silicium
DE4223458A1 (de) 1992-07-16 1994-01-20 Wacker Chemitronic Verfahren zur Zerkleinerung von Halbleitermaterial, insbesondere Silicium
JPH06271309A (ja) 1993-03-22 1994-09-27 Sumitomo Sitix Corp 多結晶シリコンの破砕方法
DE4316626A1 (de) 1993-05-18 1994-11-24 Wacker Chemitronic Verfahren und Vorrichtung zur Zerkleinerung von Halbleitermaterial
JP3285054B2 (ja) 1993-08-26 2002-05-27 三菱マテリアルポリシリコン株式会社 多結晶シリコンの破砕方法
US5753567A (en) 1995-08-28 1998-05-19 Memc Electronic Materials, Inc. Cleaning of metallic contaminants from the surface of polycrystalline silicon with a halogen gas or plasma
JPH09239319A (ja) * 1996-03-11 1997-09-16 Toyota Motor Corp 選別装置
US5851303A (en) 1996-05-02 1998-12-22 Hemlock Semiconductor Corporation Method for removing metal surface contaminants from silicon
DE19618974A1 (de) 1996-05-10 1997-11-13 Wacker Chemie Gmbh Verfahren zur Behandlung von Halbleitermaterial
US5976481A (en) 1996-05-21 1999-11-02 Tokuyama Corporation Polycrystal silicon rod and production process therefor
JPH1015422A (ja) 1996-07-03 1998-01-20 Sumitomo Sitix Corp 多結晶シリコンの破砕方法
US5791493A (en) 1996-07-26 1998-08-11 Memc Electronic Materials, Inc. Polysilicon particle classifying apparatus
DE19716374A1 (de) 1997-04-18 1998-10-22 Wacker Chemie Gmbh Brechen von Reinstsilicium auf Eis
DE19727441A1 (de) 1997-06-27 1999-01-07 Wacker Chemie Gmbh Vorrichtung und Verfahren zum Zerkleinern von Halbleitermaterial
DE19741465A1 (de) 1997-09-19 1999-03-25 Wacker Chemie Gmbh Polykristallines Silicium
DE19749127A1 (de) 1997-11-06 1999-05-20 Wacker Chemie Gmbh Verfahren zur Vorbereitung der Zerkleinerung eines Kristalls
JP3603142B2 (ja) 1997-12-17 2004-12-22 株式会社トクヤマ 選別装置
JPH11290712A (ja) 1998-04-08 1999-10-26 Kawasaki Steel Corp シリコン塊の破砕方法及び装置
DE19840200A1 (de) * 1998-09-03 2000-03-09 Wacker Chemie Gmbh Klassiervorrichtung
DE19847098A1 (de) 1998-10-13 2000-04-20 Wacker Chemie Gmbh Verfahren und Vorrichtung zur Bearbeitung von Halbleitermaterial
US6589332B1 (en) * 1998-11-03 2003-07-08 Memc Electronic Materials, Inc. Method and system for measuring polycrystalline chunk size and distribution in the charge of a Czochralski process
US6284040B1 (en) 1999-01-13 2001-09-04 Memc Electronic Materials, Inc. Process of stacking and melting polycrystalline silicon for high quality single crystal production
DE19914998A1 (de) 1999-04-01 2000-10-12 Wacker Chemie Gmbh Schwingförderer und Verfahren zur Förderung von Siliciumbruch
DE1257684T1 (de) 2000-02-18 2003-06-26 Gt Equipment Technologies Inc., Nashua Cvd-verfahren und -vorrichtung zum abscheiden von polysilizium
JP4698892B2 (ja) 2001-07-06 2011-06-08 株式会社Ｓｕｍｃｏ Ｃｚ原料供給方法及び供給用治具

Also Published As

Publication number Publication date
EP1683584B1 (de) 2009-10-21
US7080742B2 (en) 2006-07-25
JP5346323B2 (ja) 2013-11-20
DE60329789D1 (de) 2009-12-03
JP2004091321A (ja) 2004-03-25
US20040035960A1 (en) 2004-02-26
JP4585751B2 (ja) 2010-11-24
KR20040018176A (ko) 2004-03-02
EP1683584A2 (de) 2006-07-26
US20040251333A1 (en) 2004-12-16
DE60311368T2 (de) 2007-10-18
EP1683584A3 (de) 2008-11-12
US6874713B2 (en) 2005-04-05
EP1391252B1 (de) 2007-01-24
KR100991110B1 (ko) 2010-11-02
EP1391252A1 (de) 2004-02-25
JP2010189274A (ja) 2010-09-02

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