DE60311368D1 - Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium - Google Patents

Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium

Info

Publication number
DE60311368D1
DE60311368D1 DE60311368T DE60311368T DE60311368D1 DE 60311368 D1 DE60311368 D1 DE 60311368D1 DE 60311368 T DE60311368 T DE 60311368T DE 60311368 T DE60311368 T DE 60311368T DE 60311368 D1 DE60311368 D1 DE 60311368D1
Authority
DE
Germany
Prior art keywords
silicon
improving
treatment
efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60311368T
Other languages
English (en)
Other versions
DE60311368T2 (de
Inventor
Arvid Neil Arvidson
Todd Stanley Graham
Kathryn Elizabeth Messner
Chris Tim Schmidt
Terence Lee Horstman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hemlock Semiconductor Operations LLC
Original Assignee
Hemlock Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hemlock Semiconductor Corp filed Critical Hemlock Semiconductor Corp
Publication of DE60311368D1 publication Critical patent/DE60311368D1/de
Application granted granted Critical
Publication of DE60311368T2 publication Critical patent/DE60311368T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0272—Investigating particle size or size distribution with screening; with classification by filtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/02—Apparatus for grading using pockets for taking out particles from aggregates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/04—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices according to size
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N2015/0288—Sorting the particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Silicon Compounds (AREA)
  • Combined Means For Separation Of Solids (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
DE60311368T 2002-08-22 2003-08-19 Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium Expired - Lifetime DE60311368T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US227362 1994-04-13
US10/227,362 US6874713B2 (en) 2002-08-22 2002-08-22 Method and apparatus for improving silicon processing efficiency

Publications (2)

Publication Number Publication Date
DE60311368D1 true DE60311368D1 (de) 2007-03-15
DE60311368T2 DE60311368T2 (de) 2007-10-18

Family

ID=31188035

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60311368T Expired - Lifetime DE60311368T2 (de) 2002-08-22 2003-08-19 Verfahren zur Verbesserung der Effizienz der Behandlung von Silicium
DE60329789T Expired - Lifetime DE60329789D1 (de) 2002-08-22 2003-08-19 Vorrichtung zur Verbesserung der Effizienz der Behandlung von Silicium

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60329789T Expired - Lifetime DE60329789D1 (de) 2002-08-22 2003-08-19 Vorrichtung zur Verbesserung der Effizienz der Behandlung von Silicium

Country Status (5)

Country Link
US (2) US6874713B2 (de)
EP (2) EP1391252B1 (de)
JP (2) JP4585751B2 (de)
KR (1) KR100991110B1 (de)
DE (2) DE60311368T2 (de)

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JP6867388B2 (ja) 2015-08-20 2021-04-28 グローバルウェーハズ カンパニー リミテッドＧｌｏｂａｌＷａｆｅｒｓ Ｃｏ．，Ｌｔｄ． チャンクポリシリコンまたは粒状ポリシリコンを結晶成長チャンバの中に選択的に供給するためのシステム
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CN106475301B (zh) * 2016-09-29 2019-01-29 清华大学 一种油茶果鲜果分级脱壳清选机及方法
CN106473166B (zh) * 2016-09-29 2018-10-19 清华大学 一种切割碾搓组合的油茶果鲜果脱壳清选机及方法
CN106622934A (zh) * 2016-11-24 2017-05-10 张云轩 一种干燥滚动筛分机筛网布置方法及其干燥滚动筛分方法
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KR102415059B1 (ko) * 2017-04-24 2022-06-30 가부시키가이샤 도쿠야마 다결정 실리콘 파쇄물의 제조 방법 및 다결정 실리콘 파쇄물의 표면 금속 농도를 관리하는 방법
CN108405035B (zh) * 2018-02-26 2020-07-28 亚洲硅业(青海)股份有限公司 一种多晶硅棒破碎装置及方法
US12377420B2 (en) * 2018-03-09 2025-08-05 Green Eco International Ltd System and method for food waste decomposition
CN108906570A (zh) * 2018-07-06 2018-11-30 安徽香妃茶业有限公司 一种茶叶风选机
CN109046988B (zh) * 2018-08-01 2021-06-15 广西金智慧科技服务有限公司 一种蚕茧分拣装置
CN109772677B (zh) * 2019-01-23 2021-05-25 广东萨米特陶瓷有限公司 一种多孔径滚笼筛及其制备含颗粒元素陶瓷制品的方法
CN110238027B (zh) * 2019-07-29 2021-07-20 内江师范学院 一种建筑废弃物制路面砖用筛分装置及使用方法
CN114127011B (zh) * 2019-08-29 2024-03-08 瓦克化学股份公司 用于生产硅块的方法
CN112325589B (zh) * 2020-11-17 2022-09-13 江苏绿都环境工程有限公司 一种自动筛选均衡烘干的滚筒烘干机
CN112967962B (zh) * 2021-01-29 2022-07-26 上海中欣晶圆半导体科技有限公司 一种避免硅片在酸腐蚀后转移时造成擦伤的治具及其安装方法
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Also Published As

Publication number Publication date
DE60329789D1 (de) 2009-12-03
EP1683584A3 (de) 2008-11-12
EP1683584A2 (de) 2006-07-26
US7080742B2 (en) 2006-07-25
EP1391252A1 (de) 2004-02-25
JP2004091321A (ja) 2004-03-25
DE60311368T2 (de) 2007-10-18
JP4585751B2 (ja) 2010-11-24
US20040035960A1 (en) 2004-02-26
EP1683584B1 (de) 2009-10-21
EP1391252B1 (de) 2007-01-24
JP2010189274A (ja) 2010-09-02
US20040251333A1 (en) 2004-12-16
KR100991110B1 (ko) 2010-11-02
KR20040018176A (ko) 2004-03-02
US6874713B2 (en) 2005-04-05
JP5346323B2 (ja) 2013-11-20

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