DE60307523D1 - Verfahren zum messen der magnetostriktion in magnetowiderstandselementen - Google Patents

Verfahren zum messen der magnetostriktion in magnetowiderstandselementen

Info

Publication number
DE60307523D1
DE60307523D1 DE60307523T DE60307523T DE60307523D1 DE 60307523 D1 DE60307523 D1 DE 60307523D1 DE 60307523 T DE60307523 T DE 60307523T DE 60307523 T DE60307523 T DE 60307523T DE 60307523 D1 DE60307523 D1 DE 60307523D1
Authority
DE
Germany
Prior art keywords
magnetic resistance
resistance elements
applying
measuring
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60307523T
Other languages
English (en)
Other versions
DE60307523T2 (de
Inventor
Hubert Grimm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
IBM Deutschland GmbH
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IBM Deutschland GmbH, International Business Machines Corp filed Critical IBM Deutschland GmbH
Publication of DE60307523D1 publication Critical patent/DE60307523D1/de
Application granted granted Critical
Publication of DE60307523T2 publication Critical patent/DE60307523T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
    • G01R33/18—Measuring magnetostrictive properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
DE60307523T 2002-12-20 2003-10-17 Verfahren zum messen der magnetostriktion in magnetowiderstandselementen Expired - Lifetime DE60307523T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP02102858 2002-12-20
EP02102858 2002-12-20
PCT/EP2003/011512 WO2004057359A1 (en) 2002-12-20 2003-10-17 Method for measuring magnetostriction in magnetoresistive elements

Publications (2)

Publication Number Publication Date
DE60307523D1 true DE60307523D1 (de) 2006-09-21
DE60307523T2 DE60307523T2 (de) 2007-10-11

Family

ID=32668895

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60307523T Expired - Lifetime DE60307523T2 (de) 2002-12-20 2003-10-17 Verfahren zum messen der magnetostriktion in magnetowiderstandselementen

Country Status (10)

Country Link
US (4) US7298139B2 (de)
EP (1) EP1625413B1 (de)
JP (1) JP4330150B2 (de)
KR (1) KR100754304B1 (de)
CN (1) CN100403051C (de)
AT (1) ATE336009T1 (de)
AU (1) AU2003278097A1 (de)
DE (1) DE60307523T2 (de)
TW (1) TWI230266B (de)
WO (1) WO2004057359A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7298139B2 (en) 2002-12-20 2007-11-20 International Business Machines Corporation Systems and methods for measuring magnetostriction in magnetoresistive elements
KR100725753B1 (ko) * 2006-09-06 2007-06-08 한국기초과학지원연구원 스핀소자를 이용한 진폭변조 소자 및 방법
CN100554955C (zh) * 2007-01-15 2009-10-28 武汉晶泰科技有限公司 一种测量材料残余应力变化的装置及方法
KR101052698B1 (ko) * 2008-10-31 2011-07-28 삼성전자주식회사 자기저항 측정을 통한 토크마그네토미터의 포화자기값과 자기이방성상수의 측정방법
US7940042B2 (en) * 2009-01-07 2011-05-10 Tdk Corporation Method and apparatus for testing magnetoresistive effect element
DE102009016106A1 (de) 2009-02-20 2010-08-26 Rolls-Royce Deutschland Ltd & Co Kg Verfahren zum Messen der Beanspruchung rotierender Wellen von Turbomaschinen und Flugtriebwerken und Vorrichtung zur Durchführung des Verfahrens
DE102009016105B4 (de) 2009-02-20 2017-11-16 Rolls-Royce Deutschland Ltd & Co Kg Verfahren und Vorrichtung zum Messen der Beanspruchung rotierender Wellen
DE102009022751A1 (de) 2009-05-12 2010-12-02 Mts Sensor Technologie Gmbh & Co. Kg Messverfahren für Sensorik
JP5643714B2 (ja) * 2011-04-27 2014-12-17 東北特殊鋼株式会社 磁歪測定装置
EP2912174B1 (de) * 2012-10-25 2019-06-19 Neumodx Molecular, Inc. Verfahren und materialien zur isolierung von nukleinsäurematerialien
KR20150001268A (ko) * 2013-06-27 2015-01-06 엘지이노텍 주식회사 발광 소자 패키지
KR101640475B1 (ko) 2014-06-30 2016-07-18 서울과학기술대학교 산학협력단 안테나를 이용한 기판 물성 측정방법
CN104122516B (zh) * 2014-07-23 2017-03-01 中国计量科学研究院 一种电工钢片磁致伸缩测量系统及方法
JP6289552B2 (ja) * 2016-07-04 2018-03-07 株式会社東栄科学産業 磁歪計測装置、磁歪計測方法
JP6371453B2 (ja) * 2017-08-29 2018-08-08 株式会社東栄科学産業 磁歪計測装置、磁歪計測方法
US10648786B2 (en) 2017-09-01 2020-05-12 Nanohmics, Inc. Magnetoelastic sensor for analyzing strain
US11283486B1 (en) * 2018-06-25 2022-03-22 Hrl Laboratories, Llc Mechanically actuated magnetostrictive transmitter

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US3336154A (en) * 1963-12-20 1967-08-15 Sperry Rand Corp Testing apparatus and method
DE2851771C2 (de) * 1978-11-30 1980-12-18 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur direkten Bestimmung der Magnetostriktionskonstanten und Vorrichtung zur Durchführung desselben
US4321535A (en) * 1979-11-08 1982-03-23 Westinghouse Electric Corp. Apparatus for measuring dynamic magnetostriction using accelerometers
JPS59133476A (ja) 1983-01-20 1984-07-31 Hitachi Ltd 一軸磁気異方性膜の磁歪定数検査法
JPS59159077A (ja) 1983-03-02 1984-09-08 Hitachi Ltd 磁歪測定装置
JPS62106382A (ja) 1985-11-05 1987-05-16 Hitachi Ltd 磁性薄膜の磁歪定数測定装置
JPH01167686A (ja) 1987-12-24 1989-07-03 Naruse Kagaku Kikai Kk 磁歪測定装置
JPH0298681A (ja) 1988-10-04 1990-04-11 Tesura:Kk 磁気歪測定法
JPH02110331A (ja) 1988-10-20 1990-04-23 Komatsu Ltd 磁歪式応力センサの励磁方法
JPH05281321A (ja) * 1992-04-02 1993-10-29 Sony Corp 磁歪測定装置及び磁歪測定方法
JP3199941B2 (ja) * 1993-12-27 2001-08-20 新日本製鐵株式会社 連続磁気ひずみ測定法および装置
JPH07270509A (ja) * 1994-03-31 1995-10-20 Nippon Steel Corp 磁気ひずみ測定法
JP2674571B2 (ja) * 1995-06-01 1997-11-12 ティーディーケイ株式会社 複合型磁気ヘッドの検査方法及び装置
JP3560713B2 (ja) * 1995-01-27 2004-09-02 アルプス電気株式会社 磁気抵抗効果素子用多層薄膜材料および磁性層の磁化の調整方法
JPH10132913A (ja) * 1996-10-28 1998-05-22 Nippon Steel Corp 簡易磁気歪み測定法
US6005753A (en) * 1998-05-29 1999-12-21 International Business Machines Corporation Magnetic tunnel junction magnetoresistive read head with longitudinal and transverse bias
JP2000266617A (ja) * 1999-03-19 2000-09-29 Osaka Gas Co Ltd 磁歪応力測定装置及び磁歪応力測定方法
US6538430B2 (en) * 2001-08-23 2003-03-25 International Business Machines Corporation Screening test for transverse magnetic-field excited noise in giant magnetoresistive heads
US6664783B1 (en) * 2002-07-15 2003-12-16 International Business Machines Corporation System for measuring magnetostriction employing a plurality of external magnetic field rotation harmonics
US7298139B2 (en) 2002-12-20 2007-11-20 International Business Machines Corporation Systems and methods for measuring magnetostriction in magnetoresistive elements
US7229178B1 (en) * 2004-12-20 2007-06-12 Sandia Corporation Variable focal length deformable mirror

Also Published As

Publication number Publication date
EP1625413A1 (de) 2006-02-15
KR20050083943A (ko) 2005-08-26
US20080024123A1 (en) 2008-01-31
AU2003278097A1 (en) 2004-07-14
EP1625413B1 (de) 2006-08-09
TWI230266B (en) 2005-04-01
CN1692286A (zh) 2005-11-02
US7375513B2 (en) 2008-05-20
US20060132121A1 (en) 2006-06-22
US7471082B2 (en) 2008-12-30
US7728585B2 (en) 2010-06-01
US20080278153A1 (en) 2008-11-13
US7298139B2 (en) 2007-11-20
WO2004057359A1 (en) 2004-07-08
CN100403051C (zh) 2008-07-16
JP2006510884A (ja) 2006-03-30
KR100754304B1 (ko) 2007-09-03
US20080024124A1 (en) 2008-01-31
TW200428014A (en) 2004-12-16
ATE336009T1 (de) 2006-09-15
DE60307523T2 (de) 2007-10-11
JP4330150B2 (ja) 2009-09-16

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y

8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)