DE602007009492D1 - Magnetoresistive sensorvorrichtung und verfahren zur herstellung einer solchen magnetoresistiven sensorvorrichtung - Google Patents

Magnetoresistive sensorvorrichtung und verfahren zur herstellung einer solchen magnetoresistiven sensorvorrichtung

Info

Publication number
DE602007009492D1
DE602007009492D1 DE602007009492T DE602007009492T DE602007009492D1 DE 602007009492 D1 DE602007009492 D1 DE 602007009492D1 DE 602007009492 T DE602007009492 T DE 602007009492T DE 602007009492 T DE602007009492 T DE 602007009492T DE 602007009492 D1 DE602007009492 D1 DE 602007009492D1
Authority
DE
Germany
Prior art keywords
sensor device
magnetoresistive sensor
sensing element
wafer
esistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007009492T
Other languages
English (en)
Inventor
Arne Kraemer
Reinhard Buchhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP BV
Original Assignee
NXP BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NXP BV filed Critical NXP BV
Publication of DE602007009492D1 publication Critical patent/DE602007009492D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
DE602007009492T 2006-02-23 2007-02-13 Magnetoresistive sensorvorrichtung und verfahren zur herstellung einer solchen magnetoresistiven sensorvorrichtung Active DE602007009492D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06110312 2006-02-23
PCT/IB2007/050466 WO2007096806A2 (en) 2006-02-23 2007-02-13 Magnetoresistive sensor device and method of fabricating such magnetoresistive sensor device

Publications (1)

Publication Number Publication Date
DE602007009492D1 true DE602007009492D1 (de) 2010-11-11

Family

ID=38321998

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007009492T Active DE602007009492D1 (de) 2006-02-23 2007-02-13 Magnetoresistive sensorvorrichtung und verfahren zur herstellung einer solchen magnetoresistiven sensorvorrichtung

Country Status (8)

Country Link
US (1) US9304175B2 (de)
EP (1) EP1989564B1 (de)
JP (1) JP2009527758A (de)
KR (1) KR20080098426A (de)
CN (1) CN101389972B (de)
AT (1) ATE483170T1 (de)
DE (1) DE602007009492D1 (de)
WO (1) WO2007096806A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8080993B2 (en) * 2008-03-27 2011-12-20 Infineon Technologies Ag Sensor module with mold encapsulation for applying a bias magnetic field
US20090315551A1 (en) * 2008-06-20 2009-12-24 Jingshi Hu Linear magnetoresistance sensor
US8283921B2 (en) * 2008-11-26 2012-10-09 General Electric Company Magnetoresistance sensors for position and orientation determination
US8358128B2 (en) * 2008-11-28 2013-01-22 General Electric Company Surgical navigation system with magnetoresistance sensors
US8483800B2 (en) * 2008-11-29 2013-07-09 General Electric Company Surgical navigation enabled imaging table environment
KR101165237B1 (ko) * 2009-11-09 2012-07-16 중앙대학교 산학협력단 누설자속 측정에 의한 비파괴 탐상장치
FR2955942B1 (fr) * 2010-01-29 2013-01-04 Centre Nat Rech Scient Magnetometre integre et son procede de fabrication
CN102298126B (zh) * 2011-01-17 2013-03-13 江苏多维科技有限公司 独立封装的桥式磁场传感器
US9207292B2 (en) 2011-02-02 2015-12-08 Infineon Technologies Ag Magnetoresistive device and method for manufacturing the same
TW201327956A (zh) * 2011-12-28 2013-07-01 Ind Tech Res Inst 磁感應器
CN102565727B (zh) 2012-02-20 2016-01-20 江苏多维科技有限公司 用于测量磁场的磁电阻传感器
CN102590768B (zh) 2012-03-14 2014-04-16 江苏多维科技有限公司 一种磁电阻磁场梯度传感器
CN104425708A (zh) * 2013-09-06 2015-03-18 上海矽睿科技有限公司 两轴磁传感装置的制备工艺
KR101890561B1 (ko) 2016-02-03 2018-08-22 고려대학교 세종산학협력단 스핀홀 현상을 이용한 자기장 측정 장치 및 방법
DE102022105706A1 (de) 2022-03-10 2023-09-14 Infineon Technologies Ag Magnetfeldsensor mit mechanisch geschütztem Permanentmagneten
DE102022208562A1 (de) 2022-08-18 2024-02-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren zum herstellen eines magnetfeldsensorchips mit einem integrierten back-bias magneten

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3408573A (en) * 1965-06-19 1968-10-29 Philips Corp Coil core manufactured from softmagnetic and permanent-magnetic materials
DE3429708C1 (de) * 1984-08-11 1986-01-02 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Buerstendichtung
JPH04152688A (ja) 1990-10-17 1992-05-26 Fujitsu Ltd 磁気抵抗素子
JP3253556B2 (ja) 1997-05-07 2002-02-04 株式会社東芝 磁気抵抗効果素子とそれを用いた磁気ヘッドおよび磁気記憶装置
GB9718915D0 (en) 1997-09-05 1997-11-12 Greenbrook Electrical Plc Magneto-resistor
EP0905523B1 (de) * 1997-09-24 2004-11-10 Infineon Technologies AG Sensoreinrichtung zur Richtungserfassung eines äu eren Magnetfeldes mittels eines magnetoresistiven Sensorelementes
JP3544141B2 (ja) 1998-05-13 2004-07-21 三菱電機株式会社 磁気検出素子および磁気検出装置
JP2002151757A (ja) 2000-11-09 2002-05-24 Alps Electric Co Ltd 薄膜磁気素子及びその製造方法
US6946834B2 (en) 2001-06-01 2005-09-20 Koninklijke Philips Electronics N.V. Method of orienting an axis of magnetization of a first magnetic element with respect to a second magnetic element, semimanufacture for obtaining a sensor, sensor for measuring a magnetic field
US6790378B2 (en) * 2001-10-05 2004-09-14 R. William Graham Coating composition having magnetic properties
JP3835447B2 (ja) 2002-10-23 2006-10-18 ヤマハ株式会社 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ
US6872467B2 (en) * 2002-11-12 2005-03-29 Nve Corporation Magnetic field sensor with augmented magnetoresistive sensing layer
US7229746B2 (en) * 2003-04-02 2007-06-12 Delphi Technologies, Inc. Printed high strength permanent magnet targets for magnetic sensors
EP1498744B1 (de) 2003-07-18 2011-08-10 Yamaha Corporation Magnetfeldsensor und dessen Herstellungsverfahren

Also Published As

Publication number Publication date
JP2009527758A (ja) 2009-07-30
EP1989564B1 (de) 2010-09-29
CN101389972A (zh) 2009-03-18
KR20080098426A (ko) 2008-11-07
EP1989564A2 (de) 2008-11-12
US9304175B2 (en) 2016-04-05
WO2007096806A3 (en) 2007-11-01
WO2007096806A2 (en) 2007-08-30
US20090058413A1 (en) 2009-03-05
ATE483170T1 (de) 2010-10-15
CN101389972B (zh) 2012-07-04

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