JP2006510884A - 磁気抵抗エレメント内の磁気ひずみを測定するための方法 - Google Patents
磁気抵抗エレメント内の磁気ひずみを測定するための方法 Download PDFInfo
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- JP2006510884A JP2006510884A JP2004561137A JP2004561137A JP2006510884A JP 2006510884 A JP2006510884 A JP 2006510884A JP 2004561137 A JP2004561137 A JP 2004561137A JP 2004561137 A JP2004561137 A JP 2004561137A JP 2006510884 A JP2006510884 A JP 2006510884A
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- magnetoresistive
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/18—Measuring magnetostrictive properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
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Abstract
【解決手段】 この方法は、1)1つまたは複数の磁気抵抗エレメントを担持する基板を用意するステップと、2)前記基板を曲げ治具に挿入するステップと、3)前記基板に平行なDC磁界を加えるステップと、4)前記基板に垂直で前記エレメントの磁気抵抗層に平行な交番磁界を加えるステップと、5)前記エレメントからの信号を測定するステップと、6)前記基板を曲げることにより、前記基板に平行な機械的応力を加えるステップと、7)前記機械的応力を加える前に測定された信号に到達するまで、前記DC磁界を変化させるステップとから構成される。
Description
−補償法の使用により固定磁化状態が保証され、これにより構造化薄膜内の局所磁化分布によるエラーが回避される。バイアス磁界、たとえば、異方性磁気抵抗センサ(AMR)内のソフト・バイアス、長さ方向の磁気的にハードな磁界(ハード・バイアス)、または隣接磁性体層の交換磁界は、いかなる影響も及ぼさない。
−この測定は単純で高速である。
−MR効果は非常に敏感である。
−この測定はセンサ・エレメント自体で実行することができる。個別に製造されるモニタ層を設ける必要はまったくない。
Claims (6)
- 磁気抵抗エレメントの磁気ひずみ定数を直接測定するための方法であって、
1つまたは複数の磁気抵抗エレメントを担持する基板を用意するステップと、
前記基板を曲げ治具に挿入するステップと、
前記基板に平行なDC磁界を加えるステップと、
前記基板に垂直で前記エレメントの磁気抵抗層に平行な交番磁界を加えるステップと、
前記エレメントからの信号を測定するステップと、
前記基板を曲げることにより、前記基板に平行な機械的応力を加えるステップと、
前記機械的応力を加える前に測定された信号に到達するまで、前記DC磁界を変化させるステップと、
を特徴とする、方法。 - 前記基板がローまたはウェハである、請求項1に記載の方法。
- 前記ローまたはウェハが複数の磁気抵抗エレメントを担持する、請求項2に記載の方法。
- 前記機械的応力がマイクロメータねじによって加えられる、請求項1ないし3のいずれか1項に記載の方法。
- 前記マイクロメータねじが電子的に制御される、請求項4に記載の方法。
- 前記磁気抵抗エレメントが、異方性磁気抵抗(AMR)ベースのセンサ、巨大磁気抵抗(GMR)ベースのセンサ、またはトンネル磁気抵抗(TMR)ベースのセンサである、請求項1ないし5のいずれか1項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02102858 | 2002-12-20 | ||
PCT/EP2003/011512 WO2004057359A1 (en) | 2002-12-20 | 2003-10-17 | Method for measuring magnetostriction in magnetoresistive elements |
Publications (2)
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JP2006510884A true JP2006510884A (ja) | 2006-03-30 |
JP4330150B2 JP4330150B2 (ja) | 2009-09-16 |
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JP2004561137A Expired - Fee Related JP4330150B2 (ja) | 2002-12-20 | 2003-10-17 | 磁気抵抗エレメント内の磁気ひずみを測定するための方法 |
Country Status (10)
Country | Link |
---|---|
US (4) | US7298139B2 (ja) |
EP (1) | EP1625413B1 (ja) |
JP (1) | JP4330150B2 (ja) |
KR (1) | KR100754304B1 (ja) |
CN (1) | CN100403051C (ja) |
AT (1) | ATE336009T1 (ja) |
AU (1) | AU2003278097A1 (ja) |
DE (1) | DE60307523T2 (ja) |
TW (1) | TWI230266B (ja) |
WO (1) | WO2004057359A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012230034A (ja) * | 2011-04-27 | 2012-11-22 | Tohoku Tokushuko Kk | 磁歪測定装置 |
JP2018004654A (ja) * | 2017-08-29 | 2018-01-11 | 株式会社東栄科学産業 | 磁歪計測装置、磁歪計測方法 |
JP2018004491A (ja) * | 2016-07-04 | 2018-01-11 | 株式会社東栄科学産業 | 磁歪計測装置、磁歪計測方法 |
Families Citing this family (14)
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US7298139B2 (en) | 2002-12-20 | 2007-11-20 | International Business Machines Corporation | Systems and methods for measuring magnetostriction in magnetoresistive elements |
KR100725753B1 (ko) * | 2006-09-06 | 2007-06-08 | 한국기초과학지원연구원 | 스핀소자를 이용한 진폭변조 소자 및 방법 |
CN100554955C (zh) * | 2007-01-15 | 2009-10-28 | 武汉晶泰科技有限公司 | 一种测量材料残余应力变化的装置及方法 |
KR101052698B1 (ko) * | 2008-10-31 | 2011-07-28 | 삼성전자주식회사 | 자기저항 측정을 통한 토크마그네토미터의 포화자기값과 자기이방성상수의 측정방법 |
US7940042B2 (en) * | 2009-01-07 | 2011-05-10 | Tdk Corporation | Method and apparatus for testing magnetoresistive effect element |
DE102009016106A1 (de) | 2009-02-20 | 2010-08-26 | Rolls-Royce Deutschland Ltd & Co Kg | Verfahren zum Messen der Beanspruchung rotierender Wellen von Turbomaschinen und Flugtriebwerken und Vorrichtung zur Durchführung des Verfahrens |
DE102009016105B4 (de) | 2009-02-20 | 2017-11-16 | Rolls-Royce Deutschland Ltd & Co Kg | Verfahren und Vorrichtung zum Messen der Beanspruchung rotierender Wellen |
DE102009022751A1 (de) | 2009-05-12 | 2010-12-02 | Mts Sensor Technologie Gmbh & Co. Kg | Messverfahren für Sensorik |
EP2912174B1 (en) * | 2012-10-25 | 2019-06-19 | Neumodx Molecular, Inc. | Method and materials for isolation of nucleic acid materials |
KR20150001268A (ko) * | 2013-06-27 | 2015-01-06 | 엘지이노텍 주식회사 | 발광 소자 패키지 |
KR101640475B1 (ko) | 2014-06-30 | 2016-07-18 | 서울과학기술대학교 산학협력단 | 안테나를 이용한 기판 물성 측정방법 |
CN104122516B (zh) * | 2014-07-23 | 2017-03-01 | 中国计量科学研究院 | 一种电工钢片磁致伸缩测量系统及方法 |
US10648786B2 (en) | 2017-09-01 | 2020-05-12 | Nanohmics, Inc. | Magnetoelastic sensor for analyzing strain |
US11283486B1 (en) * | 2018-06-25 | 2022-03-22 | Hrl Laboratories, Llc | Mechanically actuated magnetostrictive transmitter |
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-
2003
- 2003-10-17 US US10/539,471 patent/US7298139B2/en not_active Expired - Fee Related
- 2003-10-17 AT AT03769408T patent/ATE336009T1/de not_active IP Right Cessation
- 2003-10-17 EP EP03769408A patent/EP1625413B1/en not_active Expired - Lifetime
- 2003-10-17 WO PCT/EP2003/011512 patent/WO2004057359A1/en active IP Right Grant
- 2003-10-17 DE DE60307523T patent/DE60307523T2/de not_active Expired - Lifetime
- 2003-10-17 KR KR1020057009191A patent/KR100754304B1/ko not_active IP Right Cessation
- 2003-10-17 JP JP2004561137A patent/JP4330150B2/ja not_active Expired - Fee Related
- 2003-10-17 CN CNB2003801006077A patent/CN100403051C/zh not_active Expired - Fee Related
- 2003-10-17 AU AU2003278097A patent/AU2003278097A1/en not_active Abandoned
- 2003-12-01 TW TW092133676A patent/TWI230266B/zh not_active IP Right Cessation
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2007
- 2007-10-01 US US11/865,687 patent/US7375513B2/en not_active Expired - Fee Related
- 2007-10-01 US US11/865,690 patent/US7471082B2/en not_active Expired - Fee Related
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012230034A (ja) * | 2011-04-27 | 2012-11-22 | Tohoku Tokushuko Kk | 磁歪測定装置 |
JP2018004491A (ja) * | 2016-07-04 | 2018-01-11 | 株式会社東栄科学産業 | 磁歪計測装置、磁歪計測方法 |
JP2018004654A (ja) * | 2017-08-29 | 2018-01-11 | 株式会社東栄科学産業 | 磁歪計測装置、磁歪計測方法 |
Also Published As
Publication number | Publication date |
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EP1625413A1 (en) | 2006-02-15 |
KR20050083943A (ko) | 2005-08-26 |
US20080024123A1 (en) | 2008-01-31 |
AU2003278097A1 (en) | 2004-07-14 |
DE60307523D1 (de) | 2006-09-21 |
EP1625413B1 (en) | 2006-08-09 |
TWI230266B (en) | 2005-04-01 |
CN1692286A (zh) | 2005-11-02 |
US7375513B2 (en) | 2008-05-20 |
US20060132121A1 (en) | 2006-06-22 |
US7471082B2 (en) | 2008-12-30 |
US7728585B2 (en) | 2010-06-01 |
US20080278153A1 (en) | 2008-11-13 |
US7298139B2 (en) | 2007-11-20 |
WO2004057359A1 (en) | 2004-07-08 |
CN100403051C (zh) | 2008-07-16 |
KR100754304B1 (ko) | 2007-09-03 |
US20080024124A1 (en) | 2008-01-31 |
TW200428014A (en) | 2004-12-16 |
ATE336009T1 (de) | 2006-09-15 |
DE60307523T2 (de) | 2007-10-11 |
JP4330150B2 (ja) | 2009-09-16 |
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