DE60239698D1 - Modul mit einer keramischen Leiterplatte - Google Patents

Modul mit einer keramischen Leiterplatte

Info

Publication number
DE60239698D1
DE60239698D1 DE60239698T DE60239698T DE60239698D1 DE 60239698 D1 DE60239698 D1 DE 60239698D1 DE 60239698 T DE60239698 T DE 60239698T DE 60239698 T DE60239698 T DE 60239698T DE 60239698 D1 DE60239698 D1 DE 60239698D1
Authority
DE
Germany
Prior art keywords
module
circuit board
ceramic circuit
ceramic
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239698T
Other languages
English (en)
Inventor
Hideyuki Emoto
Masahiro Ibukiyama
Isao Sugimoto
Manabu Uto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Application granted granted Critical
Publication of DE60239698D1 publication Critical patent/DE60239698D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0058—Laminating printed circuit boards onto other substrates, e.g. metallic substrates
    • H05K3/0061—Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a metallic substrate, e.g. a heat sink
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/121—Metallic interlayers based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/402—Aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/706—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the metallic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09663—Divided layout, i.e. conductors divided in two or more parts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/0969—Apertured conductors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09745—Recess in conductor, e.g. in pad or in metallic substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
DE60239698T 2001-11-29 2002-11-08 Modul mit einer keramischen Leiterplatte Expired - Lifetime DE60239698D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001364363A JP2003163315A (ja) 2001-11-29 2001-11-29 モジュール
PCT/JP2002/011698 WO2003046981A1 (en) 2001-11-29 2002-11-08 Module structure and module comprising it

Publications (1)

Publication Number Publication Date
DE60239698D1 true DE60239698D1 (de) 2011-05-19

Family

ID=19174566

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239698T Expired - Lifetime DE60239698D1 (de) 2001-11-29 2002-11-08 Modul mit einer keramischen Leiterplatte

Country Status (6)

Country Link
US (1) US7355853B2 (de)
EP (1) EP1450401B1 (de)
JP (1) JP2003163315A (de)
AU (1) AU2002343879A1 (de)
DE (1) DE60239698D1 (de)
WO (1) WO2003046981A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10333329B4 (de) * 2003-07-23 2011-07-21 SEMIKRON Elektronik GmbH & Co. KG, 90431 Leistungshalbleitermodul mit biegesteifer Grundplatte
CN100508698C (zh) * 2003-09-25 2009-07-01 株式会社东芝 陶瓷电路板、其生产方法以及电源模块
JP4804343B2 (ja) * 2004-03-19 2011-11-02 電気化学工業株式会社 セラミックシートの製造方法
JP4756165B2 (ja) * 2004-08-26 2011-08-24 Ｄｏｗａメタルテック株式会社 アルミニウム−セラミックス接合基板
GB2418539A (en) * 2004-09-23 2006-03-29 Vetco Gray Controls Ltd Electrical circuit package
JP4207896B2 (ja) * 2005-01-19 2009-01-14 富士電機デバイステクノロジー株式会社 半導体装置
JP2006253183A (ja) * 2005-03-08 2006-09-21 Hitachi Ltd 半導体パワーモジュール
JP4621531B2 (ja) * 2005-04-06 2011-01-26 株式会社豊田自動織機 放熱装置
EP1926142A1 (de) * 2005-09-15 2008-05-28 Mitsubishi Materials Corporation Isolierende leiterplatte und isolierende leiterplatte mit kühlkörper-abschnitt
JP2007171491A (ja) * 2005-12-21 2007-07-05 Toshiba Corp 光学結晶保持構造及び波長変換装置
TWI449137B (zh) * 2006-03-23 2014-08-11 Ceramtec Ag 構件或電路用的攜帶體
US7511961B2 (en) * 2006-10-26 2009-03-31 Infineon Technologies Ag Base plate for a power semiconductor module
DE102007054856A1 (de) * 2007-11-16 2009-05-20 Osram Gesellschaft mit beschränkter Haftung Beleuchtungsvorrichtung mit einer Substratplatte und einem Kühlkörper
JP4832419B2 (ja) * 2007-12-25 2011-12-07 トヨタ自動車株式会社 半導体モジュール
DE102009042518A1 (de) * 2009-09-16 2011-03-24 Esw Gmbh Vorrichtung zur Kühlung von Halbleitern
DE102011103746A1 (de) 2011-05-31 2012-12-06 Ixys Semiconductor Gmbh Verfahren zum Fügen von Metall-Keramik-Substraten an Metallkörpern
JP6012990B2 (ja) * 2012-03-19 2016-10-25 日本軽金属株式会社 放熱器一体型基板の製造方法
JP5900620B2 (ja) * 2012-07-05 2016-04-06 三菱電機株式会社 半導体装置
JP6099453B2 (ja) * 2012-11-28 2017-03-22 Ｄｏｗａメタルテック株式会社 電子部品搭載基板およびその製造方法
AT14114U1 (de) * 2013-09-20 2015-04-15 Mikroelektronik Ges Mit Beschränkter Haftung Ab Trägerplatte für ein Leistungselektronikmodul
EP4246227A3 (de) * 2015-09-25 2023-12-13 Materion Corporation Lichtumwandlungsvorrichtung mit hoher optischer leistung unter verwendung eines optokeramischen phosphorelements mit lötbefestigung
DE102016125348B4 (de) * 2016-12-22 2020-06-25 Rogers Germany Gmbh Trägersubstrat für elektrische Bauteile und Verfahren zur Herstellung eines Trägersubstrats
JP2019054069A (ja) * 2017-09-14 2019-04-04 株式会社東芝 半導体装置
CN111316408B (zh) * 2017-10-30 2023-07-18 三菱电机株式会社 电力用半导体装置以及电力用半导体装置的制造方法
CN210959284U (zh) * 2019-12-06 2020-07-07 阳光电源股份有限公司 散热器及电气设备
DE102020119208A1 (de) * 2020-07-21 2022-01-27 Rogers Germany Gmbh Verfahren zur Herstellung eines Metall-Keramik-Substrats und Metall-Keramik-Substrat hergestellt mit einem solchen Verfahren

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EP0135120B1 (de) * 1983-08-23 1988-03-09 BBC Brown Boveri AG Keramik-Metall-Element
EP0422558B1 (de) * 1989-10-09 2001-03-28 Mitsubishi Materials Corporation Keramisches Substrat angewendet zum Herstellen einer elektrischen oder elektronischen Schaltung
US5213877A (en) * 1991-05-02 1993-05-25 Mitsubishi Materials Corporation Ceramic substrate used for fabricating electric or electronic circuit
US5481136A (en) * 1992-10-28 1996-01-02 Sumitomo Electric Industries, Ltd. Semiconductor element-mounting composite heat-sink base
DE4315272A1 (de) * 1993-05-07 1994-11-10 Siemens Ag Leistungshalbleiterbauelement mit Pufferschicht
US5602720A (en) * 1993-06-25 1997-02-11 Sumitomo Electric Industries, Ltd. Mounting structure for semiconductor device having low thermal resistance
JP2570605B2 (ja) * 1993-11-15 1997-01-08 日本電気株式会社 半導体装置
EP0693776B1 (de) 1994-07-15 2000-05-31 Mitsubishi Materials Corporation Keramik-Gehäuse mit hoher Wärmeabstrahlung
DE69603664T2 (de) * 1995-05-30 2000-03-16 Motorola Inc Hybrid-Multichip-Modul und Verfahren zur seiner Herstellung
JPH0997865A (ja) 1995-09-29 1997-04-08 Toshiba Corp 放熱部品
US6033787A (en) * 1996-08-22 2000-03-07 Mitsubishi Materials Corporation Ceramic circuit board with heat sink
JP3171234B2 (ja) 1997-03-26 2001-05-28 三菱マテリアル株式会社 ヒートシンク付セラミック回路基板
JPH10189845A (ja) * 1996-12-25 1998-07-21 Denso Corp 半導体素子の放熱装置
DK1056321T3 (da) * 1999-05-28 2008-03-03 Denki Kagaku Kogyo Kk Keramisk substratkredslöb og dets fremstillingsproces
JP2001035977A (ja) * 1999-07-26 2001-02-09 Nec Corp 半導体装置用容器
US6204553B1 (en) * 1999-08-10 2001-03-20 Walsin Advanced Electronics Ltd. Lead frame structure
JP2001121287A (ja) 1999-10-21 2001-05-08 Denki Kagaku Kogyo Kk Ａｌ系金属用ろう材とそれを用いたセラミックス回路基板
JP4355412B2 (ja) * 1999-11-26 2009-11-04 昭和電工株式会社 ヒートシンクおよびその製造方法
JP2002252317A (ja) * 2001-02-27 2002-09-06 Denki Kagaku Kogyo Kk ヒートシンクとそれを用いたモジュール構造体

Also Published As

Publication number Publication date
EP1450401A4 (de) 2007-12-05
JP2003163315A (ja) 2003-06-06
US7355853B2 (en) 2008-04-08
EP1450401A1 (de) 2004-08-25
EP1450401B1 (de) 2011-04-06
WO2003046981A1 (en) 2003-06-05
US20050117302A1 (en) 2005-06-02
AU2002343879A1 (en) 2003-06-10

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