DE60234070D1 - Tischsystem mit Steuerung der Winkelposition - Google Patents

Tischsystem mit Steuerung der Winkelposition

Info

Publication number
DE60234070D1
DE60234070D1 DE60234070T DE60234070T DE60234070D1 DE 60234070 D1 DE60234070 D1 DE 60234070D1 DE 60234070 T DE60234070 T DE 60234070T DE 60234070 T DE60234070 T DE 60234070T DE 60234070 D1 DE60234070 D1 DE 60234070D1
Authority
DE
Germany
Prior art keywords
angular position
position control
table system
angular
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60234070T
Other languages
English (en)
Inventor
Masataka Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Thompson Co Ltd
Original Assignee
Nippon Thompson Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Thompson Co Ltd filed Critical Nippon Thompson Co Ltd
Application granted granted Critical
Publication of DE60234070D1 publication Critical patent/DE60234070D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/02—Indexing equipment
    • B23Q16/022—Indexing equipment in which only the indexing movement is of importance
    • B23Q16/026—Indexing equipment in which only the indexing movement is of importance by converting a reciprocating or oscillating movement into a rotary indexing movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/52—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism a single rotating pair
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/22—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings
    • F16C19/34—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load
    • F16C19/36—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers
    • F16C19/361—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers with cylindrical rollers
    • F16C19/362—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers with cylindrical rollers the rollers being crossed within the single row
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Rolling Contact Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
DE60234070T 2001-05-16 2002-05-10 Tischsystem mit Steuerung der Winkelposition Expired - Lifetime DE60234070D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001145919A JP4560235B2 (ja) 2001-05-16 2001-05-16 角度調整テーブル装置

Publications (1)

Publication Number Publication Date
DE60234070D1 true DE60234070D1 (de) 2009-12-03

Family

ID=18991651

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60234070T Expired - Lifetime DE60234070D1 (de) 2001-05-16 2002-05-10 Tischsystem mit Steuerung der Winkelposition

Country Status (4)

Country Link
US (1) US6722289B2 (de)
EP (1) EP1260309B1 (de)
JP (1) JP4560235B2 (de)
DE (1) DE60234070D1 (de)

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JP4333979B2 (ja) 2002-08-09 2009-09-16 日本トムソン株式会社 リニアモータを内蔵したアライメントステージ装置
DE10316427B4 (de) * 2003-04-08 2006-05-04 Hermann Oesterle Ausricht- und Justiereinrichtung sowie Werkzeugmaschine mit einer Ausricht- und Justiervorrichtung
EP1676701A1 (de) * 2004-12-30 2006-07-05 MHM Siebdruckmaschinen GmbH KG Rundtaktvorrichtung
WO2006092834A1 (ja) * 2005-02-28 2006-09-08 Belltec Company, Limited 回転台
JP4697658B2 (ja) * 2005-04-21 2011-06-08 日本精工株式会社 位置決めテーブル装置
CN101300429B (zh) * 2005-08-31 2010-07-28 Thk株式会社 引导台装置
US7638963B2 (en) * 2005-09-26 2009-12-29 Centricity Corporation Rotary indexing table driven by an induction motor
DE102005053753A1 (de) * 2005-11-10 2007-05-16 Maquet Gmbh & Co Kg Hydraulische Säulenklemmung
DE102005053754A1 (de) 2005-11-10 2007-05-16 Maquet Gmbh & Co Kg Einrichtung zum Verstellen der Liegefläche eines Operationstisches
DE102005054221A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Patientenlagersystem
DE102005054174A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Patientenlagerfläche für einen Operationstisch
DE102005054230A1 (de) 2005-11-14 2007-05-24 Maquet Gmbh & Co. Kg Verfahren und Einrichtung zur bidirektionalen IR-Datenübertragung zwischen einem Operationstisch und einem Bediengerät
DE102005054224A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Patientenlagersystem
DE102005054223A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Einrichtung zum Verstellen eines Operationstisches
DE102005054175A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Gelenkanordnung zur Verbindung zweier Segmente einer Patientenlagerfläche
DE102005054222A1 (de) 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Operationstisch
US7707907B2 (en) * 2005-11-17 2010-05-04 Socovar, Société En Commandite Planar parallel mechanism and method
JP4782710B2 (ja) * 2006-03-02 2011-09-28 住友重機械工業株式会社 ステージ装置
JP3132678U (ja) * 2006-12-18 2007-06-21 下西技研工業株式会社 モニタ用スイーベル装置
US20080149000A1 (en) * 2006-12-21 2008-06-26 Janic Normand Adjustable table
US20090320724A1 (en) * 2008-06-27 2009-12-31 Walburn William L Swivel base with installation aid
JP5294016B2 (ja) * 2009-01-30 2013-09-18 株式会社ニイガタマシンテクノ 回転テーブルの振れ制御装置及びこれを備えた工作機械、回転テーブルの振れ制御方法
DE102009056271A1 (de) * 2009-12-01 2011-06-09 Technische Universität München Positioniereinheit
KR101690970B1 (ko) * 2010-02-19 2016-12-29 주성엔지니어링(주) 기판 처리 시스템 및 기판 반송 방법
CN101889767A (zh) * 2010-06-30 2010-11-24 陈浩森 一种智能反馈式餐桌装置
CN102233572A (zh) * 2011-04-27 2011-11-09 苏州工业园区高登威科技有限公司 一种座椅滑轨安装装置
TWI458585B (zh) * 2012-04-25 2014-11-01 中原大學 斜向驅動式平台結構
JP5525071B2 (ja) * 2013-01-18 2014-06-18 東レエンジニアリング株式会社 多軸位置決め装置
KR101437022B1 (ko) 2013-05-20 2014-09-04 주식회사 재원 회전형 위치결정장치
JP6132695B2 (ja) * 2013-07-24 2017-05-24 通雄 渡邊 工作機械用テーブル装置
CN103681429A (zh) * 2013-12-25 2014-03-26 武汉工程大学 一种芯片固晶机的控制方法及控制系统
CN106272139A (zh) * 2015-05-13 2017-01-04 江苏诚天机械有限公司 前罩支架气动夹紧上丝装置
KR101608625B1 (ko) * 2015-07-30 2016-04-11 주식회사 재원 위치 결정 장치
US10302598B2 (en) 2016-10-24 2019-05-28 General Electric Company Corrosion and crack detection for fastener nuts
KR101956242B1 (ko) * 2017-12-01 2019-03-08 주식회사 디피아이엔 로터리 스테이지의 정밀 구동시스템
KR101901824B1 (ko) 2018-04-20 2018-09-27 삼승테크(주) 검사 스테이지의 회전 각도 정밀조절장치
CN109909651A (zh) * 2019-04-10 2019-06-21 深圳市立杰天源科技有限公司 一种滚轴式xy轴点焊辅助设备
KR102259802B1 (ko) * 2019-07-04 2021-06-02 퀸시스(주) 회전 스테이지
KR102156245B1 (ko) * 2019-08-21 2020-09-15 삼승테크(주) 검사용 회전스테이지
CN110470319B (zh) * 2019-09-09 2023-09-26 航天长屏科技有限公司 一种用于对大旋转角度进行限位的转台结构
KR102447890B1 (ko) * 2020-09-04 2022-09-27 삼승테크(주) 검사 스테이지의 회전 각도 정밀 조절장치
CN114877919B (zh) * 2022-03-23 2024-01-02 上海索迪龙自动化股份有限公司 一种位置可调式多功能传感器

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US3155383A (en) * 1962-10-11 1964-11-03 Link Division Of General Prec Precision positioning apparatus
GB2160451B (en) * 1984-05-25 1987-07-08 Citizen Watch Co Ltd A rotary table unit
DE3625979A1 (de) * 1986-07-31 1988-02-11 Heringer & Schipper Gmbh Stufenlos einstellbarer rundteiltisch
JPH01242989A (ja) * 1988-03-24 1989-09-27 Kazuya Hirose テーブルの縦横移動旋回機構
US5117761A (en) * 1989-04-28 1992-06-02 Canon Kabushiki Kaisha Part mounting apparatus
JPH03121340A (ja) * 1989-10-04 1991-05-23 Seiko Instr Inc 精密位置決め装置
DE4107881C2 (de) * 1990-03-13 1997-04-17 Ntn Toyo Bearing Co Ltd Verstellbarer Tisch
US5059755A (en) * 1990-07-23 1991-10-22 G & S Metal Products Company, Inc. Low profile oven turntable
JP2586705Y2 (ja) * 1991-05-31 1998-12-09 エヌティエヌ株式会社 ボールねじ軸装置
US5201249A (en) * 1992-02-25 1993-04-13 Progressive Blasting Systems Multi-purpose indexing turntable
JP3346838B2 (ja) * 1993-06-29 2002-11-18 有限会社創造庵 回転運動機構
JPH0751972A (ja) * 1993-08-09 1995-02-28 Souzouan:Kk 回転運動機構
JPH07191293A (ja) * 1993-12-27 1995-07-28 Sharp Corp 位置決め装置
JPH11300557A (ja) * 1998-04-15 1999-11-02 Thk Co Ltd 移動テーブル装置
JP4310504B2 (ja) * 1999-02-25 2009-08-12 Ｔｄｋ株式会社 ワーク搭載用テーブルのθ軸調整機構
JP2000271829A (ja) * 1999-03-25 2000-10-03 Ntn Corp 回転テーブル
US6334398B1 (en) * 2000-04-28 2002-01-01 Tokyo Electron Limited Variable gap stop which can be used in a semiconductor processing device
JP2001330689A (ja) * 2000-05-24 2001-11-30 Harmonic Drive Syst Ind Co Ltd 基準テーブルの傾斜角設定機構

Also Published As

Publication number Publication date
US20020170188A1 (en) 2002-11-21
EP1260309A3 (de) 2004-03-03
US6722289B2 (en) 2004-04-20
JP2002341076A (ja) 2002-11-27
JP4560235B2 (ja) 2010-10-13
EP1260309B1 (de) 2009-10-21
EP1260309A2 (de) 2002-11-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition