DE60213097T2 - Verfahren zum auftragen einer sperrbeschichtung auf einem polymersubstrat und zusammensetzung zur herstellung dieser sperrbeschichtung - Google Patents
Verfahren zum auftragen einer sperrbeschichtung auf einem polymersubstrat und zusammensetzung zur herstellung dieser sperrbeschichtung Download PDFInfo
- Publication number
- DE60213097T2 DE60213097T2 DE2002613097 DE60213097T DE60213097T2 DE 60213097 T2 DE60213097 T2 DE 60213097T2 DE 2002613097 DE2002613097 DE 2002613097 DE 60213097 T DE60213097 T DE 60213097T DE 60213097 T2 DE60213097 T2 DE 60213097T2
- Authority
- DE
- Germany
- Prior art keywords
- parylene
- layer
- polymer
- polymer substrate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 63
- 239000011248 coating agent Substances 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 48
- 239000000203 mixture Substances 0.000 title claims abstract description 23
- 229920000307 polymer substrate Polymers 0.000 title claims description 25
- 229920000052 poly(p-xylylene) Polymers 0.000 claims abstract description 108
- 229920000642 polymer Polymers 0.000 claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 230000004888 barrier function Effects 0.000 claims abstract description 39
- 229920002379 silicone rubber Polymers 0.000 claims abstract description 28
- 239000004945 silicone rubber Substances 0.000 claims abstract description 28
- 238000000137 annealing Methods 0.000 claims abstract description 20
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 9
- 239000000356 contaminant Substances 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 claims description 55
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 claims description 41
- 239000011229 interlayer Substances 0.000 claims description 5
- 238000005496 tempering Methods 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- 238000001727 in vivo Methods 0.000 claims description 2
- 230000000069 prophylactic effect Effects 0.000 claims description 2
- 239000005336 safety glass Substances 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 32
- 238000000151 deposition Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 description 18
- 238000010521 absorption reaction Methods 0.000 description 11
- 239000008199 coating composition Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 239000000446 fuel Substances 0.000 description 9
- 239000003795 chemical substances by application Substances 0.000 description 8
- 239000002861 polymer material Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 7
- OOLUVSIJOMLOCB-UHFFFAOYSA-N 1633-22-3 Chemical compound C1CC(C=C2)=CC=C2CCC2=CC=C1C=C2 OOLUVSIJOMLOCB-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000005202 decontamination Methods 0.000 description 5
- 230000003588 decontaminative effect Effects 0.000 description 5
- 239000000539 dimer Substances 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 4
- 239000002283 diesel fuel Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000003518 caustics Substances 0.000 description 3
- 125000001309 chloro group Chemical group Cl* 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 239000003599 detergent Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 230000001351 cycling effect Effects 0.000 description 2
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229920002521 macromolecule Polymers 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000006082 mold release agent Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229920001084 poly(chloroprene) Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004460 silage Substances 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 239000005051 trimethylchlorosilane Substances 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZKQDCIXGCQPQNV-UHFFFAOYSA-N Calcium hypochlorite Chemical compound [Ca+2].Cl[O-].Cl[O-] ZKQDCIXGCQPQNV-UHFFFAOYSA-N 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 206010020751 Hypersensitivity Diseases 0.000 description 1
- 208000032912 Local swelling Diseases 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 235000010678 Paulownia tomentosa Nutrition 0.000 description 1
- 244000153888 Tung Species 0.000 description 1
- 230000021736 acetylation Effects 0.000 description 1
- 238000006640 acetylation reaction Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000029936 alkylation Effects 0.000 description 1
- 238000005804 alkylation reaction Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000005576 amination reaction Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000007844 bleaching agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 101150116749 chuk gene Proteins 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013479 data entry Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 229920001109 fluorescent polymer Polymers 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000026030 halogenation Effects 0.000 description 1
- 238000005658 halogenation reaction Methods 0.000 description 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 238000006396 nitration reaction Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- NRNFFDZCBYOZJY-UHFFFAOYSA-N p-quinodimethane Chemical group C=C1C=CC(=C)C=C1 NRNFFDZCBYOZJY-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229920003031 santoprene Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/0427—Coating with only one layer of a composition containing a polymer binder
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2321/00—Characterised by the use of unspecified rubbers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2383/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2465/00—Characterised by the use of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Derivatives of such polymers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31855—Of addition polymer from unsaturated monomers
- Y10T428/31931—Polyene monomer-containing
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Wood Science & Technology (AREA)
- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Paints Or Removers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/828,065 US6586048B2 (en) | 2001-04-05 | 2001-04-05 | Method for depositing a barrier coating on a polymeric substrate and composition comprising said barrier coating |
| US828065 | 2001-04-05 | ||
| PCT/US2002/004865 WO2003002270A2 (en) | 2001-04-05 | 2002-02-19 | Method for depositing a barrier coating on a polymeric substrate and composition for manufacturihg said barrier coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60213097D1 DE60213097D1 (de) | 2006-08-24 |
| DE60213097T2 true DE60213097T2 (de) | 2006-12-21 |
Family
ID=25250845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2002613097 Expired - Fee Related DE60213097T2 (de) | 2001-04-05 | 2002-02-19 | Verfahren zum auftragen einer sperrbeschichtung auf einem polymersubstrat und zusammensetzung zur herstellung dieser sperrbeschichtung |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US6586048B2 (enExample) |
| EP (1) | EP1414588B1 (enExample) |
| JP (1) | JP4121950B2 (enExample) |
| KR (1) | KR20040068462A (enExample) |
| CN (1) | CN1256186C (enExample) |
| AT (1) | ATE332764T1 (enExample) |
| BR (1) | BR0208701A (enExample) |
| CA (1) | CA2443661A1 (enExample) |
| DE (1) | DE60213097T2 (enExample) |
| IL (2) | IL158284A0 (enExample) |
| MX (1) | MXPA03009110A (enExample) |
| WO (1) | WO2003002270A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014203172A1 (de) * | 2014-02-21 | 2015-08-27 | Oerlikon Leybold Vacuum Gmbh | Beschichtete CFK Oberflächen von Turbomolekularpumpen |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020187350A1 (en) * | 2001-01-29 | 2002-12-12 | Honeywell International Inc. | Robust highly reflective optical construction |
| US20040034275A1 (en) | 2002-07-29 | 2004-02-19 | Peter Forsell | Multi-material incontinence treatment constriction device |
| US20040133219A1 (en) * | 2002-07-29 | 2004-07-08 | Peter Forsell | Multi-material constriction device for forming stoma opening |
| MXPA05001208A (es) * | 2002-07-29 | 2005-06-08 | Potencia Medical Ag | Implante durable. |
| CA2493779C (en) * | 2002-07-29 | 2011-08-16 | Potencia Medical Ag | Multi-material penis constriction device |
| US7413706B2 (en) * | 2003-12-19 | 2008-08-19 | Palo Alto Research Center Incorporated | Replaceable parylene membranes for nanocalorimeter |
| US6997179B1 (en) | 2004-01-13 | 2006-02-14 | Essex Pb&R Corporation | Protective hood |
| ATE440622T1 (de) * | 2004-07-27 | 2009-09-15 | Cordis Corp | Verfahren zur beschichtung von stents |
| US7575781B2 (en) * | 2004-08-03 | 2009-08-18 | Sur Modics, Inc. | Method for depositing a polymeric coating on a substrate |
| WO2006038702A1 (en) * | 2004-10-06 | 2006-04-13 | Daikin Industries, Ltd. | Laminated article having excellent stain-proofing property and interlayer adhesion and method of production of same |
| KR100700000B1 (ko) * | 2004-10-19 | 2007-03-26 | 삼성에스디아이 주식회사 | 표시장치와 그 제조방법 |
| KR100588773B1 (ko) * | 2005-02-28 | 2006-06-20 | 주식회사 모젬 | 무선단말기의 키패드 및 그 제조방법 |
| KR20060105447A (ko) * | 2005-03-29 | 2006-10-11 | 엘지전자 주식회사 | 네트워크 노드의 과부하 관리 방법 및 시스템 |
| EP1904663A2 (en) * | 2005-04-21 | 2008-04-02 | California Institute of Technology | Method for decreasing chemical diffusion in parylene and trapping at parylene-to-parylene interfaces |
| US20070128420A1 (en) * | 2005-12-07 | 2007-06-07 | Mariam Maghribi | Hybrid composite for biological tissue interface devices |
| US7531481B2 (en) | 2006-03-21 | 2009-05-12 | Kolbo Philip A | Method for transferring a dye sublimation ink image onto an elastomeric substrate |
| WO2008022258A2 (en) * | 2006-08-16 | 2008-02-21 | Surmodics, Inc. | Methods and materials for increasing the adhesion of elution control matrices to substrates |
| GB2456747A (en) * | 2007-10-12 | 2009-07-29 | Laryngeal Mask Co Ltd | Laryngeal mask airway device with a parylene coating |
| TWI508331B (zh) * | 2008-11-13 | 2015-11-11 | Maven Optronics Corp | 用於形成螢光轉換型發光元件之薄膜螢光層的系統及方法、以及用於螢光轉換型發光元件之薄膜螢光層 |
| DE102008063818B4 (de) * | 2008-12-19 | 2012-12-13 | Otto Bock Healthcare Gmbh | Verfahren zur Herstellung eines orthopädischen Polsters |
| GB2479154A (en) * | 2010-03-30 | 2011-10-05 | Camvac Ltd | Electron flux coated substrate |
| RU2461429C2 (ru) * | 2010-09-03 | 2012-09-20 | Российская Федерация, от имени которой выступает Министерство образования и науки РФ (Минобрнаука РФ) | Способ получения пленок полипараксилилена и его производных |
| CN103189762A (zh) * | 2010-11-02 | 2013-07-03 | 3M创新有限公司 | 反射制品及其制备方法 |
| US8723042B2 (en) | 2011-03-17 | 2014-05-13 | Electronics And Telecommunications Research Institute | Flexible flat cable and manufacturing method thereof |
| JP2014524980A (ja) * | 2011-07-08 | 2014-09-25 | スペシャルティ コーティング システムズ， インク． | 抗菌性パリレン・コーティング及び同コーティングを蒸着する方法 |
| US11220217B2 (en) | 2013-01-24 | 2022-01-11 | SMR Patents S.à.r.l. | Rearview device with moveable head assembly and method of assembling same |
| JP6251189B2 (ja) | 2012-01-24 | 2017-12-20 | エスエムアール・パテンツ・ソシエテ・ア・レスポンサビリテ・リミテ | クロムをベースとする反射被膜 |
| US11794649B2 (en) | 2012-01-24 | 2023-10-24 | SMR Patents S.à.r.l. | Rearview device with moveable head assembly and method of assembling same |
| US11519585B2 (en) | 2012-01-24 | 2022-12-06 | SMR Patent S.à.r.l. | Covering devices for use with vehicle parts |
| CN102637609A (zh) * | 2012-04-16 | 2012-08-15 | 中国电子科技集团公司第十研究所 | 用真空气相沉积膜对毫米波电路组件进行防护处理的方法 |
| DE102012010825B3 (de) * | 2012-05-15 | 2013-03-28 | Otto Bock Healthcare Gmbh | Flexibles Laminat und Verfahren zu seiner Herstellung |
| US9024526B1 (en) | 2012-06-11 | 2015-05-05 | Imaging Systems Technology, Inc. | Detector element with antenna |
| KR102167482B1 (ko) * | 2013-03-15 | 2020-10-19 | 에이치제트오 인코포레이티드 | 상이한 유형의 내습성 재료들의 조합 |
| US20170130061A1 (en) * | 2015-11-09 | 2017-05-11 | Hzo, Inc. | Hybrid parylene-metal oxide interstacked coatings |
| US10553512B2 (en) * | 2015-11-09 | 2020-02-04 | Hzo, Inc. | Hybrid parylene-metal oxide layers for corrosion resistant coatings |
| US20170159178A1 (en) * | 2015-11-24 | 2017-06-08 | Hzo, Inc. | Ald/parylene multi-layer thin film stack |
| US12151616B2 (en) | 2017-05-24 | 2024-11-26 | SMR Patents S.à.r.l. | Rearview device with moveable head assembly and method of assembling same |
| US12122297B2 (en) | 2016-11-14 | 2024-10-22 | SMR Patents S.à.r.l. | Rearview device with moveable head assembly and method of assembling same |
| CN107474225B (zh) * | 2017-09-20 | 2019-05-10 | 陕西科技大学 | 一种化学气相沉积法制备聚对二甲苯纳米纤维的方法 |
| CN107653506B (zh) * | 2017-09-20 | 2019-06-21 | 陕西科技大学 | 一种化学气相沉积法制备可降解聚合物纳米纤维的方法 |
| KR102684674B1 (ko) * | 2019-10-07 | 2024-07-15 | 주식회사 와인 | 코팅 방법, 및 이에 의하여 얻어지는 물품 |
| KR102695904B1 (ko) * | 2019-10-07 | 2024-08-19 | 주식회사 와인 | 스텐트 코팅방법, 및 이에 의하여 제조되는 스텐트 |
| KR102704605B1 (ko) * | 2019-11-04 | 2024-09-10 | 주식회사 와인 | 펠리클 프레임 코팅방법, 및 이에 의하여 얻어지는 펠리클 |
| CN114574094B (zh) * | 2022-03-03 | 2023-03-03 | 上海派拉纶生物技术股份有限公司 | 一种高可靠性集成电路防护涂层 |
| CN117187773B (zh) * | 2023-11-03 | 2024-03-08 | 上海锐畅医疗科技有限公司 | 介入医疗器械亲水涂层及其制备方法 |
| CN120841439A (zh) * | 2025-07-17 | 2025-10-28 | 安徽华鑫微纳集成电路有限公司 | 一种基于牺牲层释放工艺的微电极制备方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3342754A (en) | 1966-02-18 | 1967-09-19 | Union Carbide Corp | Para-xylylene polymers |
| US3573968A (en) * | 1968-01-22 | 1971-04-06 | Union Carbide Corp | Process for coating solid substrates with para-xylylene polymers |
| IT1222434B (it) * | 1987-08-03 | 1990-09-05 | Ausimont Spa | Contenitore a bassa permeabilita' ai vapori idrocarburi e processo per la loro produzione |
| FR2656459A1 (fr) | 1989-12-22 | 1991-06-28 | Boye Sa Manuf Vetements Paul | Materiau pour la realisation d'equipements de protection a l'encontre des agressions nucleaires, biologiques et chimiques. |
| US5075174A (en) * | 1990-07-31 | 1991-12-24 | Acadia Polymers, Inc. | Parylene coated elastomers |
| CA2027850C (en) | 1990-10-17 | 2000-06-27 | Pierre P. Meunier | Stretchable protective fabric and protective apparel made therefrom |
| JP3056780B2 (ja) * | 1990-11-07 | 2000-06-26 | ティーディーケイ株式会社 | 改質ポリ（ｐ―キシリレン）保護膜及びその製造方法 |
| CA2174279C (en) | 1995-09-26 | 2001-01-30 | Francis J. Walker | Anti-bleed coating for silicone automobile gaskets |
| US5879808A (en) * | 1995-10-27 | 1999-03-09 | Alpha Metals, Inc. | Parylene polymer layers |
| CN1201399A (zh) | 1995-11-07 | 1998-12-09 | 卡莫多应用技术公司 | 销毁化学战争试剂的方法和设备 |
| US5955161A (en) | 1996-01-30 | 1999-09-21 | Becton Dickinson And Company | Blood collection tube assembly |
| FI963157L (fi) | 1996-08-13 | 1998-02-14 | Silitek Corp | Menetelmä näppäimistön päällystämiseksi |
| NL1007781C2 (nl) * | 1997-12-12 | 1999-06-15 | Packard Instr Bv | Microtiterplaat. |
| JP2000071451A (ja) * | 1998-09-02 | 2000-03-07 | Konica Corp | 圧電セラミック素子及びその製造方法 |
-
2001
- 2001-04-05 US US09/828,065 patent/US6586048B2/en not_active Expired - Fee Related
-
2002
- 2002-02-19 JP JP2003508492A patent/JP4121950B2/ja not_active Expired - Fee Related
- 2002-02-19 BR BR0208701A patent/BR0208701A/pt not_active IP Right Cessation
- 2002-02-19 EP EP20020765770 patent/EP1414588B1/en not_active Expired - Lifetime
- 2002-02-19 WO PCT/US2002/004865 patent/WO2003002270A2/en not_active Ceased
- 2002-02-19 CA CA 2443661 patent/CA2443661A1/en not_active Abandoned
- 2002-02-19 KR KR10-2003-7013115A patent/KR20040068462A/ko not_active Abandoned
- 2002-02-19 IL IL15828402A patent/IL158284A0/xx active IP Right Grant
- 2002-02-19 AT AT02765770T patent/ATE332764T1/de not_active IP Right Cessation
- 2002-02-19 MX MXPA03009110A patent/MXPA03009110A/es active IP Right Grant
- 2002-02-19 DE DE2002613097 patent/DE60213097T2/de not_active Expired - Fee Related
- 2002-02-19 CN CNB028106997A patent/CN1256186C/zh not_active Expired - Fee Related
-
2003
- 2003-10-07 IL IL158284A patent/IL158284A/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014203172A1 (de) * | 2014-02-21 | 2015-08-27 | Oerlikon Leybold Vacuum Gmbh | Beschichtete CFK Oberflächen von Turbomolekularpumpen |
Also Published As
| Publication number | Publication date |
|---|---|
| IL158284A (en) | 2007-12-03 |
| EP1414588B1 (en) | 2006-07-12 |
| WO2003002270A2 (en) | 2003-01-09 |
| EP1414588A2 (en) | 2004-05-06 |
| CN1256186C (zh) | 2006-05-17 |
| CN1518482A (zh) | 2004-08-04 |
| US6586048B2 (en) | 2003-07-01 |
| KR20040068462A (ko) | 2004-07-31 |
| JP2004535494A (ja) | 2004-11-25 |
| JP4121950B2 (ja) | 2008-07-23 |
| BR0208701A (pt) | 2006-01-24 |
| DE60213097D1 (de) | 2006-08-24 |
| CA2443661A1 (en) | 2003-01-09 |
| IL158284A0 (en) | 2004-05-12 |
| US20020182392A1 (en) | 2002-12-05 |
| ATE332764T1 (de) | 2006-08-15 |
| WO2003002270A3 (en) | 2004-03-04 |
| MXPA03009110A (es) | 2004-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4121950B2 (ja) | バリヤーコーティングを高分子基体に付着させる方法および該バリヤーコーティングを含む組成物 | |
| DE69305658T2 (de) | Flammhemmender, wasserdichter und atmungsfähiger verbundstoff | |
| DE102014105939B4 (de) | Verfahren zur Herstellung einer Entspiegelungsschicht auf einer Silikonoberfläche und optisches Element | |
| DE69111699T2 (de) | Fluoropolymer-Überzugszusammensetzung und damit beschichteter Gegenstand. | |
| DE69230212T2 (de) | Dauerhaft wasserabweisende Glasoberfläche | |
| EP2203258B1 (de) | Kratzfeste und dehnbare korrosionsschutzschicht für leichtmetallsubstrate | |
| DE68909110T2 (de) | Durchsichtige, kratz- und abriebfeste Dunstbeständigkeit und energieabsorbierende Eigenschaften aufweisende Polyurethanschicht, Verfahren zu deren Herstellung sowie diese benutzendes laminiertes Glas. | |
| DE60133578T2 (de) | Oberflächenmodifizierungsverfahren | |
| EP1027169A2 (de) | Verfahren zur korrosionsfesten beschichtung von metallsubstraten mittels plasmapolymerisation | |
| EP3728156A1 (de) | Gegenstand mit einer hochtemperaturbeständigen omniphoben antihaftbeschichtung, sowie verfahren zur herstellung des gegenstands | |
| DE102016214493A1 (de) | Passives elektrisches Bauteil mit Beschichtung zur Verbesserung der Belastbarkeit | |
| DE3784873T2 (de) | Verfahren zur verstaerkung von materialien mit diskontinuierlicher struktur. | |
| DE102015120901A1 (de) | Polycarbonat-Scheinwerferscheibe mit einer infundierten Hartbeschichtung und diesbezügliches Verfahren | |
| JP3552387B2 (ja) | 防汚コーティング剤組成物 | |
| DE2353495C3 (de) | Verfahren zur Erzeugung einer hydrophilen Oberfläche auf Polysiloxanelastomeren | |
| EP0232398B1 (de) | Verfahren zum modifizieren der oberfläche von polytetrafluorethylen, modifizierte formkörper auf der basis von polytetrafluorethylen und verwendung derselben | |
| DE102022119250A1 (de) | Plasmapolymerer siliziumorganischer Festkörper, insbesondere plasmacopolymere siliziumorganische Schicht, und beschichtetes Substrat sowie Verfahren zur Herstellung und Verwendung der plasma(co)polymeren siliziumorganischen Schicht | |
| EP3259396B1 (de) | Verfahren zur verbesserung der haftung zwischen einem verstärkungselement und einem elastomeren matrixmaterial | |
| DE3884711T2 (de) | Verfahren zur Herstellung von Oberflächen mit gutem Gleitverhalten. | |
| EP1042389B1 (de) | Verwendung eines silikonkautschuks zur herstellung eines absorbermaterials | |
| DE102023125172A1 (de) | Plasmapolymerer Festkörper, entsprechende Verwendungen und entsprechende Verfahren | |
| EP0961806B1 (de) | Verfahren zur modifizierung von substratoberflächen aus polymeren oder copolymeren mit methacrylatanteil | |
| AU2002329170B2 (en) | Method for depositing a barrier coating on a polymeric substrate and composition comprising said barrier coating | |
| DE102014219095A1 (de) | Wafer-Träger-Anordnung | |
| DE10042429B4 (de) | Oberflächenstabilisierung bei siliciumreichem Silicaglas unter Verwednung von verlängerter Post-Ablagerungsverzögerungszeit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |