DE60208446T2 - Verfahren zur Herstellung einer Anzeigevorrichtung - Google Patents

Verfahren zur Herstellung einer Anzeigevorrichtung Download PDF

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Publication number
DE60208446T2
DE60208446T2 DE60208446T DE60208446T DE60208446T2 DE 60208446 T2 DE60208446 T2 DE 60208446T2 DE 60208446 T DE60208446 T DE 60208446T DE 60208446 T DE60208446 T DE 60208446T DE 60208446 T2 DE60208446 T2 DE 60208446T2
Authority
DE
Germany
Prior art keywords
layer
substrate
porous
semiconductor substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60208446T
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German (de)
English (en)
Other versions
DE60208446D1 (de
Inventor
Takao Yonehara
Kiyofumi Sakaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60208446D1 publication Critical patent/DE60208446D1/de
Publication of DE60208446T2 publication Critical patent/DE60208446T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13454—Drivers integrated on the active matrix substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/105—Materials and properties semiconductor single crystal Si
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/01—Function characteristic transmissive

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Element Separation (AREA)
DE60208446T 2001-01-31 2002-01-30 Verfahren zur Herstellung einer Anzeigevorrichtung Expired - Lifetime DE60208446T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001024172 2001-01-31
JP2001024172A JP2002229473A (ja) 2001-01-31 2001-01-31 表示装置の製造方法

Publications (2)

Publication Number Publication Date
DE60208446D1 DE60208446D1 (de) 2006-02-02
DE60208446T2 true DE60208446T2 (de) 2006-08-03

Family

ID=18889349

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60203426T Expired - Lifetime DE60203426T2 (de) 2001-01-31 2002-01-30 Verfahren zur Herstellung einer Anzeigevorrichtung
DE60208446T Expired - Lifetime DE60208446T2 (de) 2001-01-31 2002-01-30 Verfahren zur Herstellung einer Anzeigevorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE60203426T Expired - Lifetime DE60203426T2 (de) 2001-01-31 2002-01-30 Verfahren zur Herstellung einer Anzeigevorrichtung

Country Status (4)

Country Link
US (1) US6891578B2 (fr)
EP (2) EP1229380B1 (fr)
JP (1) JP2002229473A (fr)
DE (2) DE60203426T2 (fr)

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JP2004311955A (ja) * 2003-03-25 2004-11-04 Sony Corp 超薄型電気光学表示装置の製造方法
US7622363B2 (en) * 2003-05-06 2009-11-24 Canon Kabushiki Kaisha Semiconductor substrate, semiconductor device, light emitting diode and producing method therefor
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US20050124137A1 (en) * 2003-05-07 2005-06-09 Canon Kabushiki Kaisha Semiconductor substrate and manufacturing method therefor
TWI242232B (en) * 2003-06-09 2005-10-21 Canon Kk Semiconductor substrate, semiconductor device, and method of manufacturing the same
JP2005005509A (ja) * 2003-06-12 2005-01-06 Canon Inc 薄膜トランジスタ及びその製造方法
JP2005026472A (ja) * 2003-07-02 2005-01-27 Sharp Corp 半導体装置の製造方法
US7199637B2 (en) * 2003-09-02 2007-04-03 Semiconductor Energy Laboratory Co., Ltd. Rectifier circuit without alternating-current feedback
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US20050132332A1 (en) * 2003-12-12 2005-06-16 Abhay Sathe Multi-location coordinated test apparatus
CN100481327C (zh) * 2004-04-28 2009-04-22 汉阳大学校产学协力团 柔性光电设备及其制造方法
US7023520B2 (en) * 2004-06-18 2006-04-04 Charmica Photoelectronic Co., Ltd. Method and system for fabricating liquid crystal film and method for fabricating brightening film
JP2006012914A (ja) * 2004-06-22 2006-01-12 Canon Inc 集積回路チップの製造方法及び半導体装置
JP4771510B2 (ja) * 2004-06-23 2011-09-14 キヤノン株式会社 半導体層の製造方法及び基板の製造方法
JP4950047B2 (ja) * 2004-07-22 2012-06-13 ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティ ゲルマニウムの成長方法及び半導体基板の製造方法
KR101152141B1 (ko) * 2005-06-08 2012-06-15 삼성전자주식회사 액정표시패널과 액정표시패널의 제조방법
JP5171016B2 (ja) 2006-10-27 2013-03-27 キヤノン株式会社 半導体部材、半導体物品の製造方法、その製造方法を用いたｌｅｄアレイ
JP2009094144A (ja) * 2007-10-04 2009-04-30 Canon Inc 発光素子の製造方法
TWI493609B (zh) * 2007-10-23 2015-07-21 Semiconductor Energy Lab 半導體基板、顯示面板及顯示裝置的製造方法
FR2936357B1 (fr) * 2008-09-24 2010-12-10 Commissariat Energie Atomique Procede de report de puces sur un substrat.
JP5695535B2 (ja) * 2011-09-27 2015-04-08 株式会社東芝 表示装置の製造方法
CN107393934B (zh) 2017-08-14 2020-02-21 京东方科技集团股份有限公司 一种阵列基板、其制作方法及显示装置
CN107507841B (zh) * 2017-09-22 2021-01-22 京东方科技集团股份有限公司 阵列基板及其制作方法、显示装置
JP2022541172A (ja) * 2019-07-19 2022-09-22 アイキューイー ピーエルシー 調整可能な誘電率及び調整可能な熱伝導率を有する半導体材料

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JP4803884B2 (ja) 2001-01-31 2011-10-26 キヤノン株式会社 薄膜半導体装置の製造方法

Also Published As

Publication number Publication date
DE60203426D1 (de) 2005-05-04
US6891578B2 (en) 2005-05-10
EP1482353B1 (fr) 2005-12-28
EP1482353A1 (fr) 2004-12-01
EP1229380A1 (fr) 2002-08-07
EP1229380B1 (fr) 2005-03-30
DE60203426T2 (de) 2006-05-11
US20020102758A1 (en) 2002-08-01
DE60208446D1 (de) 2006-02-02
JP2002229473A (ja) 2002-08-14

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