DE602008002574D1 - Leitfähige dickschichtzusammensetzung und verfahren zu ihrer verwendung bei der herstellung von halbleiterbauelementen - Google Patents
Leitfähige dickschichtzusammensetzung und verfahren zu ihrer verwendung bei der herstellung von halbleiterbauelementenInfo
- Publication number
- DE602008002574D1 DE602008002574D1 DE602008002574T DE602008002574T DE602008002574D1 DE 602008002574 D1 DE602008002574 D1 DE 602008002574D1 DE 602008002574 T DE602008002574 T DE 602008002574T DE 602008002574 T DE602008002574 T DE 602008002574T DE 602008002574 D1 DE602008002574 D1 DE 602008002574D1
- Authority
- DE
- Germany
- Prior art keywords
- mol
- manufacture
- layer composition
- semiconductor components
- conductive thick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000203 mixture Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/14—Conductive material dispersed in non-conductive inorganic material
- H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Conductive Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/786,717 US7731868B2 (en) | 2007-04-12 | 2007-04-12 | Thick film conductive composition and process for use in the manufacture of semiconductor device |
PCT/US2008/004657 WO2008127624A1 (en) | 2007-04-12 | 2008-04-09 | Thick film conductive composition and processes for use in the manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602008002574D1 true DE602008002574D1 (de) | 2010-10-28 |
Family
ID=39573723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602008002574T Active DE602008002574D1 (de) | 2007-04-12 | 2008-04-09 | Leitfähige dickschichtzusammensetzung und verfahren zu ihrer verwendung bei der herstellung von halbleiterbauelementen |
Country Status (8)
Country | Link |
---|---|
US (1) | US7731868B2 (de) |
EP (1) | EP2135294B1 (de) |
JP (1) | JP2010524257A (de) |
KR (1) | KR101086183B1 (de) |
CN (1) | CN101641796B (de) |
AT (1) | ATE481737T1 (de) |
DE (1) | DE602008002574D1 (de) |
WO (1) | WO2008127624A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0307547D0 (en) * | 2003-04-01 | 2003-05-07 | Du Pont | Conductor composition V |
US8383011B2 (en) * | 2008-01-30 | 2013-02-26 | Basf Se | Conductive inks with metallo-organic modifiers |
DE102008036837A1 (de) * | 2008-08-07 | 2010-02-18 | Epcos Ag | Sensorvorrichtung und Verfahren zur Herstellung |
DE102008037613A1 (de) * | 2008-11-28 | 2010-06-02 | Schott Solar Ag | Verfahren zur Herstellung eines Metallkontakts |
TW201025622A (en) | 2008-12-17 | 2010-07-01 | Ind Tech Res Inst | Electrode for solar cell and fabricating method thereof |
JP5293348B2 (ja) * | 2009-03-31 | 2013-09-18 | 三菱マテリアル株式会社 | 導電性組成物及びそれを用いた太陽電池の製造方法並びに太陽電池 |
US20100269893A1 (en) * | 2009-04-23 | 2010-10-28 | E. I. Du Pont De Nemours And Company | Metal pastes and use thereof in the production of positive electrodes on p-type silicon surfaces |
TW201043359A (en) * | 2009-05-01 | 2010-12-16 | Du Pont | Silver particles and a process for making them |
US8231704B2 (en) * | 2009-05-01 | 2012-07-31 | E I Du Pont De Nemours And Company | Silver particles and processes for making them |
CN102428148A (zh) * | 2009-05-20 | 2012-04-25 | 纳幕尔杜邦公司 | 相变油墨组合物 |
KR101144810B1 (ko) * | 2009-07-06 | 2012-05-11 | 엘지전자 주식회사 | 태양전지용 전극 페이스트, 이를 이용한 태양전지, 및 태양전지의 제조방법 |
CN102123961A (zh) | 2009-08-07 | 2011-07-13 | Lg化学株式会社 | 制备硅太阳能电池的无铅玻璃料粉末、其制备方法、包含其的金属膏组合物和硅太阳能电池 |
US20110048527A1 (en) * | 2009-08-25 | 2011-03-03 | E.I. Du Pont De Nemours And Company | Silver thick film paste compositions and their use in conductors for photovoltaic cells |
JP2011144726A (ja) | 2010-01-13 | 2011-07-28 | Suzuki Motor Corp | 内燃機関の制御装置 |
JP4868079B1 (ja) * | 2010-01-25 | 2012-02-01 | 日立化成工業株式会社 | n型拡散層形成組成物、n型拡散層の製造方法、及び太陽電池セルの製造方法 |
JP5540810B2 (ja) * | 2010-03-24 | 2014-07-02 | 三菱マテリアル株式会社 | 導電性組成物及びそれを用いた太陽電池の製造方法並びに太陽電池 |
JP5540811B2 (ja) * | 2010-03-24 | 2014-07-02 | 三菱マテリアル株式会社 | 導電性組成物及びそれを用いた太陽電池の製造方法並びに太陽電池 |
CN109014180B (zh) * | 2010-05-04 | 2021-08-24 | 太阳帕斯特有限责任公司 | 包含铅氧化物和碲氧化物的厚膜糊料及其在半导体装置制造中的用途 |
US8366799B2 (en) | 2010-08-30 | 2013-02-05 | E I Du Pont De Nemours And Company | Silver particles and a process for making them |
KR101428131B1 (ko) * | 2010-10-28 | 2014-08-07 | 엘지이노텍 주식회사 | 전도성 페이스트 조성물 |
KR101199194B1 (ko) | 2010-10-28 | 2012-11-07 | 엘지이노텍 주식회사 | 태양 전지의 전면 전극용 페이스트 조성물 및 태양 전지 |
US8574338B2 (en) | 2010-11-17 | 2013-11-05 | E I Du Pont De Nemours And Company | Reactor and continuous process for producing silver powders |
US9039942B2 (en) | 2011-12-21 | 2015-05-26 | E I Du Pont De Nemours And Company | Lead-free conductive paste composition and semiconductor devices made therewith |
EP2607327A1 (de) * | 2011-12-23 | 2013-06-26 | Heraeus Precious Metals GmbH & Co. KG | Dickfilmzusammensetzung mit Antimonoxid und ihre Verwendung bei der Herstellung von Halbleiterbauelementen |
US9240515B2 (en) | 2013-11-25 | 2016-01-19 | E I Du Pont De Nemours And Company | Method of manufacturing a solar cell |
CN105321594B (zh) * | 2015-02-26 | 2017-04-26 | 深圳市春仰科技有限公司 | 一种硅太阳能电池正面银浆及其制备方法 |
US10636540B2 (en) | 2015-03-27 | 2020-04-28 | Heraeus Deutschland GmbH & Co. KG | Electro-conductive pastes comprising an oxide additive |
US10056508B2 (en) | 2015-03-27 | 2018-08-21 | Heraeus Deutschland GmbH & Co. KG | Electro-conductive pastes comprising a metal compound |
JP6624930B2 (ja) | 2015-12-26 | 2019-12-25 | 日亜化学工業株式会社 | 発光素子及びその製造方法 |
JP6683003B2 (ja) | 2016-05-11 | 2020-04-15 | 日亜化学工業株式会社 | 半導体素子、半導体装置及び半導体素子の製造方法 |
JP6720747B2 (ja) | 2016-07-19 | 2020-07-08 | 日亜化学工業株式会社 | 半導体装置、基台及びそれらの製造方法 |
CN107068238A (zh) * | 2016-12-09 | 2017-08-18 | 东莞珂洛赫慕电子材料科技有限公司 | 一种铝合金基板用厚膜电路中温烧结全银电极浆料及其制备方法 |
CN107274959A (zh) * | 2017-05-03 | 2017-10-20 | 陶志斌 | 无机导电端头膜及其制备方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4256513A (en) | 1978-10-19 | 1981-03-17 | Matsushita Electric Industrial Co., Ltd. | Photoelectric conversion device |
JPS6249676A (ja) | 1985-08-29 | 1987-03-04 | Sharp Corp | 太陽電池 |
EP0234338A1 (de) * | 1986-02-13 | 1987-09-02 | W.C. Heraeus GmbH | Ein Antrag gemäss Regel 88 EPÜ auf Berichtigung der Beschreibungsseite 22, Zeile 3 liegt vor. Über diesen Antrag wird im Laufe des Verfahrens von der Prüfungsabteilung eine Entscheidung getroffen werden |
JP3152065B2 (ja) * | 1994-06-20 | 2001-04-03 | 株式会社村田製作所 | 導電性ペーストおよび積層セラミックコンデンサ |
JP3209089B2 (ja) * | 1996-05-09 | 2001-09-17 | 昭栄化学工業株式会社 | 導電性ペースト |
JP2001118425A (ja) * | 1999-10-21 | 2001-04-27 | Murata Mfg Co Ltd | 導電性ペースト |
JP2001243836A (ja) | 1999-12-21 | 2001-09-07 | Murata Mfg Co Ltd | 導電性ペースト及びそれを用いた印刷配線板 |
JP2001313400A (ja) * | 2000-04-28 | 2001-11-09 | Kyocera Corp | 太陽電池素子の形成方法 |
JP2003077336A (ja) * | 2001-08-30 | 2003-03-14 | Kyocera Corp | 導電性ペースト及びこれを用いた積層セラミックコンデンサ |
JP4103672B2 (ja) | 2003-04-28 | 2008-06-18 | 株式会社村田製作所 | 導電性ペーストおよびガラス回路構造物 |
JP2005019185A (ja) * | 2003-06-26 | 2005-01-20 | Murata Mfg Co Ltd | 銅導電性ペーストおよび積層セラミック電子部品 |
JP4432604B2 (ja) * | 2004-04-30 | 2010-03-17 | 昭栄化学工業株式会社 | 導電性ペースト |
JP5060722B2 (ja) * | 2004-11-10 | 2012-10-31 | 日立粉末冶金株式会社 | 電子放出源形成用組成物及び電子放出源用被膜の形成方法 |
CN1881482A (zh) * | 2005-03-09 | 2006-12-20 | E.I.内穆尔杜邦公司 | 黑导电厚膜组合物,黑电极及其制造方法 |
US7435361B2 (en) * | 2005-04-14 | 2008-10-14 | E.I. Du Pont De Nemours And Company | Conductive compositions and processes for use in the manufacture of semiconductor devices |
US7326367B2 (en) | 2005-04-25 | 2008-02-05 | E.I. Du Pont De Nemours And Company | Thick film conductor paste compositions for LTCC tape in microwave applications |
US8093491B2 (en) | 2005-06-03 | 2012-01-10 | Ferro Corporation | Lead free solar cell contacts |
JP4182174B2 (ja) * | 2006-03-07 | 2008-11-19 | 株式会社村田製作所 | 導電性ペースト及び太陽電池 |
-
2007
- 2007-04-12 US US11/786,717 patent/US7731868B2/en not_active Expired - Fee Related
-
2008
- 2008-04-09 KR KR1020097023499A patent/KR101086183B1/ko not_active IP Right Cessation
- 2008-04-09 CN CN2008800093140A patent/CN101641796B/zh not_active Expired - Fee Related
- 2008-04-09 AT AT08742744T patent/ATE481737T1/de not_active IP Right Cessation
- 2008-04-09 DE DE602008002574T patent/DE602008002574D1/de active Active
- 2008-04-09 WO PCT/US2008/004657 patent/WO2008127624A1/en active Application Filing
- 2008-04-09 JP JP2010503061A patent/JP2010524257A/ja active Pending
- 2008-04-09 EP EP08742744A patent/EP2135294B1/de not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
EP2135294B1 (de) | 2010-09-15 |
JP2010524257A (ja) | 2010-07-15 |
CN101641796A (zh) | 2010-02-03 |
ATE481737T1 (de) | 2010-10-15 |
US20080254567A1 (en) | 2008-10-16 |
EP2135294A1 (de) | 2009-12-23 |
WO2008127624A1 (en) | 2008-10-23 |
US7731868B2 (en) | 2010-06-08 |
KR20100005121A (ko) | 2010-01-13 |
KR101086183B1 (ko) | 2011-11-25 |
CN101641796B (zh) | 2011-03-16 |
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