DE602006013429D1 - Planar-oxidierungsverfahren zur herstellung eines lokalisierten vergrabenen isolators - Google Patents

Planar-oxidierungsverfahren zur herstellung eines lokalisierten vergrabenen isolators

Info

Publication number
DE602006013429D1
DE602006013429D1 DE602006013429T DE602006013429T DE602006013429D1 DE 602006013429 D1 DE602006013429 D1 DE 602006013429D1 DE 602006013429 T DE602006013429 T DE 602006013429T DE 602006013429 T DE602006013429 T DE 602006013429T DE 602006013429 D1 DE602006013429 D1 DE 602006013429D1
Authority
DE
Germany
Prior art keywords
verbrain
isolator
localized
preparing
oxidation process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006013429T
Other languages
English (en)
Inventor
Thierry Camps
Antonio Munoz-Yague
Guilhem Almuneau
Veronique Bardinal-Delagnes
Chantal Fontaine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of DE602006013429D1 publication Critical patent/DE602006013429D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
    • H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
    • H01L21/02178—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing aluminium, e.g. Al2O3
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/3165—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation
    • H01L21/31654—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself
    • H01L21/31658—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe
    • H01L21/31662—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe of silicon in uncombined form
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/3165—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation
    • H01L21/31654—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself
    • H01L21/31658—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe
    • H01L21/31666—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe of AIII BV compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Semiconductor Lasers (AREA)
  • Formation Of Insulating Films (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
  • Element Separation (AREA)
  • Materials For Medical Uses (AREA)
DE602006013429T 2005-02-07 2006-02-02 Planar-oxidierungsverfahren zur herstellung eines lokalisierten vergrabenen isolators Active DE602006013429D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0501201A FR2881876B1 (fr) 2005-02-07 2005-02-07 Procede d'oxydation planaire pour realiser un isolant enterre localise
PCT/FR2006/000242 WO2006082322A1 (fr) 2005-02-07 2006-02-02 Procede d’oxydation planaire pour realiser un isolant enterre localise

Publications (1)

Publication Number Publication Date
DE602006013429D1 true DE602006013429D1 (de) 2010-05-20

Family

ID=34954516

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006013429T Active DE602006013429D1 (de) 2005-02-07 2006-02-02 Planar-oxidierungsverfahren zur herstellung eines lokalisierten vergrabenen isolators

Country Status (7)

Country Link
US (1) US7932160B2 (de)
EP (1) EP1856778B1 (de)
JP (1) JP5101301B2 (de)
AT (1) ATE463839T1 (de)
DE (1) DE602006013429D1 (de)
FR (1) FR2881876B1 (de)
WO (1) WO2006082322A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4350774B2 (ja) * 2007-07-31 2009-10-21 キヤノン株式会社 面発光レーザ
JP4347369B2 (ja) 2007-07-31 2009-10-21 キヤノン株式会社 面発光レーザの製造方法
WO2009057764A1 (ja) * 2007-10-31 2009-05-07 Mitsubishi Chemical Corporation エッチング方法およびそれを用いた光／電子デバイスの製造方法
US9548355B1 (en) 2015-06-24 2017-01-17 International Business Machines Corporation Compound finFET device including oxidized III-V fin isolator
WO2018112295A1 (en) * 2016-12-16 2018-06-21 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Selective oxidation of transition metal nitride layers within compound semiconductor device structures
US20190341452A1 (en) 2018-05-04 2019-11-07 International Business Machines Corporation Iii-v-segmented finfet free of wafer bonding

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02226780A (ja) * 1989-02-28 1990-09-10 Mitsubishi Electric Corp 半導体レーザの製造方法
JPH04354331A (ja) * 1991-05-31 1992-12-08 Sony Corp ドライエッチング方法
US5978408A (en) * 1997-02-07 1999-11-02 Xerox Corporation Highly compact vertical cavity surface emitting lasers
JP2917971B2 (ja) * 1997-06-11 1999-07-12 日本電気株式会社 面発光レーザ
US5896408A (en) * 1997-08-15 1999-04-20 Hewlett-Packard Company Near planar native-oxide VCSEL devices and arrays using converging oxide ringlets
JP3745096B2 (ja) * 1997-10-07 2006-02-15 松下電器産業株式会社 面発光半導体レーザおよびその製造方法
JPH11145555A (ja) * 1997-11-12 1999-05-28 Oki Electric Ind Co Ltd 面発光レーザ用ミラー構造およびその形成方法
JP2000124549A (ja) * 1998-10-15 2000-04-28 Furukawa Electric Co Ltd:The 半導体レーザ素子
US6545335B1 (en) * 1999-12-27 2003-04-08 Xerox Corporation Structure and method for electrical isolation of optoelectronic integrated circuits
US6674777B1 (en) * 2000-08-31 2004-01-06 Honeywell International Inc. Protective side wall passivation for VCSEL chips
US20020182823A1 (en) * 2001-04-18 2002-12-05 Noriyuki Yokouchi Wafer oxidation reactor and a method for forming a semiconductor device
DE10140791A1 (de) * 2001-08-20 2003-03-13 Mattson Thermal Products Gmbh Verfahren zur thermischen Behandlung eines mehrere Schichten aufweisenden Substrats
US6891202B2 (en) * 2001-12-14 2005-05-10 Infinera Corporation Oxygen-doped Al-containing current blocking layers in active semiconductor devices
JP2003168845A (ja) * 2001-12-03 2003-06-13 Hitachi Ltd 半導体レーザ素子及びこれを用いた光モジュール、及び光システム
JP4442103B2 (ja) * 2003-03-24 2010-03-31 ソニー株式会社 面発光レーザ素子及びその製造方法
US7054345B2 (en) * 2003-06-27 2006-05-30 Finisar Corporation Enhanced lateral oxidation

Also Published As

Publication number Publication date
JP2008530774A (ja) 2008-08-07
US7932160B2 (en) 2011-04-26
ATE463839T1 (de) 2010-04-15
EP1856778B1 (de) 2010-04-07
JP5101301B2 (ja) 2012-12-19
FR2881876B1 (fr) 2007-05-25
US20080164560A1 (en) 2008-07-10
WO2006082322A1 (fr) 2006-08-10
FR2881876A1 (fr) 2006-08-11
EP1856778A1 (de) 2007-11-21

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