DE602006010214D1 - Vorrichtung und verfahren für präzisionsbearbeitung - Google Patents
Vorrichtung und verfahren für präzisionsbearbeitungInfo
- Publication number
- DE602006010214D1 DE602006010214D1 DE602006010214T DE602006010214T DE602006010214D1 DE 602006010214 D1 DE602006010214 D1 DE 602006010214D1 DE 602006010214 T DE602006010214 T DE 602006010214T DE 602006010214 T DE602006010214 T DE 602006010214T DE 602006010214 D1 DE602006010214 D1 DE 602006010214D1
- Authority
- DE
- Germany
- Prior art keywords
- precision processing
- precision
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/04—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a rotary work-table
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005226419A JP4839720B2 (ja) | 2005-08-04 | 2005-08-04 | 精密加工装置 |
PCT/IB2006/002161 WO2007015163A1 (en) | 2005-08-04 | 2006-08-03 | Precision machining apparatus and precision machining method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006010214D1 true DE602006010214D1 (de) | 2009-12-17 |
Family
ID=37216106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602006010214T Active DE602006010214D1 (de) | 2005-08-04 | 2006-08-03 | Vorrichtung und verfahren für präzisionsbearbeitung |
Country Status (8)
Country | Link |
---|---|
US (1) | US7950981B2 (de) |
EP (1) | EP1917123B1 (de) |
JP (1) | JP4839720B2 (de) |
KR (1) | KR100938484B1 (de) |
CN (1) | CN101237960B (de) |
DE (1) | DE602006010214D1 (de) |
TW (1) | TWI346597B (de) |
WO (1) | WO2007015163A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4852868B2 (ja) | 2005-04-04 | 2012-01-11 | トヨタ自動車株式会社 | 精密加工方法 |
JP5179206B2 (ja) * | 2008-01-25 | 2013-04-10 | 株式会社ディスコ | 板状物の切削加工方法 |
KR101086268B1 (ko) * | 2008-10-15 | 2011-11-24 | 서인갑 | 폴리싱기의 다이아몬드 바이트 가공용 각도기 고정장치 |
TWI395637B (zh) * | 2009-09-03 | 2013-05-11 | Univ Nat Sun Yat Sen | 精密拋光裝置 |
US20110275280A1 (en) * | 2010-05-07 | 2011-11-10 | National Formosa University | Method of auto scanning and scraping a work piece for a hard rail |
CN102248485B (zh) * | 2011-01-21 | 2013-04-17 | 清华大学 | 间隙磁吸附式二维磨削力测试系统 |
DE102012010004A1 (de) * | 2012-05-22 | 2013-11-28 | Satisloh Ag | Verfahren zum Schleifen von Werkstücken, insbesondere zum zentrierenden Schleifen von Werkstücken wie optischen Linsen |
JP6023598B2 (ja) * | 2013-01-30 | 2016-11-09 | コマツNtc株式会社 | 研削加工方法 |
KR101537074B1 (ko) * | 2013-08-08 | 2015-07-15 | 주식회사 에스엠에스비 | 복수의 가공부를 구비한 베어링 가공장치 |
JP6256227B2 (ja) * | 2014-07-09 | 2018-01-10 | 三菱電機株式会社 | 半導体装置の製造方法 |
CN104308739B (zh) * | 2014-10-11 | 2017-02-01 | 中国科学院宁波材料技术与工程研究所 | 精密加工装置及其控制方法 |
CN105834889A (zh) * | 2016-05-12 | 2016-08-10 | 苏州市展进机电设备有限公司 | 一种硅片自动研磨装置 |
CN106736883A (zh) * | 2017-01-03 | 2017-05-31 | 佛山市三水区琪昌机械设备有限公司 | 一种瓷砖抛光方法及其终端 |
JP6854726B2 (ja) * | 2017-07-20 | 2021-04-07 | 株式会社ディスコ | バイト切削装置 |
US11009339B2 (en) | 2018-08-23 | 2021-05-18 | Applied Materials, Inc. | Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries |
CN109746836B (zh) * | 2019-02-26 | 2024-04-19 | 中国工程物理研究院激光聚变研究中心 | 光学超精密加工磨削液智能监测报警装置及方法 |
JP7103305B2 (ja) * | 2019-05-29 | 2022-07-20 | 信越半導体株式会社 | インゴットの切断方法 |
JP7405563B2 (ja) * | 2019-11-01 | 2023-12-26 | 株式会社ディスコ | クリープフィード研削方法及び研削装置 |
KR102388694B1 (ko) * | 2020-02-24 | 2022-04-20 | 주식회사 에스지티 | 측면 홀 및 탭 가공 장치 |
JP7405649B2 (ja) * | 2020-03-04 | 2023-12-26 | 株式会社ディスコ | 被加工物の研削方法 |
IT202000004819A1 (it) * | 2020-03-06 | 2021-09-06 | Bottero Spa | Unita' di molatura o lucidatura di una lastra, in particolare una lastra di vetro, e metodo di lavorazione lastra utilizzante tale unita' |
CN111958394B (zh) * | 2020-08-18 | 2022-06-10 | 中国科学院光电技术研究所 | 一种用于抛光的精密力位控制装置 |
KR102543572B1 (ko) * | 2021-01-08 | 2023-06-20 | (주)대성엔지니어링 | 정반 연마 장치 및 이를 이용한 정반 연마 방법 |
CN114734318A (zh) * | 2022-03-15 | 2022-07-12 | 银川隆基硅材料有限公司 | 一种硅片的磨削方法和硅片的磨削装置 |
CN115106918B (zh) * | 2022-08-25 | 2022-11-15 | 四川跃航智能设备制造有限公司 | 一种自冷却式钢材抛光机装置及方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840860B1 (de) * | 1970-08-28 | 1973-12-03 | ||
JPS5016551B1 (de) * | 1970-12-19 | 1975-06-13 | ||
JPS55101369A (en) * | 1979-01-30 | 1980-08-02 | Toyoda Mach Works Ltd | Sizing device corrected at measuring position responsive to boring diameter |
JPS56126574A (en) * | 1980-02-29 | 1981-10-03 | Toyoda Mach Works Ltd | Safety device for feeding movable mount |
DE3826277A1 (de) * | 1987-08-04 | 1989-02-16 | Yamazaki Mazak Corp | Werkzeugmaschine mit einer schleiffunktion, umfassend eine elektroerosionsaus-/zurichtvorrichtung, ein schleifwerkzeug und eine spansammelvorrichtung |
US5891352A (en) * | 1993-09-16 | 1999-04-06 | Luxtron Corporation | Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment |
JPH08174417A (ja) * | 1994-12-26 | 1996-07-09 | Sumitomo Metal Ind Ltd | 研磨装置及び研磨量制御方法 |
TW355692B (en) | 1997-01-17 | 1999-04-11 | Tokyo Seimitsu Co Ltd | Surface grinding method and apparatus |
US6217425B1 (en) * | 1998-06-12 | 2001-04-17 | Tdk Corporation | Apparatus and method for lapping magnetic heads |
JP3052201B2 (ja) * | 1998-11-06 | 2000-06-12 | 茨城県 | 精密平面加工機械 |
JP3772946B2 (ja) * | 1999-03-11 | 2006-05-10 | 株式会社荏原製作所 | ドレッシング装置及び該ドレッシング装置を備えたポリッシング装置 |
JP2001265441A (ja) * | 2000-03-15 | 2001-09-28 | Hirotami Nakano | 微細位置決め装置および微細位置決め方法 |
US6447379B1 (en) * | 2000-03-31 | 2002-09-10 | Speedfam-Ipec Corporation | Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor |
JP4530479B2 (ja) * | 2000-05-24 | 2010-08-25 | 弘 江田 | 精密加工装置 |
JP2002127003A (ja) | 2000-10-26 | 2002-05-08 | Hiroshi Eda | 姿勢制御装置付精密加工装置及び姿勢制御方法 |
JP4630962B2 (ja) * | 2001-03-01 | 2011-02-09 | 並木精密宝石株式会社 | 傾斜ステージ及び加工装置 |
JP2004235201A (ja) * | 2003-01-28 | 2004-08-19 | Okamoto Machine Tool Works Ltd | 基板の乾式化学機械研磨方法および乾式化学機械研磨装置 |
JP4219718B2 (ja) * | 2003-03-28 | 2009-02-04 | Hoya株式会社 | Euvマスクブランクス用ガラス基板の製造方法及びeuvマスクブランクスの製造方法 |
JP2005177873A (ja) * | 2003-12-16 | 2005-07-07 | Nomizu Kikai Seisakusho:Kk | ヘアラインの加工方法および加工装置 |
JP4396518B2 (ja) | 2004-12-28 | 2010-01-13 | トヨタ自動車株式会社 | 姿勢制御装置および精密加工装置 |
JP4506461B2 (ja) | 2004-12-28 | 2010-07-21 | トヨタ自動車株式会社 | 精密加工装置および精密加工方法 |
JP4852868B2 (ja) | 2005-04-04 | 2012-01-11 | トヨタ自動車株式会社 | 精密加工方法 |
-
2005
- 2005-08-04 JP JP2005226419A patent/JP4839720B2/ja not_active Expired - Fee Related
-
2006
- 2006-08-03 EP EP06795220A patent/EP1917123B1/de not_active Expired - Fee Related
- 2006-08-03 CN CN2006800290366A patent/CN101237960B/zh not_active Expired - Fee Related
- 2006-08-03 WO PCT/IB2006/002161 patent/WO2007015163A1/en active Application Filing
- 2006-08-03 KR KR1020087002856A patent/KR100938484B1/ko not_active IP Right Cessation
- 2006-08-03 DE DE602006010214T patent/DE602006010214D1/de active Active
- 2006-08-03 US US11/989,935 patent/US7950981B2/en not_active Expired - Fee Related
- 2006-08-04 TW TW095128709A patent/TWI346597B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1917123B1 (de) | 2009-11-04 |
EP1917123A1 (de) | 2008-05-07 |
US7950981B2 (en) | 2011-05-31 |
US20100167627A1 (en) | 2010-07-01 |
KR100938484B1 (ko) | 2010-01-25 |
WO2007015163A1 (en) | 2007-02-08 |
CN101237960B (zh) | 2010-12-01 |
TWI346597B (en) | 2011-08-11 |
TW200726574A (en) | 2007-07-16 |
JP4839720B2 (ja) | 2011-12-21 |
JP2007038358A (ja) | 2007-02-15 |
KR20080027379A (ko) | 2008-03-26 |
CN101237960A (zh) | 2008-08-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |