DE602006002945D1 - Verfahren und Vorrichtung zur Kontrolle eines Objektes - Google Patents

Verfahren und Vorrichtung zur Kontrolle eines Objektes

Info

Publication number
DE602006002945D1
DE602006002945D1 DE602006002945T DE602006002945T DE602006002945D1 DE 602006002945 D1 DE602006002945 D1 DE 602006002945D1 DE 602006002945 T DE602006002945 T DE 602006002945T DE 602006002945 T DE602006002945 T DE 602006002945T DE 602006002945 D1 DE602006002945 D1 DE 602006002945D1
Authority
DE
Germany
Prior art keywords
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006002945T
Other languages
English (en)
Inventor
Kevin George Harding
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE602006002945D1 publication Critical patent/DE602006002945D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
DE602006002945T 2005-10-24 2006-10-23 Verfahren und Vorrichtung zur Kontrolle eines Objektes Active DE602006002945D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/259,344 US7576347B2 (en) 2005-10-24 2005-10-24 Method and apparatus for optically inspecting an object using a light source

Publications (1)

Publication Number Publication Date
DE602006002945D1 true DE602006002945D1 (de) 2008-11-13

Family

ID=37579187

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006002945T Active DE602006002945D1 (de) 2005-10-24 2006-10-23 Verfahren und Vorrichtung zur Kontrolle eines Objektes

Country Status (5)

Country Link
US (1) US7576347B2 (de)
EP (1) EP1777488B1 (de)
JP (1) JP4922730B2 (de)
CN (1) CN1955635B (de)
DE (1) DE602006002945D1 (de)

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US7969583B2 (en) * 2008-03-05 2011-06-28 General Electric Company System and method to determine an object distance from a reference point to a point on the object surface
US8422030B2 (en) * 2008-03-05 2013-04-16 General Electric Company Fringe projection system with intensity modulating by columns of a plurality of grating elements
DE102010029319B4 (de) * 2009-05-27 2015-07-02 Koh Young Technology Inc. Vorrichtung zur Messung einer dreidimensionalen Form und Verfahren dazu
US8254235B2 (en) * 2010-03-31 2012-08-28 General Electric Company System and method for transfer of data stored in holographic storage medium
FR2958751B1 (fr) * 2010-04-13 2012-05-25 Iris Inspection Machines Procede de detection de defauts dans des articles verriers et installation pour la mise en oeuvre dudit procede
EP2482031A1 (de) * 2011-01-26 2012-08-01 Mitutoyo Research Center Europe B.V. Verfahren und Vorrichtung zur Durchführung von Foliendickenmessungen mit Weißlichtabtastinterferometrie
DE102011077564B4 (de) 2011-06-15 2016-08-25 Sirona Dental Systems Gmbh Verfahren zur optischen dreidimensionalen Vermessung eines dentalen Objekts
CN102914543A (zh) * 2011-08-03 2013-02-06 浙江中茂科技有限公司 一种三维立体影像的物件检测装置
US8456641B1 (en) * 2011-11-23 2013-06-04 Kla-Tencor Corporation Optical system
CN104180765B (zh) * 2013-05-28 2017-03-15 甘志银 化学气相沉积设备中实时测量衬底翘曲的方法及装置
CN105842963A (zh) * 2015-01-12 2016-08-10 芋头科技（杭州）有限公司 一种显示装置
US9557164B2 (en) * 2015-04-15 2017-01-31 General Electric Company Data acquisition devices, systems and method for analyzing strain sensors and monitoring turbine component strain
CN105806229A (zh) * 2016-05-27 2016-07-27 四川三维测控设备有限公司 一种厚度、宽度在线无接触测量方法
CN106862157B (zh) * 2017-01-13 2019-07-30 深圳市金洲精工科技股份有限公司 轮廓仪及其镜片维护方法
US10746534B2 (en) 2017-07-03 2020-08-18 Saudi Arabian Oil Company Smart coating device for storage tank monitoring and calibration
CN109253696A (zh) * 2018-11-28 2019-01-22 信利光电股份有限公司 基于结构光测量物件尺寸的设备
US11255748B2 (en) 2019-08-15 2022-02-22 Pratt & Whitney Canada Corp. Methods and systems for measurement of components

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US4349277A (en) * 1980-06-11 1982-09-14 General Electric Company Non-contact measurement of surface profile
US4585947A (en) * 1980-06-26 1986-04-29 Diffracto, Ltd. Photodetector array based optical measurement systems
US4686374A (en) * 1980-06-26 1987-08-11 Diffracto Ltd. Surface reflectivity detector with oil mist reflectivity enhancement
DE3907430C1 (de) 1988-12-23 1991-03-21 Klaus 8206 Bruckmuehl De Pfister
US4933541A (en) * 1989-06-29 1990-06-12 Canadian Patents And Development Ltd. - Societe Canadienne Des Brevets Et D'exploitation Limitee Method and apparatus for active vision image enhancement with wavelength matching
US5539514A (en) * 1991-06-26 1996-07-23 Hitachi, Ltd. Foreign particle inspection apparatus and method with front and back illumination
DE4130237A1 (de) * 1991-09-11 1993-03-18 Zeiss Carl Fa Verfahren und vorrichtung zur dreidimensionalen optischen vermessung von objektoberflaechen
JPH0755432A (ja) * 1993-08-18 1995-03-03 Fujitsu Ltd 長さ及び高さ測定装置
US6028671A (en) * 1996-01-31 2000-02-22 General Scanning, Inc. Method and system for suppressing unwanted reflections in an optical system
US6064759A (en) * 1996-11-08 2000-05-16 Buckley; B. Shawn Computer aided inspection machine
US6031611A (en) * 1997-06-03 2000-02-29 California Institute Of Technology Coherent gradient sensing method and system for measuring surface curvature
JP3899623B2 (ja) * 1997-12-18 2007-03-28 株式会社ニコン 画像検査・測定装置
US6956963B2 (en) * 1998-07-08 2005-10-18 Ismeca Europe Semiconductor Sa Imaging for a machine-vision system
EP1093562A1 (de) * 1998-07-08 2001-04-25 PPT Vision, Inc. Bildverarbeitung und halbleiterhandhabung
US6084712A (en) * 1998-11-03 2000-07-04 Dynamic Measurement And Inspection,Llc Three dimensional imaging using a refractive optic design
US6639685B1 (en) * 2000-02-25 2003-10-28 General Motors Corporation Image processing method using phase-shifted fringe patterns and curve fitting
US6469788B2 (en) * 2000-03-27 2002-10-22 California Institute Of Technology Coherent gradient sensing ellipsometer
US6600565B1 (en) * 2000-04-25 2003-07-29 California Institute Of Technology Real-time evaluation of stress fields and properties in line features formed on substrates
JP2002134391A (ja) * 2000-10-23 2002-05-10 Nikon Corp 位置計測装置及び方法、露光装置、並びにマイクロデバイス製造方法
US6678057B2 (en) * 2001-12-19 2004-01-13 General Electric Company Method and device for reduction in noise in images from shiny parts
CN1511676A (zh) * 2002-12-27 2004-07-14 中国科学院自动化研究所 激光结构光视觉传感装置
US7283250B2 (en) * 2004-01-16 2007-10-16 Veeco Instruments, Inc. Measurement of object deformation with optical profiler

Also Published As

Publication number Publication date
CN1955635B (zh) 2010-11-03
US7576347B2 (en) 2009-08-18
EP1777488A1 (de) 2007-04-25
JP2007121295A (ja) 2007-05-17
JP4922730B2 (ja) 2012-04-25
CN1955635A (zh) 2007-05-02
US20070090308A1 (en) 2007-04-26
EP1777488B1 (de) 2008-10-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition