DE602005009697D1 - Verfahren zur herstellung von piezoelektrischen materialien - Google Patents

Verfahren zur herstellung von piezoelektrischen materialien

Info

Publication number
DE602005009697D1
DE602005009697D1 DE602005009697T DE602005009697T DE602005009697D1 DE 602005009697 D1 DE602005009697 D1 DE 602005009697D1 DE 602005009697 T DE602005009697 T DE 602005009697T DE 602005009697 T DE602005009697 T DE 602005009697T DE 602005009697 D1 DE602005009697 D1 DE 602005009697D1
Authority
DE
Germany
Prior art keywords
stack
sol
piezoelectric
piezoelectric ceramic
ceramic oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005009697T
Other languages
English (en)
Inventor
Philippe Boy
Gilles Ehrhart
Philippe Belleville
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602005009697D1 publication Critical patent/DE602005009697D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Laminated Bodies (AREA)
  • Chemically Coating (AREA)
DE602005009697T 2004-06-17 2005-06-16 Verfahren zur herstellung von piezoelektrischen materialien Active DE602005009697D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0451289A FR2871942B1 (fr) 2004-06-17 2004-06-17 Procede de preparation de materiaux piezoelectriques
PCT/FR2005/050453 WO2006003342A1 (fr) 2004-06-17 2005-06-16 Procede de preparation de materiaux piezoelectriques

Publications (1)

Publication Number Publication Date
DE602005009697D1 true DE602005009697D1 (de) 2008-10-23

Family

ID=34945193

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005009697T Active DE602005009697D1 (de) 2004-06-17 2005-06-16 Verfahren zur herstellung von piezoelektrischen materialien

Country Status (11)

Country Link
US (1) US20080182128A1 (de)
EP (1) EP1756882B1 (de)
JP (1) JP5896586B2 (de)
AT (1) ATE408242T1 (de)
CA (1) CA2569927C (de)
DE (1) DE602005009697D1 (de)
DK (1) DK1756882T3 (de)
ES (1) ES2314699T3 (de)
FR (1) FR2871942B1 (de)
SI (1) SI1756882T1 (de)
WO (1) WO2006003342A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5582944B2 (ja) 2009-09-28 2014-09-03 京セラ株式会社 配線基板、積層板及び積層シート
KR101669953B1 (ko) 2010-03-26 2016-11-09 삼성전자 주식회사 산화물 박막, 산화물 박막의 형성 방법 및 산화물 박막을 포함하는 전자 소자
FR2967992B1 (fr) 2010-11-26 2015-05-29 Commissariat Energie Atomique Preparation de sols d'oxydes metalliques stables, utiles notamment pour la fabrication de films minces a proprietes optiques et resistants a l'abrasion
EP2677558B1 (de) 2011-02-18 2017-03-29 Panasonic Intellectual Property Management Co., Ltd. Piezoelektrisches element
US9548439B2 (en) 2011-08-24 2017-01-17 National Research Council Of Canada Porosity control in piezoelectric films
FR2981064B1 (fr) 2011-10-07 2014-11-28 Commissariat Energie Atomique Procede de preparation d'un materiau sur un substrat par voie sol-gel
US9099384B2 (en) 2012-02-15 2015-08-04 Drexel University Charge ordered vertical transistors
FR3045036B1 (fr) * 2015-12-15 2017-12-22 Commissariat Energie Atomique Procede de preparation d'une solution sol-gel utilisable pour la preparation d'une ceramique de titanate de baryum dope par du hafnium et/ou par au moins un element lanthanide

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04293280A (ja) * 1991-03-22 1992-10-16 Seiko Instr Inc セラミック薄膜素子の製造方法
JPH0632613A (ja) * 1992-07-16 1994-02-08 Rohm Co Ltd 複合酸化物薄膜の製造方法
JPH06112550A (ja) * 1992-09-28 1994-04-22 Seiko Epson Corp 圧電体、強誘電体薄膜素子の製造方法
JP3336720B2 (ja) * 1994-02-21 2002-10-21 株式会社デンソー 圧電素子
DE4416245C1 (de) * 1994-05-07 1995-04-13 Fraunhofer Ges Forschung Verfahren zur Herstellung von PZT-Schichten aus niedrig sinterndem PZT-Pulver
JP3865442B2 (ja) * 1995-11-22 2007-01-10 のぞみフォトニクス株式会社 多層酸化物薄膜素子及びその製造方法
WO1998011613A1 (fr) * 1996-09-12 1998-03-19 Citizen Watch Co., Ltd. Element ferroelectrique, son procede de production, et tete pour impression a jet d'encre
DE19744630C1 (de) * 1997-10-09 1999-06-24 Fraunhofer Ges Forschung Verfahren zur Herstellung und Verwendung eines piezoelektrischen Bauelementes
US6333066B1 (en) * 1997-11-21 2001-12-25 Samsung Electronics Co., Ltd. Method for forming PZT thin film using seed layer
JP4122564B2 (ja) * 1998-04-24 2008-07-23 セイコーエプソン株式会社 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
JP3750413B2 (ja) * 1999-04-15 2006-03-01 セイコーエプソン株式会社 圧電体素子の製造方法及びインクジェット式記録ヘッドの製造方法
JP4110503B2 (ja) * 2000-04-14 2008-07-02 セイコーエプソン株式会社 圧電体素子およびインクジェット式記録ヘッドの製造方法
KR100369118B1 (ko) * 2000-05-13 2003-01-24 한국과학기술연구원 스크린 프린팅에 의한 고밀도 세라믹 후막 제조방법
US6677059B2 (en) * 2000-12-12 2004-01-13 Tdk Corporation EL device and making method
JP2003257269A (ja) * 2002-02-28 2003-09-12 Star Micronics Co Ltd 誘電体膜の製造方法
SG107103A1 (en) * 2002-05-24 2004-11-29 Ntu Ventures Private Ltd Process for producing nanocrystalline composites

Also Published As

Publication number Publication date
US20080182128A1 (en) 2008-07-31
SI1756882T1 (sl) 2009-02-28
JP2008504672A (ja) 2008-02-14
CA2569927C (en) 2016-04-05
FR2871942B1 (fr) 2006-08-04
EP1756882A1 (de) 2007-02-28
DK1756882T3 (da) 2008-12-15
FR2871942A1 (fr) 2005-12-23
ATE408242T1 (de) 2008-09-15
WO2006003342A1 (fr) 2006-01-12
ES2314699T3 (es) 2009-03-16
EP1756882B1 (de) 2008-09-10
CA2569927A1 (en) 2006-01-12
JP5896586B2 (ja) 2016-03-30

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