WO2009124857A3 - Verfahren zur herstellung von siliziumhaltigen keramischen strukturen - Google Patents

Verfahren zur herstellung von siliziumhaltigen keramischen strukturen Download PDF

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Publication number
WO2009124857A3
WO2009124857A3 PCT/EP2009/053807 EP2009053807W WO2009124857A3 WO 2009124857 A3 WO2009124857 A3 WO 2009124857A3 EP 2009053807 W EP2009053807 W EP 2009053807W WO 2009124857 A3 WO2009124857 A3 WO 2009124857A3
Authority
WO
WIPO (PCT)
Prior art keywords
structures
containing silicon
ceramic
production
structures containing
Prior art date
Application number
PCT/EP2009/053807
Other languages
English (en)
French (fr)
Other versions
WO2009124857A2 (de
Inventor
Martin Koehne
Viacheslav Bekker
Juergen Oberle
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to US12/736,460 priority Critical patent/US20110091722A1/en
Priority to EP09731058A priority patent/EP2265543A2/de
Priority to CN2009801118578A priority patent/CN101983171A/zh
Publication of WO2009124857A2 publication Critical patent/WO2009124857A2/de
Publication of WO2009124857A3 publication Critical patent/WO2009124857A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00166—Electrodes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/07—Interconnects
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Products (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

Die vorliegende Erfindung betrifft ein Verfahren zur Herstellung von siliziumhaltigen keramischen Strukturen (3), wobei auf der Oberfläche eines Substrats (2) Strukturen eines präkeramisches Polymers (1) bereitgestellt werden, wobei das präkeramische Polymer ausgewählt ist aus der Gruppe umfassend Polysiloxane, Polycarbosilane, Polysilazane und/oder Polyureasilazane und wobei die präkeramischen Strukturen (1) auf dem Substrat (2) keramisiert werden. Im erfindungsgemäßen Verfahren weisen die Strukturen (1) des präkeramischen Polymers eine Höhe von ≤ 20 μm und eine Breite senkrecht zur ihrer Längsachse (a, a') von ≤ 500 μm auf. Die vorliegende Erfindung betrifft weiterhin eine erfindungsgemäß erhaltbare siliziumhaltige keramische Struktur (3) sowie einen Sensor, umfassend eine solche Struktur.
PCT/EP2009/053807 2008-04-08 2009-03-31 Verfahren zur herstellung von siliziumhaltigen keramischen strukturen WO2009124857A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/736,460 US20110091722A1 (en) 2008-04-08 2009-03-31 Method for producing silicon-containing ceramic structures
EP09731058A EP2265543A2 (de) 2008-04-08 2009-03-31 Verfahren zur herstellung von siliziumhaltigen keramischen strukturen
CN2009801118578A CN101983171A (zh) 2008-04-08 2009-03-31 制备含硅陶瓷结构的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008001063.4 2008-04-08
DE102008001063A DE102008001063A1 (de) 2008-04-08 2008-04-08 Verfahren zur Herstellung von siliziumhaltigen keramischen Strukturen

Publications (2)

Publication Number Publication Date
WO2009124857A2 WO2009124857A2 (de) 2009-10-15
WO2009124857A3 true WO2009124857A3 (de) 2010-07-08

Family

ID=41111404

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/053807 WO2009124857A2 (de) 2008-04-08 2009-03-31 Verfahren zur herstellung von siliziumhaltigen keramischen strukturen

Country Status (5)

Country Link
US (1) US20110091722A1 (de)
EP (1) EP2265543A2 (de)
CN (1) CN101983171A (de)
DE (1) DE102008001063A1 (de)
WO (1) WO2009124857A2 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9815952B2 (en) 2013-03-15 2017-11-14 Melior Innovations, Inc. Solvent free solid material
US9815943B2 (en) 2013-03-15 2017-11-14 Melior Innovations, Inc. Polysilocarb materials and methods
US10167366B2 (en) 2013-03-15 2019-01-01 Melior Innovations, Inc. Polysilocarb materials, methods and uses
US9828542B2 (en) 2013-03-15 2017-11-28 Melior Innovations, Inc. Methods of hydraulically fracturing and recovering hydrocarbons
US9499677B2 (en) 2013-03-15 2016-11-22 Melior Innovations, Inc. Black ceramic additives, pigments, and formulations
CN108410174A (zh) * 2013-05-02 2018-08-17 梅里奥创新公司 聚硅碳酸酯材料和方法
US9481781B2 (en) 2013-05-02 2016-11-01 Melior Innovations, Inc. Black ceramic additives, pigments, and formulations
JP6257975B2 (ja) * 2013-09-17 2018-01-10 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ 被膜形成方法
JP2016204487A (ja) 2015-04-20 2016-12-08 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ 被膜形成用組成物およびそれを用いた被膜形成方法
US11891341B2 (en) * 2016-11-30 2024-02-06 Hrl Laboratories, Llc Preceramic 3D-printing monomer and polymer formulations
US10590042B2 (en) * 2017-06-29 2020-03-17 Hrl Laboratories, Llc Photopolymer resins with solid and liquid phases for polymer-derived ceramics
US10514167B1 (en) * 2018-06-29 2019-12-24 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber
EP4157806A4 (de) * 2020-05-30 2024-07-10 Hrl Lab Llc Vorkeramische 3d-druck-monomer- und polymerformulierungen
US12043748B2 (en) * 2020-09-24 2024-07-23 Rtx Corporation Photo-curable liquid composition for additive manufacturing of ceramic

Citations (2)

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Publication number Priority date Publication date Assignee Title
DE10333961A1 (de) * 2003-07-25 2005-02-10 Robert Bosch Gmbh Verfahren zur Herstellung einer Precursor-Keramik
US20070254975A1 (en) * 2004-12-29 2007-11-01 Arney David S Single- and multi-photon polymerizable pre-ceramic polymeric compositions

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DE4316184A1 (de) * 1993-05-14 1994-11-17 Hoechst Ag Verfahren zur Herstellung keramischer Mikrostrukturen aus polymeren Precursoren
DE19815978B4 (de) * 1998-04-09 2004-01-08 Forschungszentrum Karlsruhe Gmbh Verfahren zur Herstellung von Klein- und Mikroteilen aus Keramik
US6569602B1 (en) * 1998-10-05 2003-05-27 E. I. Du Pont De Nemours And Company Ionization radiation imageable photopolymer compositions
US6245849B1 (en) * 1999-06-02 2001-06-12 Sandia Corporation Fabrication of ceramic microstructures from polymer compositions containing ceramic nanoparticles
DE19937322C2 (de) 1999-08-10 2001-06-13 K Busch Gmbh Druck & Vakuum Dr Polymerkeramische Werkstoffe und Formteile mit metallähnlichem Wärmeausdehnungsverhalten, ihre Herstellung und Verwendung sowie Einzelteile aus solchen Formteilen im Verbund mit Metallteilen
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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10333961A1 (de) * 2003-07-25 2005-02-10 Robert Bosch Gmbh Verfahren zur Herstellung einer Precursor-Keramik
US20070254975A1 (en) * 2004-12-29 2007-11-01 Arney David S Single- and multi-photon polymerizable pre-ceramic polymeric compositions

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
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Also Published As

Publication number Publication date
CN101983171A (zh) 2011-03-02
EP2265543A2 (de) 2010-12-29
DE102008001063A1 (de) 2009-10-29
US20110091722A1 (en) 2011-04-21
WO2009124857A2 (de) 2009-10-15

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