DE60140767D1 - Lichtemittierende struktur mit einem getter-bereich - Google Patents
Lichtemittierende struktur mit einem getter-bereichInfo
- Publication number
- DE60140767D1 DE60140767D1 DE60140767T DE60140767T DE60140767D1 DE 60140767 D1 DE60140767 D1 DE 60140767D1 DE 60140767 T DE60140767 T DE 60140767T DE 60140767 T DE60140767 T DE 60140767T DE 60140767 D1 DE60140767 D1 DE 60140767D1
- Authority
- DE
- Germany
- Prior art keywords
- light
- emitting structure
- getter area
- getter
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/48—Electron guns
- H01J29/481—Electron guns using field-emission, photo-emission, or secondary-emission electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/467—Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
- H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/38—Control of maintenance of pressure in the vessel
- H01J2209/385—Gettering
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Electroluminescent Light Sources (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/698,696 US7315115B1 (en) | 2000-10-27 | 2000-10-27 | Light-emitting and electron-emitting devices having getter regions |
PCT/US2001/051402 WO2002065499A2 (en) | 2000-10-27 | 2001-10-24 | Structure and fabrication of device, such as light-emitting device or electron-emitting device, having getter region |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60140767D1 true DE60140767D1 (de) | 2010-01-21 |
Family
ID=24806304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60140767T Expired - Lifetime DE60140767D1 (de) | 2000-10-27 | 2001-10-24 | Lichtemittierende struktur mit einem getter-bereich |
Country Status (8)
Country | Link |
---|---|
US (1) | US7315115B1 (de) |
EP (2) | EP1371077B1 (de) |
JP (4) | JP4160828B2 (de) |
KR (1) | KR100862998B1 (de) |
AU (1) | AU2002256978A1 (de) |
DE (1) | DE60140767D1 (de) |
TW (1) | TWI258794B (de) |
WO (1) | WO2002065499A2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050077539A (ko) * | 2004-01-28 | 2005-08-03 | 삼성에스디아이 주식회사 | 액정 표시장치용 전계방출형 백라이트 유니트 |
US7164520B2 (en) * | 2004-05-12 | 2007-01-16 | Idc, Llc | Packaging for an interferometric modulator |
KR20050113897A (ko) * | 2004-05-31 | 2005-12-05 | 삼성에스디아이 주식회사 | 전자 방출 소자 |
JP2006004804A (ja) * | 2004-06-18 | 2006-01-05 | Hitachi Displays Ltd | 画像表示装置 |
US7612494B2 (en) * | 2004-08-18 | 2009-11-03 | Canon Kabushiki Kaisha | Image display apparatus having accelerating electrode with uneven thickness |
JP2006338966A (ja) * | 2005-05-31 | 2006-12-14 | Rohm Co Ltd | 電子装置、ならびにそれを利用した表示装置およびセンサ |
KR20070046663A (ko) | 2005-10-31 | 2007-05-03 | 삼성에스디아이 주식회사 | 전자 방출 표시 디바이스 |
KR101173859B1 (ko) * | 2006-01-31 | 2012-08-14 | 삼성에스디아이 주식회사 | 스페이서 및 이를 구비한 전자 방출 표시 디바이스 |
WO2007136706A1 (en) * | 2006-05-17 | 2007-11-29 | Qualcomm Mems Technologies Inc. | Desiccant in a mems device |
US20080018218A1 (en) * | 2006-07-24 | 2008-01-24 | Wei-Sheng Hsu | Straddling and supporting structure for a field emission display device and a manufacturing method thereof |
WO2009041951A1 (en) * | 2007-09-28 | 2009-04-02 | Qualcomm Mems Technologies, Inc. | Optimization of desiccant usage in a mems package |
JP2009199999A (ja) * | 2008-02-25 | 2009-09-03 | Canon Inc | 画像表示装置 |
US8410690B2 (en) * | 2009-02-13 | 2013-04-02 | Qualcomm Mems Technologies, Inc. | Display device with desiccant |
NO2944700T3 (de) | 2013-07-11 | 2018-03-17 | ||
US9196556B2 (en) | 2014-02-28 | 2015-11-24 | Raytheon Company | Getter structure and method for forming such structure |
US10692692B2 (en) * | 2015-05-27 | 2020-06-23 | Kla-Tencor Corporation | System and method for providing a clean environment in an electron-optical system |
CN111180294A (zh) * | 2018-11-09 | 2020-05-19 | 烟台艾睿光电科技有限公司 | 一种吸气剂薄膜的加工衬底和加工工艺 |
CN115803893A (zh) * | 2020-07-22 | 2023-03-14 | 维耶尔公司 | 微光电装置 |
CN112499580B (zh) * | 2020-11-05 | 2024-03-26 | 武汉鲲鹏微纳光电有限公司 | 非制冷红外探测器、芯片以及芯片的制作方法 |
Family Cites Families (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2926981A (en) | 1957-09-11 | 1960-03-01 | Gen Electric | Method of gettering using zirconiumtitanium alloy |
US3588570A (en) * | 1968-04-29 | 1971-06-28 | Westinghouse Electric Corp | Masked photocathode structure with a masked,patterned layer of titanium oxide |
US3867662A (en) * | 1973-10-15 | 1975-02-18 | Rca Corp | Grating tuned photoemitter |
IT1173865B (it) | 1984-03-16 | 1987-06-24 | Getters Spa | Metodo perfezionato per fabbricare dispositivi getter non evaporabili porosi e dispositivi getter cosi' prodotti |
JPS63181248A (ja) | 1987-01-23 | 1988-07-26 | Matsushita Electric Ind Co Ltd | 電子管の製造法 |
US5223766A (en) | 1990-04-28 | 1993-06-29 | Sony Corporation | Image display device with cathode panel and gas absorbing getters |
JPH0412436A (ja) | 1990-04-28 | 1992-01-17 | Sony Corp | 画像表示装置 |
US5063323A (en) | 1990-07-16 | 1991-11-05 | Hughes Aircraft Company | Field emitter structure providing passageways for venting of outgassed materials from active electronic area |
US5083958A (en) | 1990-07-16 | 1992-01-28 | Hughes Aircraft Company | Field emitter structure and fabrication process providing passageways for venting of outgassed materials from active electronic area |
JP3088480B2 (ja) | 1991-04-12 | 2000-09-18 | 日本重化学工業株式会社 | 非蒸発型ゲッターの製造方法 |
JP2716305B2 (ja) | 1991-12-27 | 1998-02-18 | シャープ株式会社 | 電界放出型電子管 |
US5477105A (en) * | 1992-04-10 | 1995-12-19 | Silicon Video Corporation | Structure of light-emitting device with raised black matrix for use in optical devices such as flat-panel cathode-ray tubes |
US5283500A (en) | 1992-05-28 | 1994-02-01 | At&T Bell Laboratories | Flat panel field emission display apparatus |
US5793158A (en) * | 1992-08-21 | 1998-08-11 | Wedding, Sr.; Donald K. | Gas discharge (plasma) displays |
JPH08507643A (ja) | 1993-03-11 | 1996-08-13 | フェド.コーポレイション | エミッタ先端構造体及び該エミッタ先端構造体を備える電界放出装置並びにその製造方法 |
US5525861A (en) | 1993-04-30 | 1996-06-11 | Canon Kabushiki Kaisha | Display apparatus having first and second internal spaces |
DE69404000T2 (de) | 1993-05-05 | 1998-01-29 | At & T Corp | Flache Bildwiedergabeanordnung und Herstellungsverfahren |
KR0139489B1 (ko) | 1993-07-08 | 1998-06-01 | 호소야 레이지 | 전계방출형 표시장치 |
JP2606406Y2 (ja) * | 1993-09-06 | 2000-11-06 | 双葉電子工業株式会社 | 真空気密装置および表示装置 |
US5559389A (en) | 1993-09-08 | 1996-09-24 | Silicon Video Corporation | Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals |
US5564959A (en) | 1993-09-08 | 1996-10-15 | Silicon Video Corporation | Use of charged-particle tracks in fabricating gated electron-emitting devices |
US5545946A (en) | 1993-12-17 | 1996-08-13 | Motorola | Field emission display with getter in vacuum chamber |
US5453659A (en) | 1994-06-10 | 1995-09-26 | Texas Instruments Incorporated | Anode plate for flat panel display having integrated getter |
FR2724041B1 (fr) * | 1994-08-24 | 1997-04-11 | Pixel Int Sa | Ecran plat de visualisation a haute tension inter-electrodes |
JP3423511B2 (ja) | 1994-12-14 | 2003-07-07 | キヤノン株式会社 | 画像形成装置及びゲッタ材の活性化方法 |
US5693438A (en) | 1995-03-16 | 1997-12-02 | Industrial Technology Research Institute | Method of manufacturing a flat panel field emission display having auto gettering |
US5670296A (en) * | 1995-07-03 | 1997-09-23 | Industrial Technology Research Institute | Method of manufacturing a high efficiency field emission display |
EP0842526B1 (de) | 1995-08-04 | 2000-03-22 | Printable Field Emitters Limited | Feldelektronenemitterende materialen und vorrichtungen |
US5689151A (en) | 1995-08-11 | 1997-11-18 | Texas Instruments Incorporated | Anode plate for flat panel display having integrated getter |
US5606225A (en) | 1995-08-30 | 1997-02-25 | Texas Instruments Incorporated | Tetrode arrangement for color field emission flat panel display with barrier electrodes on the anode plate |
US5628662A (en) | 1995-08-30 | 1997-05-13 | Texas Instruments Incorporated | Method of fabricating a color field emission flat panel display tetrode |
US5614785A (en) | 1995-09-28 | 1997-03-25 | Texas Instruments Incorporated | Anode plate for flat panel display having silicon getter |
US5865658A (en) | 1995-09-28 | 1999-02-02 | Micron Display Technology, Inc. | Method for efficient positioning of a getter |
US5578900A (en) | 1995-11-01 | 1996-11-26 | Industrial Technology Research Institute | Built in ion pump for field emission display |
US5827102A (en) | 1996-05-13 | 1998-10-27 | Micron Technology, Inc. | Low temperature method for evacuating and sealing field emission displays |
FR2750248B1 (fr) | 1996-06-19 | 1998-08-28 | Org Europeene De Rech | Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter |
US5688708A (en) | 1996-06-24 | 1997-11-18 | Motorola | Method of making an ultra-high vacuum field emission display |
US6049165A (en) * | 1996-07-17 | 2000-04-11 | Candescent Technologies Corporation | Structure and fabrication of flat panel display with specially arranged spacer |
JPH10125262A (ja) * | 1996-10-18 | 1998-05-15 | Sony Corp | フィールドエミッションディスプレイ装置 |
US5789859A (en) | 1996-11-25 | 1998-08-04 | Micron Display Technology, Inc. | Field emission display with non-evaporable getter material |
US5864205A (en) | 1996-12-02 | 1999-01-26 | Motorola Inc. | Gridded spacer assembly for a field emission display |
US5977706A (en) | 1996-12-12 | 1999-11-02 | Candescent Technologies Corporation | Multi-compartment getter-containing flat-panel device |
FR2760089B1 (fr) | 1997-02-26 | 1999-04-30 | Org Europeene De Rech | Agencement et procede pour ameliorer le vide dans un systeme a vide tres pousse |
US5931713A (en) | 1997-03-19 | 1999-08-03 | Micron Technology, Inc. | Display device with grille having getter material |
JPH10269973A (ja) * | 1997-03-26 | 1998-10-09 | Mitsubishi Electric Corp | 電子放出素子を用いたディスプレイ |
US6046539A (en) * | 1997-04-29 | 2000-04-04 | Candescent Technologies Corporation | Use of sacrificial masking layer and backside exposure in forming openings that typically receive light-emissive material |
US6013974A (en) | 1997-05-30 | 2000-01-11 | Candescent Technologies Corporation | Electron-emitting device having focus coating that extends partway into focus openings |
US5945780A (en) | 1997-06-30 | 1999-08-31 | Motorola, Inc. | Node plate for field emission display |
JP3595651B2 (ja) * | 1997-07-23 | 2004-12-02 | キヤノン株式会社 | 画像形成装置 |
JP3024602B2 (ja) * | 1997-08-06 | 2000-03-21 | 日本電気株式会社 | 微小真空ポンプおよび微小真空ポンプ搭載装置 |
US5866978A (en) | 1997-09-30 | 1999-02-02 | Fed Corporation | Matrix getter for residual gas in vacuum sealed panels |
US5858619A (en) | 1997-09-30 | 1999-01-12 | Candescent Technologies Corporation | Multi-level conductive matrix formation method |
JPH11185673A (ja) * | 1997-12-24 | 1999-07-09 | Sony Corp | 画像表示装置 |
US6084339A (en) | 1998-04-01 | 2000-07-04 | Motorola, Inc. | Field emission device having an electroplated structure and method for the fabrication thereof |
US6107728A (en) * | 1998-04-30 | 2000-08-22 | Candescent Technologies Corporation | Structure and fabrication of electron-emitting device having electrode with openings that facilitate short-circuit repair |
US6215241B1 (en) | 1998-05-29 | 2001-04-10 | Candescent Technologies Corporation | Flat panel display with encapsulated matrix structure |
US6396207B1 (en) | 1998-10-20 | 2002-05-28 | Canon Kabushiki Kaisha | Image display apparatus and method for producing the same |
JP2000133138A (ja) | 1998-10-29 | 2000-05-12 | Canon Inc | 画像形成装置とその製造方法 |
JP2000231880A (ja) | 1999-02-12 | 2000-08-22 | Canon Inc | 非蒸発型ゲッタの形成方法、該非蒸発型ゲッタを用いた画像形成装置およびその製造方法 |
JP2000251787A (ja) * | 1999-02-24 | 2000-09-14 | Canon Inc | 画像形成装置及びゲッター材の活性化方法 |
EP1077443A4 (de) * | 1999-03-05 | 2004-06-16 | Canon Kk | Bild-formierungs-vorrichtung |
EP1081739B1 (de) * | 1999-03-05 | 2010-06-02 | Canon Kabushiki Kaisha | Bilderzeugungsvorrichtung |
JP2000268703A (ja) | 1999-03-17 | 2000-09-29 | Futaba Corp | 電界放出デバイス |
JP2001210225A (ja) | 1999-11-12 | 2001-08-03 | Sony Corp | ゲッター、平面型表示装置及び平面型表示装置の製造方法 |
-
2000
- 2000-10-27 US US09/698,696 patent/US7315115B1/en not_active Expired - Fee Related
-
2001
- 2001-10-24 EP EP01272492A patent/EP1371077B1/de not_active Expired - Lifetime
- 2001-10-24 KR KR1020037005686A patent/KR100862998B1/ko not_active IP Right Cessation
- 2001-10-24 AU AU2002256978A patent/AU2002256978A1/en not_active Abandoned
- 2001-10-24 JP JP2002565333A patent/JP4160828B2/ja not_active Expired - Fee Related
- 2001-10-24 DE DE60140767T patent/DE60140767D1/de not_active Expired - Lifetime
- 2001-10-24 WO PCT/US2001/051402 patent/WO2002065499A2/en active Search and Examination
- 2001-10-24 EP EP07021328A patent/EP1898442A3/de not_active Withdrawn
- 2001-10-26 TW TW090126626A patent/TWI258794B/zh not_active IP Right Cessation
-
2008
- 2008-06-18 JP JP2008159309A patent/JP4976344B2/ja not_active Expired - Fee Related
- 2008-06-18 JP JP2008159305A patent/JP4580438B2/ja not_active Expired - Fee Related
- 2008-06-18 JP JP2008159310A patent/JP4580439B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4160828B2 (ja) | 2008-10-08 |
EP1371077A2 (de) | 2003-12-17 |
EP1898442A3 (de) | 2010-07-07 |
TWI258794B (en) | 2006-07-21 |
WO2002065499A2 (en) | 2002-08-22 |
JP2004533700A (ja) | 2004-11-04 |
US7315115B1 (en) | 2008-01-01 |
KR100862998B1 (ko) | 2008-10-13 |
WO2002065499A3 (en) | 2003-09-25 |
JP4580438B2 (ja) | 2010-11-10 |
KR20030088021A (ko) | 2003-11-15 |
EP1371077B1 (de) | 2009-12-09 |
JP2008218438A (ja) | 2008-09-18 |
AU2002256978A1 (en) | 2002-08-28 |
JP4580439B2 (ja) | 2010-11-10 |
JP2008258176A (ja) | 2008-10-23 |
JP4976344B2 (ja) | 2012-07-18 |
JP2008218437A (ja) | 2008-09-18 |
EP1371077A4 (de) | 2006-11-02 |
EP1898442A2 (de) | 2008-03-12 |
WO2002065499A9 (en) | 2003-04-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8328 | Change in the person/name/address of the agent |
Representative=s name: TBK-PATENT, 80336 MUENCHEN |
|
8364 | No opposition during term of opposition |