DE60135890D1 - Abgedeckte Verdampfungsquellenanordnung mit mehreren Taschen - Google Patents
Abgedeckte Verdampfungsquellenanordnung mit mehreren TaschenInfo
- Publication number
- DE60135890D1 DE60135890D1 DE60135890T DE60135890T DE60135890D1 DE 60135890 D1 DE60135890 D1 DE 60135890D1 DE 60135890 T DE60135890 T DE 60135890T DE 60135890 T DE60135890 T DE 60135890T DE 60135890 D1 DE60135890 D1 DE 60135890D1
- Authority
- DE
- Germany
- Prior art keywords
- crucible
- pockets
- evaporation source
- source arrangement
- several pockets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/584,940 US6342103B1 (en) | 2000-06-01 | 2000-06-01 | Multiple pocket electron beam source |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60135890D1 true DE60135890D1 (de) | 2008-11-06 |
Family
ID=24339380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60135890T Expired - Lifetime DE60135890D1 (de) | 2000-06-01 | 2001-05-31 | Abgedeckte Verdampfungsquellenanordnung mit mehreren Taschen |
Country Status (6)
Country | Link |
---|---|
US (2) | US6342103B1 (de) |
EP (2) | EP1967607A1 (de) |
JP (1) | JP4845286B2 (de) |
AT (1) | ATE409245T1 (de) |
DE (1) | DE60135890D1 (de) |
DK (1) | DK1160351T3 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6342103B1 (en) | 2000-06-01 | 2002-01-29 | The Boc Group, Inc. | Multiple pocket electron beam source |
US6641674B2 (en) * | 2000-11-10 | 2003-11-04 | Helix Technology Inc. | Movable evaporation device |
TWI262034B (en) * | 2002-02-05 | 2006-09-11 | Semiconductor Energy Lab | Manufacturing system, manufacturing method, method of operating a manufacturing apparatus, and light emitting device |
TWI285515B (en) * | 2002-02-22 | 2007-08-11 | Semiconductor Energy Lab | Light-emitting device and method of manufacturing the same, and method of operating manufacturing apparatus |
GB0307745D0 (en) * | 2003-04-03 | 2003-05-07 | Microemissive Displays Ltd | Method and apparatus for depositing material on a substrate |
KR100671673B1 (ko) * | 2005-03-09 | 2007-01-19 | 삼성에스디아이 주식회사 | 다중 진공증착장치 및 제어방법 |
WO2007012342A1 (de) * | 2005-07-27 | 2007-02-01 | Applied Materials Gmbh & Co. Kg | Vorrichtung zum einspannen und positionieren eines verdampferschiffchens |
CN100516284C (zh) * | 2006-01-21 | 2009-07-22 | 鸿富锦精密工业(深圳)有限公司 | 蒸镀装置 |
KR20080007820A (ko) * | 2006-07-18 | 2008-01-23 | 세메스 주식회사 | 박막 증착용 회전 증착원 및 이를 이용하는 박막 증착 장치 |
EP2113584A1 (de) | 2008-04-28 | 2009-11-04 | LightLab Sweden AB | Verdampfungssystem |
US8557045B2 (en) * | 2008-08-26 | 2013-10-15 | Colorado State University Research Foundation | Apparatus and method for fabricating photovoltaic modules using heated pocket deposition in a vacuum |
FR2957455B1 (fr) * | 2010-03-09 | 2012-04-20 | Essilor Int | Enveloppe de protection pour canon a ions, dispositif de depot de materiaux par evaporation sous vide comprenant une telle enveloppe de protection et procede de depot de materiaux |
US8480805B2 (en) * | 2010-04-16 | 2013-07-09 | Colorado State University Research Foundation | System and method for sealing a vapor deposition source |
TW201202454A (en) * | 2010-07-07 | 2012-01-16 | Hon Hai Prec Ind Co Ltd | Processing apparatus for smoothing film material and evaporation deposition device with same |
TW201204845A (en) * | 2010-07-16 | 2012-02-01 | Hon Hai Prec Ind Co Ltd | Processing apparatus for smoothing film material and evaporation deposition device with same |
CN102337502A (zh) * | 2010-07-19 | 2012-02-01 | 鸿富锦精密工业(深圳)有限公司 | 膜料加工装置及具有该膜料加工装置的蒸镀设备 |
KR101671489B1 (ko) * | 2010-07-29 | 2016-11-02 | 삼성디스플레이 주식회사 | 유기물 증발원 및 그를 포함하는 증착 장치 |
CN101942641B (zh) * | 2010-09-08 | 2012-06-13 | 四川虹视显示技术有限公司 | Oled蒸镀机的蒸发源装置 |
KR20120138305A (ko) * | 2011-06-14 | 2012-12-26 | 삼성디스플레이 주식회사 | 유기 박막 증착 시스템 및 유기 박막 증착 방법 |
JPWO2013153604A1 (ja) * | 2012-04-09 | 2015-12-17 | 株式会社シンクロン | 電子銃装置 |
CN203373418U (zh) * | 2012-04-09 | 2014-01-01 | 株式会社新柯隆 | 电子枪装置 |
WO2014006706A1 (ja) * | 2012-07-04 | 2014-01-09 | 中外炉工業株式会社 | 蒸着装置 |
KR101438734B1 (ko) * | 2013-11-08 | 2014-11-03 | 우경금속주식회사 | 회전식 열처리로 |
CN104789930B (zh) * | 2015-04-24 | 2016-05-11 | 京东方科技集团股份有限公司 | 蒸镀设备及采用该蒸镀设备的操作方法 |
CN105018884B (zh) * | 2015-07-30 | 2018-04-10 | 苏州方昇光电装备技术有限公司 | 一种小型真空蒸镀仪 |
TWI737718B (zh) * | 2016-04-25 | 2021-09-01 | 美商創新先進材料股份有限公司 | 含有瀉流源的沉積系統及相關方法 |
CN107326329A (zh) * | 2017-08-31 | 2017-11-07 | 京东方科技集团股份有限公司 | 蒸发源和蒸镀装置 |
CN107604315B (zh) * | 2017-09-21 | 2023-10-27 | 京东方科技集团股份有限公司 | 一种密闭式坩埚和使用该坩埚的蒸镀方法 |
CN108704687A (zh) * | 2018-05-03 | 2018-10-26 | 宁波大学 | 一种圆形玻璃纤维滤膜层叠堆放式烘烧皿 |
EP3887562A4 (de) * | 2018-11-30 | 2022-08-24 | Ferrotec (USA) Corporation | Tiegeldeckel zur beschichtung mit einer elektronenstrahlquelle |
USD939461S1 (en) | 2018-11-30 | 2021-12-28 | Ferrotec (Usa) Corporation | Two-piece crucible cover for coating with an electron beam source |
USD909439S1 (en) | 2018-11-30 | 2021-02-02 | Ferrotec (Usa) Corporation | Two-piece crucible cover |
DE102019102587B4 (de) * | 2019-02-01 | 2023-02-23 | Semikron Elektronik Gmbh & Co. Kg | Drehbare Verdampfungsmaterialaufnahmeeinrichtung und Vorrichtung hiermit zur Beschichtung von Halbleiter- oder sonstigen Oberflächen |
USD973734S1 (en) * | 2019-08-06 | 2022-12-27 | Nxl Technologies Inc. | Blind shear |
EP3840012A1 (de) * | 2019-12-20 | 2021-06-23 | Essilor International | Optimierte tiegelanordnung und verfahren zur physikalischen dampfabscheidung |
WO2022221038A1 (en) * | 2021-04-15 | 2022-10-20 | Applied Materials, Inc. | Evaporation source cooling mechanism |
CN113564536B (zh) * | 2021-06-11 | 2022-08-26 | 北京航空航天大学 | 一种实现自动蒸发陶瓷靶材制备双层陶瓷层的装置 |
CN116770234B (zh) * | 2023-06-25 | 2023-12-15 | 苏州佑伦真空设备科技有限公司 | 一种防止串料的坩埚装置 |
JP7421002B1 (ja) | 2023-07-07 | 2024-01-23 | 株式会社アルバック | 電子ビーム式蒸着ユニット |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2482329A (en) | 1946-05-27 | 1949-09-20 | Rca Corp | Apparatus for selective vapor coating |
US2853402A (en) * | 1954-08-06 | 1958-09-23 | Jr Marsden S Blois | Magnetic element and method for producing the same |
US4108107A (en) | 1976-04-01 | 1978-08-22 | Airco, Inc. | Rotatable substrate holder for use in vacuum |
DE2917841A1 (de) * | 1979-05-03 | 1980-11-13 | Leybold Heraeus Gmbh & Co Kg | Verdampfer fuer vakuumaufdampfanlagen |
DE3316554C1 (de) | 1983-05-06 | 1984-07-12 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien |
CH663037A5 (de) | 1985-02-05 | 1987-11-13 | Balzers Hochvakuum | Dampfquelle fuer vakuumbeschichtungsanlagen. |
US4866239A (en) * | 1988-05-31 | 1989-09-12 | The Boc Group, Inc. | Vapor source assembly with crucible |
DE59002513D1 (de) | 1989-02-09 | 1993-10-07 | Balzers Hochvakuum | Tiegelabdeckung für Beschichtungsanlagen mit einer Elektronenstrahlquelle. |
US4983806A (en) * | 1990-03-01 | 1991-01-08 | Harper James L | Method and device for cooling electron beam gun |
JP2913745B2 (ja) | 1990-04-10 | 1999-06-28 | 松下電器産業株式会社 | 真空蒸着装置 |
US5473627A (en) | 1992-11-05 | 1995-12-05 | Mdc Vacuum Products Corporation | UHV rotating fluid delivery system |
US5338913A (en) | 1992-12-28 | 1994-08-16 | Tfi Telemark | Electron beam gun with liquid cooled rotatable crucible |
US5792521A (en) | 1996-04-18 | 1998-08-11 | General Electric Company | Method for forming a multilayer thermal barrier coating |
US6012413A (en) * | 1998-03-10 | 2000-01-11 | Mdc Vacuum Products Corp. | Electron beam source for use with varying sizes of crucibles |
US6342103B1 (en) | 2000-06-01 | 2002-01-29 | The Boc Group, Inc. | Multiple pocket electron beam source |
US20030019849A1 (en) | 2001-07-16 | 2003-01-30 | Cameron Daniel Barton | Electron beam gun with water cooled interlocking crucible cover |
-
2000
- 2000-06-01 US US09/584,940 patent/US6342103B1/en not_active Expired - Lifetime
-
2001
- 2001-05-31 EP EP08153868A patent/EP1967607A1/de not_active Withdrawn
- 2001-05-31 EP EP01304805A patent/EP1160351B1/de not_active Expired - Lifetime
- 2001-05-31 DK DK01304805T patent/DK1160351T3/da active
- 2001-05-31 DE DE60135890T patent/DE60135890D1/de not_active Expired - Lifetime
- 2001-05-31 AT AT01304805T patent/ATE409245T1/de active
- 2001-06-01 JP JP2001167138A patent/JP4845286B2/ja not_active Expired - Lifetime
- 2001-10-24 US US09/999,199 patent/US6902625B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20020040682A1 (en) | 2002-04-11 |
EP1967607A1 (de) | 2008-09-10 |
US6902625B2 (en) | 2005-06-07 |
JP2002038256A (ja) | 2002-02-06 |
EP1160351A2 (de) | 2001-12-05 |
EP1160351A3 (de) | 2004-01-28 |
ATE409245T1 (de) | 2008-10-15 |
US6342103B1 (en) | 2002-01-29 |
EP1160351B1 (de) | 2008-09-24 |
DK1160351T3 (da) | 2009-01-19 |
JP4845286B2 (ja) | 2011-12-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FERROTEC (USA) CORP. (N.D. GES. D. STAATES MAS, US |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: WUESTHOFF & WUESTHOFF PATENT- UND RECHTSANWAELTE, |