FI914379A0 - Anordning foer laogtemperaturplas- maytbehandling av en skiva eller ett ark av metall. - Google Patents

Anordning foer laogtemperaturplas- maytbehandling av en skiva eller ett ark av metall.

Info

Publication number
FI914379A0
FI914379A0 FI914379A FI914379A FI914379A0 FI 914379 A0 FI914379 A0 FI 914379A0 FI 914379 A FI914379 A FI 914379A FI 914379 A FI914379 A FI 914379A FI 914379 A0 FI914379 A0 FI 914379A0
Authority
FI
Finland
Prior art keywords
maytbehandling
laogtemperaturplas
skiva
metall
ark
Prior art date
Application number
FI914379A
Other languages
English (en)
Other versions
FI914379A (fi
Inventor
Gelis Pierre De
Joelle Pontet
Gerard Piet
Gerrald Pacqueau
Original Assignee
Ugine Aciers
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ugine Aciers filed Critical Ugine Aciers
Publication of FI914379A0 publication Critical patent/FI914379A0/fi
Publication of FI914379A publication Critical patent/FI914379A/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C21D1/38—Heating by cathodic discharges
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38—Treatment of ferrous surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
FI914379A 1990-09-19 1991-09-18 Anordning foer laogtemperaturplas- maytbehandling av en skiva eller ett ark av metall. FI914379A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9011647A FR2666821B1 (fr) 1990-09-19 1990-09-19 Dispositif de traitement superficiel d'une plaque ou d'une tole d'un materiau metallique par plasma basse temperature.

Publications (2)

Publication Number Publication Date
FI914379A0 true FI914379A0 (fi) 1991-09-18
FI914379A FI914379A (fi) 1992-03-20

Family

ID=9400509

Family Applications (1)

Application Number Title Priority Date Filing Date
FI914379A FI914379A (fi) 1990-09-19 1991-09-18 Anordning foer laogtemperaturplas- maytbehandling av en skiva eller ett ark av metall.

Country Status (7)

Country Link
US (1) US5225651A (fi)
EP (1) EP0485314A1 (fi)
CA (1) CA2051798A1 (fi)
FI (1) FI914379A (fi)
FR (1) FR2666821B1 (fi)
IE (1) IE913283A1 (fi)
PT (1) PT98997A (fi)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5823416A (en) * 1995-07-28 1998-10-20 Matsushita Electric Industrial Co., Ltd. Apparatus and method for surface treatment, and apparatus and method for wire bonding using the surface treatment apparatus
FR2741361B3 (fr) * 1995-11-22 1998-04-17 Balzers Hochvakuum Procede pour traitement thermochimique de surface par immersion dans un plasma, installation pour ce procede, utilisations et pieces obtenues
EP1689216A1 (en) * 2005-02-04 2006-08-09 Vlaamse Instelling Voor Technologisch Onderzoek (Vito) Atmospheric-pressure plasma jet
JP4929759B2 (ja) * 2006-03-02 2012-05-09 大日本印刷株式会社 プラズマ処理方法
JP4853049B2 (ja) * 2006-03-02 2012-01-11 大日本印刷株式会社 プラズマ処理方法
US20120261271A1 (en) * 2011-04-14 2012-10-18 Husein Ahmad Kattab Nitrogen-Rich Water Production System
CN107151779B (zh) * 2017-05-27 2019-04-16 西华大学 渗氮可控的零污染离子氮化装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5291650A (en) * 1976-01-29 1977-08-02 Toshiba Corp Continuous gas plasma etching apparatus
US4080508A (en) * 1976-03-17 1978-03-21 Greenewald Jr Herbert Manufacture of carbides and the like
JPS5643158U (fi) * 1979-09-11 1981-04-20
JPS5681533U (fi) * 1979-11-27 1981-07-01
JPS6056431B2 (ja) * 1980-10-09 1985-12-10 三菱電機株式会社 プラズマエツチング装置
FR2550044B1 (fr) * 1983-07-05 1986-11-21 Parrens Pierre Appareil de traitement par plasma de substrats en forme de plaquettes
KR0129663B1 (ko) * 1988-01-20 1998-04-06 고다까 토시오 에칭 장치 및 방법
FR2630133B1 (fr) * 1988-04-18 1993-09-24 Siderurgie Fse Inst Rech Procede pour l'amelioration de la resistance a la corrosion de materiaux metalliques

Also Published As

Publication number Publication date
FR2666821A1 (fr) 1992-03-20
IE913283A1 (en) 1992-02-25
FR2666821B1 (fr) 1992-10-23
EP0485314A1 (fr) 1992-05-13
US5225651A (en) 1993-07-06
FI914379A (fi) 1992-03-20
PT98997A (pt) 1993-10-29
CA2051798A1 (fr) 1992-03-20

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Legal Events

Date Code Title Description
FD Application lapsed