DE60036371D1 - Ventil mit zwei schiebern und dessen anwendung - Google Patents
Ventil mit zwei schiebern und dessen anwendungInfo
- Publication number
- DE60036371D1 DE60036371D1 DE60036371T DE60036371T DE60036371D1 DE 60036371 D1 DE60036371 D1 DE 60036371D1 DE 60036371 T DE60036371 T DE 60036371T DE 60036371 T DE60036371 T DE 60036371T DE 60036371 D1 DE60036371 D1 DE 60036371D1
- Authority
- DE
- Germany
- Prior art keywords
- valve
- open
- slot
- transport
- servicing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Valves (AREA)
- Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
- Time-Division Multiplex Systems (AREA)
- Pens And Brushes (AREA)
- Bag Frames (AREA)
- Manipulator (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US280177 | 1999-03-29 | ||
US09/280,177 US6095741A (en) | 1999-03-29 | 1999-03-29 | Dual sided slot valve and method for implementing the same |
PCT/US2000/005159 WO2000058654A1 (en) | 1999-03-29 | 2000-02-29 | Dual-sided slot valve and method for implementing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60036371D1 true DE60036371D1 (de) | 2007-10-25 |
DE60036371T2 DE60036371T2 (de) | 2008-06-05 |
Family
ID=23072008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60036371T Expired - Lifetime DE60036371T2 (de) | 1999-03-29 | 2000-02-29 | Ventil mit zwei schiebern und dessen anwendung |
Country Status (8)
Country | Link |
---|---|
US (1) | US6095741A (de) |
EP (1) | EP1165993B1 (de) |
JP (1) | JP4532749B2 (de) |
KR (1) | KR100783120B1 (de) |
AT (1) | ATE373193T1 (de) |
AU (1) | AU3610500A (de) |
DE (1) | DE60036371T2 (de) |
WO (1) | WO2000058654A1 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6328814B1 (en) | 1999-03-26 | 2001-12-11 | Applied Materials, Inc. | Apparatus for cleaning and drying substrates |
US6267545B1 (en) * | 1999-03-29 | 2001-07-31 | Lam Research Corporation | Semiconductor processing platform architecture having processing module isolation capabilities |
US6390448B1 (en) | 2000-03-30 | 2002-05-21 | Lam Research Corporation | Single shaft dual cradle vacuum slot valve |
US6913243B1 (en) * | 2000-03-30 | 2005-07-05 | Lam Research Corporation | Unitary slot valve actuator with dual valves |
CN101499413B (zh) * | 2001-11-02 | 2011-05-04 | 应用材料股份有限公司 | 单个晶片的干燥装置和干燥方法 |
US7513062B2 (en) * | 2001-11-02 | 2009-04-07 | Applied Materials, Inc. | Single wafer dryer and drying methods |
US7100892B2 (en) * | 2003-08-26 | 2006-09-05 | Kitz Sct Corporation | Non-rubbing gate valve for semiconductor fabrication apparatus |
JP3912604B2 (ja) * | 2003-11-04 | 2007-05-09 | 入江工研株式会社 | ゲート弁 |
JP4462912B2 (ja) * | 2003-12-10 | 2010-05-12 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理装置の管理方法 |
US20050205210A1 (en) * | 2004-01-06 | 2005-09-22 | Devine Daniel J | Advanced multi-pressure workpiece processing |
US20050205209A1 (en) * | 2004-03-18 | 2005-09-22 | Aelan Mosden | Replacing chamber components in a vacuum environment |
US8668422B2 (en) * | 2004-08-17 | 2014-03-11 | Mattson Technology, Inc. | Low cost high throughput processing platform |
US20060102282A1 (en) * | 2004-11-15 | 2006-05-18 | Supercritical Systems, Inc. | Method and apparatus for selectively filtering residue from a processing chamber |
US7767145B2 (en) * | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
US20060225772A1 (en) * | 2005-03-29 | 2006-10-12 | Jones William D | Controlled pressure differential in a high-pressure processing chamber |
US20060225769A1 (en) * | 2005-03-30 | 2006-10-12 | Gentaro Goshi | Isothermal control of a process chamber |
US7494107B2 (en) * | 2005-03-30 | 2009-02-24 | Supercritical Systems, Inc. | Gate valve for plus-atmospheric pressure semiconductor process vessels |
US7904182B2 (en) * | 2005-06-08 | 2011-03-08 | Brooks Automation, Inc. | Scalable motion control system |
US20060278164A1 (en) * | 2005-06-10 | 2006-12-14 | Petrach Philip M | Dual gate isolating maintenance slit valve chamber with pumping option |
JP5078243B2 (ja) * | 2005-09-02 | 2012-11-21 | 東京エレクトロン株式会社 | 真空処理装置および真空予備室の排気方法 |
KR101447184B1 (ko) * | 2006-11-10 | 2014-10-08 | 엘아이지에이디피 주식회사 | 게이트슬릿 개폐장치가 구비된 공정챔버 |
DE102008027944B3 (de) * | 2008-06-12 | 2009-07-30 | Vat Holding Ag | Schieberventil |
DE102008049353A1 (de) * | 2008-09-29 | 2010-04-08 | Vat Holding Ag | Vakuumventil |
KR200473996Y1 (ko) | 2008-12-22 | 2014-08-13 | 주식회사 테스 | 슬릿밸브 |
EP2224153A1 (de) * | 2009-02-25 | 2010-09-01 | VAT Holding AG | Vakuumdoppelschieberventil |
TWI541465B (zh) * | 2009-10-27 | 2016-07-11 | Vat控股股份有限公司 | 用於真空閥之封閉單元 |
KR101762984B1 (ko) * | 2010-01-29 | 2017-07-28 | 배트 홀딩 아게 | 개구부를 폐쇄하기 위한 도어 |
JP5806827B2 (ja) * | 2011-03-18 | 2015-11-10 | 東京エレクトロン株式会社 | ゲートバルブ装置及び基板処理装置並びにその基板処理方法 |
KR101352929B1 (ko) * | 2011-12-20 | 2014-01-20 | 주식회사 에스에프에이 | 글라스 처짐이 방지된 인라인 진공장치 |
KR101338387B1 (ko) * | 2011-12-23 | 2013-12-06 | 이동민 | 진공 공정용 게이트 밸브 |
TWI656293B (zh) * | 2014-04-25 | 2019-04-11 | 瑞士商Vat控股股份有限公司 | 閥 |
JP6160923B2 (ja) * | 2014-04-30 | 2017-07-12 | Smc株式会社 | ゲートバルブ |
JP6584829B2 (ja) * | 2014-07-04 | 2019-10-02 | バット ホールディング アーゲー | バルブ |
US10184291B2 (en) * | 2014-12-19 | 2019-01-22 | Vat Holding Ag | Door for closing a chamber opening in a chamber wall of a vacuum chamber |
JP6677738B2 (ja) | 2015-03-09 | 2020-04-08 | バット ホールディング アーゲー | 真空バルブ |
TWI705212B (zh) | 2016-01-19 | 2020-09-21 | 瑞士商Vat控股股份有限公司 | 用於對壁中開口進行真空密封的密封裝置 |
US9666461B1 (en) * | 2016-02-05 | 2017-05-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor process and semiconductor processing device using the same |
TWI740981B (zh) | 2016-08-22 | 2021-10-01 | 瑞士商Vat控股股份有限公司 | 真空閥 |
US10622214B2 (en) | 2017-05-25 | 2020-04-14 | Applied Materials, Inc. | Tungsten defluorination by high pressure treatment |
CN113130345B (zh) * | 2019-12-31 | 2023-12-08 | 中微半导体设备(上海)股份有限公司 | 基片处理系统及其维护方法 |
US11328943B2 (en) * | 2020-04-03 | 2022-05-10 | Applied Materials, Inc. | Dual gate and single actuator system |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB851444A (en) * | 1956-06-05 | 1960-10-19 | Commissariat Energie Atomique | Improvements in or relating to vacuum control valves |
US3789875A (en) * | 1972-05-15 | 1974-02-05 | Gray Tool Co | Fluid pressure actuated valve operator |
US4355937A (en) * | 1980-12-24 | 1982-10-26 | International Business Machines Corporation | Low shock transmissive antechamber seal mechanisms for vacuum chamber type semi-conductor wafer electron beam writing apparatus |
US4483654A (en) * | 1981-02-13 | 1984-11-20 | Lam Research Corporation | Workpiece transfer mechanism |
US4340462A (en) * | 1981-02-13 | 1982-07-20 | Lam Research Corporation | Adjustable electrode plasma processing chamber |
SU1093854A1 (ru) * | 1983-01-11 | 1984-05-23 | Специальное Проектно-Конструкторское И Технологическое Бюро Электротермического Оборудования Саратовского Завода Электротермического Оборудования | Вакуумный шиберный затвор |
US4593915A (en) * | 1984-11-28 | 1986-06-10 | Grove Valve And Regulator Co. | Orifice plate seal ring |
US4753417A (en) * | 1985-01-28 | 1988-06-28 | The Boc Group, Inc. | Gate valve for vacuum processing apparatus |
US4715921A (en) * | 1986-10-24 | 1987-12-29 | General Signal Corporation | Quad processor |
US4715764A (en) * | 1986-04-28 | 1987-12-29 | Varian Associates, Inc. | Gate valve for wafer processing system |
US4917556A (en) * | 1986-04-28 | 1990-04-17 | Varian Associates, Inc. | Modular wafer transport and processing system |
JPS62190170U (de) * | 1986-05-23 | 1987-12-03 | ||
US4747577A (en) * | 1986-07-23 | 1988-05-31 | The Boc Group, Inc. | Gate valve with magnetic closure for use with vacuum equipment |
US4721282A (en) * | 1986-12-16 | 1988-01-26 | Lam Research Corporation | Vacuum chamber gate valve |
US5292393A (en) * | 1986-12-19 | 1994-03-08 | Applied Materials, Inc. | Multichamber integrated process system |
EP0273226B1 (de) * | 1986-12-22 | 1992-01-15 | Siemens Aktiengesellschaft | Transportbehälter mit austauschbarem, zweiteiligem Innenbehälter |
US4795299A (en) * | 1987-04-15 | 1989-01-03 | Genus, Inc. | Dial deposition and processing apparatus |
JPS63312574A (ja) * | 1987-06-11 | 1988-12-21 | Nippon Kentetsu Co Ltd | 真空装置のゲ−トバルブ装置 |
JP2539447B2 (ja) * | 1987-08-12 | 1996-10-02 | 株式会社日立製作所 | 枚葉キャリアによる生産方法 |
US5076205A (en) * | 1989-01-06 | 1991-12-31 | General Signal Corporation | Modular vapor processor system |
US5002255A (en) * | 1989-03-03 | 1991-03-26 | Irie Koken Kabushiki Kaisha | Non-sliding gate valve for high vacuum use |
US5120019A (en) * | 1989-08-03 | 1992-06-09 | Brooks Automation, Inc. | Valve |
JPH0478377A (ja) * | 1990-07-20 | 1992-03-12 | Tokyo Electron Ltd | トグル式ゲート |
DE4024973C2 (de) * | 1990-08-07 | 1994-11-03 | Ibm | Anordnung zum Lagern, Transportieren und Einschleusen von Substraten |
JP2524270B2 (ja) * | 1990-10-04 | 1996-08-14 | 西武商事有限会社 | 仕切弁 |
JPH0599348A (ja) * | 1991-06-11 | 1993-04-20 | Plasma Syst:Kk | ゲートバルブ |
US5697749A (en) * | 1992-07-17 | 1997-12-16 | Tokyo Electron Kabushiki Kaisha | Wafer processing apparatus |
US5295522A (en) * | 1992-09-24 | 1994-03-22 | International Business Machines Corporation | Gas purge system for isolation enclosure for contamination sensitive items |
JP3330686B2 (ja) * | 1993-07-12 | 2002-09-30 | 株式会社アルバック | 無摺動ゲートバルブ |
JP3394293B2 (ja) * | 1993-09-20 | 2003-04-07 | 株式会社日立製作所 | 試料の搬送方法および半導体装置の製造方法 |
US5383338A (en) * | 1993-12-17 | 1995-01-24 | Emerson Electric Co. | In-line sight indicator |
KR960002534A (ko) * | 1994-06-07 | 1996-01-26 | 이노우에 아키라 | 감압·상압 처리장치 |
DE19601541A1 (de) * | 1995-01-27 | 1996-08-01 | Seiko Seiki Kk | In einer Vakuumumgebung einsetzbares Vertikaltransfersystem sowie dazugehöriges Absperrventilsystem |
US5667197A (en) * | 1996-07-09 | 1997-09-16 | Lam Research Corporation | Vacuum chamber gate valve and method for making same |
US5902088A (en) * | 1996-11-18 | 1999-05-11 | Applied Materials, Inc. | Single loadlock chamber with wafer cooling function |
JPH10335406A (ja) * | 1997-06-02 | 1998-12-18 | Kokusai Electric Co Ltd | ドア開閉機構 |
JPH10339377A (ja) * | 1997-06-06 | 1998-12-22 | Nec Corp | ゲートバルブ |
US6079693A (en) * | 1998-05-20 | 2000-06-27 | Applied Komatsu Technology, Inc. | Isolation valves |
-
1999
- 1999-03-29 US US09/280,177 patent/US6095741A/en not_active Expired - Lifetime
-
2000
- 2000-02-29 KR KR1020017012363A patent/KR100783120B1/ko active IP Right Grant
- 2000-02-29 DE DE60036371T patent/DE60036371T2/de not_active Expired - Lifetime
- 2000-02-29 EP EP00914757A patent/EP1165993B1/de not_active Expired - Lifetime
- 2000-02-29 AT AT00914757T patent/ATE373193T1/de not_active IP Right Cessation
- 2000-02-29 JP JP2000608109A patent/JP4532749B2/ja not_active Expired - Lifetime
- 2000-02-29 AU AU36105/00A patent/AU3610500A/en not_active Abandoned
- 2000-02-29 WO PCT/US2000/005159 patent/WO2000058654A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1165993A1 (de) | 2002-01-02 |
ATE373193T1 (de) | 2007-09-15 |
EP1165993B1 (de) | 2007-09-12 |
JP4532749B2 (ja) | 2010-08-25 |
KR20010109331A (ko) | 2001-12-08 |
KR100783120B1 (ko) | 2007-12-07 |
AU3610500A (en) | 2000-10-16 |
WO2000058654A1 (en) | 2000-10-05 |
JP2002540612A (ja) | 2002-11-26 |
US6095741A (en) | 2000-08-01 |
DE60036371T2 (de) | 2008-06-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |