DE60027371D1 - Kinematische Linsenhalterung - Google Patents

Kinematische Linsenhalterung

Info

Publication number
DE60027371D1
DE60027371D1 DE60027371T DE60027371T DE60027371D1 DE 60027371 D1 DE60027371 D1 DE 60027371D1 DE 60027371 T DE60027371 T DE 60027371T DE 60027371 T DE60027371 T DE 60027371T DE 60027371 D1 DE60027371 D1 DE 60027371D1
Authority
DE
Germany
Prior art keywords
mounts
flexure
radial
lens
soft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60027371T
Other languages
English (en)
Other versions
DE60027371T2 (de
Inventor
Douglas C Watson
Thomas W Novak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of DE60027371D1 publication Critical patent/DE60027371D1/de
Application granted granted Critical
Publication of DE60027371T2 publication Critical patent/DE60027371T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Epidemiology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Prostheses (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Fuel Cell (AREA)
DE60027371T 1999-08-31 2000-07-29 Kinematische Linsenhalterung Expired - Fee Related DE60027371T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US386255 1999-08-31
US09/386,255 US6239924B1 (en) 1999-08-31 1999-08-31 Kinematic lens mounting with distributed support and radial flexure

Publications (2)

Publication Number Publication Date
DE60027371D1 true DE60027371D1 (de) 2006-05-24
DE60027371T2 DE60027371T2 (de) 2007-06-21

Family

ID=23524830

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60027371T Expired - Fee Related DE60027371T2 (de) 1999-08-31 2000-07-29 Kinematische Linsenhalterung

Country Status (7)

Country Link
US (1) US6239924B1 (de)
EP (1) EP1081521B1 (de)
JP (1) JP4622058B2 (de)
KR (1) KR100654117B1 (de)
AT (1) ATE323893T1 (de)
DE (1) DE60027371T2 (de)
TW (1) TW490599B (de)

Families Citing this family (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6650412B1 (en) * 1999-09-10 2003-11-18 Kaiser Optical Systems Thermal compensation for optical apparatus
KR20030051421A (ko) * 2000-03-31 2003-06-25 가부시키가이샤 니콘 광학 부재의 유지 방법 및 장치, 광학 장치, 노광 장치 및디바이스 제조 방법
JP4945845B2 (ja) * 2000-03-31 2012-06-06 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
US6400516B1 (en) * 2000-08-10 2002-06-04 Nikon Corporation Kinematic optical mounting
US6473245B1 (en) 2000-08-10 2002-10-29 Nikon Corporation Catadioptric lens barrel structure having a plurality of support platforms and method of making the same
US6577457B1 (en) 2000-08-10 2003-06-10 Nikon Corporation Catadioptric lens barrel structure having a kinematic alignment structure and method for aligning two planar surfaces
US6639740B1 (en) 2000-08-10 2003-10-28 Nikon Corporation Catadioptric lens barrel structure having a plurality of split lens barrels and a support structure supporting the split lens barrels
AU2001277758A1 (en) 2000-08-18 2002-03-04 Nikon Corporation Optical element holding device
US6653639B1 (en) * 2000-10-17 2003-11-25 Nikon Corporation Chuck for mounting reticle to a reticle stage
JP4081813B2 (ja) * 2000-11-10 2008-04-30 株式会社ニコン 光学装置、露光装置、及びデバイス製造方法
US6439139B1 (en) * 2000-11-17 2002-08-27 Owens Corning Fiberglas Technology, Inc. Method for recycling building materials
DE10100546A1 (de) * 2001-01-08 2002-07-11 Zeiss Carl Vorrichtung zur Verstellung eines optischen Elementes in einem Objektiv
US6381081B1 (en) * 2001-01-19 2002-04-30 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Flexure-ring for centering a concave lens in a bore of a housing for an optical system
JP2002365013A (ja) * 2001-06-04 2002-12-18 Fuji Photo Optical Co Ltd 光波干渉計用参照基準板の支持装置
US6788389B2 (en) * 2001-07-10 2004-09-07 Nikon Corporation Production method of projection optical system
US6603611B1 (en) * 2001-11-06 2003-08-05 Itt Manufacturing Enterprises, Inc. Mount for ultra-high performance of optical components under thermal and vibrational distortion conditions
TW577108B (en) * 2001-11-07 2004-02-21 Nikon Corp Optical device and the manufacturing method thereof, optical system, and manufacturing method of exposure device and micro-device
US20030098965A1 (en) * 2001-11-29 2003-05-29 Mike Binnard System and method for supporting a device holder with separate components
US6909493B2 (en) 2002-03-20 2005-06-21 Canon Kabushiki Kaisha Correction member, retainer, exposure apparatus, and device fabrication method
TWI223863B (en) * 2002-04-22 2004-11-11 Nikon Corp Support apparatus, optical apparatus, exposure apparatus and manufacturing method of device
JP4333078B2 (ja) * 2002-04-26 2009-09-16 株式会社ニコン 投影光学系、該投影光学系を備えた露光装置および該投影光学系を用いた露光方法並びにデバイス製造方法
US7245361B2 (en) 2002-06-04 2007-07-17 Nikon Corporation Method for evaluating refractive index homogeneity of optical member
JPWO2003102529A1 (ja) * 2002-06-04 2005-09-29 株式会社ニコン 光学部材の屈折率均質性を評価する方法
US20030234918A1 (en) * 2002-06-20 2003-12-25 Nikon Corporation Adjustable soft mounts in kinematic lens mounting system
US20030235682A1 (en) * 2002-06-21 2003-12-25 Sogard Michael R. Method and device for controlling thermal distortion in elements of a lithography system
US20030234916A1 (en) * 2002-06-21 2003-12-25 Nikon Corporation Soft supports to reduce deformation of vertically mounted lens or mirror
US6922293B2 (en) 2002-07-02 2005-07-26 Nikon Corporation Kinematic optical mounting assembly with flexures
EP1380899B1 (de) * 2002-07-11 2014-09-03 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
TWI266151B (en) * 2002-07-11 2006-11-11 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US6649865B1 (en) * 2002-08-07 2003-11-18 Great Computer Corp. Control method for optical lens-seat on a laser processing machine
JP2005534998A (ja) * 2002-08-08 2005-11-17 カール・ツァイス・エスエムティー・アーゲー イメージングデバイスにおける光学式アセンブリを保持するための装置
US20040080730A1 (en) * 2002-10-29 2004-04-29 Michael Binnard System and method for clamping a device holder with reduced deformation
WO2004086148A1 (de) * 2003-03-26 2004-10-07 Carl Zeiss Smt Ag Vorrichtung zur deformationsarmen austauschbaren lagerung eines optischen elements
JP2004363559A (ja) * 2003-05-14 2004-12-24 Canon Inc 光学部材保持装置
JP2004347814A (ja) * 2003-05-21 2004-12-09 Canon Inc 保持装置、露光装置及びデバイス製造方法
DE602004024302D1 (de) * 2003-06-06 2010-01-07 Nippon Kogaku Kk Halteeinrichtung für optische elemente, objektivtubus, belichtungseinrichtung und herstellungsverfahren für bauelemente
DE102004025832A1 (de) * 2004-05-24 2005-12-22 Carl Zeiss Smt Ag Optikmodul für ein Objektiv
US7697222B2 (en) * 2003-12-25 2010-04-13 Nikon Corporation Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
EP1577693B1 (de) * 2004-02-26 2011-07-13 Carl Zeiss SMT GmbH Objektiv mit wenigstens einem optischen Element
DE102004014641B4 (de) * 2004-03-09 2007-09-13 Carl Zeiss Smt Ag Anordnung zur Lagerung eines optischen Bauelements
WO2006096045A1 (en) * 2005-03-09 2006-09-14 Stichting Astron Suspension for keeping an object aligned during large temperature variations; optical system provided with such a suspension.
US20060238735A1 (en) * 2005-04-22 2006-10-26 Vladimir Kamenov Optical system of a projection exposure apparatus
WO2006134910A1 (ja) * 2005-06-14 2006-12-21 Nikon Corporation 光学素子、光学素子保持装置、露光装置、及びデバイス製造方法
EP1899756A2 (de) * 2005-07-01 2008-03-19 Carl Zeiss SMT AG Anordnung zur lagerung eines optischen bauelements
JP5243957B2 (ja) 2005-08-16 2013-07-24 カール・ツァイス・エスエムティー・ゲーエムベーハー 液浸リソグラフィー用オブジェクティブ
TWI372271B (en) * 2005-09-13 2012-09-11 Zeiss Carl Smt Gmbh Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device
WO2007132862A1 (ja) * 2006-05-16 2007-11-22 Nikon Corporation 投影光学系、露光方法、露光装置、及びデバイス製造方法
EP1901101A1 (de) 2006-09-14 2008-03-19 Carl Zeiss SMT AG Optische Elementeinheit und Verfahren zum Stützen eines optischen Elements
US8416386B2 (en) * 2007-03-13 2013-04-09 Nikon Corporation Conforming seats for clamps used in mounting an optical element, and optical systems comprising same
JPWO2008146655A1 (ja) * 2007-05-25 2010-08-19 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置ならびにデバイスの製造方法
WO2009024192A1 (en) * 2007-08-23 2009-02-26 Carl Zeiss Smt Ag Optical element module with minimized parasitic loads
US7990628B1 (en) * 2007-08-29 2011-08-02 Tessera MEMS Technologies, Inc. Planar flexure system with high pitch stiffness
DE102007047186B4 (de) * 2007-10-02 2014-01-09 Carl Zeiss Sms Gmbh Aufnahmevorrichtung zur Aufnahme einer Photolithographiemaske
DE102007063305A1 (de) * 2007-12-27 2009-07-02 Carl Zeiss Smt Ag Optische Einrichtung mit einer Federeinrichtung mit einem Bereich konstanter Federkraft
DE102008022211B3 (de) * 2008-05-06 2010-02-25 Carl Zeiss Surgical Gmbh Linsenträger sowie optische Baugruppe
US9335641B2 (en) * 2008-07-21 2016-05-10 Asml Netherlands B.V. Optical element mount for lithographic apparatus
US8591048B2 (en) * 2009-10-30 2013-11-26 Flir Systems, Inc. Spatially efficient kinematic mirror mount
US8919724B2 (en) 2010-08-24 2014-12-30 Raytheon Company Mount for cryogenic fast switching mechanism
CN102486564B (zh) * 2010-12-06 2014-10-29 上海微电子装备有限公司 透镜挠性固定装置
CN102243359B (zh) * 2011-06-20 2012-11-14 北京空间机电研究所 一种大孔径透镜挠性支撑方法
JP5695011B2 (ja) * 2012-10-31 2015-04-01 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
DE202013011933U1 (de) 2013-01-23 2014-10-28 Jenoptik Optical Systems Gmbh Thermisch kompensierte optische Baugruppe mit einem formschlüssig gehaltenen optischen Bauelement
CN103901571B (zh) * 2014-02-13 2016-03-09 中国科学院上海光学精密机械研究所 大型透反式镜片非垂直放置的挠性支撑装置和支撑方法
CN103885302B (zh) * 2014-04-04 2016-03-30 中国科学院光电技术研究所 一种装卡光学元件的力反馈精密支撑装置
JP5848470B2 (ja) * 2015-02-05 2016-01-27 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
CN106383395A (zh) * 2015-07-29 2017-02-08 上海微电子装备有限公司 一种大口径侧立镜组结构
CN105371763B (zh) * 2015-12-01 2017-09-19 中国科学院长春光学精密机械与物理研究所 一种大口径光学元件卧式电磁支撑装置
CN107329225B (zh) * 2016-04-29 2020-06-16 上海微电子装备（集团）股份有限公司 侧立镜组及其安装方法
US20170363833A1 (en) * 2016-06-17 2017-12-21 Corning Incorporated Polymer-free compliant optical member support
US10015378B2 (en) 2016-09-15 2018-07-03 Microsoft Technology Licensing, Llc Kinematic mount for split camera
TWI597536B (zh) * 2016-10-27 2017-09-01 財團法人國家實驗硏究院 用於支撐鏡片的支撐裝置與方法及用於支 撐功能元件的支撐組件
US10678018B2 (en) * 2017-10-23 2020-06-09 Magna Electronics Inc. Camera for vehicle vision system with replaceable lens
LT3759537T (lt) * 2018-03-02 2023-08-25 Gooch And Housego Plc Montavimo žiedas optinio įtaiso centravimui palaikyti
GB201804952D0 (en) * 2018-03-27 2018-05-09 Pxyl Ltd Improved scanning optical microscope
US11692816B2 (en) 2018-04-27 2023-07-04 Cognex Corporation Mounting arrangement for optical systems
EP3608627B1 (de) 2018-08-09 2023-11-08 Cognex Corporation Positionierungssystem für komponenten von optischen systemen
CN109387918A (zh) * 2018-12-03 2019-02-26 长春奥普光电技术股份有限公司 一种主三一体镜定位组合装置及方法
EP3792673A1 (de) * 2019-09-16 2021-03-17 ASML Netherlands B.V. Anordnung zur bündelung von breitbandstrahlung
WO2021043516A1 (en) * 2019-09-03 2021-03-11 Asml Netherlands B.V. Assembly for collimating broadband radiation
CN110568576B (zh) * 2019-09-09 2021-04-06 中国科学院长春光学精密机械与物理研究所 一种透镜柔性支撑装置
CN112068277B (zh) * 2020-08-31 2021-08-20 中国科学院长春光学精密机械与物理研究所 大口径光学透镜的多级柔性支撑结构
CN112128546B (zh) * 2020-09-30 2021-11-05 中国科学院国家天文台南京天文光学技术研究所 用于大尺寸拼接光学元件的支撑结构及其安装方法
DE102021200131A1 (de) * 2021-01-11 2022-07-14 Carl Zeiss Smt Gmbh Baugruppe mit einem Entkopplungsgelenk zur mechanischen Lagerung eines Elements
CN113917645B (zh) * 2021-11-01 2023-03-31 中国科学院光电技术研究所 一种镜片弹性支撑装置
CN114486939B (zh) * 2022-04-08 2022-07-22 欧普康视科技股份有限公司 一种镜片划痕检测系统及方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2808762A (en) * 1956-06-25 1957-10-08 Bausch & Lomb Lens mounting means
US2937571A (en) 1957-10-08 1960-05-24 Ernest B Thompson Optical lens mount
DE1262041B (de) * 1965-07-13 1968-02-29 Voigtlaender Ag Halterung fuer Linsen
US3601343A (en) 1969-09-05 1971-08-24 North American Rockwell Strain-free mount
JPS58159509A (ja) * 1982-03-18 1983-09-21 Olympus Optical Co Ltd レンズ保持装置
JPS58187907A (ja) * 1982-04-27 1983-11-02 Olympus Optical Co Ltd レンズ保持装置
US4733945A (en) 1986-01-15 1988-03-29 The Perkin-Elmer Corporation Precision lens mounting
US4929054A (en) 1986-04-28 1990-05-29 The Perkin-Elmer Corporation Mounting for high resolution projection lenses
US4726671A (en) 1986-06-19 1988-02-23 The Perkin-Elmer Corporation High resonance adjustable mirror mount
US5428482A (en) * 1991-11-04 1995-06-27 General Signal Corporation Decoupled mount for optical element and stacked annuli assembly
JP3412638B2 (ja) * 1993-01-19 2003-06-03 株式会社ニコン レンズの保持具
JPH06250061A (ja) * 1993-02-26 1994-09-09 Nikon Corp 光学部材保持装置
JP3956454B2 (ja) 1997-11-18 2007-08-08 株式会社ニコン レンズ支持装置、支持方法および投影露光装置
DE19904152A1 (de) * 1999-02-03 2000-08-10 Zeiss Carl Fa Baugruppe aus einem optischen Element und einer Fassung

Also Published As

Publication number Publication date
EP1081521B1 (de) 2006-04-19
KR20010020912A (ko) 2001-03-15
ATE323893T1 (de) 2006-05-15
EP1081521A3 (de) 2004-01-02
US6239924B1 (en) 2001-05-29
JP4622058B2 (ja) 2011-02-02
DE60027371T2 (de) 2007-06-21
KR100654117B1 (ko) 2006-12-05
EP1081521A2 (de) 2001-03-07
JP2001074991A (ja) 2001-03-23
TW490599B (en) 2002-06-11

Similar Documents

Publication Publication Date Title
ATE323893T1 (de) Kinematische linsenhalterung
DK1994324T3 (en) Højpassivt subdued vibrationsisoleringsbeslag low profile and multiple axes
JP4934131B2 (ja) 光学要素の支持装置
US5801891A (en) Flat mirror mounting flexure
FR2779503B1 (fr) Amortisseur d'oscillations de torsion comprenant des moyens de fixation axiale d'appui de ressort
EP1806610A4 (de) Optisches system, objektivtubus; belichtungssystem und bauelemente-herstellungsverfahren
JP5583646B2 (ja) ハウジング構造体
WO2006119970A2 (en) Assembly for adjusting an optical element
WO2001070573A3 (en) Passive, multi-axis, highly damped, shock isolation mounts
US6017013A (en) Damped instrument kinematic mounts
EP1278088A3 (de) Optomechanische Halterung zur genauen Positionierung eines Lichtstrahls
DE69325360D1 (de) Struktur zur dynamischen halterung von reflektierenden elementen
EP0947417A3 (de) Stossdämpfungsvorrichtung für Fahrrad
ATE294908T1 (de) Brücke in stossgedämpfter bauweise
ATE286224T1 (de) Entkoppelter gewichtsausgleich für eine kamera- balance-vorrichtung
EP1308765A1 (de) Hochleistungsfassung für optische Elemente unter Wärme- und Schwingungsbeanspruchung
ITTO20030519A1 (it) Sistema d'appoggio articolabile di un elemento
SG136794A1 (en) Data storage module suspension system
DE3768624D1 (de) Stativ mit einer saeule und einem ueber ein gelenk damit verbundenen ausleger.
EP1241371A3 (de) Schwingungsdämpfungssystem
DE50208404D1 (de) Einstellbarer Schwingungstilger
JP3307062B2 (ja) 光学素子保持装置
CA2436614A1 (en) Floating support structure for cd changer
SU1471163A1 (ru) Устройство дл разгрузки зеркал
BR9302413A (pt) Suporte elastico com amortecedores para mangas filtrantes

Legal Events

Date Code Title Description
8332 No legal effect for de
8364 No opposition during term of opposition
8370 Indication related to discontinuation of the patent is to be deleted
8339 Ceased/non-payment of the annual fee