DE60023628D1 - Verfahren zur herstellung eines pvd al2o3 beschichteten schneidwerkzeugs - Google Patents

Verfahren zur herstellung eines pvd al2o3 beschichteten schneidwerkzeugs

Info

Publication number
DE60023628D1
DE60023628D1 DE60023628T DE60023628T DE60023628D1 DE 60023628 D1 DE60023628 D1 DE 60023628D1 DE 60023628 T DE60023628 T DE 60023628T DE 60023628 T DE60023628 T DE 60023628T DE 60023628 D1 DE60023628 D1 DE 60023628D1
Authority
DE
Germany
Prior art keywords
substrate
producing
cutting tool
coated cutting
pvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60023628T
Other languages
English (en)
Other versions
DE60023628T2 (de
Inventor
Siegfried Schiller
Klaus Goedicke
Fred Fietzke
Olaf Zywitzki
Mats Sjoestrand
Bjoern Ljungberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PABIO AS
Original Assignee
PABIO AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PABIO AS filed Critical PABIO AS
Publication of DE60023628D1 publication Critical patent/DE60023628D1/de
Application granted granted Critical
Publication of DE60023628T2 publication Critical patent/DE60023628T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Plasma & Fusion (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Laminated Bodies (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Chemical Treatment Of Metals (AREA)
DE60023628T 1999-05-06 2000-05-03 Verfahren zur herstellung eines pvd ai2o3 beschichteten schneidwerkzeugs Expired - Lifetime DE60023628T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9901650 1999-05-06
SE9901650A SE520716C2 (sv) 1999-05-06 1999-05-06 En process för tillverkning av ett skärverktyg belagt med aluminiumoxid
PCT/SE2000/000857 WO2000068452A1 (en) 1999-05-06 2000-05-03 Method of making a pvd al2o3 coated cutting tool

Publications (2)

Publication Number Publication Date
DE60023628D1 true DE60023628D1 (de) 2005-12-08
DE60023628T2 DE60023628T2 (de) 2006-06-08

Family

ID=20415500

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60023628T Expired - Lifetime DE60023628T2 (de) 1999-05-06 2000-05-03 Verfahren zur herstellung eines pvd ai2o3 beschichteten schneidwerkzeugs

Country Status (12)

Country Link
US (1) US6451180B1 (de)
EP (1) EP1097250B1 (de)
JP (1) JP4975906B2 (de)
KR (1) KR100673637B1 (de)
CN (1) CN1304458A (de)
AT (1) ATE308629T1 (de)
BR (1) BR0006060A (de)
DE (1) DE60023628T2 (de)
IL (1) IL140511A0 (de)
PL (1) PL193249B1 (de)
SE (1) SE520716C2 (de)
WO (1) WO2000068452A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE519921C2 (sv) * 1999-05-06 2003-04-29 Sandvik Ab PVD-belagt skärverktyg och metod för dess framställning
US6689450B2 (en) * 2001-03-27 2004-02-10 Seco Tools Ab Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
US7967957B2 (en) 2002-08-09 2011-06-28 Kobe Steel, Ltd. Method for preparing alumna coating film having alpha-type crystal structure as primary structure
DE10244438B4 (de) * 2002-09-24 2007-02-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verbundkörper mit einer verschleißmindernden Oberflächenschicht, Verfahren zu seiner Herstellung sowie Verwendung des Verbundkörpers
DE10303428A1 (de) * 2003-01-29 2004-08-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Einrichtung zur plasmaaktivierten Schichtabscheidung durch Kathodenzerstäubung nach dem Magnetron-Prinzip
CN100409983C (zh) * 2003-10-30 2008-08-13 上海交通大学 整体式硬质合金旋转刀具金刚石涂层制备装置
SE529855C2 (sv) * 2005-12-30 2007-12-11 Sandvik Intellectual Property Belagt hårdmetallskär och sätt att tillverka detta
JP5013053B2 (ja) * 2006-08-24 2012-08-29 株式会社ブリヂストン タンタル酸化物膜の成膜方法
SE533395C2 (sv) * 2007-06-08 2010-09-14 Sandvik Intellectual Property Sätt att göra PVD-beläggningar
JP2009035784A (ja) 2007-08-02 2009-02-19 Kobe Steel Ltd 酸化物皮膜、酸化物皮膜被覆材および酸化物皮膜の形成方法
JP2009120912A (ja) 2007-11-15 2009-06-04 Kobe Steel Ltd 硬質皮膜を備えた耐摩耗性部材
CN104302804B (zh) * 2012-12-26 2016-10-26 伍尚华 一种采用物理气相沉积工艺在氮化硅切削刀具表面制备Al2O3涂层及其复合涂层的方法
DE102014104672A1 (de) 2014-04-02 2015-10-08 Kennametal Inc. Beschichtetes Schneidwerkzeug und Verfahren zu seiner Herstellung
CN104962873A (zh) * 2015-07-17 2015-10-07 广东工业大学 一种制备多晶氧化铝硬质涂层的方法
JP6515387B2 (ja) * 2015-09-15 2019-05-22 日本製鉄株式会社 超硬工具及びその製造方法
KR102652515B1 (ko) * 2017-11-07 2024-03-28 발터 악티엔게젤샤프트 Al2O3 증착을 위한 PVD 프로세스 및 적어도 하나의 Al2O3 층으로 코팅된 절삭 공구
CN113322442B (zh) * 2021-06-03 2022-11-01 哈尔滨工业大学 一种抗原子氧性能优异的γ-三氧化二铝薄膜的制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE252205C (de)
CH540991A (fr) 1971-07-07 1973-08-31 Battelle Memorial Institute Procédé pour augmenter la résistance à l'usure de la surface d'une pièce en "métal dur"
DE59201616D1 (de) 1991-03-27 1995-04-13 Krupp Widia Gmbh Verbundkörper, verwendung des verbundkörpers und verfahren zu seiner herstellung.
SE9101953D0 (sv) 1991-06-25 1991-06-25 Sandvik Ab A1203 coated sintered body
DE4209975A1 (de) 1992-03-27 1993-09-30 Krupp Widia Gmbh Verbundkörper und dessen Verwendung
EP0592986B1 (de) 1992-10-12 1998-07-08 Sumitomo Electric Industries, Limited Ultradünnes Filmlaminat
SE501527C2 (sv) 1992-12-18 1995-03-06 Sandvik Ab Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt
JP2999346B2 (ja) * 1993-07-12 2000-01-17 オリエンタルエンヂニアリング株式会社 基体表面被覆方法及び被覆部材
SE509201C2 (sv) 1994-07-20 1998-12-14 Sandvik Ab Aluminiumoxidbelagt verktyg
US5700551A (en) 1994-09-16 1997-12-23 Sumitomo Electric Industries, Ltd. Layered film made of ultrafine particles and a hard composite material for tools possessing the film
US5698314A (en) 1995-05-22 1997-12-16 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Compound body of vacuum-coated sintered material and process for its production
US5693417A (en) 1995-05-22 1997-12-02 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Vacuum-coated compound body and process for its production
DE19544584A1 (de) * 1995-11-30 1997-06-05 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material
DE19546826C1 (de) * 1995-12-15 1997-04-03 Fraunhofer Ges Forschung Verfahren und Einrichtung zur Vorbehandlung von Substraten
SE520795C2 (sv) * 1999-05-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning

Also Published As

Publication number Publication date
KR20010053389A (ko) 2001-06-25
PL345385A1 (en) 2001-12-17
SE520716C2 (sv) 2003-08-12
CN1304458A (zh) 2001-07-18
EP1097250A1 (de) 2001-05-09
KR100673637B1 (ko) 2007-01-23
JP4975906B2 (ja) 2012-07-11
IL140511A0 (en) 2002-02-10
WO2000068452A1 (en) 2000-11-16
PL193249B1 (pl) 2007-01-31
JP2002544379A (ja) 2002-12-24
SE9901650D0 (sv) 1999-05-06
DE60023628T2 (de) 2006-06-08
SE9901650L (sv) 2000-11-07
US6451180B1 (en) 2002-09-17
BR0006060A (pt) 2001-03-20
EP1097250B1 (de) 2005-11-02
ATE308629T1 (de) 2005-11-15

Similar Documents

Publication Publication Date Title
DE60023628D1 (de) Verfahren zur herstellung eines pvd al2o3 beschichteten schneidwerkzeugs
CA1269061A (en) Process for the production of diamond-like carbon coatings
ATE528421T1 (de) Verfahren zur herstellung von gruppe-iii- metallnitrid-materialien
DE19983075T1 (de) Organisches Substrat mit durch Magnetronzerstäubung gefällten optischen Lagen und Verfahren zur Herstellung desselben
IL160411A (en) Method for producing a nanostructured functional coating and a coating that can be produced according to said method
AU562107B2 (en) Coating of ti, zr and hf compounds by cathodic sputtering in a pulsed reactive gas
ATE522637T1 (de) Verfahren zur herstellung eines sputtertargets
JPH0588310B2 (de)
JP2002544379A5 (de)
CN106191799B (zh) 一种不锈钢af涂层工艺
US10060026B2 (en) High-power pulse coating method
CN102345091A (zh) 涂层、具有该涂层的被覆件及该被覆件的制备方法
ATE538489T1 (de) Verfahren zur herstellung magnetron- sputterbeschichteter substrate und anlage hierfür
RU2018140962A (ru) TiCN С СОКРАЩЕННЫМИ ДЕФЕКТАМИ РОСТА С ПОМОЩЬЮ HiPIMS
DK0668369T3 (da) PVD-fremgangsmåde til afsætning af lag af hårde materialer med flere komponenter
Vetter et al. Domino platform: PVD coaters for arc evaporation and high current pulsed magnetron sputtering
AU2001249804A1 (en) Selective deposition of material on a substrate according to an interference pattern
RU2266351C1 (ru) Способ нанесения декоративного нитридтитанового покрытия на изделия из керамики, металла, стекла и полимерных материалов
RU2123540C1 (ru) Способ защитно-декоративного нитридтитанового покрытия керамической посуды
Berry Three Firms Using Chromalloy's New Coating Method
Grenier et al. The formation of titanium nitride films by thermal plasma reactive forming
Ahmed Reviewing deposition
BROWN et al. Deposition of mullite and mullite-like coatings on silicon carbide by dual- source metal plasma immersion(Topical Report, Oct. 1995- Sep. 1996)
RU2001102773A (ru) Способ изготовления режущего инструмента
UA38393C2 (uk) Спосіб нанесення покриттів на основі нітридів металів у вакуумі на вироби з діелектричних матеріалів

Legal Events

Date Code Title Description
8364 No opposition during term of opposition