AU2001249804A1 - Selective deposition of material on a substrate according to an interference pattern - Google Patents
Selective deposition of material on a substrate according to an interference patternInfo
- Publication number
- AU2001249804A1 AU2001249804A1 AU2001249804A AU4980401A AU2001249804A1 AU 2001249804 A1 AU2001249804 A1 AU 2001249804A1 AU 2001249804 A AU2001249804 A AU 2001249804A AU 4980401 A AU4980401 A AU 4980401A AU 2001249804 A1 AU2001249804 A1 AU 2001249804A1
- Authority
- AU
- Australia
- Prior art keywords
- interference pattern
- substrate
- substrate according
- selective deposition
- preferentially
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Polarising Elements (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
A method of preferentially depositing material on a substrate is disclosed. Material can be preferentially deposited by directing an electromagnetic interference pattern on to a substrate to selectively heat areas of the substrate coincident with the interference pattern maxima. The substrate can then be exposed to gas phase material that is capable of preferentially accumulating on surfaces based on surface temperature.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/542,256 US6391528B1 (en) | 2000-04-03 | 2000-04-03 | Methods of making wire grid optical elements by preferential deposition of material on a substrate |
US09542256 | 2000-04-03 | ||
US09820299 | 2001-03-28 | ||
US09/820,299 US20010028925A1 (en) | 2000-04-03 | 2001-03-28 | Selective deposition of material on a substrate according to an interference pattern |
PCT/US2001/010732 WO2001075491A1 (en) | 2000-04-03 | 2001-04-02 | Selective deposition of material on a substrate according to an interference pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001249804A1 true AU2001249804A1 (en) | 2001-10-15 |
Family
ID=27066973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001249804A Abandoned AU2001249804A1 (en) | 2000-04-03 | 2001-04-02 | Selective deposition of material on a substrate according to an interference pattern |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1269225B1 (en) |
JP (1) | JP2003529680A (en) |
CN (1) | CN1241036C (en) |
AT (1) | ATE337568T1 (en) |
AU (1) | AU2001249804A1 (en) |
DE (1) | DE60122482T2 (en) |
ES (1) | ES2270997T3 (en) |
WO (1) | WO2001075491A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7001529B2 (en) * | 2002-10-18 | 2006-02-21 | Lam Research Corporation | Pre-endpoint techniques in photoresist etching |
US7368744B2 (en) * | 2006-02-17 | 2008-05-06 | Asml Netherlands B.V. | Photon sieve for optical systems in micro-lithography |
MX2009011501A (en) * | 2007-04-26 | 2009-11-10 | Helianthos Bv | Photovoltaic module comprising layer with conducting spots. |
WO2015020814A1 (en) | 2013-08-08 | 2015-02-12 | Applied Materials, Inc. | Photonic activation of reactants for sub-micron feature formation using depleted beams |
CN105695951B (en) * | 2016-04-20 | 2018-10-02 | 肖志凯 | A kind of device and its application suitable for local growth film and coating |
CN106947954B (en) * | 2017-04-27 | 2019-06-18 | 京东方科技集团股份有限公司 | A kind of preparation method of vapor deposition apparatus and film |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4289381A (en) * | 1979-07-02 | 1981-09-15 | Hughes Aircraft Company | High selectivity thin film polarizer |
FR2542327B1 (en) * | 1983-03-07 | 1986-03-07 | Bensoussan Marcel | |
US4746934A (en) * | 1986-07-07 | 1988-05-24 | Tektronix, Inc. | Color image copying system using a cathode-ray tube with diffraction grating face plate |
JPH0720766A (en) * | 1993-06-29 | 1995-01-24 | Canon Inc | Production of hologram and display device |
JP3704843B2 (en) * | 1995-10-24 | 2005-10-12 | 凸版印刷株式会社 | Non-contact non-destructive material evaluation method and apparatus, elastic wave excitation method and elastic wave excitation apparatus |
JP3624561B2 (en) * | 1996-03-12 | 2005-03-02 | 旭硝子株式会社 | Optical modulation element and optical head device |
GB2329484A (en) * | 1997-09-22 | 1999-03-24 | Northern Telecom Ltd | Writing Bragg reflection gratings in optical waveguides |
-
2001
- 2001-04-02 CN CN01807758.7A patent/CN1241036C/en not_active Expired - Fee Related
- 2001-04-02 JP JP2001573110A patent/JP2003529680A/en not_active Withdrawn
- 2001-04-02 EP EP01923075A patent/EP1269225B1/en not_active Expired - Lifetime
- 2001-04-02 WO PCT/US2001/010732 patent/WO2001075491A1/en active IP Right Grant
- 2001-04-02 DE DE60122482T patent/DE60122482T2/en not_active Expired - Fee Related
- 2001-04-02 AU AU2001249804A patent/AU2001249804A1/en not_active Abandoned
- 2001-04-02 ES ES01923075T patent/ES2270997T3/en not_active Expired - Lifetime
- 2001-04-02 AT AT01923075T patent/ATE337568T1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1269225A1 (en) | 2003-01-02 |
WO2001075491A1 (en) | 2001-10-11 |
CN1422388A (en) | 2003-06-04 |
DE60122482T2 (en) | 2007-05-24 |
CN1241036C (en) | 2006-02-08 |
JP2003529680A (en) | 2003-10-07 |
ATE337568T1 (en) | 2006-09-15 |
DE60122482D1 (en) | 2006-10-05 |
ES2270997T3 (en) | 2007-04-16 |
EP1269225B1 (en) | 2006-08-23 |
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