SE9901650L - Sätt att framställa ett PVD A1203 belagt skärverktyg - Google Patents

Sätt att framställa ett PVD A1203 belagt skärverktyg

Info

Publication number
SE9901650L
SE9901650L SE9901650A SE9901650A SE9901650L SE 9901650 L SE9901650 L SE 9901650L SE 9901650 A SE9901650 A SE 9901650A SE 9901650 A SE9901650 A SE 9901650A SE 9901650 L SE9901650 L SE 9901650L
Authority
SE
Sweden
Prior art keywords
substrate
cutting tool
coated cutting
pvd
way
Prior art date
Application number
SE9901650A
Other languages
English (en)
Other versions
SE520716C2 (sv
SE9901650D0 (sv
Inventor
Siegfried Schiller
Klaus Goedicke
Fred Fietzke
Olaf Zywitzki
Mats Sjoestrand
Bjoern Ljungberg
Original Assignee
Sandvik Ab
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Ab, Fraunhofer Ges Forschung filed Critical Sandvik Ab
Priority to SE9901650A priority Critical patent/SE520716C2/sv
Publication of SE9901650D0 publication Critical patent/SE9901650D0/sv
Priority to US09/563,419 priority patent/US6451180B1/en
Priority to PL345385A priority patent/PL193249B1/pl
Priority to AT00930015T priority patent/ATE308629T1/de
Priority to PCT/SE2000/000857 priority patent/WO2000068452A1/en
Priority to CN00800790A priority patent/CN1304458A/zh
Priority to IL14051100A priority patent/IL140511A0/xx
Priority to JP2000617220A priority patent/JP4975906B2/ja
Priority to DE60023628T priority patent/DE60023628T2/de
Priority to BR0006060-7A priority patent/BR0006060A/pt
Priority to EP00930015A priority patent/EP1097250B1/en
Priority to KR1020017000109A priority patent/KR100673637B1/ko
Publication of SE9901650L publication Critical patent/SE9901650L/sv
Publication of SE520716C2 publication Critical patent/SE520716C2/sv

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Laminated Bodies (AREA)
  • Chemical Treatment Of Metals (AREA)
SE9901650A 1999-05-06 1999-05-06 En process för tillverkning av ett skärverktyg belagt med aluminiumoxid SE520716C2 (sv)

Priority Applications (12)

Application Number Priority Date Filing Date Title
SE9901650A SE520716C2 (sv) 1999-05-06 1999-05-06 En process för tillverkning av ett skärverktyg belagt med aluminiumoxid
US09/563,419 US6451180B1 (en) 1999-05-06 2000-05-02 Method of making a PVD Al2O3 coated cutting tool
KR1020017000109A KR100673637B1 (ko) 1999-05-06 2000-05-03 ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭공구의 제조방법
IL14051100A IL140511A0 (en) 1999-05-06 2000-05-03 A process for producing an aluminum oxide coated cutting tool
AT00930015T ATE308629T1 (de) 1999-05-06 2000-05-03 Verfahren zur herstellung eines pvd al2o3 beschichteten schneidwerkzeugs
PCT/SE2000/000857 WO2000068452A1 (en) 1999-05-06 2000-05-03 Method of making a pvd al2o3 coated cutting tool
CN00800790A CN1304458A (zh) 1999-05-06 2000-05-03 制备用PVD法涂覆Al2O3的切削刀具的方法
PL345385A PL193249B1 (pl) 1999-05-06 2000-05-03 Sposób wytwarzania powlekanego narzędzia
JP2000617220A JP4975906B2 (ja) 1999-05-06 2000-05-03 Ｐｖｄ酸化アルミニウムで被覆された切削工具の製造方法
DE60023628T DE60023628T2 (de) 1999-05-06 2000-05-03 Verfahren zur herstellung eines pvd ai2o3 beschichteten schneidwerkzeugs
BR0006060-7A BR0006060A (pt) 1999-05-06 2000-05-03 Método de fabricação de uma ferramenta de corte revestida de al2o3, através da técnica de depósito fìsica a vapor (pvd)
EP00930015A EP1097250B1 (en) 1999-05-06 2000-05-03 Method of making a pvd al2o3 coated cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9901650A SE520716C2 (sv) 1999-05-06 1999-05-06 En process för tillverkning av ett skärverktyg belagt med aluminiumoxid

Publications (3)

Publication Number Publication Date
SE9901650D0 SE9901650D0 (sv) 1999-05-06
SE9901650L true SE9901650L (sv) 2000-11-07
SE520716C2 SE520716C2 (sv) 2003-08-12

Family

ID=20415500

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9901650A SE520716C2 (sv) 1999-05-06 1999-05-06 En process för tillverkning av ett skärverktyg belagt med aluminiumoxid

Country Status (12)

Country Link
US (1) US6451180B1 (sv)
EP (1) EP1097250B1 (sv)
JP (1) JP4975906B2 (sv)
KR (1) KR100673637B1 (sv)
CN (1) CN1304458A (sv)
AT (1) ATE308629T1 (sv)
BR (1) BR0006060A (sv)
DE (1) DE60023628T2 (sv)
IL (1) IL140511A0 (sv)
PL (1) PL193249B1 (sv)
SE (1) SE520716C2 (sv)
WO (1) WO2000068452A1 (sv)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE519921C2 (sv) * 1999-05-06 2003-04-29 Sandvik Ab PVD-belagt skärverktyg och metod för dess framställning
US6689450B2 (en) * 2001-03-27 2004-02-10 Seco Tools Ab Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
US7967957B2 (en) 2002-08-09 2011-06-28 Kobe Steel, Ltd. Method for preparing alumna coating film having alpha-type crystal structure as primary structure
DE10244438B4 (de) * 2002-09-24 2007-02-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verbundkörper mit einer verschleißmindernden Oberflächenschicht, Verfahren zu seiner Herstellung sowie Verwendung des Verbundkörpers
DE10303428A1 (de) * 2003-01-29 2004-08-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Einrichtung zur plasmaaktivierten Schichtabscheidung durch Kathodenzerstäubung nach dem Magnetron-Prinzip
CN100409983C (zh) * 2003-10-30 2008-08-13 上海交通大学 整体式硬质合金旋转刀具金刚石涂层制备装置
SE529855C2 (sv) * 2005-12-30 2007-12-11 Sandvik Intellectual Property Belagt hårdmetallskär och sätt att tillverka detta
JP5013053B2 (ja) * 2006-08-24 2012-08-29 株式会社ブリヂストン タンタル酸化物膜の成膜方法
SE533395C2 (sv) * 2007-06-08 2010-09-14 Sandvik Intellectual Property Sätt att göra PVD-beläggningar
JP2009035784A (ja) * 2007-08-02 2009-02-19 Kobe Steel Ltd 酸化物皮膜、酸化物皮膜被覆材および酸化物皮膜の形成方法
JP2009120912A (ja) 2007-11-15 2009-06-04 Kobe Steel Ltd 硬質皮膜を備えた耐摩耗性部材
WO2014101517A1 (zh) * 2012-12-26 2014-07-03 Wu Shanghua 一种采用物理气相沉积工艺在氮化硅切削刀具表面制备Al2O3涂层及其复合涂层的方法
DE102014104672A1 (de) 2014-04-02 2015-10-08 Kennametal Inc. Beschichtetes Schneidwerkzeug und Verfahren zu seiner Herstellung
CN104962873A (zh) * 2015-07-17 2015-10-07 广东工业大学 一种制备多晶氧化铝硬质涂层的方法
JP6515387B2 (ja) * 2015-09-15 2019-05-22 日本製鉄株式会社 超硬工具及びその製造方法
WO2019092009A1 (en) * 2017-11-07 2019-05-16 Walter Ag Pvd process for the deposition of al2o3 and a coated cutting tool with at least one layer of al2o3
CN113322442B (zh) * 2021-06-03 2022-11-01 哈尔滨工业大学 一种抗原子氧性能优异的γ-三氧化二铝薄膜的制备方法

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Publication number Priority date Publication date Assignee Title
DE252205C (sv)
CH540991A (fr) 1971-07-07 1973-08-31 Battelle Memorial Institute Procédé pour augmenter la résistance à l'usure de la surface d'une pièce en "métal dur"
DE59201616D1 (de) 1991-03-27 1995-04-13 Krupp Widia Gmbh Verbundkörper, verwendung des verbundkörpers und verfahren zu seiner herstellung.
SE9101953D0 (sv) 1991-06-25 1991-06-25 Sandvik Ab A1203 coated sintered body
DE4209975A1 (de) 1992-03-27 1993-09-30 Krupp Widia Gmbh Verbundkörper und dessen Verwendung
DE69319531T2 (de) 1992-10-12 1999-04-15 Sumitomo Electric Industries, Ltd., Osaka Ultradünnes Filmlaminat
SE501527C2 (sv) 1992-12-18 1995-03-06 Sandvik Ab Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt
JP2999346B2 (ja) * 1993-07-12 2000-01-17 オリエンタルエンヂニアリング株式会社 基体表面被覆方法及び被覆部材
SE509201C2 (sv) 1994-07-20 1998-12-14 Sandvik Ab Aluminiumoxidbelagt verktyg
DE69527236T2 (de) 1994-09-16 2003-03-20 Sumitomo Electric Industries, Ltd. Mehrschichtfilm aus ultrafeinen Partikeln und harter Verbundwerkstoff für Werkzeuge, die diesen Film enthalten
DE19518779C1 (de) 1995-05-22 1996-07-18 Fraunhofer Ges Forschung Verbundkörper aus vakuumbeschichtetem Sinterwerkstoff und Verfahren zu seiner Herstellung
DE19518781C1 (de) 1995-05-22 1996-09-05 Fraunhofer Ges Forschung Vakuumbeschichteter Verbundkörper und Verfahren zu seiner Herstellung
DE19544584A1 (de) * 1995-11-30 1997-06-05 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material
DE19546826C1 (de) * 1995-12-15 1997-04-03 Fraunhofer Ges Forschung Verfahren und Einrichtung zur Vorbehandlung von Substraten
SE520795C2 (sv) * 1999-05-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning

Also Published As

Publication number Publication date
SE520716C2 (sv) 2003-08-12
PL345385A1 (en) 2001-12-17
WO2000068452A1 (en) 2000-11-16
ATE308629T1 (de) 2005-11-15
JP4975906B2 (ja) 2012-07-11
EP1097250A1 (en) 2001-05-09
DE60023628D1 (de) 2005-12-08
PL193249B1 (pl) 2007-01-31
DE60023628T2 (de) 2006-06-08
KR100673637B1 (ko) 2007-01-23
SE9901650D0 (sv) 1999-05-06
BR0006060A (pt) 2001-03-20
IL140511A0 (en) 2002-02-10
CN1304458A (zh) 2001-07-18
KR20010053389A (ko) 2001-06-25
JP2002544379A (ja) 2002-12-24
US6451180B1 (en) 2002-09-17
EP1097250B1 (en) 2005-11-02

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