BR0006060A - Método de fabricação de uma ferramenta de corte revestida de al2o3, através da técnica de depósito fìsica a vapor (pvd) - Google Patents

Método de fabricação de uma ferramenta de corte revestida de al2o3, através da técnica de depósito fìsica a vapor (pvd)

Info

Publication number
BR0006060A
BR0006060A BR0006060-7A BR0006060A BR0006060A BR 0006060 A BR0006060 A BR 0006060A BR 0006060 A BR0006060 A BR 0006060A BR 0006060 A BR0006060 A BR 0006060A
Authority
BR
Brazil
Prior art keywords
substrate
al2o3
cutting tool
pvd
manufacturing
Prior art date
Application number
BR0006060-7A
Other languages
English (en)
Inventor
Siegfried Schiller
Klaus Goedicke
Fred Fietzke
Olaf Zywitzki
Mats Sjoestrand
Bjoern Ljungberg
Original Assignee
Sandvik Ab
Fraunhofer Inst Elektronen Str
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Ab, Fraunhofer Inst Elektronen Str filed Critical Sandvik Ab
Publication of BR0006060A publication Critical patent/BR0006060A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Laminated Bodies (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Chemical Treatment Of Metals (AREA)

Abstract

<B>"MéTODO DE FABRICAçãO DE UMA FERRAMENTA DE CORTE REVESTIDA DE Al~ 2~O~ 3~, ATRAVéS DA TéCNICA DE DEPOSIçãO FìSICA A VAPOR (PVD)"<D>. A presente invenção se refere a um processo para produção de uma ferramenta de corte revestida, consistindo de um revestimento e um substrato, em que pelo menos uma camada refratária que consiste de <sym>-Al~ 2~O~ 3~ é depositada mediante crepitação reativa de magnétron sobre um substrato móvel em vácuo, através da crepitação pulsada de magnétron em uma mistura de um gás nobre e um gás reativo, a uma freq³ência de pulso estabelecida para 10 a 100 kHz. A deposição ocorre com uma velocidade de pelo menos 1 nm/s com referência a um substrato disposto de modo estacionário, com uma densidade de energia em um tempo médio de magnétron alvo estabelecida para pelo menos 10 W/cm^ 2^. A temperatura do substrato se encontra na faixa de 400 a 700° C e o fluxo de partículas que se chocam sobre cada substrato individual é ciclicamente interrompido.
BR0006060-7A 1999-05-06 2000-05-03 Método de fabricação de uma ferramenta de corte revestida de al2o3, através da técnica de depósito fìsica a vapor (pvd) BR0006060A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9901650A SE520716C2 (sv) 1999-05-06 1999-05-06 En process för tillverkning av ett skärverktyg belagt med aluminiumoxid
PCT/SE2000/000857 WO2000068452A1 (en) 1999-05-06 2000-05-03 Method of making a pvd al2o3 coated cutting tool

Publications (1)

Publication Number Publication Date
BR0006060A true BR0006060A (pt) 2001-03-20

Family

ID=20415500

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0006060-7A BR0006060A (pt) 1999-05-06 2000-05-03 Método de fabricação de uma ferramenta de corte revestida de al2o3, através da técnica de depósito fìsica a vapor (pvd)

Country Status (12)

Country Link
US (1) US6451180B1 (pt)
EP (1) EP1097250B1 (pt)
JP (1) JP4975906B2 (pt)
KR (1) KR100673637B1 (pt)
CN (1) CN1304458A (pt)
AT (1) ATE308629T1 (pt)
BR (1) BR0006060A (pt)
DE (1) DE60023628T2 (pt)
IL (1) IL140511A0 (pt)
PL (1) PL193249B1 (pt)
SE (1) SE520716C2 (pt)
WO (1) WO2000068452A1 (pt)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE519921C2 (sv) * 1999-05-06 2003-04-29 Sandvik Ab PVD-belagt skärverktyg och metod för dess framställning
US6689450B2 (en) * 2001-03-27 2004-02-10 Seco Tools Ab Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
EP1541707B1 (en) * 2002-08-09 2012-10-17 Kabushiki Kaisha Kobe Seiko Sho METHOD FOR PREPARING ALUMNA COATING FILM HAVING a-TYPE CRYSTAL STRUCTURE AS PRIMARY STRUCTURE
DE10244438B4 (de) * 2002-09-24 2007-02-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verbundkörper mit einer verschleißmindernden Oberflächenschicht, Verfahren zu seiner Herstellung sowie Verwendung des Verbundkörpers
DE10303428A1 (de) * 2003-01-29 2004-08-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Einrichtung zur plasmaaktivierten Schichtabscheidung durch Kathodenzerstäubung nach dem Magnetron-Prinzip
CN100409983C (zh) * 2003-10-30 2008-08-13 上海交通大学 整体式硬质合金旋转刀具金刚石涂层制备装置
SE529855C2 (sv) * 2005-12-30 2007-12-11 Sandvik Intellectual Property Belagt hårdmetallskär och sätt att tillverka detta
JP5013053B2 (ja) * 2006-08-24 2012-08-29 株式会社ブリヂストン タンタル酸化物膜の成膜方法
SE533395C2 (sv) * 2007-06-08 2010-09-14 Sandvik Intellectual Property Sätt att göra PVD-beläggningar
JP2009035784A (ja) 2007-08-02 2009-02-19 Kobe Steel Ltd 酸化物皮膜、酸化物皮膜被覆材および酸化物皮膜の形成方法
JP2009120912A (ja) 2007-11-15 2009-06-04 Kobe Steel Ltd 硬質皮膜を備えた耐摩耗性部材
CN104302804B (zh) * 2012-12-26 2016-10-26 伍尚华 一种采用物理气相沉积工艺在氮化硅切削刀具表面制备Al2O3涂层及其复合涂层的方法
DE102014104672A1 (de) 2014-04-02 2015-10-08 Kennametal Inc. Beschichtetes Schneidwerkzeug und Verfahren zu seiner Herstellung
CN104962873A (zh) * 2015-07-17 2015-10-07 广东工业大学 一种制备多晶氧化铝硬质涂层的方法
JP6515387B2 (ja) * 2015-09-15 2019-05-22 日本製鉄株式会社 超硬工具及びその製造方法
WO2019092009A1 (en) * 2017-11-07 2019-05-16 Walter Ag Pvd process for the deposition of al2o3 and a coated cutting tool with at least one layer of al2o3
CN113322442B (zh) * 2021-06-03 2022-11-01 哈尔滨工业大学 一种抗原子氧性能优异的γ-三氧化二铝薄膜的制备方法

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Also Published As

Publication number Publication date
KR100673637B1 (ko) 2007-01-23
ATE308629T1 (de) 2005-11-15
KR20010053389A (ko) 2001-06-25
CN1304458A (zh) 2001-07-18
EP1097250B1 (en) 2005-11-02
JP2002544379A (ja) 2002-12-24
EP1097250A1 (en) 2001-05-09
IL140511A0 (en) 2002-02-10
US6451180B1 (en) 2002-09-17
DE60023628T2 (de) 2006-06-08
SE9901650L (sv) 2000-11-07
SE9901650D0 (sv) 1999-05-06
WO2000068452A1 (en) 2000-11-16
DE60023628D1 (de) 2005-12-08
JP4975906B2 (ja) 2012-07-11
PL345385A1 (en) 2001-12-17
PL193249B1 (pl) 2007-01-31
SE520716C2 (sv) 2003-08-12

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B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]