DE19983075T1 - Organisches Substrat mit durch Magnetronzerstäubung gefällten optischen Lagen und Verfahren zur Herstellung desselben - Google Patents

Organisches Substrat mit durch Magnetronzerstäubung gefällten optischen Lagen und Verfahren zur Herstellung desselben

Info

Publication number
DE19983075T1
DE19983075T1 DE19983075T DE19983075T DE19983075T1 DE 19983075 T1 DE19983075 T1 DE 19983075T1 DE 19983075 T DE19983075 T DE 19983075T DE 19983075 T DE19983075 T DE 19983075T DE 19983075 T1 DE19983075 T1 DE 19983075T1
Authority
DE
Germany
Prior art keywords
magnetron sputtering
organic substrate
producing
same
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19983075T
Other languages
English (en)
Other versions
DE19983075B3 (de
Inventor
Joem-Steffen Liebig
Klaus Goedicke
Volker Kirchhoff
Gerhard Keller
Richard Bosmans
Pascal Comble
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
EssilorLuxottica SA
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Essilor International Compagnie Generale dOptique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8235310&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE19983075(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV, Essilor International Compagnie Generale dOptique SA filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of DE19983075T1 publication Critical patent/DE19983075T1/de
Application granted granted Critical
Publication of DE19983075B3 publication Critical patent/DE19983075B3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • C23C14/0036Reactive sputtering
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/90Magnetic feature
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31507Of polycarbonate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
DE19983075T 1998-03-26 1999-03-18 Organisches Substrat mit durch Magnetronzerstäubung abgeschiedenen optischen Lagen und Verfahren zur Herstellung desselben, sowie Verwendung eines solchen Verfahrens Expired - Lifetime DE19983075B3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP98400721A EP0947601A1 (de) 1998-03-26 1998-03-26 Organisches Substrat mit optischen Schichten hergestellt mittels Magnetron-Zerstäubung und Verfahren
EP98400721.1 1998-03-26
PCT/EP1999/001817 WO1999049097A1 (en) 1998-03-26 1999-03-18 Organic substrate having optical layers deposited by magnetron sputtering and method for preparing it

Publications (2)

Publication Number Publication Date
DE19983075T1 true DE19983075T1 (de) 2001-05-10
DE19983075B3 DE19983075B3 (de) 2011-12-29

Family

ID=8235310

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19983075T Expired - Lifetime DE19983075B3 (de) 1998-03-26 1999-03-18 Organisches Substrat mit durch Magnetronzerstäubung abgeschiedenen optischen Lagen und Verfahren zur Herstellung desselben, sowie Verwendung eines solchen Verfahrens

Country Status (7)

Country Link
US (1) US6596368B1 (de)
EP (2) EP0947601A1 (de)
JP (1) JP4727813B2 (de)
AT (1) ATE223514T1 (de)
AU (1) AU3146399A (de)
DE (1) DE19983075B3 (de)
WO (1) WO1999049097A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2817267B1 (fr) 2000-11-28 2003-08-29 Essilor Int Procede de depot de couche anti-reflets a froid sur substrat organique
WO2002096966A1 (en) 2001-05-29 2002-12-05 Essilor International Compagnie Generale D'optique Epoxy/acrylate based primer coating compositions and their use in the optical field.
EP1694275A2 (de) * 2003-12-18 2006-08-30 AFG Industries, Inc. Schutzschicht für optische beschichtungen mit verbesserter korrosions- und kratzfestigkeit
DE102005015631B4 (de) * 2005-04-05 2010-12-02 Von Ardenne Anlagentechnik Gmbh Verfahren zur Herstellung eines reflexionsvermindernden Kratzschutzschichtsystems für Kunststoffe
KR101386806B1 (ko) 2005-05-12 2014-04-21 에이지씨 플랫 글래스 노스 아메리카, 인코퍼레이티드 저태양열 획득 계수, 향상된 화학적 및 기계적 특성을 갖는 저방사율 코팅 및 이의 제조 방법
US7901781B2 (en) 2007-11-23 2011-03-08 Agc Flat Glass North America, Inc. Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same
ES2302661B1 (es) * 2008-02-14 2009-10-29 Indo Internacional S.A. Lente de base polimerica que comprende una capa endurecedora, una multicapa interferencial y una capa dura intercalada entre ambas, y procedimiento de fabricacion correspondiente.
ES2324148B1 (es) * 2009-03-20 2010-07-08 Indo Internacional, S.A Lente de base polimerica que comprende una capa endurecedora, una capa absorbente y multicapa interferencial y procedimiento de fabricacion correspondiente.
FR2943798B1 (fr) 2009-03-27 2011-05-27 Essilor Int Article d'optique revetu d'un revetement antireflet ou reflechissant comprenant une couche electriquement conductrice a base d'oxyde d'etain et procede de fabrication
AU2011370999B2 (en) 2011-06-13 2016-01-14 Essilor International Method for obtaining optical articles having superior abrasion resistant properties, and coated articles prepared according to such method
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9684097B2 (en) 2013-05-07 2017-06-20 Corning Incorporated Scratch-resistant articles with retained optical properties
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
FR3039828B1 (fr) 2015-08-05 2021-12-17 Essilor Int Article a proprietes thermomecaniques ameliorees comportant une couche de nature organique-inorganique
WO2017048700A1 (en) 2015-09-14 2017-03-23 Corning Incorporated High light transmission and scratch-resistant anti-reflective articles
US10816703B2 (en) 2015-09-28 2020-10-27 Tru Vue, Inc. Near infrared reflective coatings
ES2882707T3 (es) 2016-04-19 2021-12-02 Apogee Entpr Inc Superficies de vidrio revestidas y procedimiento de revestimiento de un sustrato de vidrio
NZ758846A (en) 2017-05-04 2024-05-31 Apogee Entpr Inc Low emissivity coatings, glass surfaces including the same, and methods for making the same
WO2020016620A1 (en) 2018-07-18 2020-01-23 Essilor International Optical article with improved antireflective coating, methods for making the same
KR102591065B1 (ko) 2018-08-17 2023-10-19 코닝 인코포레이티드 얇고, 내구성 있는 반사-방지 구조를 갖는 무기산화물 물품
EP3640688B1 (de) 2018-10-18 2022-10-05 Essilor International Optischer gegenstand mit einer interferenziellen beschichtung mit verbesserter abriebfestigkeit
EP3640687A1 (de) 2018-10-18 2020-04-22 Essilor International Optischer artikel mit einer interferenziellen beschichtung mit hoher abriebfestigkeit
EP3654071B1 (de) 2018-11-19 2024-07-31 Essilor International Optische linse mit interferenzieller beschichtung und mehrschichtsystem zur verbesserung der abriebfestigkeit
EP3654072B1 (de) 2018-11-19 2024-09-04 Essilor International Optische linse mit einer filternden interferenziellen beschichtung und einem mehrschichtsystem zur verbesserung der abriebfestigkeit
EP3884315B1 (de) 2018-11-19 2024-01-03 Essilor International Optische linse mit einer verbesserten interferenzbeschichtung und mehrschichtiges system zur verbesserung der abriebfestigkeit
WO2020104381A2 (en) 2018-11-19 2020-05-28 Essilor International Optical lens having a mirror coating and a multilayer system for improving abrasion-resistance

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62240762A (ja) * 1986-04-11 1987-10-21 Toyota Central Res & Dev Lab Inc 薄膜形成方法
US4849081A (en) * 1988-06-22 1989-07-18 The Boc Group, Inc. Formation of oxide films by reactive sputtering
US5181141A (en) * 1989-03-31 1993-01-19 Hoya Corporation Anti-reflection optical element
EP0428358B1 (de) * 1989-11-13 1996-05-15 Optical Coating Laboratory, Inc. Geometrie und Gestaltungen eines Geräts zum Magnetronzerstäuben
US5170291A (en) * 1989-12-19 1992-12-08 Leybold Aktiengesellschaft Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for manufacturing the coating
CA2067765A1 (en) * 1990-08-30 1992-03-01 Eric R. Dickey Dc reactively sputtered optical coatings including niobium oxide
GB9101106D0 (en) * 1991-01-18 1991-02-27 Cray Microcoat Ltd Ion vapour deposition apparatus and method
DE4204763C1 (de) * 1992-02-18 1993-06-03 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
FR2702486B1 (fr) * 1993-03-08 1995-04-21 Essilor Int Compositions de revêtement antiabrasion à base d'hydrolysats de silanes et de composés de l'aluminium, et articles revêtus correspondants résistants à l'abrasion et aux chocs.
JPH08511830A (ja) * 1993-06-17 1996-12-10 デポジション・サイエンシス,インコーポレイテッド スパッタリング装置
JPH07248415A (ja) * 1994-03-10 1995-09-26 Olympus Optical Co Ltd 光学薄膜の製造方法
JP3433845B2 (ja) * 1994-08-02 2003-08-04 尾池工業株式会社 耐擦傷性と耐久性に優れた反射防止フィルム
DE4430363A1 (de) 1994-08-26 1996-02-29 Leybold Ag Optische Linse aus einem klarsichtigen Kunststoff
JPH0894802A (ja) * 1994-09-27 1996-04-12 Canon Inc 光学素子
JPH08211201A (ja) * 1995-02-02 1996-08-20 Olympus Optical Co Ltd 光学薄膜およびその製造方法
JP3694882B2 (ja) * 1995-10-30 2005-09-14 セイコーエプソン株式会社 反射防止性能を有する防曇性物品及びその製造方法
DE19605932A1 (de) * 1996-02-17 1997-08-21 Leybold Systems Gmbh Verfahren zum Ablagern einer optisch transparenten und elektrisch leitenden Schicht auf einem Substrat aus durchscheinendem Werkstoff
US5670030A (en) * 1996-03-19 1997-09-23 Optical Coating Laboratory, Inc. Methods for preparing low scatter optical coatings
JPH1036962A (ja) * 1996-07-22 1998-02-10 Olympus Optical Co Ltd 光学薄膜の製造装置および製造方法

Also Published As

Publication number Publication date
DE19983075B3 (de) 2011-12-29
JP2002507665A (ja) 2002-03-12
US6596368B1 (en) 2003-07-22
EP1071832B1 (de) 2002-09-04
AU3146399A (en) 1999-10-18
EP1071832A1 (de) 2001-01-31
ATE223514T1 (de) 2002-09-15
JP4727813B2 (ja) 2011-07-20
EP0947601A1 (de) 1999-10-06
WO1999049097A1 (en) 1999-09-30

Similar Documents

Publication Publication Date Title
DE19983075T1 (de) Organisches Substrat mit durch Magnetronzerstäubung gefällten optischen Lagen und Verfahren zur Herstellung desselben
JP3330143B2 (ja) 低温プラズマおよび電着を使用した金属被覆方法
ATE99001T1 (de) Verfahren zur herstellung einer keramischen beschichtung auf einem metallischen substrat sowie mittels des verfahrens beschichteter gegenstand.
DE3884697D1 (de) Verfahren zur gesteigerten Abscheidung von Siliciumoxid durch Plasma.
DE50309800D1 (de) Verfahren zur herstellung von schichten und schichtsystemen sowie beschichtetes substrat
EP0915178A3 (de) Sputtertarget aus hochreinem Titan
ATE411413T1 (de) Verfahren zur herstellung einer mehrlägigen beschichtung mit hoher abriebfestigkeit
EP0963797A3 (de) Verfahren zur Änderung von Oberflächen mit Ultradünnschichten
WO2002084702A3 (en) Sputtering deposition apparatus and method for depositing surface films
US5382471A (en) Adherent metal coating for aluminum nitride surfaces
DE60023628D1 (de) Verfahren zur herstellung eines pvd al2o3 beschichteten schneidwerkzeugs
ATE86283T1 (de) Verfahren zur herstellung eines metallisierten polyolefinfilms.
ATE473202T1 (de) Verfahren zur herstellung von transparenten titanoxidbeschichtungen mit rutilstruktur
AU2001265978A1 (en) Coated substrate with metallic surface impression, method for adhesively coatingsubstrates with corrosive optical layers and use of said coated substrate and p roducts obtained from a method for adhesively coating with corrosive optical layers
JP3091326B2 (ja) 成膜方法
AU3573995A (en) Low surface energy coatings
US5421976A (en) Oxidation resistant diamond composite and method of forming the same
ATE109215T1 (de) Verfahren zur herstellung von physiologisch verträglichen oxidschichten auf skelettimplantaten.
ATE35697T1 (de) Verfahren zum ueberziehen von optischen substraten mit reflexvermindernden schichten, die geaetzt werden koennen.
JPH0254754A (ja) 傾斜組成制御膜の形成法
ATE155827T1 (de) Verfahren zur herstellung einer dünnen schicht mittels reaktiver kathodenzerstäubung
RU2123540C1 (ru) Способ защитно-декоративного нитридтитанового покрытия керамической посуды
JPH04337083A (ja) 複合多層膜およびその形成方法
ATE215133T1 (de) Verfahren zur herstellung einer farbgebenden beschichtung
JPH01198464A (ja) スパッタリングによる鉄鋼の表面硬化処理方法

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
R016 Response to examination communication
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R018 Grant decision by examination section/examining division
R020 Patent grant now final

Effective date: 20120330

R071 Expiry of right