ATE35697T1 - Verfahren zum ueberziehen von optischen substraten mit reflexvermindernden schichten, die geaetzt werden koennen. - Google Patents
Verfahren zum ueberziehen von optischen substraten mit reflexvermindernden schichten, die geaetzt werden koennen.Info
- Publication number
- ATE35697T1 ATE35697T1 AT85401784T AT85401784T ATE35697T1 AT E35697 T1 ATE35697 T1 AT E35697T1 AT 85401784 T AT85401784 T AT 85401784T AT 85401784 T AT85401784 T AT 85401784T AT E35697 T1 ATE35697 T1 AT E35697T1
- Authority
- AT
- Austria
- Prior art keywords
- enclosure
- chromium
- coating
- chromium oxide
- extinction
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 6
- 239000011248 coating agent Substances 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 3
- 230000003287 optical effect Effects 0.000 title abstract 2
- 239000006117 anti-reflective coating Substances 0.000 title 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 abstract 3
- 229910000423 chromium oxide Inorganic materials 0.000 abstract 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 2
- 230000008033 biological extinction Effects 0.000 abstract 2
- 229910052804 chromium Inorganic materials 0.000 abstract 2
- 239000011651 chromium Substances 0.000 abstract 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8414369A FR2570392B1 (fr) | 1984-09-19 | 1984-09-19 | Procede de depot sur substrats optiques de couches antireflechissantes susceptibles d'etre gravees |
| EP85401784A EP0178969B1 (de) | 1984-09-19 | 1985-09-16 | Verfahren zum Überziehen von optischen Substraten mit reflexvermindernden Schichten, die geätzt werden können |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE35697T1 true ATE35697T1 (de) | 1988-07-15 |
Family
ID=9307861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT85401784T ATE35697T1 (de) | 1984-09-19 | 1985-09-16 | Verfahren zum ueberziehen von optischen substraten mit reflexvermindernden schichten, die geaetzt werden koennen. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4676992A (de) |
| EP (1) | EP0178969B1 (de) |
| AT (1) | ATE35697T1 (de) |
| DE (1) | DE3563754D1 (de) |
| FR (1) | FR2570392B1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69422770T2 (de) * | 1993-04-16 | 2000-09-21 | Libbey Owens Ford Co | Verfahren und vorrichtung zum beschichten eines glassubstrates |
| US6231992B1 (en) | 1998-09-04 | 2001-05-15 | Yazaki Corporation | Partial reflector |
| JP4447755B2 (ja) * | 2000-08-28 | 2010-04-07 | 独立行政法人産業技術総合研究所 | ＺｎＯ系酸化物半導体層の成長方法およびそれを用いた半導体発光素子の製法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE835203C (de) * | 1948-10-02 | 1952-03-27 | Physikalisches Untersuchungsla | Verfahren zur genauen Bemessung der Schichtdicken beim Aufbringen reflexvermindernder Schichten auf optische Elemente durch Vakuumverdampfung oder Kathodenzerstaeubung |
| US2904452A (en) * | 1956-04-16 | 1959-09-15 | Heraeus Gmbh W C | Oxide coating |
| US3208873A (en) * | 1962-01-05 | 1965-09-28 | Ibm | Method and apparatus for depositing films of refractory metal oxides and refractory metals |
| FR1449361A (fr) * | 1964-08-28 | 1966-08-12 | Balzers Patent Beteilig Ag | Procédé pour accroître la robustesse de la liaison entre des couches minces de matière |
| US3698928A (en) * | 1967-11-14 | 1972-10-17 | Fairchild Camera Instr Co | Multilayer antireflective absorption film |
| US3808035A (en) * | 1970-12-09 | 1974-04-30 | M Stelter | Deposition of single or multiple layers on substrates from dilute gas sweep to produce optical components, electro-optical components, and the like |
| JPS539060B1 (de) * | 1971-05-24 | 1978-04-03 | ||
| CH625054A5 (de) * | 1976-12-27 | 1981-08-31 | Balzers Hochvakuum | |
| US4107349A (en) * | 1977-08-12 | 1978-08-15 | The United States Of America As Represented By The Secretary Of The Army | Method of adjusting the frequency of piezoelectric resonators |
| US4172356A (en) * | 1977-10-27 | 1979-10-30 | Westland Industries, Inc. | Yard rake |
| JPS57104141A (en) * | 1980-12-22 | 1982-06-29 | Dainippon Printing Co Ltd | Photomask and photomask substrate |
| US4430366A (en) * | 1981-02-04 | 1984-02-07 | Minnesota Mining And Manufacturing Company | Metal/metal oxide coating |
| JPS6053745B2 (ja) * | 1981-07-31 | 1985-11-27 | アルバツク成膜株式会社 | 二元蒸着によつて不均質光学的薄膜を形成する方法 |
-
1984
- 1984-09-19 FR FR8414369A patent/FR2570392B1/fr not_active Expired
-
1985
- 1985-09-16 AT AT85401784T patent/ATE35697T1/de active
- 1985-09-16 DE DE8585401784T patent/DE3563754D1/de not_active Expired
- 1985-09-16 EP EP85401784A patent/EP0178969B1/de not_active Expired
- 1985-09-17 US US06/776,778 patent/US4676992A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US4676992A (en) | 1987-06-30 |
| FR2570392A1 (fr) | 1986-03-21 |
| EP0178969B1 (de) | 1988-07-13 |
| DE3563754D1 (en) | 1988-08-18 |
| EP0178969A1 (de) | 1986-04-23 |
| FR2570392B1 (fr) | 1987-01-02 |
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