DE3885028D1 - Kühlungsstruktur für auf einem Substrat montierte elektronische Wärmeerzeugende Bauelemente. - Google Patents
Kühlungsstruktur für auf einem Substrat montierte elektronische Wärmeerzeugende Bauelemente.Info
- Publication number
- DE3885028D1 DE3885028D1 DE88306812T DE3885028T DE3885028D1 DE 3885028 D1 DE3885028 D1 DE 3885028D1 DE 88306812 T DE88306812 T DE 88306812T DE 3885028 T DE3885028 T DE 3885028T DE 3885028 D1 DE3885028 D1 DE 3885028D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- cooling structure
- components mounted
- generating components
- electronic heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
- H01L23/4338—Pistons, e.g. spring-loaded members
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185182A JP2716129B2 (ja) | 1987-07-24 | 1987-07-24 | 集積回路の冷却構造 |
JP62189201A JP2521966B2 (ja) | 1987-07-29 | 1987-07-29 | 集積回路の冷却構造 |
JP20416887A JPS6448452A (en) | 1987-08-19 | 1987-08-19 | Cooling structure of integrated circuit |
JP1987157800U JPH0163141U (de) | 1987-10-15 | 1987-10-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3885028D1 true DE3885028D1 (de) | 1993-11-25 |
DE3885028T2 DE3885028T2 (de) | 1994-05-11 |
Family
ID=27473502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88306812T Expired - Fee Related DE3885028T2 (de) | 1987-07-24 | 1988-07-25 | Kühlungsstruktur für auf einem Substrat montierte elektronische Wärmeerzeugende Bauelemente. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4942497A (de) |
EP (1) | EP0302641B1 (de) |
CA (1) | CA1290078C (de) |
DE (1) | DE3885028T2 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1303238C (en) * | 1988-05-09 | 1992-06-09 | Kazuhiko Umezawa | Flat cooling structure of integrated circuit |
FR2640457B1 (fr) * | 1988-12-09 | 1991-01-25 | Thomson Csf | Dispositif de raccordement de composants et module fonctionnel l'utilisant |
FR2664684A1 (fr) * | 1990-07-10 | 1992-01-17 | Metal Process | Dispositif de controle de la temperature d'une piece par contacts multiples. |
JPH04192552A (ja) * | 1990-11-27 | 1992-07-10 | Nec Corp | 半導体素子用パッケージ |
US5186238A (en) * | 1991-04-25 | 1993-02-16 | International Business Machines Corporation | Liquid film interface cooling chuck for semiconductor wafer processing |
US5088006A (en) * | 1991-04-25 | 1992-02-11 | International Business Machines Corporation | Liquid film interface cooling system for semiconductor wafer processing |
JP2852148B2 (ja) * | 1991-10-21 | 1999-01-27 | 日本電気株式会社 | 集積回路パッケージの冷却構造 |
JP2728105B2 (ja) * | 1991-10-21 | 1998-03-18 | 日本電気株式会社 | 集積回路用冷却装置 |
JP2792304B2 (ja) * | 1992-01-22 | 1998-09-03 | 日本電気株式会社 | 集積回路用冷却装置 |
JP3572628B2 (ja) * | 1992-06-03 | 2004-10-06 | セイコーエプソン株式会社 | 半導体装置及びその製造方法 |
US5652461A (en) * | 1992-06-03 | 1997-07-29 | Seiko Epson Corporation | Semiconductor device with a convex heat sink |
JP3362530B2 (ja) * | 1993-12-16 | 2003-01-07 | セイコーエプソン株式会社 | 樹脂封止型半導体装置およびその製造方法 |
JP3494188B2 (ja) * | 1994-03-17 | 2004-02-03 | 富士通株式会社 | 集積回路素子用冷却装置 |
JP3509274B2 (ja) * | 1994-07-13 | 2004-03-22 | セイコーエプソン株式会社 | 樹脂封止型半導体装置およびその製造方法 |
JP3367299B2 (ja) * | 1994-11-11 | 2003-01-14 | セイコーエプソン株式会社 | 樹脂封止型半導体装置およびその製造方法 |
JP3542677B2 (ja) * | 1995-02-27 | 2004-07-14 | セイコーエプソン株式会社 | 樹脂封止型半導体装置およびその製造方法 |
JP3309686B2 (ja) * | 1995-03-17 | 2002-07-29 | セイコーエプソン株式会社 | 樹脂封止型半導体装置及びその製造方法 |
US5802707A (en) * | 1996-03-28 | 1998-09-08 | Intel Corporation | Controlled bondline thickness attachment mechanism |
US5999407A (en) * | 1998-10-22 | 1999-12-07 | Lockheed Martin Corp. | Electronic module with conductively heat-sunk components |
US6356448B1 (en) | 1999-11-02 | 2002-03-12 | Inceptechnologies, Inc. | Inter-circuit encapsulated packaging for power delivery |
US20030156400A1 (en) * | 1999-07-15 | 2003-08-21 | Dibene Joseph Ted | Method and apparatus for providing power to a microprocessor with intergrated thermal and EMI management |
US6452113B2 (en) | 1999-07-15 | 2002-09-17 | Incep Technologies, Inc. | Apparatus for providing power to a microprocessor with integrated thermal and EMI management |
US6304450B1 (en) | 1999-07-15 | 2001-10-16 | Incep Technologies, Inc. | Inter-circuit encapsulated packaging |
US6741480B2 (en) | 1999-07-15 | 2004-05-25 | Incep Technologies, Inc. | Integrated power delivery with flex circuit interconnection for high density power circuits for integrated circuits and systems |
US6801431B2 (en) * | 1999-07-15 | 2004-10-05 | Incep Technologies, Inc. | Integrated power delivery and cooling system for high power microprocessors |
US6947293B2 (en) * | 1999-07-15 | 2005-09-20 | Incep Technologies | Method and apparatus for providing power to a microprocessor with integrated thermal and EMI management |
US6847529B2 (en) * | 1999-07-15 | 2005-01-25 | Incep Technologies, Inc. | Ultra-low impedance power interconnection system for electronic packages |
US20030214800A1 (en) * | 1999-07-15 | 2003-11-20 | Dibene Joseph Ted | System and method for processor power delivery and thermal management |
US6618268B2 (en) | 1999-07-15 | 2003-09-09 | Incep Technologies, Inc. | Apparatus for delivering power to high performance electronic assemblies |
US6623279B2 (en) | 1999-07-15 | 2003-09-23 | Incep Technologies, Inc. | Separable power delivery connector |
JP4089098B2 (ja) * | 1999-08-18 | 2008-05-21 | 横河電機株式会社 | プリント基板の冷却構造 |
US7167379B2 (en) * | 2001-02-16 | 2007-01-23 | Dibene Ii Joseph T | Micro-spring interconnect systems for low impedance high power applications |
JP4158347B2 (ja) * | 2001-03-21 | 2008-10-01 | 日本電気株式会社 | 電子部品取付構造 |
US6845013B2 (en) * | 2002-03-04 | 2005-01-18 | Incep Technologies, Inc. | Right-angle power interconnect electronic packaging assembly |
US6999317B2 (en) * | 2003-08-12 | 2006-02-14 | Delphi Technologies, Inc. | Thermally enhanced electronic module with self-aligning heat sink |
US7849914B2 (en) * | 2006-05-02 | 2010-12-14 | Clockspeed, Inc. | Cooling apparatus for microelectronic devices |
US7719842B2 (en) * | 2008-02-18 | 2010-05-18 | International Business Machines Corporation | Method of providing flexible heat sink installations for early blade board manufacturing |
EP2247172B1 (de) * | 2009-04-27 | 2013-01-30 | Siemens Aktiengesellschaft | Kühlsystem, Kühlplatte und Baugruppe mit Kühlsystem |
US8369090B2 (en) | 2009-05-12 | 2013-02-05 | Iceotope Limited | Cooled electronic system |
US9265176B2 (en) | 2013-03-08 | 2016-02-16 | International Business Machines Corporation | Multi-component electronic module with integral coolant-cooling |
US9686887B2 (en) | 2014-09-15 | 2017-06-20 | Nicholas Michael D'Onofrio | Liquid cooled metal core printed circuit board |
CN109399630B (zh) * | 2018-12-19 | 2020-12-11 | 长沙新材料产业研究院有限公司 | 一种在金刚石合成设备中便于控制衬底温度的装置 |
Family Cites Families (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL99576C (de) * | 1954-06-22 | |||
US3205469A (en) * | 1961-07-12 | 1965-09-07 | Gen Precision Inc | Pin board |
US3211969A (en) * | 1961-11-15 | 1965-10-12 | Westinghouse Electric Corp | High voltage rectifier |
US3405323A (en) * | 1967-03-20 | 1968-10-08 | Ibm | Apparatus for cooling electrical components |
US3651865A (en) * | 1970-08-21 | 1972-03-28 | Us Air Force | Cooled electronic equipment mounting plate |
US3777220A (en) * | 1972-06-30 | 1973-12-04 | Ibm | Circuit panel and method of construction |
US3912001A (en) * | 1974-03-11 | 1975-10-14 | Gen Electric | Water cooled heat sink assembly |
US3908188A (en) * | 1974-08-14 | 1975-09-23 | Us Air Force | Heat sink for microstrip circuit |
SU572951A1 (ru) * | 1974-10-24 | 1977-09-15 | Предприятие П/Я А-3162 | Устройство дл охлаждени элементов радиоаппаратуры |
US4110549A (en) * | 1974-11-30 | 1978-08-29 | Robert Bosch Gmbh | Environmentally protected electronic housing and heat sink structure, particularly for automotive use |
US4072188A (en) * | 1975-07-02 | 1978-02-07 | Honeywell Information Systems Inc. | Fluid cooling systems for electronic systems |
US3993123A (en) * | 1975-10-28 | 1976-11-23 | International Business Machines Corporation | Gas encapsulated cooling module |
US4204246A (en) * | 1976-02-14 | 1980-05-20 | Sony Corporation | Cooling assembly for cooling electrical parts wherein a heat pipe is attached to a heat conducting portion of a heat conductive block |
US4037270A (en) * | 1976-05-24 | 1977-07-19 | Control Data Corporation | Circuit packaging and cooling |
US4093971A (en) * | 1976-12-10 | 1978-06-06 | Burroughs Corporation | D-I-P On island |
US4115836A (en) * | 1977-04-25 | 1978-09-19 | Burroughs Corporation | Cooling system for dual-in-line packages |
JPS6011830B2 (ja) * | 1977-05-24 | 1985-03-28 | 日本電気株式会社 | 電子部品の冷却装置 |
US4196775A (en) * | 1977-09-19 | 1980-04-08 | The Unites States Of America As Represented By The Secretary Of The Navy | Shock-mounted, liquid cooled cold plate assembly |
US4282924A (en) * | 1979-03-16 | 1981-08-11 | Varian Associates, Inc. | Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface |
US4245273A (en) * | 1979-06-29 | 1981-01-13 | International Business Machines Corporation | Package for mounting and interconnecting a plurality of large scale integrated semiconductor devices |
JPS5612760A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Multi chip lsi package |
US4588023A (en) * | 1980-06-16 | 1986-05-13 | Showa Aluminum Corporation | Device for releasing heat |
JPS57106062A (en) * | 1980-12-24 | 1982-07-01 | Hitachi Ltd | Package for integrated circuit |
FR2498814B1 (fr) * | 1981-01-26 | 1985-12-20 | Burroughs Corp | Boitier pour circuit integre, moyen pour le montage et procede de fabrication |
US4381032A (en) * | 1981-04-23 | 1983-04-26 | Cutchaw John M | Apparatus for cooling high-density integrated circuit packages |
US4468717A (en) * | 1982-06-09 | 1984-08-28 | Sperry Corporation | Apparatus for cooling integrated circuit chips |
US4493010A (en) * | 1982-11-05 | 1985-01-08 | Lockheed Corporation | Electronic packaging module utilizing phase-change conductive cooling |
US4498122A (en) * | 1982-12-29 | 1985-02-05 | At&T Bell Laboratories | High-speed, high pin-out LSI chip package |
GB8304890D0 (en) * | 1983-02-22 | 1983-03-23 | Smiths Industries Plc | Chip-carrier substrates |
US4536824A (en) * | 1983-03-28 | 1985-08-20 | Goodyear Aerospace Corporation | Indirect cooling of electronic circuits |
EP0120500B1 (de) * | 1983-03-29 | 1989-08-16 | Nec Corporation | LSI Verpackung hoher Dichte für logische Schaltungen |
US4535385A (en) * | 1983-04-22 | 1985-08-13 | Cray Research, Inc. | Circuit module with enhanced heat transfer and distribution |
US4602678A (en) * | 1983-09-02 | 1986-07-29 | The Bergquist Company | Interfacing of heat sinks with electrical devices, and the like |
JPH0673364B2 (ja) * | 1983-10-28 | 1994-09-14 | 株式会社日立製作所 | 集積回路チップ冷却装置 |
US4546410A (en) * | 1983-10-31 | 1985-10-08 | Kaufman Lance R | Circuit package with membrane, containing thermoconductive material, ruptured against a heat sink |
US4574879A (en) * | 1984-02-29 | 1986-03-11 | The Bergquist Company | Mounting pad for solid-state devices |
US4666545A (en) * | 1984-06-27 | 1987-05-19 | The Bergquist Company | Method of making a mounting base pad for semiconductor devices |
US4628990A (en) * | 1984-08-17 | 1986-12-16 | Nec Corporation | Cooling equipment for an integrated circuit chip |
JPH06101523B2 (ja) * | 1985-03-04 | 1994-12-12 | 株式会社日立製作所 | 集積回路チツプ冷却装置 |
JPS61222242A (ja) * | 1985-03-28 | 1986-10-02 | Fujitsu Ltd | 冷却装置 |
FR2580060B1 (de) * | 1985-04-05 | 1989-06-09 | Nec Corp | |
US4602125A (en) * | 1985-05-10 | 1986-07-22 | The Bergquist Company | Mounting pad with tubular projections for solid-state devices |
US4748495A (en) * | 1985-08-08 | 1988-05-31 | Dypax Systems Corporation | High density multi-chip interconnection and cooling package |
US4879632A (en) * | 1985-10-04 | 1989-11-07 | Fujitsu Limited | Cooling system for an electronic circuit device |
US4750086A (en) * | 1985-12-11 | 1988-06-07 | Unisys Corporation | Apparatus for cooling integrated circuit chips with forced coolant jet |
DE3766384D1 (de) * | 1986-02-25 | 1991-01-10 | Nec Corp | Fluessigkeitskuehlungssystem fuer integrierte schaltungschips. |
JPS62238653A (ja) * | 1986-04-09 | 1987-10-19 | Nec Corp | 冷却構造 |
US4721996A (en) * | 1986-10-14 | 1988-01-26 | Unisys Corporation | Spring loaded module for cooling integrated circuit packages directly with a liquid |
JPS63157449A (ja) * | 1986-12-22 | 1988-06-30 | Nec Corp | 集積回路の冷却構造 |
US4791983A (en) * | 1987-10-13 | 1988-12-20 | Unisys Corporation | Self-aligning liquid-cooling assembly |
-
1988
- 1988-07-21 US US07/222,818 patent/US4942497A/en not_active Expired - Fee Related
- 1988-07-22 CA CA000572835A patent/CA1290078C/en not_active Expired - Fee Related
- 1988-07-25 EP EP88306812A patent/EP0302641B1/de not_active Expired - Lifetime
- 1988-07-25 DE DE88306812T patent/DE3885028T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3885028T2 (de) | 1994-05-11 |
CA1290078C (en) | 1991-10-01 |
EP0302641B1 (de) | 1993-10-20 |
EP0302641A1 (de) | 1989-02-08 |
US4942497A (en) | 1990-07-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |