DE3878331D1 - Vakuumbogen-fluessigmetall-ionenquelle. - Google Patents
Vakuumbogen-fluessigmetall-ionenquelle.Info
- Publication number
- DE3878331D1 DE3878331D1 DE8888201511T DE3878331T DE3878331D1 DE 3878331 D1 DE3878331 D1 DE 3878331D1 DE 8888201511 T DE8888201511 T DE 8888201511T DE 3878331 T DE3878331 T DE 3878331T DE 3878331 D1 DE3878331 D1 DE 3878331D1
- Authority
- DE
- Germany
- Prior art keywords
- metal ion
- ion source
- liquid metal
- vacuum arc
- arc liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
- H01J27/22—Metal ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8710391A FR2618604B1 (fr) | 1987-07-22 | 1987-07-22 | Source d'ions de metaux liquides a arc sous vide |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3878331D1 true DE3878331D1 (de) | 1993-03-25 |
DE3878331T2 DE3878331T2 (de) | 1993-08-05 |
Family
ID=9353437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888201511T Expired - Fee Related DE3878331T2 (de) | 1987-07-22 | 1988-07-14 | Vakuumbogen-fluessigmetall-ionenquelle. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5008585A (de) |
EP (1) | EP0300566B1 (de) |
JP (1) | JPH01157046A (de) |
DE (1) | DE3878331T2 (de) |
FR (1) | FR2618604B1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0399374B1 (de) * | 1989-05-26 | 1995-04-19 | Micrion Corporation | Herstellungsverfahren und Vorrichtung für Ionenquelle |
US5089707A (en) * | 1990-11-14 | 1992-02-18 | Ism Technologies, Inc. | Ion beam generating apparatus with electronic switching between multiple cathodes |
JP3060876B2 (ja) * | 1995-02-15 | 2000-07-10 | 日新電機株式会社 | 金属イオン注入装置 |
US7058024B1 (en) | 1999-02-03 | 2006-06-06 | Lucent Technologies, Inc. | Automatic telecommunications link identification system |
US7276847B2 (en) * | 2000-05-17 | 2007-10-02 | Varian Semiconductor Equipment Associates, Inc. | Cathode assembly for indirectly heated cathode ion source |
AT500917B8 (de) * | 2004-07-20 | 2007-02-15 | Arc Seibersdorf Res Gmbh | Flüssigmetall-ionenquelle |
JP4988327B2 (ja) * | 2006-02-23 | 2012-08-01 | ルネサスエレクトロニクス株式会社 | イオン注入装置 |
KR20080112790A (ko) * | 2007-06-22 | 2008-12-26 | 삼성전자주식회사 | 반도체 소자의 박막 형성 방법 |
DE102007058504A1 (de) | 2007-12-05 | 2009-07-09 | Acino Ag | Transdermales therapeutisches System mit einem Gehalt an einem Modulator für nikotinische Acetylcholinrezeptoren (nAChR) |
US10580610B2 (en) * | 2013-03-15 | 2020-03-03 | General Electric Company | Cold cathode switching device and converter |
CN104217911A (zh) * | 2013-10-18 | 2014-12-17 | 常州博锐恒电子科技有限公司 | 一种侧引出mevva金属离子源 |
JP6927493B2 (ja) * | 2016-10-11 | 2021-09-01 | 国立大学法人横浜国立大学 | イオン源 |
US11728140B1 (en) * | 2022-01-31 | 2023-08-15 | Axcelis Technologies, Inc. | Hydraulic feed system for an ion source |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57205953A (en) * | 1981-06-12 | 1982-12-17 | Jeol Ltd | Ion source |
JPS58163135A (ja) * | 1982-03-20 | 1983-09-27 | Nippon Denshi Zairyo Kk | イオン源 |
JPS61142645A (ja) * | 1984-12-17 | 1986-06-30 | Hitachi Ltd | 正,負兼用イオン源 |
US4638210A (en) * | 1985-04-05 | 1987-01-20 | Hughes Aircraft Company | Liquid metal ion source |
JPS62259332A (ja) * | 1985-10-23 | 1987-11-11 | Nippon Denshi Zairyo Kk | イオン発生装置 |
-
1987
- 1987-07-22 FR FR8710391A patent/FR2618604B1/fr not_active Expired
-
1988
- 1988-07-14 EP EP88201511A patent/EP0300566B1/de not_active Expired - Lifetime
- 1988-07-14 DE DE8888201511T patent/DE3878331T2/de not_active Expired - Fee Related
- 1988-07-21 US US07/223,465 patent/US5008585A/en not_active Expired - Fee Related
- 1988-07-22 JP JP63181970A patent/JPH01157046A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2618604A1 (fr) | 1989-01-27 |
EP0300566B1 (de) | 1993-02-10 |
DE3878331T2 (de) | 1993-08-05 |
JPH01157046A (ja) | 1989-06-20 |
FR2618604B1 (fr) | 1989-11-24 |
US5008585A (en) | 1991-04-16 |
EP0300566A1 (de) | 1989-01-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL |
|
8339 | Ceased/non-payment of the annual fee |