FR2618604B1 - Source d'ions de metaux liquides a arc sous vide - Google Patents

Source d'ions de metaux liquides a arc sous vide

Info

Publication number
FR2618604B1
FR2618604B1 FR8710391A FR8710391A FR2618604B1 FR 2618604 B1 FR2618604 B1 FR 2618604B1 FR 8710391 A FR8710391 A FR 8710391A FR 8710391 A FR8710391 A FR 8710391A FR 2618604 B1 FR2618604 B1 FR 2618604B1
Authority
FR
France
Prior art keywords
metal ion
ion source
liquid metal
vacuum arc
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8710391A
Other languages
English (en)
Other versions
FR2618604A1 (fr
Inventor
Henri Bernardet
Jean-Claude Pauwe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
REALISATIONS NUCLEAIRES ET
SODERN SA
Original Assignee
REALISATIONS NUCLEAIRES ET
SODERN SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by REALISATIONS NUCLEAIRES ET, SODERN SA filed Critical REALISATIONS NUCLEAIRES ET
Priority to FR8710391A priority Critical patent/FR2618604B1/fr
Priority to DE8888201511T priority patent/DE3878331T2/de
Priority to EP88201511A priority patent/EP0300566B1/fr
Priority to US07/223,465 priority patent/US5008585A/en
Priority to JP63181970A priority patent/JPH01157046A/ja
Publication of FR2618604A1 publication Critical patent/FR2618604A1/fr
Application granted granted Critical
Publication of FR2618604B1 publication Critical patent/FR2618604B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
FR8710391A 1987-07-22 1987-07-22 Source d'ions de metaux liquides a arc sous vide Expired FR2618604B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8710391A FR2618604B1 (fr) 1987-07-22 1987-07-22 Source d'ions de metaux liquides a arc sous vide
DE8888201511T DE3878331T2 (de) 1987-07-22 1988-07-14 Vakuumbogen-fluessigmetall-ionenquelle.
EP88201511A EP0300566B1 (fr) 1987-07-22 1988-07-14 Source d'ions de métaux liquides à arc sous vide
US07/223,465 US5008585A (en) 1987-07-22 1988-07-21 Vacuum arc sources of ions
JP63181970A JPH01157046A (ja) 1987-07-22 1988-07-22 真空アークイオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8710391A FR2618604B1 (fr) 1987-07-22 1987-07-22 Source d'ions de metaux liquides a arc sous vide

Publications (2)

Publication Number Publication Date
FR2618604A1 FR2618604A1 (fr) 1989-01-27
FR2618604B1 true FR2618604B1 (fr) 1989-11-24

Family

ID=9353437

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8710391A Expired FR2618604B1 (fr) 1987-07-22 1987-07-22 Source d'ions de metaux liquides a arc sous vide

Country Status (5)

Country Link
US (1) US5008585A (fr)
EP (1) EP0300566B1 (fr)
JP (1) JPH01157046A (fr)
DE (1) DE3878331T2 (fr)
FR (1) FR2618604B1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69018697T2 (de) * 1989-05-26 1996-01-04 Micrion Corp Herstellungsverfahren und Vorrichtung für Ionenquelle.
US5089707A (en) * 1990-11-14 1992-02-18 Ism Technologies, Inc. Ion beam generating apparatus with electronic switching between multiple cathodes
JP3060876B2 (ja) * 1995-02-15 2000-07-10 日新電機株式会社 金属イオン注入装置
US7058024B1 (en) 1999-02-03 2006-06-06 Lucent Technologies, Inc. Automatic telecommunications link identification system
US7276847B2 (en) * 2000-05-17 2007-10-02 Varian Semiconductor Equipment Associates, Inc. Cathode assembly for indirectly heated cathode ion source
AT500917B8 (de) * 2004-07-20 2007-02-15 Arc Seibersdorf Res Gmbh Flüssigmetall-ionenquelle
JP4988327B2 (ja) * 2006-02-23 2012-08-01 ルネサスエレクトロニクス株式会社 イオン注入装置
KR20080112790A (ko) * 2007-06-22 2008-12-26 삼성전자주식회사 반도체 소자의 박막 형성 방법
DE102007058504A1 (de) 2007-12-05 2009-07-09 Acino Ag Transdermales therapeutisches System mit einem Gehalt an einem Modulator für nikotinische Acetylcholinrezeptoren (nAChR)
WO2014143100A1 (fr) * 2013-03-15 2014-09-18 General Electric Company Dispositif de commutation à cathode froide et convertisseur
CN104217911A (zh) * 2013-10-18 2014-12-17 常州博锐恒电子科技有限公司 一种侧引出mevva金属离子源
JP6927493B2 (ja) * 2016-10-11 2021-09-01 国立大学法人横浜国立大学 イオン源
US11728140B1 (en) * 2022-01-31 2023-08-15 Axcelis Technologies, Inc. Hydraulic feed system for an ion source

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205953A (en) * 1981-06-12 1982-12-17 Jeol Ltd Ion source
JPS58163135A (ja) * 1982-03-20 1983-09-27 Nippon Denshi Zairyo Kk イオン源
JPS61142645A (ja) * 1984-12-17 1986-06-30 Hitachi Ltd 正，負兼用イオン源
US4638210A (en) * 1985-04-05 1987-01-20 Hughes Aircraft Company Liquid metal ion source
JPS62259332A (ja) * 1985-10-23 1987-11-11 Nippon Denshi Zairyo Kk イオン発生装置

Also Published As

Publication number Publication date
DE3878331D1 (de) 1993-03-25
EP0300566A1 (fr) 1989-01-25
DE3878331T2 (de) 1993-08-05
FR2618604A1 (fr) 1989-01-27
US5008585A (en) 1991-04-16
JPH01157046A (ja) 1989-06-20
EP0300566B1 (fr) 1993-02-10

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Legal Events

Date Code Title Description
ST Notification of lapse