FR2722333B1 - Source d'ions de metaux liquides - Google Patents

Source d'ions de metaux liquides

Info

Publication number
FR2722333B1
FR2722333B1 FR9408395A FR9408395A FR2722333B1 FR 2722333 B1 FR2722333 B1 FR 2722333B1 FR 9408395 A FR9408395 A FR 9408395A FR 9408395 A FR9408395 A FR 9408395A FR 2722333 B1 FR2722333 B1 FR 2722333B1
Authority
FR
France
Prior art keywords
metal ion
ion source
liquid metal
liquid
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9408395A
Other languages
English (en)
Other versions
FR2722333A1 (fr
Inventor
Jacques Gierak
Assayag Gerard Jacques Ben
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR9408395A priority Critical patent/FR2722333B1/fr
Priority to EP95920933A priority patent/EP0769202B1/fr
Priority to PCT/FR1995/000903 priority patent/WO1996002065A1/fr
Priority to DE69509390T priority patent/DE69509390T2/de
Priority to US08/765,873 priority patent/US5936251A/en
Priority to JP8504154A priority patent/JPH10506497A/ja
Publication of FR2722333A1 publication Critical patent/FR2722333A1/fr
Application granted granted Critical
Publication of FR2722333B1 publication Critical patent/FR2722333B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
FR9408395A 1994-07-07 1994-07-07 Source d'ions de metaux liquides Expired - Lifetime FR2722333B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR9408395A FR2722333B1 (fr) 1994-07-07 1994-07-07 Source d'ions de metaux liquides
EP95920933A EP0769202B1 (fr) 1994-07-07 1995-07-06 Source d'ions de metaux liquides
PCT/FR1995/000903 WO1996002065A1 (fr) 1994-07-07 1995-07-06 Source d'ions de metaux liquides
DE69509390T DE69509390T2 (de) 1994-07-07 1995-07-06 Flüssigmetallionenquelle
US08/765,873 US5936251A (en) 1994-07-07 1995-07-06 Liquid metal ion source
JP8504154A JPH10506497A (ja) 1994-07-07 1995-07-06 液体金属イオンソース

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9408395A FR2722333B1 (fr) 1994-07-07 1994-07-07 Source d'ions de metaux liquides

Publications (2)

Publication Number Publication Date
FR2722333A1 FR2722333A1 (fr) 1996-01-12
FR2722333B1 true FR2722333B1 (fr) 1996-09-13

Family

ID=9465110

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9408395A Expired - Lifetime FR2722333B1 (fr) 1994-07-07 1994-07-07 Source d'ions de metaux liquides

Country Status (6)

Country Link
US (1) US5936251A (fr)
EP (1) EP0769202B1 (fr)
JP (1) JPH10506497A (fr)
DE (1) DE69509390T2 (fr)
FR (1) FR2722333B1 (fr)
WO (1) WO1996002065A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5969470A (en) * 1996-11-08 1999-10-19 Veeco Instruments, Inc. Charged particle source
FR2823005B1 (fr) * 2001-03-28 2003-05-16 Centre Nat Rech Scient Dispositif de generation d'un faisceau d'ions et procede de reglage de ce faisceau
US7129513B2 (en) * 2004-06-02 2006-10-31 Xintek, Inc. Field emission ion source based on nanostructure-containing material
EP1622182B1 (fr) 2004-07-28 2007-03-21 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emetteur pour source de ions et procédé pour sa production
EP1622184B1 (fr) * 2004-07-28 2011-05-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emetteur pource source d'ions et procédé pour sa fabrication
FR2892560B1 (fr) * 2005-10-21 2008-06-27 Centre Nat Rech Scient Pointe, tete et dispositif de lecture/ecriture, et son utilisation, et procede de fabrication d'un tel dispositif
FR2897719B1 (fr) * 2006-02-20 2008-10-03 Centre Nat Rech Scient Installation et procede de nano-fabrication
JP6879908B2 (ja) 2014-10-13 2021-06-02 アリゾナ ボード オブ リージェンツ ア ボディ コーポレート オブ ザ ステイト オブ アリゾナ アクティング フォー アンド オン ビハーフ オブ アリゾナ ステイト ユニバーシティーＡｒｉｚｏｎａ Ｂｏａｒｄ Ｏｆ Ｒｅｇｅｎｔｓ， Ａ Ｂｏｄｙ Ｃｏｒｐｏｒａｔｅ Ｏｆ Ｔｈｅ Ｓｔａｔｅ Ｏｆ Ａｒｉｚｏｎａ Ａｃｔｉｎｇ Ｆｏｒ Ａｎｄ Ｏｎ Ｂｅｈａｌｆ Ｏｆ Ａｒｉｚｏｎａ Ｓｔａｔｅ Ｕｎｉｖｅｒｓｉｔｙ 二次イオン質量分析計のためのセシウム一次イオン源
US10672602B2 (en) * 2014-10-13 2020-06-02 Arizona Board Of Regents On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328667A (en) * 1979-03-30 1982-05-11 The European Space Research Organisation Field-emission ion source and ion thruster apparatus comprising such sources
US4318030A (en) * 1980-05-12 1982-03-02 Hughes Aircraft Company Liquid metal ion source
JPS5878557U (ja) * 1981-11-24 1983-05-27 株式会社日立製作所 電界放出型イオン源
US4638210A (en) * 1985-04-05 1987-01-20 Hughes Aircraft Company Liquid metal ion source
US4617203A (en) * 1985-04-08 1986-10-14 Hughes Aircraft Company Preparation of liquid metal source structures for use in ion beam evaporation of boron-containing alloys
JPS62259332A (ja) * 1985-10-23 1987-11-11 Nippon Denshi Zairyo Kk イオン発生装置
JP2807719B2 (ja) * 1990-04-04 1998-10-08 セイコーインスツルメンツ株式会社 集束イオンビーム装置の液体金属イオン源の動作方法
JP3315720B2 (ja) * 1992-06-18 2002-08-19 株式会社日立製作所 液体金属イオン源及び加熱洗浄方法

Also Published As

Publication number Publication date
WO1996002065A1 (fr) 1996-01-25
DE69509390D1 (de) 1999-06-02
FR2722333A1 (fr) 1996-01-12
US5936251A (en) 1999-08-10
EP0769202B1 (fr) 1999-04-28
JPH10506497A (ja) 1998-06-23
DE69509390T2 (de) 1999-11-18
EP0769202A1 (fr) 1997-04-23

Similar Documents

Publication Publication Date Title
FI951910A (fi) Ioniliikespektrometri
GB9402612D0 (en) Ionic liquids
FI954807A0 (fi) Ionisia nesteitä
BR9506463A (pt) Aparelho distribuidor de refrigerante
DE69637765D1 (de) Ionenstrahlgerät
ZA9510411B (en) Ionic liquids
DE59503765D1 (de) Verdampfereinheit
DE69430176D1 (de) Kontinuierliche Ionenaustauschvorrichtung
FR2722333B1 (fr) Source d'ions de metaux liquides
FR2720923B1 (fr) Vis pour ostéosynthèse.
BR9610382A (pt) Composição de tratamento do cableo
DE69525563T2 (de) Ionenimplantierungsgerät
AU8301691A (en) Liquid metal treatment
NO941397L (no) N-substiuerte 2-azetidioner
FR2742820B1 (fr) Fixation demontable de boitier
DE9402986U1 (de) Rahmenloses Gehäuse zur Aufnahme von Komponenten
DE59602769D1 (de) Ionenquelle
DE69617417D1 (de) Einfach-Potential Ionenquelle
KR940024782U (ko) 이온 정수기
KR950025875U (ko) 이온 주입기
ES1025565Y (es) "carcasa de foco empotrable"
BR9506158A (pt) Umidificador metálico
UA25987C2 (uk) Горілка особлива "поліський сувеhір"
ZA951060B (en) Ionic liquids
GB9404104D0 (en) Ionic liquids