DE69509390D1 - Flüssigmetallionenquelle - Google Patents

Flüssigmetallionenquelle

Info

Publication number
DE69509390D1
DE69509390D1 DE69509390T DE69509390T DE69509390D1 DE 69509390 D1 DE69509390 D1 DE 69509390D1 DE 69509390 T DE69509390 T DE 69509390T DE 69509390 T DE69509390 T DE 69509390T DE 69509390 D1 DE69509390 D1 DE 69509390D1
Authority
DE
Germany
Prior art keywords
metal ion
ion source
liquid metal
liquid
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69509390T
Other languages
English (en)
Other versions
DE69509390T2 (de
Inventor
Jacques Gierak
Assayag Gerard Ben
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of DE69509390D1 publication Critical patent/DE69509390D1/de
Publication of DE69509390T2 publication Critical patent/DE69509390T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69509390T 1994-07-07 1995-07-06 Flüssigmetallionenquelle Expired - Lifetime DE69509390T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9408395A FR2722333B1 (fr) 1994-07-07 1994-07-07 Source d'ions de metaux liquides
PCT/FR1995/000903 WO1996002065A1 (fr) 1994-07-07 1995-07-06 Source d'ions de metaux liquides

Publications (2)

Publication Number Publication Date
DE69509390D1 true DE69509390D1 (de) 1999-06-02
DE69509390T2 DE69509390T2 (de) 1999-11-18

Family

ID=9465110

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69509390T Expired - Lifetime DE69509390T2 (de) 1994-07-07 1995-07-06 Flüssigmetallionenquelle

Country Status (6)

Country Link
US (1) US5936251A (de)
EP (1) EP0769202B1 (de)
JP (1) JPH10506497A (de)
DE (1) DE69509390T2 (de)
FR (1) FR2722333B1 (de)
WO (1) WO1996002065A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5969470A (en) * 1996-11-08 1999-10-19 Veeco Instruments, Inc. Charged particle source
FR2823005B1 (fr) * 2001-03-28 2003-05-16 Centre Nat Rech Scient Dispositif de generation d'un faisceau d'ions et procede de reglage de ce faisceau
US7129513B2 (en) * 2004-06-02 2006-10-31 Xintek, Inc. Field emission ion source based on nanostructure-containing material
EP1622182B1 (de) 2004-07-28 2007-03-21 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter für eine Ionenquelle und Verfahren zur dessen Herstellung
EP1622184B1 (de) 2004-07-28 2011-05-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter für eine Ionenquelle und Verfahren zu deren Herstellung
FR2892560B1 (fr) 2005-10-21 2008-06-27 Centre Nat Rech Scient Pointe, tete et dispositif de lecture/ecriture, et son utilisation, et procede de fabrication d'un tel dispositif
FR2897719B1 (fr) * 2006-02-20 2008-10-03 Centre Nat Rech Scient Installation et procede de nano-fabrication
US9941089B2 (en) 2014-10-13 2018-04-10 Arizona Board Of Regents, A Body Corporate Of The State Of Arizona, Acting For And On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer
US10672602B2 (en) * 2014-10-13 2020-06-02 Arizona Board Of Regents On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328667A (en) * 1979-03-30 1982-05-11 The European Space Research Organisation Field-emission ion source and ion thruster apparatus comprising such sources
US4318030A (en) * 1980-05-12 1982-03-02 Hughes Aircraft Company Liquid metal ion source
JPS5878557U (ja) * 1981-11-24 1983-05-27 株式会社日立製作所 電界放出型イオン源
US4638210A (en) * 1985-04-05 1987-01-20 Hughes Aircraft Company Liquid metal ion source
US4617203A (en) * 1985-04-08 1986-10-14 Hughes Aircraft Company Preparation of liquid metal source structures for use in ion beam evaporation of boron-containing alloys
JPS62259332A (ja) * 1985-10-23 1987-11-11 Nippon Denshi Zairyo Kk イオン発生装置
JP2807719B2 (ja) * 1990-04-04 1998-10-08 セイコーインスツルメンツ株式会社 集束イオンビーム装置の液体金属イオン源の動作方法
JP3315720B2 (ja) * 1992-06-18 2002-08-19 株式会社日立製作所 液体金属イオン源及び加熱洗浄方法

Also Published As

Publication number Publication date
WO1996002065A1 (fr) 1996-01-25
EP0769202B1 (de) 1999-04-28
JPH10506497A (ja) 1998-06-23
US5936251A (en) 1999-08-10
FR2722333B1 (fr) 1996-09-13
EP0769202A1 (de) 1997-04-23
FR2722333A1 (fr) 1996-01-12
DE69509390T2 (de) 1999-11-18

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