JP4988327B2 - イオン注入装置 - Google Patents
イオン注入装置 Download PDFInfo
- Publication number
- JP4988327B2 JP4988327B2 JP2006346385A JP2006346385A JP4988327B2 JP 4988327 B2 JP4988327 B2 JP 4988327B2 JP 2006346385 A JP2006346385 A JP 2006346385A JP 2006346385 A JP2006346385 A JP 2006346385A JP 4988327 B2 JP4988327 B2 JP 4988327B2
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- Prior art keywords
- hole
- ion
- implantation apparatus
- ion implantation
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000005468 ion implantation Methods 0.000 claims description 36
- 229910052710 silicon Inorganic materials 0.000 claims description 35
- 239000010703 silicon Substances 0.000 claims description 35
- 239000013078 crystal Substances 0.000 claims description 34
- 238000010884 ion-beam technique Methods 0.000 claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 15
- 238000007493 shaping process Methods 0.000 claims description 7
- 238000007751 thermal spraying Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 34
- 235000012431 wafers Nutrition 0.000 description 29
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 229910002804 graphite Inorganic materials 0.000 description 9
- 239000010439 graphite Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/045—Diaphragms
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
220 アパーチャ部材
221 部材本体
222 貫通孔
223 コーティング膜
Claims (13)
- イオンビームを部材の貫通孔に通過させてビーム形状を成形するイオン注入装置であって、
前記部材の少なくとも前記貫通孔の内面に多孔質膜が被覆されており、
前記多孔質膜の表面に複数の凹部が形成されているとともに内部に複数の空孔が形成されており、複数の前記凹部の少なくとも一部と複数の前記空孔の少なくとも一部とが連通しており、複数の前記空孔の少なくとも一部が相互に連通しているイオン注入装置。 - 前記多孔質膜の前記凹部と前記空孔とは、前記ビーム形状の成形に影響せず、前記イオンビームのイオン種を吸着するサイズに形成されている請求項1に記載のイオン注入装置。
- 前記多孔質膜がコーティング膜からなる請求項1または2に記載のイオン注入装置。
- 前記多孔質膜が無配向な結晶構造に形成されている請求項1ないし3の何れか一項に記載のイオン注入装置。
- 前記部材が選択配向の結晶構造に形成されている請求項1ないし4の何れか一項に記載のイオン注入装置。
- 前記部材がカーボンを主成分として含有する請求項1ないし5の何れか一項に記載のイオン注入装置。
- 前記多孔質膜が溶射膜からなる請求項1ないし6の何れか一項に記載のイオン注入装置。
- 前記溶射膜がシリコンを主成分として含有する請求項7に記載のイオン注入装置。
- 前記溶射膜がタングステンを主成分として含有する請求項7に記載のイオン注入装置。
- イオンビームを貫通孔に通過させてビーム形状を成形する部材であって、
少なくとも前記貫通孔の内面に多孔質膜が被覆されており、前記多孔質膜の表面に複数の凹部が形成されているとともに内部に複数の空孔が形成されており、複数の前記凹部の少なくとも一部と複数の前記空孔の少なくとも一部とが連通しており、複数の前記空孔の少なくとも一部が相互に連通している部材。 - 前記多孔質膜が無配向な結晶構造に形成されている請求項10に記載の部材。
- イオンビームを貫通孔に通過させてビーム形状を成形する部材を製造するための部材製造方法であって、
前記ビーム形状に対応した貫通孔が形成されている部材本体を形成し、
この部材本体の貫通孔の少なくとも内面に多孔質となるコーティング膜を溶射により被覆する工程を含み、
前記コーティング膜の表面に複数の凹部が形成されているとともに内部に複数の空孔が形成されており、複数の前記凹部の少なくとも一部と複数の前記空孔の少なくとも一部とが連通しており、複数の前記空孔の少なくとも一部が相互に連通している部材製造方法。 - 前記コーティング膜が無配向な結晶構造に形成されている請求項12に記載の部材製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006346385A JP4988327B2 (ja) | 2006-02-23 | 2006-12-22 | イオン注入装置 |
US11/702,677 US7732790B2 (en) | 2006-02-23 | 2007-02-06 | Ion implanting apparatus for forming ion beam geometry |
CN2007100058252A CN101026078B (zh) | 2006-02-23 | 2007-02-25 | 离子注入装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006046140 | 2006-02-23 | ||
JP2006046140 | 2006-02-23 | ||
JP2006346385A JP4988327B2 (ja) | 2006-02-23 | 2006-12-22 | イオン注入装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007258154A JP2007258154A (ja) | 2007-10-04 |
JP4988327B2 true JP4988327B2 (ja) | 2012-08-01 |
Family
ID=38632147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006346385A Expired - Fee Related JP4988327B2 (ja) | 2006-02-23 | 2006-12-22 | イオン注入装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7732790B2 (ja) |
JP (1) | JP4988327B2 (ja) |
CN (1) | CN101026078B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009048877A (ja) * | 2007-08-21 | 2009-03-05 | Nec Electronics Corp | イオン注入装置 |
US7838849B2 (en) | 2007-10-24 | 2010-11-23 | Applied Materials, Inc. | Ion implanters |
US20090200494A1 (en) * | 2008-02-11 | 2009-08-13 | Varian Semiconductor Equipment Associates, Inc. | Techniques for cold implantation of carbon-containing species |
JP2010003596A (ja) * | 2008-06-23 | 2010-01-07 | Hitachi High-Technologies Corp | 荷電粒子線加工装置 |
DE102010041156B9 (de) * | 2010-09-21 | 2018-01-25 | Carl Zeiss Microscopy Gmbh | Blendeneinheit für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät |
US9437397B2 (en) * | 2013-06-27 | 2016-09-06 | Varian Semiconductor Equipment Associates, Inc. | Textured silicon liners in substrate processing systems |
CN103474319B (zh) * | 2013-09-12 | 2015-11-18 | 武汉新芯集成电路制造有限公司 | 一种减少晶圆葡萄球状缺陷的离子注入机 |
JP6810391B2 (ja) * | 2018-05-18 | 2021-01-06 | 日新イオン機器株式会社 | イオン源 |
CN111524779B (zh) * | 2020-04-28 | 2023-02-17 | 京东方科技集团股份有限公司 | 防着板装置及离子源腔室、离子注入机 |
CN111871950A (zh) * | 2020-07-27 | 2020-11-03 | 安徽富乐德科技发展股份有限公司 | 一种半导体离子注入装置石墨部件表面处理装置和工艺 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2618604B1 (fr) * | 1987-07-22 | 1989-11-24 | Realisations Nucleaires Et | Source d'ions de metaux liquides a arc sous vide |
JPH0258221A (ja) * | 1988-08-23 | 1990-02-27 | Semiconductor Energy Lab Co Ltd | 炭素または炭素を主成分とするマスクを用いたエッチング方法 |
JPH03269940A (ja) * | 1990-03-19 | 1991-12-02 | Hitachi Ltd | イオン注入装置及びそれを用いた半導体集積回路装置の製造方法 |
JP3140551B2 (ja) * | 1992-04-27 | 2001-03-05 | オリンパス光学工業株式会社 | 電子線記録媒体 |
US5554854A (en) * | 1995-07-17 | 1996-09-10 | Eaton Corporation | In situ removal of contaminants from the interior surfaces of an ion beam implanter |
JPH0955169A (ja) * | 1995-08-10 | 1997-02-25 | Nissin Electric Co Ltd | イオン源用試料蒸発源 |
DE19535078B4 (de) * | 1995-09-21 | 2006-06-08 | Robert Bosch Gmbh | Überwachung und Regelung von thermischen Spritzverfahren |
JPH1025178A (ja) * | 1996-07-04 | 1998-01-27 | Ibiden Co Ltd | イオン注入装置用カーボン材料 |
JPH11149898A (ja) * | 1997-11-19 | 1999-06-02 | Sony Corp | イオン注入装置 |
US5947053A (en) * | 1998-01-09 | 1999-09-07 | International Business Machines Corporation | Wear-through detector for multilayered parts and methods of using same |
JPH11283552A (ja) | 1998-03-31 | 1999-10-15 | Tadamoto Tamai | イオン注入装置、イオン注入方法、イオンビーム源、及び可変スリット機構 |
US7276287B2 (en) * | 2003-12-17 | 2007-10-02 | Eidgenössische Technische Hochschule Zürich | Melt-processible poly(tetrafluoroethylene) |
US6824866B1 (en) * | 1999-04-08 | 2004-11-30 | Affymetrix, Inc. | Porous silica substrates for polymer synthesis and assays |
US6447637B1 (en) * | 1999-07-12 | 2002-09-10 | Applied Materials Inc. | Process chamber having a voltage distribution electrode |
JP4029375B2 (ja) * | 2000-06-21 | 2008-01-09 | スズキ株式会社 | 混合粉末溶射方法 |
JP2003124089A (ja) * | 2001-10-09 | 2003-04-25 | Nikon Corp | 荷電粒子線露光装置及び露光方法 |
US7026009B2 (en) * | 2002-03-27 | 2006-04-11 | Applied Materials, Inc. | Evaluation of chamber components having textured coatings |
JP4472372B2 (ja) * | 2003-02-03 | 2010-06-02 | 株式会社オクテック | プラズマ処理装置及びプラズマ処理装置用の電極板 |
US20040256215A1 (en) * | 2003-04-14 | 2004-12-23 | David Stebbins | Sputtering chamber liner |
JP2005062134A (ja) * | 2003-08-20 | 2005-03-10 | Horiba Ltd | 試料の前処理方法および試料保持部材 |
KR100553716B1 (ko) * | 2004-08-02 | 2006-02-24 | 삼성전자주식회사 | 이온 주입 설비의 이온 소스부 |
US20060288934A1 (en) * | 2005-06-22 | 2006-12-28 | Tokyo Electron Limited | Electrode assembly and plasma processing apparatus |
-
2006
- 2006-12-22 JP JP2006346385A patent/JP4988327B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-06 US US11/702,677 patent/US7732790B2/en active Active
- 2007-02-25 CN CN2007100058252A patent/CN101026078B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20080073585A1 (en) | 2008-03-27 |
CN101026078B (zh) | 2010-09-08 |
CN101026078A (zh) | 2007-08-29 |
JP2007258154A (ja) | 2007-10-04 |
US7732790B2 (en) | 2010-06-08 |
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