DE3872644T2 - Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten. - Google Patents

Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten.

Info

Publication number
DE3872644T2
DE3872644T2 DE8888116463T DE3872644T DE3872644T2 DE 3872644 T2 DE3872644 T2 DE 3872644T2 DE 8888116463 T DE8888116463 T DE 8888116463T DE 3872644 T DE3872644 T DE 3872644T DE 3872644 T2 DE3872644 T2 DE 3872644T2
Authority
DE
Germany
Prior art keywords
mercury
solution
cadmium
tellurium
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888116463T
Other languages
German (de)
English (en)
Other versions
DE3872644D1 (de
Inventor
Sergio Bernardi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MBDA Italia SpA
Original Assignee
Selenia Industrie Elettroniche Associate SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Selenia Industrie Elettroniche Associate SpA filed Critical Selenia Industrie Elettroniche Associate SpA
Application granted granted Critical
Publication of DE3872644D1 publication Critical patent/DE3872644D1/de
Publication of DE3872644T2 publication Critical patent/DE3872644T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10P14/265
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02623Liquid deposition
    • H01L21/02628Liquid deposition using solutions
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/02Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
    • C30B19/04Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux the solvent being a component of the crystal composition
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/46Sulfur-, selenium- or tellurium-containing compounds
    • C30B29/48AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02367Substrates
    • H01L21/0237Materials
    • H01L21/024Group 12/16 materials
    • H01L21/02411Tellurides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02551Group 12/16 materials
    • H01L21/02562Tellurides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02623Liquid deposition
    • H01L21/02625Liquid deposition using melted materials
    • H10P14/263
    • H10P14/2917
    • H10P14/3432
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/906Special atmosphere other than vacuum or inert

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE8888116463T 1987-10-06 1988-10-05 Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten. Expired - Fee Related DE3872644T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8767842A IT1211385B (it) 1987-10-06 1987-10-06 Metodo per la fabbricazione di strati monocristallini di tellururo di cadmio e mercurio

Publications (2)

Publication Number Publication Date
DE3872644D1 DE3872644D1 (de) 1992-08-13
DE3872644T2 true DE3872644T2 (de) 1993-03-25

Family

ID=11305723

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8888116463T Expired - Fee Related DE3872644T2 (de) 1987-10-06 1988-10-05 Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten.
DE198888116463T Pending DE311038T1 (de) 1987-10-06 1988-10-05 Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE198888116463T Pending DE311038T1 (de) 1987-10-06 1988-10-05 Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten.

Country Status (6)

Country Link
US (1) US4906325A (enExample)
EP (1) EP0311038B1 (enExample)
JP (1) JPH01197399A (enExample)
CA (1) CA1319588C (enExample)
DE (2) DE3872644T2 (enExample)
IT (1) IT1211385B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2754765B2 (ja) * 1989-07-19 1998-05-20 富士通株式会社 化合物半導体結晶の製造方法
JPH042689A (ja) * 1990-04-19 1992-01-07 Mitsubishi Electric Corp ヘテロエピタキシャル液相成長方法
US5264190A (en) * 1990-04-19 1993-11-23 Mitsubishi Denki Kabushiki Kaisha Liquid phase epitaxial film growth apparatus
US5512511A (en) * 1994-05-24 1996-04-30 Santa Barbara Research Center Process for growing HgCdTe base and contact layer in one operation
US6902619B2 (en) * 2001-06-28 2005-06-07 Ntu Ventures Pte. Ltd. Liquid phase epitaxy
CA2649322C (en) 2008-09-30 2011-02-01 5N Plus Inc. Cadmium telluride production process
CN102677162A (zh) * 2012-05-09 2012-09-19 中国科学院上海技术物理研究所 一种全自动控制的液相外延设备及控制方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642142A (en) * 1982-05-19 1987-02-10 Massachusetts Institute Of Technology Process for making mercury cadmium telluride

Also Published As

Publication number Publication date
US4906325A (en) 1990-03-06
EP0311038A1 (en) 1989-04-12
CA1319588C (en) 1993-06-29
DE311038T1 (de) 1989-10-05
DE3872644D1 (de) 1992-08-13
IT8767842A0 (it) 1987-10-06
JPH01197399A (ja) 1989-08-09
IT1211385B (it) 1989-10-18
EP0311038B1 (en) 1992-07-08
JPH0478598B2 (enExample) 1992-12-11

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee
8327 Change in the person/name/address of the patent owner

Owner name: ALENIA MARCONI SYSTEMS S.P.A., ROM/ROMA, IT