IT1211385B - Metodo per la fabbricazione di strati monocristallini di tellururo di cadmio e mercurio - Google Patents

Metodo per la fabbricazione di strati monocristallini di tellururo di cadmio e mercurio

Info

Publication number
IT1211385B
IT1211385B IT8767842A IT6784287A IT1211385B IT 1211385 B IT1211385 B IT 1211385B IT 8767842 A IT8767842 A IT 8767842A IT 6784287 A IT6784287 A IT 6784287A IT 1211385 B IT1211385 B IT 1211385B
Authority
IT
Italy
Prior art keywords
cadmium
manufacture
mercury telluride
monocrystalline layers
monocrystalline
Prior art date
Application number
IT8767842A
Other languages
English (en)
Other versions
IT8767842A0 (it
Inventor
Sergio Bernardi
Original Assignee
Selenia Ind Elettroniche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Selenia Ind Elettroniche filed Critical Selenia Ind Elettroniche
Priority to IT8767842A priority Critical patent/IT1211385B/it
Publication of IT8767842A0 publication Critical patent/IT8767842A0/it
Priority to JP63249170A priority patent/JPH01197399A/ja
Priority to DE8888116463T priority patent/DE3872644T2/de
Priority to US07/254,380 priority patent/US4906325A/en
Priority to CA000579336A priority patent/CA1319588C/en
Priority to DE198888116463T priority patent/DE311038T1/de
Priority to EP88116463A priority patent/EP0311038B1/en
Application granted granted Critical
Publication of IT1211385B publication Critical patent/IT1211385B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
    • C30B19/04—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux the solvent being a component of the crystal composition
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
    • C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/024—Group 12/16 materials
    • H01L21/02411—Tellurides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02551—Group 12/16 materials
    • H01L21/02562—Tellurides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02625—Liquid deposition using melted materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/906—Special atmosphere other than vacuum or inert

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
IT8767842A 1987-10-06 1987-10-06 Metodo per la fabbricazione di strati monocristallini di tellururo di cadmio e mercurio IT1211385B (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IT8767842A IT1211385B (it) 1987-10-06 1987-10-06 Metodo per la fabbricazione di strati monocristallini di tellururo di cadmio e mercurio
JP63249170A JPH01197399A (ja) 1987-10-06 1988-10-04 単結晶テルル化カドミウム水銀層を作製する方法
DE8888116463T DE3872644T2 (de) 1987-10-06 1988-10-05 Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten.
US07/254,380 US4906325A (en) 1987-10-06 1988-10-05 Method of making single-crystal mercury cadmium telluride layers
CA000579336A CA1319588C (en) 1987-10-06 1988-10-05 Method of making single-crystal mercury cadmium telluride layers
DE198888116463T DE311038T1 (de) 1987-10-06 1988-10-05 Verfahren zum erzeugen von monokristallinen quecksilber-cadmium-tellurid-schichten.
EP88116463A EP0311038B1 (en) 1987-10-06 1988-10-05 Process for making single-crystal mercury cadmium telluride layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8767842A IT1211385B (it) 1987-10-06 1987-10-06 Metodo per la fabbricazione di strati monocristallini di tellururo di cadmio e mercurio

Publications (2)

Publication Number Publication Date
IT8767842A0 IT8767842A0 (it) 1987-10-06
IT1211385B true IT1211385B (it) 1989-10-18

Family

ID=11305723

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8767842A IT1211385B (it) 1987-10-06 1987-10-06 Metodo per la fabbricazione di strati monocristallini di tellururo di cadmio e mercurio

Country Status (6)

Country Link
US (1) US4906325A (it)
EP (1) EP0311038B1 (it)
JP (1) JPH01197399A (it)
CA (1) CA1319588C (it)
DE (2) DE3872644T2 (it)
IT (1) IT1211385B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2754765B2 (ja) * 1989-07-19 1998-05-20 富士通株式会社 化合物半導体結晶の製造方法
JPH042689A (ja) * 1990-04-19 1992-01-07 Mitsubishi Electric Corp ヘテロエピタキシャル液相成長方法
US5264190A (en) * 1990-04-19 1993-11-23 Mitsubishi Denki Kabushiki Kaisha Liquid phase epitaxial film growth apparatus
US5512511A (en) * 1994-05-24 1996-04-30 Santa Barbara Research Center Process for growing HgCdTe base and contact layer in one operation
US6902619B2 (en) * 2001-06-28 2005-06-07 Ntu Ventures Pte. Ltd. Liquid phase epitaxy
CA2649322C (en) * 2008-09-30 2011-02-01 5N Plus Inc. Cadmium telluride production process
CN102677162A (zh) * 2012-05-09 2012-09-19 中国科学院上海技术物理研究所 一种全自动控制的液相外延设备及控制方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642142A (en) * 1982-05-19 1987-02-10 Massachusetts Institute Of Technology Process for making mercury cadmium telluride

Also Published As

Publication number Publication date
EP0311038A1 (en) 1989-04-12
JPH0478598B2 (it) 1992-12-11
DE3872644T2 (de) 1993-03-25
EP0311038B1 (en) 1992-07-08
US4906325A (en) 1990-03-06
CA1319588C (en) 1993-06-29
DE311038T1 (de) 1989-10-05
IT8767842A0 (it) 1987-10-06
JPH01197399A (ja) 1989-08-09
DE3872644D1 (de) 1992-08-13

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