DE3783103T2 - Elektrochemischer gassensor und verfahren zu seiner herstellung. - Google Patents
Elektrochemischer gassensor und verfahren zu seiner herstellung.Info
- Publication number
- DE3783103T2 DE3783103T2 DE8787307825T DE3783103T DE3783103T2 DE 3783103 T2 DE3783103 T2 DE 3783103T2 DE 8787307825 T DE8787307825 T DE 8787307825T DE 3783103 T DE3783103 T DE 3783103T DE 3783103 T2 DE3783103 T2 DE 3783103T2
- Authority
- DE
- Germany
- Prior art keywords
- production
- gas sensor
- electrochemical gas
- electrochemical
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/417—Systems using cells, i.e. more than one cell and probes with solid electrolytes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
- G01N27/4072—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure characterized by the diffusion barrier
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61210432A JPH0810211B2 (ja) | 1986-09-05 | 1986-09-05 | ガスセンサ及びその製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3783103D1 DE3783103D1 (de) | 1993-01-28 |
DE3783103T2 true DE3783103T2 (de) | 1993-05-27 |
Family
ID=16589222
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787307825T Expired - Lifetime DE3783103T2 (de) | 1986-09-05 | 1987-09-04 | Elektrochemischer gassensor und verfahren zu seiner herstellung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4859307A (de) |
EP (1) | EP0259175B1 (de) |
JP (1) | JPH0810211B2 (de) |
DE (1) | DE3783103T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021116238A1 (de) | 2021-06-23 | 2022-12-29 | Testo SE & Co. KGaA | Elektrochemischer Gassensor |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3728289C1 (de) * | 1987-08-25 | 1988-08-04 | Bosch Gmbh Robert | Nach dem polarographischen Messprinzip arbeitende Grenzstromsonde |
US5310575A (en) * | 1987-11-03 | 1994-05-10 | Robert Bosch Gmbh | Method of making a porous ceramic protective layer on an electrode of an electrochemical sensor for exposure to hot gas |
US5271821A (en) * | 1988-03-03 | 1993-12-21 | Ngk Insulators, Ltd. | Oxygen sensor and method of producing the same |
DE3811713A1 (de) * | 1988-04-08 | 1989-10-19 | Bosch Gmbh Robert | Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen |
JPH01272955A (ja) * | 1988-04-25 | 1989-10-31 | Ngk Spark Plug Co Ltd | 空燃比センサ及びその製造方法 |
DE68923734T2 (de) * | 1988-05-24 | 1996-01-18 | Gte Laboratories Inc | Gasfühlelement. |
DE3834987A1 (de) * | 1988-10-14 | 1990-04-19 | Bosch Gmbh Robert | Sensorelement fuer grenzstromsensoren zur bestimmung des (lambda)-wertes von gasgemischen |
EP0366863B1 (de) * | 1988-10-31 | 1994-08-31 | Fujikura Ltd. | Sauerstoffsensorvorrichtung |
DE3841611A1 (de) * | 1988-12-10 | 1990-06-13 | Bosch Gmbh Robert | Sensorelement fuer grenzstromsensoren zur bestimmung des (lambda)-wertes von gasgemischen |
DE3941837C2 (de) * | 1989-12-19 | 1994-01-13 | Bosch Gmbh Robert | Widerstandsmeßfühler zur Erfassung des Sauerstoffgehaltes in Gasgemischen und Verfahren zu seiner Herstellung |
DE4226540A1 (de) * | 1992-08-11 | 1994-04-21 | Bosch Gmbh Robert | Polarographischer Sensor |
DE4231966A1 (de) * | 1992-09-24 | 1994-03-31 | Bosch Gmbh Robert | Planare polarograhische Sonde zur Bestimmung des Lambda-Wertes von Gasgemischen |
DE4311849C2 (de) * | 1992-12-23 | 2003-04-24 | Bosch Gmbh Robert | Sensor zur Bestimmung von Gaskomponenten und/oder Gaskonzentrationen von Gasgemischen |
DE4311851A1 (de) * | 1993-04-10 | 1994-10-13 | Bosch Gmbh Robert | Sensoranordnung zur Bestimmung von Gaskomponenten und/oder von Gaskonzentrationen von Gasgemischen |
DE4333230B4 (de) * | 1993-09-30 | 2004-03-25 | Robert Bosch Gmbh | Elektrochemischer Meßfühler zur Bestimmung des Sauerstoffgehalts in Gasen |
DE4342005C2 (de) * | 1993-12-09 | 2003-03-27 | Bosch Gmbh Robert | Planare elektrochemische Sonde und Verfahren zu deren Herstellung |
DE4343089A1 (de) * | 1993-12-17 | 1995-06-29 | Bosch Gmbh Robert | Planares Sensorelement auf Festelektrolytbasis |
DE19539357B4 (de) * | 1994-10-24 | 2011-09-15 | Denso Corporation | Luft-Brennstoffverhältnis-Erfassungseinrichtung |
JP3501187B2 (ja) * | 1995-02-08 | 2004-03-02 | 株式会社デンソー | 酸素濃度検出器 |
JP3671100B2 (ja) * | 1996-02-23 | 2005-07-13 | 日本碍子株式会社 | 酸化物センサ |
US5689059A (en) * | 1996-08-14 | 1997-11-18 | Motorola, Inc. | Selective gas sensor |
EP0869356B1 (de) * | 1997-03-28 | 2007-02-07 | NGK Spark Plug Co. Ltd. | NOx Sensor |
US6026639A (en) | 1997-11-03 | 2000-02-22 | Engelhard Corporation | Apparatus and method for diagnosis of catalyst performance |
US6015533A (en) * | 1997-11-14 | 2000-01-18 | Motorola Inc. | Sensor housing for a calorimetric gas sensor |
US5989398A (en) * | 1997-11-14 | 1999-11-23 | Motorola, Inc. | Calorimetric hydrocarbon gas sensor |
US6071476A (en) * | 1997-11-14 | 2000-06-06 | Motorola, Inc. | Exhaust gas sensor |
DE19805023A1 (de) * | 1998-02-09 | 1999-08-12 | Bosch Gmbh Robert | Elektrochemischer Meßfühler |
JP3855483B2 (ja) * | 1998-08-25 | 2006-12-13 | 株式会社デンソー | 積層型空燃比センサ素子 |
JP3953677B2 (ja) * | 1999-03-12 | 2007-08-08 | 日本特殊陶業株式会社 | ガスセンサ |
DE19941051C2 (de) * | 1999-08-28 | 2003-10-23 | Bosch Gmbh Robert | Sensorelement zur Bestimmung der Sauerstoffkonzentration in Gasgemischen und Verfahren zur Herstellung desselben |
US6936147B2 (en) * | 1999-11-19 | 2005-08-30 | Perkinelmer Las, Inc. | Hybrid film type sensor |
US6620723B1 (en) | 2000-06-27 | 2003-09-16 | Applied Materials, Inc. | Formation of boride barrier layers using chemisorption techniques |
US6551929B1 (en) | 2000-06-28 | 2003-04-22 | Applied Materials, Inc. | Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques |
DE10058643A1 (de) * | 2000-11-25 | 2002-06-06 | Bosch Gmbh Robert | Heizeinrichtung |
US6616820B2 (en) * | 2000-12-15 | 2003-09-09 | Delphi Technologies, Inc. | Exhaust species sensing method and device |
US6365880B1 (en) * | 2000-12-19 | 2002-04-02 | Delphi Technologies, Inc. | Heater patterns for planar gas sensors |
US6765178B2 (en) | 2000-12-29 | 2004-07-20 | Applied Materials, Inc. | Chamber for uniform substrate heating |
US7211144B2 (en) | 2001-07-13 | 2007-05-01 | Applied Materials, Inc. | Pulsed nucleation deposition of tungsten layers |
US7085616B2 (en) | 2001-07-27 | 2006-08-01 | Applied Materials, Inc. | Atomic layer deposition apparatus |
US6833161B2 (en) | 2002-02-26 | 2004-12-21 | Applied Materials, Inc. | Cyclical deposition of tungsten nitride for metal oxide gate electrode |
JP3832437B2 (ja) * | 2002-04-03 | 2006-10-11 | 株式会社デンソー | ガスセンサ素子 |
US7279432B2 (en) | 2002-04-16 | 2007-10-09 | Applied Materials, Inc. | System and method for forming an integrated barrier layer |
DE10252712B4 (de) * | 2002-11-13 | 2004-10-28 | Robert Bosch Gmbh | Gasmessfühler |
US7262133B2 (en) | 2003-01-07 | 2007-08-28 | Applied Materials, Inc. | Enhancement of copper line reliability using thin ALD tan film to cap the copper line |
US20090101502A1 (en) * | 2003-02-10 | 2009-04-23 | Robert Bosch Gmbh | Thermal Shock Resistant Gas Sensor Element |
US8906214B2 (en) * | 2003-02-10 | 2014-12-09 | Robert Bosch Gmbh | Contamination-resistant gas sensor element |
US7211180B2 (en) * | 2003-02-10 | 2007-05-01 | Robert Bosch Corporation | Contamination-resistant gas sensor element |
DE10305533A1 (de) * | 2003-02-11 | 2004-09-02 | Robert Bosch Gmbh | Sensorelement |
US7151260B2 (en) * | 2003-03-03 | 2006-12-19 | Advanced Fuel Research, Inc. | Analyzer for measuring multiple gases |
US7211508B2 (en) | 2003-06-18 | 2007-05-01 | Applied Materials, Inc. | Atomic layer deposition of tantalum based barrier materials |
DE10345143B4 (de) * | 2003-09-29 | 2006-08-24 | Robert Bosch Gmbh | Sensorelement |
DE102004023004A1 (de) * | 2004-05-10 | 2005-12-08 | Robert Bosch Gmbh | Sensorelement |
JP4653546B2 (ja) * | 2004-06-14 | 2011-03-16 | 株式会社デンソー | ガスセンサ素子 |
JP4845111B2 (ja) * | 2005-10-17 | 2011-12-28 | 日本特殊陶業株式会社 | ガスセンサ素子及びガスセンサ |
DE102008040175A1 (de) * | 2008-07-04 | 2010-01-07 | Robert Bosch Gmbh | Lambdasonde mit erhöhter statischer Genauigkeit |
JP4966266B2 (ja) * | 2008-07-22 | 2012-07-04 | 日本特殊陶業株式会社 | ガスセンサ |
US9297791B2 (en) | 2012-12-20 | 2016-03-29 | Robert Bosch Gmbh | Gas sensor with thermal shock protection |
US11024910B2 (en) | 2017-02-22 | 2021-06-01 | Universidade De Aveiro | Sulfate/sulfide based rechargeable battery and uses thereof |
JP7122248B2 (ja) * | 2018-12-27 | 2022-08-19 | 日本碍子株式会社 | センサ素子 |
US11824238B2 (en) | 2019-04-30 | 2023-11-21 | Hyaxiom, Inc. | System for managing hydrogen utilization in a fuel cell power plant |
US11768186B2 (en) | 2020-12-08 | 2023-09-26 | Hyaxiom, Inc. | Hydrogen concentration sensor |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2442444A1 (fr) * | 1978-11-21 | 1980-06-20 | Thomson Csf | Capteur electrochimique des concentrations relatives d'especes reactives dans un melange fluide, et systeme comportant un tel capteur, notamment pour la regulation |
DE2938179A1 (de) * | 1979-09-21 | 1981-04-09 | Bosch Gmbh Robert | Polarographischer messfuehler zum messen der sauerstoffkonzentration in gasen, insbesondere in abgasen von brennkraftmaschinen |
DE3017947A1 (de) * | 1980-05-10 | 1981-11-12 | Bosch Gmbh Robert | Elektrochemischer messfuehler fuer die bestimmung des sauerstoffgehaltes in gasen und verfahren zum herstellen von sensorelementen fuer derartige messfuehler |
JPH065220B2 (ja) * | 1983-07-04 | 1994-01-19 | トヨタ自動車株式会社 | 酸素濃度検出器 |
US4579643A (en) * | 1983-11-18 | 1986-04-01 | Ngk Insulators, Ltd. | Electrochemical device |
JPS60135756A (ja) * | 1983-12-24 | 1985-07-19 | Ngk Insulators Ltd | 電気化学的セルの製造方法 |
JPS60173461A (ja) * | 1984-02-20 | 1985-09-06 | Nissan Motor Co Ltd | 酸素センサ |
JP2502961B2 (ja) * | 1984-04-26 | 1996-05-29 | 日本碍子株式会社 | 電気化学的装置の製造方法 |
US4645572A (en) * | 1985-02-23 | 1987-02-24 | Ngk Insulators, Ltd. | Method of determining concentration of a component in gases and electrochemical device suitable for practicing the method |
JPS61195338A (ja) * | 1985-02-25 | 1986-08-29 | Ngk Spark Plug Co Ltd | 空燃比センサ− |
US4772376A (en) * | 1986-03-11 | 1988-09-20 | Nissan Motor Co., Ltd. | Air/fuel ratio sensor having oxygen sensor cell and oxygen pump cell |
-
1986
- 1986-09-05 JP JP61210432A patent/JPH0810211B2/ja not_active Expired - Lifetime
-
1987
- 1987-09-02 US US07/092,206 patent/US4859307A/en not_active Expired - Lifetime
- 1987-09-04 EP EP87307825A patent/EP0259175B1/de not_active Expired
- 1987-09-04 DE DE8787307825T patent/DE3783103T2/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021116238A1 (de) | 2021-06-23 | 2022-12-29 | Testo SE & Co. KGaA | Elektrochemischer Gassensor |
Also Published As
Publication number | Publication date |
---|---|
EP0259175B1 (de) | 1992-12-16 |
JPH0810211B2 (ja) | 1996-01-31 |
DE3783103D1 (de) | 1993-01-28 |
EP0259175A2 (de) | 1988-03-09 |
EP0259175A3 (en) | 1989-08-30 |
US4859307A (en) | 1989-08-22 |
JPS6365360A (ja) | 1988-03-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |